Clamping tool for thermal field piece of single crystal furnace

Abstract

The utility model relates to the technical field of monocrystalline silicon manufacturing, in particular to a clamping tool for a thermal field piece of a single crystal furnace, and aims to solve the problem of how to stably lift different thermal field pieces when the single crystal furnace is overhauled so as to improve the overhauling efficiency of the single crystal furnace. In order to achieve the purpose, the clamping tool for the thermal field piece of the single crystal furnace comprises an annular base, the multiple first clamping rods are arranged in the circumferential direction of the annular base at intervals, and each first clamping rod extends in the radial direction of the annular base and is in sliding connection with the annular base; the transmission assembly is in transmission connection with each first clamping rod; the driving device is arranged on the annular base; and the connecting pieces are connected between the adjacent transmission assemblies and used for transmitting power between the adjacent transmission assemblies, so that when the driving device drives one transmission assembly or the first clamping rod to move, each first clamping rod can stretch out and draw back in the radial direction of the annular base. The stability of the thermal field piece in the hoisting process can be improved, and the overhauling efficiency of the single crystal furnace is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal silicon manufacturing, and particularly relates to a clamping tool for a hot field component of a single crystal furnace. BACKGROUND

[0002] A single crystal furnace is a main device for producing single crystal silicon, and the single crystal furnace often needs to be overhauled during the production process. With the increasing demand for single crystal silicon wafer production of solar panels, semiconductor devices and the like, higher requirements are put forward for the overhauling efficiency of the single crystal furnace.

[0003] The single crystal furnace has a heater, a heat preservation cylinder, a crucible and various hot field components. The manual disassembly of the above hot field components for overhauling obviously cannot meet the current requirement for efficient overhauling. In some related technologies, a steel wire rope with a hook is usually used to hook the hot field components, and a hoisting device is used to hoist the hot field components to the outside of the single crystal furnace for overhauling. However, this method has the following problems. On the one hand, the hoisting process is unstable, and the hot field components are prone to knocking and even slipping. On the other hand, the hoisting method is limited by the sizes and spatial arrangement positions of different hot field components, and it is difficult to meet the hoisting requirements of different hot field components.

[0004] Correspondingly, there is a need in the art for a new technical solution to solve the above problems. UTILITY MODEL CONTENT

[0005] The present application aims to solve the above technical problems, that is, to solve the problem of how to stably hoist different hot field components during the overhauling of the single crystal furnace, so as to improve the overhauling efficiency of the single crystal furnace.

[0006] The present application provides a clamping tool for a hot field component of a single crystal furnace, which comprises:

[0007] a ring-shaped base;

[0008] a plurality of first clamping rods are arranged along the circumference of the ring-shaped base, and each first clamping rod extends along the radial direction of the ring-shaped base and is in sliding connection with the ring-shaped base;

[0009] a transmission assembly in transmission connection with each first clamping rod;

[0010] a driving device arranged on the ring-shaped base;

[0011] a connecting piece connected between adjacent transmission assemblies, for transmitting power between adjacent transmission assemblies, so that each first clamping rod can stretch and contract along the radial direction of the ring-shaped base when the driving device drives one transmission assembly or first clamping rod to move.

[0012] In one of the technical solutions of the clamping tool, the first clamping rod is provided with a tooth belt along the extension direction thereof, and the transmission assembly comprises a transmission gear rotatably arranged on the annular base, and the transmission gear is engaged with the tooth belt.

[0013] In one of the technical solutions of the clamping tool, the connecting member is a universal transmission shaft, and the two ends of the universal transmission shaft are respectively connected with the transmission gears on the two sides thereof.

[0014] In one of the technical solutions of the clamping tool, the driving device is a pneumatic cylinder, an electric cylinder or a hydraulic cylinder, and the telescopic rod of the driving device is connected with any one of the first clamping rods.

[0015] In one of the technical solutions of the clamping tool, the driving device comprises a servo motor and a driving gear connected to the output end of the servo motor, and the driving gear is engaged with any one of the transmission gears.

[0016] In one of the technical solutions of the clamping tool, the end of the first clamping rod towards the center of the annular base is connected with a second clamping rod, the extension direction of the second clamping rod intersects with the extension direction of the first clamping rod, and the second clamping rod has a clamping surface facing the first clamping rod.

[0017] In one of the technical solutions of the clamping tool, the end of the first clamping rod away from the center of the annular base is connected with a clamping block.

[0018] In one of the technical solutions of the clamping tool, the spacing between adjacent first clamping rods is equal.

[0019] In one of the technical solutions of the clamping tool, the clamping tool further comprises:

[0020] A plurality of hoisting arms are arranged at intervals along the circumferential direction of the annular base, and the plurality of hoisting arms extend towards the axis direction of the annular base.

[0021] A force bearing support is connected to the end of the plurality of hoisting arms away from the annular base, and the force bearing support is provided with a lifting ring.

[0022] In one of the technical solutions of the clamping tool, the clamping tool further comprises:

[0023] An image acquisition device is arranged on the force bearing support.

[0024] A controller is communicatively connected with the image acquisition device, and the controller adjusts the position of the annular base according to the acquisition information of the image acquisition device.

[0025] As above, in the case of adopting the technical scheme above, based on the "cylindrical" structural characteristics of the heat field pieces such as the heat preservation cylinder and the crucible in the single crystal furnace, the clamping tool is arranged as the first clamping rods in annular distribution, and the radial expansion of all the first clamping rods is realized through the transmission assembly and the connecting piece, so that in the maintenance process of the single crystal furnace, the heat field pieces are fixed by the supporting force exerted by the inner wall of the heat field pieces such as the heat preservation cylinder and the crucible when the first clamping rods are radially expanded, and then the heat field pieces are taken out. In this way, the clamping and fixing of the heat field pieces are carried out based on the "multi-point supporting" mode, which not only has stronger stability, but also can be applied to heat field pieces of different sizes, has stronger adaptability, and at the same time, compared with the traditional mode of fixing by hooking with steel wire rope, the hoisting and taking speed of the heat field pieces is greatly improved, thereby improving the maintenance efficiency of the single crystal furnace. BRIEF DESCRIPTION OF DRAWINGS

[0026] The preferred embodiments of the present application will be described below with reference to the accompanying drawings, in which:

[0027] Figure 1 is a clamping tool for heat field pieces of a single crystal furnace according to an embodiment of the present application;

[0028] Figure 2 is Figure 1 a front view of

[0029] Figure 3 is a schematic view of an annular base according to an embodiment of the present application;

[0030] Figure 4 is a schematic view of a driving device according to an embodiment of the present application;

[0031] Figure 5 is a schematic view of a driving device according to another embodiment of the present application;

[0032] Figure 6 is a structural schematic view of a heat field of a single crystal furnace.

[0033] In the drawings, the reference signs refer to the following:

[0034] 1, annular base; 11, slide; 2, first clamping rod; 21, toothed belt; 22, clamping block; 23, second clamping rod; 231, clamping surface; 3, transmission assembly; 4, connecting piece; 5, driving device; 51, servo motor; 52, driving gear; 61, hoisting arm; 62, force bearing support; 63, lifting ring; 64, image acquisition device;

[0035] 100, upper heat preservation cylinder; 110, middle heat preservation cylinder; 120, lower heat preservation cylinder; 200, main heater; 210, bottom heater; 300, crucible; 400, supporting rod. DETAILED DESCRIPTION

[0036] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art will understand that the embodiments are only used to explain the technical principles of the present application, and are not used to limit the protection scope of the present application. Those skilled in the art can make adjustments as needed to adapt to specific application occasions.

[0037] It should be noted that in the description of the present application, the terms "upper", "lower", "left", "right", "inner", "outer" and the like indicating the direction or positional relationship are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the related devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the ordinal numbers "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] In addition, it should also be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection" should be understood broadly, for example, it can be fixed connection, or it can be clamped connection or integral connection; it can be mechanical connection, or it can be electrical connection; it can be directly connected, or it can be indirectly connected through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0039] Referring to Figure 1 and Figure 2 , the clamping tool for the hot field part of the single crystal furnace according to an embodiment of the present application is used to clamp the hot field part during the maintenance process of the single crystal furnace, and then cooperate with the hoisting equipment to take out the hot field part from the single crystal furnace.

[0040] The clamping tool includes an annular base 1, a first clamping rod 2, a transmission assembly 3, a connecting piece 4 and a driving device 5.

[0041] The annular base 1 as a whole can be welded by a plurality of trusses, so as to reduce its weight and processing difficulty, of course, it can also be an integral cast part, etc., which is not limited by the present application.

[0042] The first clamping rod 2 is arranged in plurality along the circumference of the annular base 1, in an implementation manner of the present application, the spacing between adjacent first clamping rods 2 is equal, so that the clamping force acting point is more evenly distributed in the circumferential direction of the hot field part. The annular base 1 is provided with a plurality of circumferentially distributed sliding channels 11, the sliding channels 11 extend radially of the annular base 1, and the first clamping rod 2 is slidingly arranged on the sliding channel 11, so that each first clamping rod 2 can be extended and retracted in the radial direction of the annular base 1.

[0043] The number of the transmission assemblies 3 is the same as the number of the first clamping rods 2, and each of the transmission assemblies 3 is in transmission connection with one of the first clamping rods 2. In an embodiment of the present application, each of the transmission assemblies 3 comprises a transmission gear rotatably arranged on the annular base 1, and the surface of the first clamping rod 2 facing the transmission gear is provided with a toothed belt 21 along the extension direction of the first clamping rod 2, the transmission gear is in meshing connection with the toothed belt 21, so that the first clamping rod 2 is driven to move by the toothed belt 21 when the transmission gear rotates, or the transmission gear is driven to rotate when the first clamping rod 2 moves linearly. It should be understood that the toothed belt 21 and the first clamping rod 2 can be an integrally formed component, in which case the first clamping rod 2 is a "gear rack" matched with the transmission gear. Of course, the toothed belt 21 can also be separately produced and fixedly connected with the first clamping rod 2, which is a known technology in the art and can be selected as needed in specific applications.

[0044] It should also be understood that, although the transmission assemblies 3 are exemplarily described by taking the transmission gears as examples in the above-mentioned manner of the present application, this does not constitute a limitation on the present application, and the transmission assemblies 3 can also adopt other structures such as a chain wheel and chain transmission structure, a synchronous belt transmission structure, etc., as long as the linear reciprocating movement of the first clamping rods 2 can be achieved.

[0045] The connecting members 4 are connected between adjacent transmission assemblies 3. It should be noted that the plurality of transmission assemblies 3 are arranged in a circumferential direction of the annular base 1 to form an approximate annular structure, for example, the transmission gears are taken as examples for description, the axes of the adjacent transmission gears intersect, and therefore the connecting members 4 are used to transmit power between the "intersecting axes", in an embodiment of the present application, the connecting members 4 are universal transmission shafts, and the two ends of the universal transmission shaft are respectively connected with the transmission gears on the two sides, and the transmission gear on one side can transmit power to the transmission gear on the other side through the universal transmission shaft when the transmission gear on one side rotates.

[0046] The driving device 5 is arranged on the annular base 1, and the driving device 5 can be connected with any one of the transmission assemblies 3 or the first clamping rods 2, so that when the driving device 5 drives one of the transmission assemblies 3 or the first clamping rods 2 to move, the plurality of first clamping rods 2 can all stretch or contract in the radial direction of the annular base 1.

[0047] Referring to Figure 3 In an embodiment of the present application, a universal transmission shaft is arranged between any two adjacent transmission assemblies 3, and the plurality of universal transmission shafts and the plurality of transmission assemblies 3 form a closed annular structure, in this case, when the driving device 5 drives one of the transmission assemblies 3 to move, the transmission assembly 3 can drive the connecting members 4 on the two sides to move at the same time, thereby transmitting power to the two sides at the same time.

[0048] In another embodiment of the present application, the driving device 5 is provided with the connecting member 4 only on one side, in which case the plurality of universal transmission shafts and the plurality of transmission assemblies 3 are not a closed ring structure, and when the driving device 5 drives one of the transmission assemblies 3 to move, the transmission assembly 3 drives the connecting member 4 on one side to move, and the power is transmitted in one direction, i.e., the driving device 5 is the starting point of the power, and the power is transmitted along the arc-shaped track step by step, and the transmission assembly 3 on the other side of the driving device 5 is the end point of the power transmission.

[0049] Referring to Figure 4 In one implementation, the driving device 5 is a telescopic structure such as a pneumatic cylinder, an electric cylinder or a hydraulic cylinder, and the telescopic rod of the driving device 5 is connected to the first clamping rod 2, so that the linear reciprocating motion of the first clamping rod 2 is realized by the extension and retraction of the telescopic rod of the driving device 5, and the first clamping rod 2 drives the transmission gear connected thereto to rotate to realize the transmission of power.

[0050] Referring to Figure 5 In another implementation, the driving device 5 includes a servo motor 51 and a driving gear 52, the driving gear 52 is connected to the output end of the servo motor 51, and the driving gear 52 is engaged with any one of the transmission gears. When the driving gear 52 rotates, it drives the transmission gear to rotate, and the transmission gear drives all the first clamping rods 2 to move linearly. It should be noted that in actual application, other gears can be arranged between the transmission gear and the driving gear 52 according to the spatial position relationship of the clamping tool for multi-stage engagement, or the driving gear 52 can be engaged with the tooth belt 21 on the first clamping rod 2, and the like, and those skilled in the art can make adaptive adjustments according to the actual application scene, which is not limited in the present application.

[0051] Referring to Figure 6 Fig. 4 is a schematic view of the structure of the hot field of a single crystal furnace. The insulation cylinder is divided into an upper insulation cylinder 100, a middle insulation cylinder 110 and a lower insulation cylinder 120. Taking the upper insulation cylinder 100 as an example, after the single crystal furnace is stopped and cooled, the hoisting equipment suspends the clamping tool above the single crystal furnace, and the center axis of the annular base 1 is aligned with the center axis of the single crystal furnace through position detection, and then the clamping tool is controlled to descend to the middle position of the upper insulation cylinder 100, at which time the driving device 5 drives the first clamping rod 2 to extend radially outward until the first clamping rod 2 is tightly fixed to the inner wall of the upper insulation cylinder 100, and finally the hoisting equipment controls the clamping tool to ascend to take out the upper insulation cylinder 100 from the single crystal furnace. Of course, the middle insulation cylinder 110, the lower insulation cylinder 120 and the crucible 300 and other hot field components can also be clamped and fixed in this way and hoisted out of the single crystal furnace.

[0052] As above, based on the "cylindrical" structural characteristics of the heat field components such as the heat preservation cylinder, the crucible and the like in the single crystal furnace, the clamping tool is arranged as the first clamping rods 2 in a ring shape, and the radial extension and retraction of all the first clamping rods 2 is realized through the transmission assembly 3 and the connecting piece 4, so that in the maintenance process of the single crystal furnace, the heat field components are fixed by the support force exerted by the inner wall of the heat field components such as the heat preservation cylinder, the crucible and the like when the first clamping rods 2 radially extend, and then the heat field components are taken out. In this way, the clamping and fixing of the heat field components are realized based on the "multi-point support" mode, which not only has stronger stability, but also can be applied to heat field components of different sizes, has stronger adaptability, and at the same time, compared with the traditional mode of fixing by hooking with steel wire ropes, the hoisting and taking speed of the heat field components is greatly improved, thereby improving the maintenance efficiency of the single crystal furnace.

[0053] With reference to Figure 2 and Figure 3 , the end of the first clamping rod 2 away from the center of the ring-shaped base 1 is also connected with a clamping block 22, which is used to increase the contact area between the first clamping rod 2 and the inner wall of the above-mentioned cylindrical heat field component, thereby improving the stability of the clamping process.

[0054] In an implementation manner of the present application, the end of the first clamping rod 2 towards the center of the ring-shaped base 1 is also connected with a second clamping rod 23, the extension direction of the second clamping rod 23 is perpendicular to the extension direction of the first clamping rod 2, and the end of the second clamping rod 23 away from the first clamping rod 2 has a "barb", which forms a clamping surface 231 towards the second clamping rod 23.

[0055] With reference to Figure 6 , for the main heater 200, it has a cylindrical structure, and of course can also be clamped in the above-mentioned mode, but the main heater 200 is affected by its structural characteristics, and it is difficult to withstand excessive support force, otherwise it may be damaged, therefore, after the crucible 300 is taken out, when the main heater 200 is hoisted and taken, the clamping tool can be controlled to descend, the lower end of the second clamping rod 23 is controlled to be below the lower edge of the main heater 200, then the first clamping rod 2 is controlled to extend radially outward, so that the second clamping rod 23 is in close contact with the main heater 200, then the clamping tool is controlled to slowly ascend until the clamping surface 231 contacts the lower edge of the main heater 200, at this time, the clamping tool is controlled to continue to ascend, and the main heater 200 is pulled out of the single crystal furnace.

[0056] Of course, the bottom heater 210 can also be hoisted and taken in the above-mentioned mode, but it should be noted that the radial extension and retraction process of the first clamping rod 2 is the opposite process of the above-mentioned mode, that is, after the second clamping rod 23 is first opened outward and the lower end thereof is controlled to be below the foot plate of the bottom heater 210, the second clamping rod 23 is controlled to be retracted inward. Similarly, the supporting rod 400 can also be hoisted and taken in this mode, which will not be described here in detail.

[0057] As described above, the second clamping rod 23 and the clamping surface 231 thereof are arranged to clamp and lift the hot field component with the disc structure, such as the bottom heater 210 and the supporting rod 400, thereby improving the applicability of the clamping tool and further improving the maintenance efficiency of the single crystal furnace.

[0058] With reference to Figure 1 and Figure 2 As an implementation manner of the present application, the annular base 1 is further provided with an auxiliary lifting structure, which includes lifting arms 61, a force bearing support 62 and a lifting ring 63. The lifting arms 61 are arranged in plurality and are arranged along the circumference of the annular base 1 and extend towards the axis direction of the annular base 1. The force bearing support 62 is fixedly connected to the end of the lifting arms 61 away from the annular base 1. The lifting ring 63 is fixedly connected to the force bearing support 62. In this way, during the lifting process, the lifting device can be directly connected to the lifting ring 63, and the lifting arms 61 and the force bearing support 62 serve as force bearing components to stably lift the hot field component.

[0059] Optionally, the clamping tool further includes an image acquisition device 64 arranged on the force bearing support 62 and a controller (not shown in the figure). The image acquisition device 64 is used to acquire image information in the single crystal furnace, and the controller is in communication connection with the image acquisition device 64. The position of the annular base 1 is adjusted according to the acquisition information of the image acquisition device 64 so that the axis of the annular base 1 coincides with the central axis of the hot field component. For example, the edge track of the hot field component in the top view state can be acquired by the image acquisition device 64, and then the position of the annular base 1 is determined by calculating the center of the edge track. In this way, the automatic positioning of the annular base 1 is realized by the image acquisition device 64, which can improve the accuracy of the position of the annular base 1 and is also conducive to rapid positioning, thereby improving the maintenance efficiency of the single crystal furnace.

[0060] So far, the technical solution of the present application has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the present application, and the technical solutions after the changes or replacements will fall within the protection scope of the present application.

Claims

1. A clamping tool for a heat field component of a single crystal furnace, characterized by, The utility model relates to a clamping tool, including: A ring base; A plurality of first clamping rods are arranged along the circumference of the ring base, and each first clamping rod extends along the radial direction of the ring base and is in sliding connection with the ring base; A transmission assembly is in transmission connection with each first clamping rod; A driving device is arranged on the ring base; A connecting piece is connected between adjacent transmission assemblies to transmit power between adjacent transmission assemblies, so that when the driving device drives one transmission assembly or first clamping rod to move, each first clamping rod can extend or retract along the radial direction of the ring base.

2. The clamping fixture of claim 1, wherein The first clamping rod is provided with a toothed belt along its extension direction, and the transmission assembly includes a transmission gear rotatably arranged on the ring base, which is in meshing connection with the toothed belt.

3. The clamping fixture of claim 2, wherein The connecting piece is a universal transmission shaft, and the two ends of the universal transmission shaft are respectively connected with the transmission gears on its two sides.

4. The clamping fixture of claim 3, wherein The driving device is a pneumatic cylinder, an electric cylinder or a hydraulic cylinder, and the telescopic rod of the driving device is connected with any one first clamping rod.

5. The clamping fixture of claim 3, wherein The driving device includes a servo motor and a driving gear connected to the output end of the servo motor, and the driving gear is in meshing connection with any one transmission gear.

6. The clamping fixture of claim 1, wherein The end of the first clamping rod towards the center of the ring base is connected with a second clamping rod, the extension direction of the second clamping rod intersects with the extension direction of the first clamping rod, and the second clamping rod has a clamping surface towards the first clamping rod.

7. The clamping fixture of claim 1, wherein The end of the first clamping rod away from the center of the ring base is connected with a clamping block.

8. The clamping fixture of claim 1, wherein The distance between adjacent first clamping rods is equal.

9. The clamping fixture of any one of claims 1 to 8, wherein, The clamping tool further includes: A plurality of hoisting arms are arranged along the circumference of the ring base, and the plurality of hoisting arms extend towards the axis direction of the ring base; A force bearing support is connected to the end of the plurality of hoisting arms away from the ring base, and the force bearing support is provided with a lifting ring.

10. The clamping fixture of claim 9, wherein The clamping tool further includes: An image acquisition device is arranged on the force bearing support; A controller is in communication connection with the image acquisition device, and the controller adjusts the position of the ring base according to the acquisition information of the image acquisition device.

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