Calibration plate adjusting device and alignment equipment
By designing a calibration plate adjustment device, the calibration plate was able to be adjusted independently with multiple degrees of freedom, which solved the crosstalk problem during the assembly and adjustment process and improved the convenience and efficiency of assembly and adjustment.
Patent Information
- Application Number
- CN202423228756.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2034-12-26
AI Technical Summary
In the semiconductor manufacturing process, the multi-degree-of-freedom adjustment of the calibration board is subject to crosstalk, which leads to high assembly and adjustment difficulty and long time, resulting in low assembly and adjustment efficiency.
A calibration plate adjustment device is provided, including a base, a first adjustment seat, a second adjustment seat, and a rotating seat. The vertical and horizontal assembly angles are adjusted by the adjustment mechanism to achieve multi-degree-of-freedom independent adjustment of the calibration plate.
This solves the crosstalk problem in the multi-degree-of-freedom assembly and adjustment process of the calibration board, improving the convenience and efficiency of assembly and adjustment.
Smart Images
Figure CN223582320U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a calibration plate adjustment device and alignment equipment. Background Technology
[0002] In the semiconductor manufacturing industry, calibration boards play a crucial role in the semiconductor manufacturing process, providing a precise pattern alignment standard for overlay measurement. During semiconductor manufacturing, patterns between different layers need to be aligned to achieve the designed circuit functions. The calibration board, as the measurement target, provides a clear reference for this alignment process. However, when assembling and adjusting the calibration board, there is a problem of crosstalk in multi-degree-of-freedom adjustment, making the assembly and adjustment of multiple degrees of freedom difficult and time-consuming, resulting in low assembly and adjustment efficiency.
[0003] Therefore, how to improve the ease of calibration board assembly and adjustment has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0004] In view of this, the purpose of this application is to provide a calibration plate adjustment device to improve the convenience of calibration plate assembly and adjustment.
[0005] Another object of this application is to provide an alignment device having the above-described calibration plate adjustment device.
[0006] To achieve the above objectives, this application provides the following technical solution:
[0007] A calibration plate adjustment device, comprising:
[0008] Base;
[0009] A first adjusting seat is disposed on the base, and an adjusting mechanism is provided on the first adjusting seat. The adjusting mechanism is used to adjust the assembly angle of the first adjusting seat in the vertical direction.
[0010] The second adjusting seat is rotatably disposed on the first adjusting seat so that the second adjusting seat can move along the vertical direction;
[0011] A rotating seat, which is disposed on the second adjusting seat and is rotatable in the horizontal direction;
[0012] A calibration plate assembly is rotatably mounted on the rotating base, and the calibration plate assembly moves synchronously with the rotating base.
[0013] Optionally, in the above-mentioned calibration plate adjustment device, the calibration plate assembly includes a fixing base and a calibration plate, the fixing base is provided with a mounting groove for accommodating the calibration plate, and the calibration plate is installed in the mounting groove.
[0014] Optionally, in the above-mentioned calibration plate adjustment device, the fixed seat is provided with a mounting shaft, the rotating seat is provided with a countersunk hole that mates with the mounting shaft, the mounting shaft is inserted into the countersunk hole, and the mounting shaft and the countersunk hole can rotate relative to each other.
[0015] Optionally, in the above-mentioned calibration plate adjustment device, one or more ear plates are provided on the mounting shaft, and a slot adapted to the ear plate is provided in the countersunk hole of the rotating seat, and the slot restricts the adjustment space for the ear plate to move circumferentially along the countersunk hole;
[0016] The rotating base is provided with a through hole in the circumferential direction that is adapted to and passes through the slot, so that the fastener passes through the through hole and abuts against the ear plate in the slot.
[0017] Optionally, in the above-mentioned calibration plate adjustment device, the adjustment mechanism includes an adjustment screw, and the first adjustment seat is provided with an adjustment hole that is threadedly engaged with the adjustment screw. The adjustment screw passes through the adjustment hole and abuts against the base.
[0018] Optionally, in the above-mentioned calibration plate adjustment device, the first adjustment seat has two mutually perpendicular central rotating shafts, and at least one adjustment screw is provided on both sides of each central rotating shaft, and the adjustment hole is adapted to the adjustment screw.
[0019] Optionally, in the above-mentioned calibration plate adjustment device, the rotating seat is provided with a rotating shaft, and the second adjustment seat is provided with a shaft hole that cooperates with the rotating shaft. The rotating shaft of the rotating seat is inserted into the shaft hole of the second adjustment seat, and the rotating shaft and the shaft hole can rotate relative to each other.
[0020] Optionally, in the above-mentioned calibration plate adjustment device, the second adjustment seat is provided with a plurality of locking holes communicating with the shaft hole in the circumferential direction, so that the fastener can pass through the locking holes and abut against the rotating shaft of the rotating seat.
[0021] Optionally, in the above-mentioned calibration plate adjustment device, the second adjustment seat is provided with a connecting shaft, the first adjustment seat is provided with a connecting hole, and the connecting shaft of the second adjustment seat is threadedly engaged with the connecting hole of the first adjustment seat.
[0022] An alignment device includes a calibration plate adjustment device as described in any of the preceding claims.
[0023] The calibration plate adjustment device provided in this application comprises a first adjustment seat mounted on a base, with an adjustment mechanism on the first adjustment seat to adjust the vertical assembly angle of the first adjustment seat. A second adjustment seat is rotatably mounted on the first adjustment seat, allowing it to move vertically. Simultaneously, a calibration plate assembly is rotatably mounted on a rotating base, moving synchronously with the rotating base. The rotating base is mounted on the second adjustment seat and can rotate horizontally. When installing and adjusting the calibration plate, the vertical assembly angle of the first adjustment seat can be adjusted via the adjustment mechanism, thereby adjusting the vertical assembly angle of the calibration plate assembly. Rotating the second adjustment seat allows it to move vertically, adjusting the vertical height of the calibration plate assembly. Simultaneously, rotating the rotating base horizontally adjusts the horizontal assembly angle of the calibration plate assembly. Furthermore, rotating the calibration plate assembly allows for fine horizontal adjustment of the calibration plate. As can be seen from the above examples, the calibration plate adjustment device provided in this application can realize the independent adjustment of multiple degrees of freedom of the calibration plate, solve the crosstalk problem in the multi-degree-of-freedom assembly and adjustment process of the calibration plate, and improve the convenience of calibration plate assembly and adjustment.
[0024] The technical features mentioned above, those to be mentioned below, and those shown individually in the accompanying drawings can be combined arbitrarily, provided that the combined technical features are not contradictory. All feasible combinations of features are the technical content explicitly described herein. Any one of the multiple sub-features contained in the same statement can be applied independently, without necessarily being applied together with other sub-features. Attached Figure Description
[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0026] Figure 1 This is a schematic diagram of the calibration plate adjustment device provided in the embodiments of this application;
[0027] Figure 2 This is a schematic diagram of the structure of the second adjusting seat provided in an embodiment of this application;
[0028] Figure 3 This is a schematic diagram of the structure of the rotary seat provided in the embodiments of this application;
[0029] Figure 4This is a schematic diagram of the structure of the fixing base provided in the embodiment of this application;
[0030] Figure 5 A top view of the first adjustment seat provided in an embodiment of this application.
[0031] Among them, 100 is the base;
[0032] 200 is the first adjusting seat, 201 is the adjusting mechanism, 2011 is the adjusting screw, 2012 is the first screw, 2013 is the second screw, 2014 is the third screw, 2015 is the fourth screw, 2016 is the adjusting hole, 202 is the central rotating shaft, 2021 is the first central rotating shaft, 2022 is the second central rotating shaft, and 203 is the fixing hole;
[0033] 300 is the second adjusting seat, 301 is the shaft hole, 302 is the locking hole, and 303 is the connecting shaft;
[0034] 400 is a rotating base, 401 is a countersunk hole, 4011 is a slot, 402 is a through hole, and 403 is a rotating shaft;
[0035] 500 is the calibration plate assembly, 501 is the mounting base, 5011 is the mounting slot, 5012 is the mounting shaft, 5013 is the ear plate, and 502 is the calibration plate. Detailed Implementation
[0036] The core of this application is to provide a calibration plate adjustment device to improve the convenience of calibration plate assembly and adjustment.
[0037] Another core aspect of this application is to provide an alignment device having the aforementioned calibration plate adjustment device.
[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0039] In the semiconductor manufacturing industry, calibration boards play a crucial role in the semiconductor manufacturing process, providing a precise pattern alignment standard for overlay measurement. During semiconductor manufacturing, patterns between different layers need to be aligned to achieve the designed circuit functions. The calibration board, as the measurement target, provides a clear reference for this alignment process. However, when assembling and adjusting the calibration board, there is a problem of crosstalk in multi-degree-of-freedom adjustment, making the assembly and adjustment of multiple degrees of freedom difficult and time-consuming, resulting in low assembly and adjustment efficiency.
[0040] Therefore, such as Figure 1As shown in the figure, this application discloses a calibration plate adjustment device, including a base 100, a first adjustment seat 200, a second adjustment seat 300, a rotating seat 400, and a calibration plate assembly 500. Using the calibration plate adjustment device disclosed in this application, independent adjustment of the calibration plate 502 with multiple degrees of freedom can be achieved, solving the crosstalk problem of the calibration plate 502 during multi-degree-of-freedom assembly and adjustment, and improving the convenience of assembling and adjusting the calibration plate 502.
[0041] The following will combine Figures 1 to 4 The calibration plate adjustment device disclosed in the embodiments of this application will be explained and described in detail.
[0042] Among them, such as Figure 1 As shown, the first adjustment seat 200 can be installed on the base 100, and an adjustment mechanism 201 can be provided on the first adjustment seat 200 so that the assembly angle of the first adjustment seat 200 in the vertical direction can be adjusted by the adjustment mechanism 201.
[0043] In some embodiments, such as Figure 1 As shown, the adjustment mechanism 201 may include an adjustment screw 2011, and an adjustment hole 2016 is provided on the first adjustment seat 200 to be threadedly engaged with the adjustment screw 2011, so that the adjustment screw 2011 can pass through the adjustment hole 2016 and abut against the base 100. Thus, by rotating the adjustment screw 2011, the length of the adjustment screw 2011 extending out of the adjustment hole 2016 on the side of the base 100 can be adjusted, thereby adjusting the height of the first adjustment seat 200 at this position, so that the first adjustment seat 200 can be deflected in the vertical direction along the central axis 202, so as to realize the adjustment of the assembly angle of the first adjustment seat 200 in the vertical direction.
[0044] In some embodiments, such as Figure 1 and Figure 5 As shown, the first adjusting seat 200 may have two mutually perpendicular central rotating shafts 202, allowing the first adjusting seat 200 to rotate and adjust in the vertical direction around the two central rotating shafts 202 respectively, thereby realizing the adjustment of the assembly angle of the first adjusting seat 200 in the vertical direction. To achieve the rotational adjustment of the first adjusting seat 200 around the two central rotating shafts 202 in the vertical direction, at least one adjusting screw 2011 may be provided on both sides of each central rotating shaft 202. For ease of understanding, the two central rotating shafts 202 are defined as the first central rotating shaft 2021 and the second central rotating shaft 2022, respectively, and the first central rotating shaft 2021 and the second central rotating shaft 2022 are arranged perpendicularly to each other.
[0045] In some embodiments, such as Figure 1 and Figure 5As shown, an adjusting screw 2011 can be respectively provided on both sides of the first central rotating shaft 2021. The two adjusting screws 2011 can be set on the second central rotating shaft 2022, so that the first adjusting seat 200 can be rotated around the first central rotating shaft 2021 by rotating the adjusting screws 2011 on both sides of the first central rotating shaft 2021. At the same time, since both adjusting screws 2011 are located on the second central rotating shaft 2022, the stability of the assembly angle adjustment of the first adjusting seat 200 around the first central rotating shaft 2021 can be guaranteed. Similarly, an adjusting screw 2011 can be provided on each side of the second central rotating shaft 2022, and the two adjusting screws 2011 can be set on the first central rotating shaft 2021. Thus, by rotating the adjusting screws 2011 on both sides of the second central rotating shaft 2022, the first adjusting seat 200 can be rotated around the second central rotating shaft 2022. At the same time, since both adjusting screws 2011 are located on the first central rotating shaft 2021, the stability of the assembly angle adjustment of the first adjusting seat 200 around the second central rotating shaft 2022 can be guaranteed.
[0046] In some embodiments, such as Figure 5 As shown, the first adjusting seat 200 may have a circular cross-section. The first central rotating shaft 2021 and the second central rotating shaft 2022 both pass through the center of the first adjusting seat 200 and are perpendicular to each other. Simultaneously, four adjusting screws 2011 may be included, and these four adjusting screws 2011 are evenly distributed along the circumference of the first adjusting seat 200. Adjusting holes 2016 are correspondingly provided with the adjusting screws 2011. For ease of understanding, the four adjusting screws 2011 are defined as the first screw 2012, the second screw 2013, the third screw 2014, and the fourth screw 2015. The first screw 2012 and the third screw 2014 may be symmetrically arranged about the first central rotating shaft 2021, and both the first screw 2012 and the third screw 2014 are located on the second central rotating shaft 2022. Furthermore, the second screw 2013 and the fourth screw 2015 can be symmetrically arranged about the second central rotating shaft 2022, and both the second screw 2013 and the fourth screw 2015 can be located on the first central rotating shaft 2021.
[0047] When it is necessary to adjust the assembly angle of the first adjusting seat 200 around the first central rotating shaft 2021, the first screw 2012 can be turned while the third screw 2014 is turned in the opposite direction. That is, the screwing directions of the third screw 2014 and the first screw 2012 are opposite, so that the first adjusting seat 200 can rotate around the first central rotating shaft 2021 to adjust the assembly angle of the first adjusting seat 200 around the first central rotating shaft 2021.
[0048] When it is necessary to adjust the assembly angle of the first adjusting seat 200 around the second central rotating shaft 2022, the second screw 2013 can be turned while the fourth screw 2015 is turned in the opposite direction. That is, the screwing directions of the fourth screw 2015 and the second screw 2013 are opposite, so that the first adjusting seat 200 can rotate around the second central rotating shaft 2022 to adjust the assembly angle of the first adjusting seat 200 around the second central rotating shaft 2022.
[0049] It should be noted that in the above embodiments, the assembly angle adjustment of the first adjusting seat 200 around the first central rotating shaft 2021 can be achieved by simply turning the adjusting screw 2011 on either side of the first central rotating shaft 2021. Similarly, the assembly angle adjustment of the first adjusting seat 200 around the second central rotating shaft 2022 can be achieved by simply turning the adjusting screw 2011 on either side of the second central rotating shaft 2022. Of course, all four adjusting screws 2011 can be turned in the same direction simultaneously to achieve the lifting adjustment of the first adjusting seat 200. Alternatively, the first screw 2012 and the second screw 2013 can be adjusted in the same direction simultaneously, and the third screw 2014 and the fourth screw 2015 can be adjusted in the opposite direction simultaneously to achieve the deflection adjustment of the first adjusting seat 200. Similarly, the second screw 2013 and the third screw 2014 can be adjusted in the same direction simultaneously, and the first screw 2012 and the fourth screw 2015 can be adjusted in the opposite direction simultaneously to achieve the deflection adjustment of the first adjusting seat 200. The specific adjustment method of the first adjustment seat 200 can be determined according to the actual assembly situation.
[0050] In the above embodiments, two, three or more adjusting screws 2011 may be provided on both sides of each central rotating shaft 202, and each adjusting screw 2011 on both sides of each central rotating shaft 202 may be coaxially arranged on another central rotating shaft 202, or may be symmetrically arranged on both sides of another central rotating shaft 202. This is not limited here.
[0051] In some embodiments, such as Figure 5 As shown, in order to ensure the stability of the adjustment of the first adjusting seat 200, as follows: Figure 1 and Figure 5 As shown, a plurality of fixing holes 203 are provided on the first adjusting seat 200, that is, there can be one, two, three or more fixing holes 203, and the fixing holes 203 can be smooth holes. At the same time, threaded holes corresponding to the fixing holes 203 are provided on the base 100, so that after the first adjusting seat 200 is adjusted, fasteners such as bolts can pass through the fixing holes 203 and be threadedly engaged with the threaded holes on the base 100 to lock and fix it, so as to ensure the stability of the adjustment of the first adjusting seat 200 and prevent the first adjusting seat 200 from shaking when adjusting other degrees of freedom, which would cause the adjustment of the first adjusting seat 200 to fail.
[0052] like Figure 1As shown, the second adjusting seat 300 is rotatably mounted on the first adjusting seat 200, allowing the second adjusting seat 300 to move vertically. Simultaneously, the calibration plate assembly 500 is rotatably mounted on the rotating seat 400, and the calibration plate assembly 500 can move synchronously with the rotating seat 400. The rotating seat 400 is mounted on the second adjusting seat 300 and can rotate horizontally. When the calibration plate 502 is installed and adjusted, the assembly angle of the first adjustment seat 200 in the vertical direction can be adjusted by the adjustment mechanism 201, thereby adjusting the assembly angle of the calibration plate assembly 500 in the vertical direction. The second adjustment seat 300 can be rotated to move vertically, thereby adjusting the height of the calibration plate assembly 500 in the vertical direction. Simultaneously, the assembly angle of the calibration plate assembly 500 in the horizontal direction can be adjusted by rotating the rotating seat 400. Furthermore, the calibration plate assembly 502 can be finely adjusted in the horizontal direction by rotating the calibration plate assembly 502. This achieves independent adjustment of the calibration plate 502 in multiple degrees of freedom, solving the crosstalk problem during multi-degree-of-freedom assembly and adjustment of the calibration plate 502, and improving the convenience of assembly and adjustment of the calibration plate 502.
[0053] In some embodiments, such as Figure 1 and Figure 2 As shown, a connecting shaft 303 is provided on the second adjusting seat 300, and a connecting hole is provided on the first adjusting seat 200. Wherein, as... Figure 2 As shown, an external threaded portion can be provided on the outer wall of the connecting shaft 303 of the second adjusting seat 300, and an internal threaded portion is provided on the wall of the connecting hole of the first adjusting seat 200. Thus, the height adjustment of the second adjusting seat 300 in the vertical direction can be achieved by the threaded engagement between the external threaded portion of the connecting shaft 303 and the internal threaded portion of the connecting hole.
[0054] In some embodiments, such as Figure 2 and Figure 3 As shown, to enable the rotating base 400 to rotate horizontally and adjust the horizontal assembly angle of the calibration plate assembly 500, a rotating shaft 403 is provided on the rotating base 400, and a shaft hole 301 that mates with the rotating shaft 403 is provided on the second adjusting base 300. The rotating shaft 403 of the rotating base 400 can be inserted into the shaft hole 301 of the second adjusting base 300, and the two can be in a clearance fit, allowing the rotating shaft 403 and the shaft hole 301 to rotate relative to each other, thereby enabling the rotating base 400 to rotate horizontally and thus adjusting the horizontal assembly angle of the calibration plate assembly 500. Because the rotating base 400 and the second adjusting base 300 are in a shaft hole fit, the rotating base 400 can rotate 360°, thereby improving the convenience of adjusting the horizontal assembly angle of the calibration plate assembly 500.
[0055] In some embodiments, such as Figure 2 As shown, to ensure the stability of the adjustment of the rotary seat 400, the second adjusting seat 300 may be provided with several locking holes 302 communicating with the shaft hole 301 in the circumferential direction. That is, there may be one, two, three or more locking holes 302. The locking holes 302 may be threaded holes, allowing fasteners such as bolts to pass through the locking holes 302 and abut against the rotating shaft 403 of the rotary seat 400. After the rotary seat 400 is adjusted, fasteners such as bolts can be threaded into the locking holes 302 and pass through the locking holes 302 to press against the rotating shaft 403 of the rotary seat 400, thereby locking the rotation of the rotary seat 400 and preventing the rotary seat 400 from rotating when adjusting other degrees of freedom, which would cause the adjustment of the rotary seat 400 to fail.
[0056] like Figure 1 and Figure 4 As shown, the calibration plate assembly 500 may include a mounting base 501 and a calibration plate 502. The mounting base 501 may be provided with a mounting groove 5011 for accommodating the calibration plate 502. The calibration plate 502 can be bonded to the mounting groove 5011 with UV adhesive, thereby fixing the calibration plate 502 to the mounting base 501.
[0057] In some embodiments, such as Figure 3 and Figure 4 As shown, a mounting shaft 5012 is provided on the fixed seat 501, and a countersunk hole 401 that mates with the mounting shaft 5012 is provided on the rotating seat 400. During assembly, the mounting shaft 5012 of the fixed seat 501 can be inserted into the countersunk hole 401, so that the side of the fixed seat 501 facing away from the calibration plate 502 is in contact with the pressure-bearing surface of the countersunk hole 401. At the same time, the mounting shaft 5012 can rotate relative to the countersunk hole 401 to achieve fine adjustment of the calibration plate 502 in the horizontal direction.
[0058] In some embodiments, such as Figure 3 and Figure 4As shown, one or more ear plates 5013 can be provided on the mounting shaft 5012, that is, there can be one, two, three or more ear plates 5013. The countersunk hole 401 of the rotating seat 400 is provided with a slot 4011 that is adapted to the ear plate 5013. At the same time, there is an adjustment space in the slot 4011 for the ear plate 5013 to move circumferentially along the countersunk hole 401. This allows the ear plate 5013 to move circumferentially within the adjustment space of the slot 4011, thereby driving the mounting shaft 5012 to rotate circumferentially along the countersunk hole 401, so as to achieve fine adjustment of the calibration plate 502 in the horizontal direction. To facilitate the circumferential movement of the ear plate 5013 within the adjustment space of the slot 4011, a through hole 402 adapted to and passing through the slot 4011 is provided in the circumferential direction of the rotating base 400. The through hole 402 can be a threaded hole, so that fasteners such as bolts can be threaded into the through hole 402 and pass through the through hole 402 to abut against the ear plate 5013 in the slot 4011, thereby pushing the ear plate 5013 to move circumferentially within the adjustment space of the slot 4011. At the same time, the position of the ear plate 5013 in the slot 4011 can be fixed to ensure the stability of the calibration plate 502 in the horizontal direction for fine adjustment.
[0059] In some embodiments, such as Figure 3 and Figure 4 As shown, two ear plates 5013 can be provided on the mounting shaft 5012, and the two ear plates 5013 are symmetrically arranged on both sides of the mounting shaft 5012 about the central axis of the mounting shaft 5012. At the same time, two slots 4011 adapted to the two ear plates 5013 are respectively provided in the countersunk hole 401 of the rotating seat 400, so that when the mounting shaft 5012 is inserted into the countersunk hole 401, the ear plates 5013 on both sides of the mounting shaft 5012 are inserted into the two slots 4011 in the countersunk hole 401. Meanwhile, two through holes 402 are provided on the rotating seats 400 on both sides of each ear plate 5013, and the two through holes 402 are respectively connected to the two side walls of the slot 4011, so that the two fasteners such as bolts arranged opposite to each other can pass through the through holes 402 and abut against the two opposite sides of the ear plate 5013. Thus, by adjusting the fasteners such as bolts on both sides of each ear plate 5013, the ear plate 5013 can be pushed to move circumferentially within the adjustment space of the slot 4011, which improves the convenience of fine adjustment of the calibration plate 502 in the horizontal direction.
[0060] When assembling and adjusting the calibration plate 502, first assemble the base 100, the first adjusting seat 200, the second adjusting seat 300, the rotating seat 400, and the fixed seat 501 together. Then, glue the calibration plate 502 into the mounting groove 5011 of the fixed seat 501. By adjusting the height of the four adjusting screws 2011 of the adjusting mechanism 201, the connection height between the first adjusting seat 200 and the base 100 at different positions is made different, thereby adjusting the assembly angle of the calibration plate 502 in the vertical direction. Since the second adjusting seat 300 is threadedly engaged with the first adjusting seat 200, the height of the calibration plate 502 in the vertical direction can be adjusted by rotating the second adjusting seat 300. When the height of the calibration plate 502 in the vertical direction is adjusted by rotating the second adjusting seat 300, the calibration plate 502 is at this time... 02 also rotates, causing the calibration plate 502 to have a certain angle with the target position. If the angle is too large, since the rotating seat 400 and the second adjusting seat 300 are fitted with a shaft hole, the assembly angle of the calibration plate 502 in the horizontal direction can be coarsely adjusted by rotating the rotating seat 400. Then, fasteners such as bolts pass through the through holes 402 on the rotating seat 400 to push the ear plate 5013 on the mounting shaft 5012 of the fixed seat 501, so as to achieve fine adjustment of the calibration plate 502 until the calibration plate 502 is located at the target position.
[0061] This application also discloses an alignment device, including the calibration plate adjustment device disclosed in the above embodiments. Therefore, the calibration plate adjustment device has all the technical effects of the above-mentioned calibration plate adjustment device, which will not be repeated here.
[0062] The terms "first" and "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units may include steps or units not listed, but rather not listed.
[0063] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A calibration plate adjustment device, characterized in that, include: Base (100); A first adjusting seat (200) is disposed on the base (100), and an adjusting mechanism (201) is provided on the first adjusting seat (200). The adjusting mechanism (201) is used to adjust the assembly angle of the first adjusting seat (200) in the vertical direction. The second adjusting seat (300) is rotatably disposed on the first adjusting seat (200) so that the second adjusting seat (300) can move along the vertical direction; A rotating seat (400) is disposed on the second adjusting seat (300), and the rotating seat (400) is rotatable in the horizontal direction; A calibration plate assembly (500) is rotatably mounted on the rotating base (400), and the calibration plate assembly (500) moves synchronously with the rotating base (400).
2. The calibration plate adjustment device according to claim 1, characterized in that, The calibration plate assembly (500) includes a mounting base (501) and a calibration plate (502). The mounting base (501) is provided with a mounting groove (5011) for accommodating the calibration plate (502), and the calibration plate (502) is installed in the mounting groove (5011).
3. The calibration plate adjustment device according to claim 2, characterized in that, The fixed seat (501) is provided with a mounting shaft (5012), and the rotating seat (400) is provided with a countersunk hole (401) that cooperates with the mounting shaft (5012). The mounting shaft (5012) is inserted into the countersunk hole (401), and the mounting shaft (5012) and the countersunk hole (401) can rotate relative to each other.
4. The calibration plate adjustment device according to claim 3, characterized in that, One or more ear plates (5013) are provided on the mounting shaft (5012), and a slot (4011) adapted to the ear plate (5013) is provided in the countersunk hole (401) of the rotating seat (400), and the slot (4011) restricts an adjustment space for the ear plate (5013) to move circumferentially along the countersunk hole (401). The rotating base (400) is provided with a through hole (402) in the circumferential direction that is adapted to and passes through the slot (4011) so that the fastener passes through the through hole (402) and abuts against the ear plate (5013) in the slot (4011).
5. The calibration plate adjustment device according to claim 1, characterized in that, The adjustment mechanism (201) includes an adjustment screw (2011), and the first adjustment seat (200) is provided with an adjustment hole (2016) that is threadedly engaged with the adjustment screw (2011). The adjustment screw (2011) passes through the adjustment hole (2016) and abuts against the base (100).
6. The calibration plate adjustment device according to claim 5, characterized in that, The first adjusting seat (200) has two mutually perpendicular central rotating shafts (202), and each of the central rotating shafts (202) is provided with at least one adjusting screw (2011) on both sides, and the adjusting hole (2016) is adapted to the adjusting screw (2011).
7. The calibration plate adjustment device according to claim 1, characterized in that, The rotating seat (400) is provided with a rotating shaft (403), and the second adjusting seat (300) is provided with a shaft hole (301) that cooperates with the rotating shaft (403). The rotating shaft (403) of the rotating seat (400) is inserted into the shaft hole (301) of the second adjusting seat (300), and the rotating shaft (403) and the shaft hole (301) can rotate relative to each other.
8. The calibration plate adjustment device according to claim 7, characterized in that, The second adjusting seat (300) is provided with a plurality of locking holes (302) that communicate with the shaft hole (301) in the circumferential direction, so that the fastener can pass through the locking holes (302) and abut against the rotating shaft (403) of the rotating seat (400).
9. The calibration plate adjustment device according to any one of claims 1 to 8, characterized in that, The second adjusting seat (300) is provided with a connecting shaft (303), and the first adjusting seat (200) is provided with a connecting hole. The connecting shaft (303) of the second adjusting seat (300) is threadedly engaged with the connecting hole of the first adjusting seat (200).
10. An alignment device, characterized in that, Includes the calibration plate adjustment device as described in any one of claims 1 to 9.