Machining equipment

Abstract

The utility model provides processing equipment. The machining equipment comprises a material moving device, the material moving device comprises a material frame and a material moving mechanism which are arranged in the first direction, and the material moving mechanism is used for carrying materials between the material frame and a waiting position in the first direction; the machining device comprises a feeding mechanism, a machining mechanism and a discharging mechanism, the feeding mechanism and the discharging mechanism are arranged in a spaced mode in the first direction, the machining mechanism is located between the feeding mechanism and the discharging mechanism, the machining mechanism is provided with a material receiving position, and the feeding mechanism is used for carrying materials from the waiting position to the material receiving position in the second direction perpendicular to the first direction; the discharging mechanism is used for carrying the machined materials from the material receiving position to the waiting position in the second direction. The material carrying tracks of the feeding mechanism and the discharging mechanism can be in a long strip shape. Compared with an arc-shaped track in the prior art, the long-strip-shaped track has the advantages that the occupied space can be smaller, so that the overall size of the machining equipment is smaller, and the machining equipment can be suitable for more scenes.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of material processing, and specifically relates to a processing equipment. BACKGROUND

[0002] In the field of material processing taking semiconductor devices (for example, wafers) as an example, the cutting process of semiconductor devices is a very important processing process. In order to improve processing efficiency, automatic processing equipment is usually used to cut materials.

[0003] In the existing processing equipment, the main components include a feeding mechanism, a processing mechanism and a discharging mechanism. The feeding mechanism can carry the material to be processed from the waiting position to the receiving position of the processing mechanism. Then the discharging mechanism can process the material to be processed to form the processed material. Then, the discharging mechanism can carry the processed material from the receiving position of the processing mechanism to the waiting position. The feeding mechanism and the discharging mechanism can be operated simultaneously to alternately carry the material along the arc-shaped track, thereby improving the processing efficiency.

[0004] However, since the feeding mechanism and the discharging mechanism alternately carry the material to be processed along the arc-shaped track, a large space needs to be occupied. Especially when the material is an 8-inch wafer or other larger size material, the space occupied by the feeding mechanism and the discharging mechanism is larger, which can easily cause interference with the surrounding components, and further cause collision and other safety accidents. Therefore, the overall size of the processing equipment is large, which limits its application in many scenarios. SUMMARY

[0005] In order to at least partially solve the problems existing in the prior art, the utility model provides a processing equipment. The processing equipment comprises: a material moving device, the material moving device comprising a rack and a material moving mechanism arranged along a first direction, the material moving mechanism being used for carrying the material between the rack and a waiting position along the first direction; and a processing device, the processing device comprising a feeding mechanism, a processing mechanism and a discharging mechanism, the feeding mechanism and the discharging mechanism being arranged at intervals along the first direction, the processing mechanism being located between the feeding mechanism and the discharging mechanism, the processing mechanism having a receiving position, the feeding mechanism being used for carrying the material from the waiting position to the receiving position along a second direction perpendicular to the first direction, and the discharging mechanism being used for carrying the processed material from the receiving position to the waiting position along the second direction.

[0006] Exemplarily, in the second direction, the feeding mechanism and the discharging mechanism are arranged on the same side of the material moving device.

[0007] Exemplarily, in the first direction, the feeding mechanism and the rack are located on both sides of the discharging mechanism.

[0008] Exemplarily, the feeding mechanism comprises a first material taking and placing assembly, and the discharging mechanism comprises a second material taking and placing assembly, the first material taking and placing assembly and the second material taking and placing assembly are movable along the second direction between above the receiving position and above the standby position, so as to carry the material from the standby position to the receiving position before processing of the material, and carry the material from the receiving position to the standby position after completion of processing of the material.

[0009] Exemplarily, the discharging mechanism comprises a lifting assembly for driving the second material taking and placing assembly to lift, the first material taking and placing assembly is at a first height when carrying the material along the second direction, and the second material taking and placing assembly is at a second height when carrying the material along the second direction, the second height is greater than the first height.

[0010] Exemplarily, the lifting assembly comprises a locking cylinder, and the lifting assembly drives the second material taking and placing assembly to lift under driving of the locking cylinder.

[0011] Exemplarily, the discharging mechanism comprises a mounting frame, a transmitting sensor and a receiving sensor are arranged on a side of the mounting frame facing the rack, a signal transmission line exists between the transmitting sensor and the receiving sensor, a qualified position of the material on the rack is located on one side of the signal transmission line, and the material at an unqualified position on the rack blocks the signal transmission line.

[0012] Exemplarily, the material moving mechanism comprises a third guide rail and a third material taking and placing assembly, the third material taking and placing assembly is connected to the third guide rail and is movable along the first direction between the rack and the standby position, so as to carry the material between the rack and the standby position, and the third guide rail is provided with a positioning assembly on one side in the second direction, and the standby position is located on the positioning assembly.

[0013] Exemplarily, the positioning assembly comprises a carrier and two limiting strips, the two limiting strips extend along the first direction, and the two limiting strips are arranged on two sides of the carrier in the second direction, and the standby position is located on the carrier and between the two limiting strips.

[0014] Exemplarily, a light source is arranged above the positioning assembly, and a camera for shooting the material located in the standby position is arranged above the light source.

[0015] Exemplarily, the processing device comprises a laser processing device, and the processing mechanism comprises a processing platform and a laser unit, the processing platform is movable between the processing position and the receiving position, and the laser unit is used for processing the material to be processed on the processing platform located in the processing position.

[0016] The processing equipment provided by the utility model, because the feeding mechanism and the discharging mechanism are arranged at intervals along the first direction, and the feeding mechanism and the discharging mechanism all carry the material along the second direction which is perpendicular to the first direction, therefore, the trajectories of the feeding mechanism and the discharging mechanism carrying the material can be long strip-shaped respectively. The space occupied by the long strip-shaped trajectory can be considered to be only related to the size of the carried material, compared with the arc-shaped trajectory in the prior art, the occupied space can be smaller, therefore, the overall size of the processing equipment is smaller, so that the processing equipment can be applied to more scenes. When the size of the material is larger, through simple structural change, the feeding mechanism and the discharging mechanism can have suitable intervals along the first direction, so that the feeding mechanism and the discharging mechanism do not interfere with each other when carrying the material respectively. Therefore, the processing equipment is more suitable for processing the material with larger size.

[0017] A series of simplified forms are introduced in the utility model content, which will be further described in detail in the specific embodiment part. The utility model content part does not mean trying to limit the key features and necessary technical features of the claimed technical scheme, and does not mean trying to determine the protection scope of the claimed technical scheme.

[0018] The advantages and characteristics of the utility model will be described in detail below in combination with the drawings. DRAWINGS

[0019] The following drawings of the utility model are hereby part of the utility model for understanding the utility model. The embodiments of the utility model and the description thereof shown in the drawings are used to explain the principle of the utility model. In the drawings,

[0020] Figure 1 It is a perspective view of the processing equipment according to an exemplary embodiment of the utility model;

[0021] Figure 2 It is Figure 1 It is a top view of the processing equipment shown in the drawings;

[0022] Figure 3 It is Figure 1 It is a perspective view of the partial structure of the processing equipment shown in the drawings;

[0023] Figure 4 It is Figure 3 It is a perspective view of the feeding mechanism shown in the drawings;

[0024] Figure 5 It is Figure 3 It is a perspective view of the material moving mechanism shown in the drawings;

[0025] Figure 6 It is Figure 3 It is a perspective view of the discharging mechanism shown in the drawings;

[0026] Figure 7 As Figure 6 A perspective view of part of the structure of the unloading mechanism shown in

[0027] Figure 8 As Figure 1 A perspective view of the positioning assembly shown in

[0028] Wherein, the above drawings include the following reference signs:

[0029] 100, material moving device; 200, rack; 300, material moving mechanism; 310, third guide rail; 320, third material taking and placing assembly; 400, processing device; 500, material loading mechanism; 510, first material taking and placing assembly; 511, dustproof plate; 520, first driving member; 530, first guide rail; 600, processing mechanism; 610, processing platform; 620, laser unit; 700, material unloading mechanism; 710, second material taking and placing assembly; 720, second driving member; 730, second guide rail; 740, lifting assembly; 750, mounting frame; 761, emitting sensor; 762, receiving sensor; 800, positioning assembly; 810, carrier; 820, two limiting strips; 830, light source; 840, camera; 910, waiting position; 920, material; 930, material receiving position; 940, processing position. DETAILED DESCRIPTION

[0030] In the following description, a large number of details are provided in order to enable a thorough understanding of the present application. However, it can be appreciated by those skilled in the art that the following description only exemplarily shows the preferred embodiments of the present application, and the present application can be implemented without one or more such details. In addition, in order to avoid confusion with the present application, some technical features known in the art are not described in detail.

[0031] Embodiments of the present application provide a processing equipment. The processing equipment includes but is not limited to a cutting processing equipment, a welding processing equipment or a drilling processing equipment. The processing equipment can realize material moving, material loading, processing and material unloading operations of the material. The material includes but is not limited to a wafer or a material plate. The processing equipment of the embodiments of the present application will be described in detail below in combination with the drawings.

[0032] As Figures 1-3 shown, the processing equipment can include a material moving device 100 and a processing device 400.

[0033] The material moving device 100 can include a material rack 200 and a material moving mechanism 300. The material rack 200 can be used to store materials 920. For example, the material rack 200 can be provided with a plurality of material slots arranged in a vertical direction. Each material slot can be used to place one material 920. The materials 920 on the material rack 200 can be taken and placed by a hand or a mechanical hand, etc. The material rack 200 and the material moving mechanism 300 can be arranged along a first direction X-X. The material moving mechanism 300 can be used to carry the materials 920 between the material rack 200 and the waiting position 910 along the first direction X-X. That is, the material moving mechanism 300 can be used to carry the materials 920 on the material rack 200 to the waiting position 910, and can also be used to carry the materials 920 on the waiting position 910 to the material rack 200. Depending on the materials 920, the material moving mechanism 300 can adopt any suitable material moving mechanism, such as a vacuum suction material moving mechanism, a magnetic attraction material moving mechanism, or a gripper material moving mechanism, as long as it can carry the materials 920 between the material rack 200 and the waiting position 910.

[0034] The processing device 400 can include a feeding mechanism 500, a processing mechanism 600, and a discharging mechanism 700. The feeding mechanism 500 and the discharging mechanism 700 can be spaced apart along a first direction X-X. Along the first direction X-X, the processing mechanism 600 can be located between the feeding mechanism 500 and the discharging mechanism 700. The processing mechanism 600 can have a receiving position 930. The feeding mechanism 500 can be used to carry the material 920 from a waiting position 910 to the receiving position 930 along a second direction Y-Y. Depending on the material 920, the feeding mechanism 500 can adopt any suitable feeding mechanism, such as a vacuum suction feeding mechanism, a magnetic feeding mechanism, or a gripper feeding mechanism, as long as the material 920 can be carried from the waiting position 910 to the receiving position 930 along the second direction Y-Y. The second direction Y-Y can be perpendicular to the first direction X-X. Depending on the processing technology of the material 920, the processing mechanism 600 can adopt any suitable processing mechanism, such as a cutting processing mechanism, a welding processing mechanism, or a drilling processing mechanism. Exemplarily, the processing device can include a laser processing device. The processing mechanism 600 can include a processing platform 610 and a laser unit 620. The processing platform 610 can be movable between a processing position 940 and the receiving position 930. The processing platform 610 can be used to place the material 920. In this way, the processing platform 610 can be used to carry the material 920 between the processing position 940 and the receiving position 930. The laser unit 620 can be used to process the material 920 to be processed on the processing platform 610 at the processing position 940. The laser unit 620 can adopt various types of laser units known in the art or possibly appearing in the future, which can emit laser light so as to cut the material 920. In some embodiments, the laser unit 620 can emit laser light to focus laser energy to generate high temperature, so as to achieve invisible cutting of a wafer, that is, to generate a burst point inside a wafer cutting path, and a crack generated by connecting multiple points, so as to separate the wafer chip and achieve the cutting purpose. In this way, no dust is generated in the processing process, and the wafer is not contaminated. The processing process is a non-contact processing process, and the heat effect is very small, which is very good for processing a wafer with a relatively thin thickness. The processing mechanism 600 can be mounted on a high-precision high-speed marble linear motor platform, and the processing efficiency is high, the linear speed can be up to 1 m / s, and the processing precision can reach ±1 microns. The processing mechanism 600 can adopt an optical positioning camera system, which can realize cutting of a whole wafer and a non-whole wafer, and the positioning precision can reach micron level. The processing mechanism 600 can be equipped with a Z-axis following system, which can automatically follow the Z-axis according to the wafer undulation at a high linear speed, and ensure the depth consistency of the laser focal point. The discharging mechanism 700 can be used to carry the processed material 920 from the receiving position 930 to the waiting position 910 along the second direction Y-Y.According to the material 920, the unloading mechanism 700 can adopt any suitable unloading mechanism, such as a vacuum suction plate unloading mechanism, a magnetic unloading mechanism, or a clamping jaw unloading mechanism, as long as it can carry the processed material 920 from the receiving position 930 to the waiting position 910 along the second direction Y-Y.

[0035] The working process of the processing equipment is described below. First, the material moving mechanism 300 can carry the material to be processed 920 from the rack 200 to the waiting position 910 along the first direction X-X. Then, the feeding mechanism 500 can carry the material to be processed 920 from the waiting position 910 to the receiving position 930 along the second direction Y-Y. Then, the processing platform 610 can carry the material to be processed 920 from the receiving position 930 to the processing position 940. Then, the laser unit 620 can process the material to be processed 920 on the processing platform 610 at the processing position 940 to form the processed material 920. Then, the processing platform 610 can carry the processed material 920 from the processing position 940 to the receiving position 930. Then, the unloading mechanism 700 can carry the processed material 920 from the receiving position 930 to the waiting position 910 along the second direction Y-Y. Then, the material moving mechanism 300 can carry the processed material 920 from the waiting position 910 to the rack 200 along the first direction X-X. In this way, the processing of the material 920 by the processing equipment can be completed. The processing equipment can perform the above process repeatedly to process more materials 920. In actual applications, the material moving mechanism 300, the feeding mechanism 500, and the unloading mechanism 700 can work simultaneously. For example, while the feeding mechanism 500 is carrying the material to be processed 920 from the waiting position 910 to the receiving position 930 along the second direction Y-Y, the unloading mechanism 700 can carry the processed material 920 from the receiving position 930 to the waiting position 910 along the second direction Y-Y. In this way, the processing mechanism 600 can be in a processing state for a long time, thereby improving the working efficiency of the processing equipment.

[0036] In summary, the processing equipment provided by the utility model, because the feeding mechanism 500 and the discharging mechanism 700 are arranged along the first direction X-X at intervals, and the feeding mechanism 500 and the discharging mechanism 700 both carry the material 920 along the second direction Y-Y perpendicular to the first direction X-X, therefore, the trajectories of the feeding mechanism 500 and the discharging mechanism 700 carrying the material 920 can be long strip-shaped respectively. The space occupied by the long strip-shaped trajectory can be considered to be only related to the size of the carried material 920, compared with the arc-shaped trajectory in the prior art, the occupied space can be smaller, therefore, the overall size of the processing equipment is smaller, so that the processing equipment can be applied to more scenes. When the material 920 (for example, 8-inch wafer) is large in size, through simple structural change, the feeding mechanism 500 and the discharging mechanism 700 can have suitable intervals along the first direction X-X, so that the feeding mechanism 500 and the discharging mechanism 700 do not interfere with each other when carrying the material 920 respectively. Therefore, the processing equipment is more suitable for processing the material 920 large in size.

[0037] Exemplarily, as shown in Figures 1-2 the feeding mechanism 500 and the discharging mechanism 700 can be arranged on the same side of the material moving device 100 along the second direction Y-Y. In this way, along the second direction Y-Y, the structure of the processing equipment is more compact.

[0038] Exemplarily, as shown in Figures 1-2 the feeding mechanism 500 and the rack 200 can be located on both sides of the discharging mechanism 700 along the first direction X-X. In this way, along the first direction X-X, the structure of the processing equipment is more compact. And the material moving mechanism 300 carries the processed material 920 from the waiting position 910 to the rack 200 along the first direction X-X at a shorter distance, so that the influence on the processed material 920 in the carrying process can be reduced, and the processed material 920 can meet the requirements.

[0039] Exemplarily, as shown in Figure 4 the feeding mechanism 500 can include a first material taking and placing assembly 510. As shown in Figure 6As shown, the unloading mechanism 700 can include a second material taking and placing assembly 710. Both the first material taking and placing assembly 510 and the second material taking and placing assembly 710 can move along the second direction Y-Y between above the receiving position 930 and above the waiting position 910, so as to carry the material 920 from the waiting position 910 to the receiving position 930 before the material 920 is processed, and carry the material 920 from the receiving position 930 to the waiting position 910 after the material 920 is processed. Specifically, the first material taking and placing assembly 510 can carry the material 920 to be processed from the waiting position 910 to the receiving position 930 along the second direction Y-Y. After the processing mechanism 600 completes the processing, the second material taking and placing assembly 710 can carry the processed material 920 from the receiving position 930 to the waiting position 910 along the second direction Y-Y. In this way, the structure of the feeding mechanism 500 and the unloading mechanism 700 is relatively simple, and the manufacturing cost is low. According to the different materials 920, the first material taking and placing assembly 510 can adopt various types of material taking and placing assemblies known in the art or possibly appearing in the future, including but not limited to a vacuum suction material taking and placing assembly, a magnetic suction material taking and placing assembly, or a gripper material taking and placing assembly. Similarly, according to the different materials 920, the second material taking and placing assembly 710 can adopt various types of material taking and placing assemblies known in the art or possibly appearing in the future, including but not limited to a vacuum suction material taking and placing assembly, a magnetic suction material taking and placing assembly, or a gripper material taking and placing assembly. In the embodiment shown in the figure, both the first material taking and placing assembly 510 and the second material taking and placing assembly 710 can include a vacuum suction material taking and placing assembly, so as to take and place the material 920 by vacuum suction.

[0040] Exemplarily, as shown in the figure, Figure 4 The feeding mechanism 500 can further include a first driving member 520 and a first guide rail 530. The first guide rail 530 can extend along the second direction Y-Y. The first material taking and placing assembly 510 can be connected to the first guide rail 530. And the first driving member 520 can be connected to the first material taking and placing assembly 510. Under the driving of the first driving member 520, the first material taking and placing assembly 510 can move relative to the first guide rail 530, so as to carry the material 920 to be processed from the waiting position 910 to the receiving position 930 along the second direction Y-Y. The first driving member 520 includes but is not limited to a motor, a pneumatic cylinder, or a hydraulic cylinder. In this way, the first driving member 520 can enable the feeding mechanism 500 to be automatically controlled, and the first guide rail 530 can improve the stability of the movement of the first material taking and placing assembly 510.

[0041] Exemplarily, as shown in the figure, Figure 6As shown, the discharging mechanism 700 can include a second driving member 720 and a second guide rail 730. The second guide rail 730 can extend along the second direction Y-Y. The second material taking and placing assembly 710 can be connected to the second guide rail 730. Also, the second driving member 720 can be connected to the second material taking and placing assembly 710. Under the driving of the second driving member 720, the second material taking and placing assembly 710 can move relative to the second guide rail 730, so that the processed material 920 can be carried from the receiving position 930 to the waiting position 910 along the second direction Y-Y. The second driving member 720 includes, but is not limited to, a motor, a pneumatic cylinder or a hydraulic cylinder. In this way, the second driving member 720 can enable the discharging mechanism 700 to be automatically controlled, and the second guide rail 730 can improve the stability of the movement of the second material taking and placing assembly 710.

[0042] As shown, the discharging mechanism 700 can include a second driving member 720 and a second guide rail 730. The second guide rail 730 can extend along the second direction Y-Y. The second material taking and placing assembly 710 can be connected to the second guide rail 730. Also, the second driving member 720 can be connected to the second material taking and placing assembly 710. Under the driving of the second driving member 720, the second material taking and placing assembly 710 can move relative to the second guide rail 730, so that the processed material 920 can be carried from the receiving position 930 to the waiting position 910 along the second direction Y-Y. The second driving member 720 includes, but is not limited to, a motor, a pneumatic cylinder or a hydraulic cylinder. In this way, the second driving member 720 can enable the discharging mechanism 700 to be automatically controlled, and the second guide rail 730 can improve the stability of the movement of the second material taking and placing assembly 710. Figure 6 As shown, the discharging mechanism 700 can further include a lifting assembly 740. The lifting assembly 740 can be connected between the second driving member 720 and the second material taking and placing assembly 710. Under the driving of the second driving member 720, the second material taking and placing assembly 710 and the lifting assembly 740 can move synchronously relative to the second guide rail 730. The lifting assembly 740 can be used to drive the second material taking and placing assembly 710 to lift and lower. The first material taking and placing assembly 510 can be at a first height when carrying the material 920 along the second direction Y-Y. The second material taking and placing assembly 710 can be at a second height when carrying the material 920 along the second direction. The second height can be greater than the first height. Specifically, when the second material taking and placing assembly 710 needs to pick up the processed material 920 at the receiving position 930 or place the processed material 920 at the waiting position 910, the lifting assembly 740 can drive the second material taking and placing assembly 710 to lower. When the second material taking and placing assembly 710 needs to move between the receiving position 930 and the waiting position 910, the lifting assembly 740 can drive the second material taking and placing assembly 710 to rise to the second height. In this way, the second material taking and placing assembly 710 moves between the receiving position 930 and the waiting position 910 along the second direction Y-Y without being at the same height as the first material taking and placing assembly 510, so as to avoid interference. In this way, the distance between the first material taking and placing assembly 510 and the second material taking and placing assembly 710 along the first direction X-X can be appropriately reduced, so as to make the structure of the processing equipment more compact.

[0043] As shown, the discharging mechanism 700 can include a second driving member 720 and a second guide rail 730. The second guide rail 730 can extend along the second direction Y-Y. The second material taking and placing assembly 710 can be connected to the second guide rail 730. Also, the second driving member 720 can be connected to the second material taking and placing assembly 710. Under the driving of the second driving member 720, the second material taking and placing assembly 710 can move relative to the second guide rail 730, so that the processed material 920 can be carried from the receiving position 930 to the waiting position 910 along the second direction Y-Y. The second driving member 720 includes, but is not limited to, a motor, a pneumatic cylinder or a hydraulic cylinder. In this way, the second driving member 720 can enable the discharging mechanism 700 to be automatically controlled, and the second guide rail 730 can improve the stability of the movement of the second material taking and placing assembly 710. Figure 6 As shown, the discharging mechanism 700 can further include a lifting assembly 740. The lifting assembly 740 can be connected between the second driving member 720 and the second material taking and placing assembly 710. Under the driving of the second driving member 720, the second material taking and placing assembly 710 and the lifting assembly 740 can move synchronously relative to the second guide rail 730. The lifting assembly 740 can be used to drive the second material taking and placing assembly 710 to lift and lower. The first material taking and placing assembly 510 can be at a first height when carrying the material 920 along the second direction Y-Y. The second material taking and placing assembly 710 can be at a second height when carrying the material 920 along the second direction. The second height can be greater than the first height. Specifically, when the second material taking and placing assembly 710 needs to pick up the processed material 920 at the receiving position 930 or place the processed material 920 at the waiting position 910, the lifting assembly 740 can drive the second material taking and placing assembly 710 to lower. When the second material taking and placing assembly 710 needs to move between the receiving position 930 and the waiting position 910, the lifting assembly 740 can drive the second material taking and placing assembly 710 to rise to the second height. In this way, the second material taking and placing assembly 710 moves between the receiving position 930 and the waiting position 910 along the second direction Y-Y without being at the same height as the first material taking and placing assembly 510, so as to avoid interference. In this way, the distance between the first material taking and placing assembly 510 and the second material taking and placing assembly 710 along the first direction X-X can be appropriately reduced, so as to make the structure of the processing equipment more compact.

[0044] For example, such as Figure 4 As shown, a dustproof plate 511 can be provided on the top of the first material handling assembly 510. The dustproof plate 511 can be located above the first material handling assembly 510, thereby shielding the material to be processed 920 on the first material handling assembly 510. In this way, the dustproof plate 511 can prevent dust and other contaminants from falling onto the material to be processed 920, thereby avoiding the contaminants affecting the processing of the material to be processed 920. Furthermore, the dustproof plate 511 can also play a protective role, preventing components such as the second material handling assembly 710 above the dustproof plate 511 from accidentally falling and damaging the first material handling assembly 510 and the material to be processed 920.

[0045] For example, such as Figures 6-7 As shown, the unloading mechanism 700 may further include a mounting frame 750. A transmitting sensor 761 and a receiving sensor 762 may be mounted on the side of the mounting frame 750 facing the material rack 200. A signal transmission line may exist between the transmitting sensor 761 and the receiving sensor 762. Specifically, the transmitting sensor 761 can transmit a signal through the signal transmission line, and the receiving sensor 762 can receive the signal through the signal transmission line. The acceptable position of the material 920 on the material rack 200 may be located on one side of the signal transmission line. Material 920 in an unacceptable position on the material rack 200 can block the signal transmission line. Thus, when there is unacceptable material 920 on the material rack 200, the material 920 can block the signal transmission line, preventing the receiving sensor 762 from receiving the signal. In this way, the transmitting sensor 761 and the receiving sensor 762 can detect whether the material 920 on the material rack 200 is in an acceptable position. When the material 920 on the material rack 200 is in an acceptable position, it is convenient for the material transfer mechanism 300 to handle it.

[0046] For example, such as Figures 1-2As shown in Figures 5 and 8, the material handling mechanism 300 may include a third guide rail 310 and a third pick-and-place assembly 320. The third guide rail 310 may extend along a first direction XX. The third pick-and-place assembly 320 may be connected to the third guide rail 310. Furthermore, the third pick-and-place assembly 320 may move relative to the third guide rail 310 along the first direction XX between the rack 200 and the waiting position 910 to transport the material 920 between the rack 200 and the waiting position 910. Depending on the material 920, the third pick-and-place assembly 320 may employ various types of pick-and-place assemblies known in the art or likely to emerge in the future, including but not limited to vacuum suction cup pick-and-place assemblies, magnetic suction assemblies, or gripper pick-and-place assemblies. A positioning assembly 800 may be provided on one side of the third guide rail 310 in the second direction YY. The waiting position 910 may be located on the positioning assembly 800. Thus, when the third material handling component 320 transports the material to be processed 920 to the waiting position 910, the positioning component 800 can position the material to be processed 920. The structure of the positioning component 800 can be arbitrary; for example, it can include a positioning component that positions the material to be processed 920 via a magnetic suction element, or a positioning component that positions the material to be processed 920 via a guide channel. In this way, the feeding mechanism 500 can accurately pick up the material to be processed 920, thereby transporting the material to be processed 920 from the waiting position 910 to the receiving position 930. With this configuration, the reliability of the processing equipment is high.

[0047] For example, such as Figure 8 As shown, the positioning component 800 may include a platform 810 and two limiting bars 820. Both limiting bars 820 extend along a first direction XX. The two limiting bars 820 are respectively positioned on both sides of the platform 810 along a second direction YY. A waiting position 910 can be located on the platform 810, and between the two limiting bars 820. When the third material handling component 320 transports the material to be processed 920 to the waiting position 910, the two limiting bars 820 can support the material to be processed 920. Then, the two limiting bars 820 can merge along the second direction YY, thereby clamping and positioning the material to be processed 920. The two limiting bars 820 can be driven by any suitable method such as manual operation, motor, or cylinder. With this configuration, the positioning component 800 has a simple structure and low cost.

[0048] For example, such as Figure 1 and 8As shown, above the positioning assembly 800 can be provided with a light source 830. Above the light source 830 can be provided with a camera 840. The camera 840 includes but is not limited to a wide-angle camera. The camera 840 can be used to take a photo of the material 920 located in the waiting position 910. The light source 830 can provide a light source for the camera 840. The camera 840 can take photos of the shape and / or position of the material 920, so as to provide information for subsequent processing.

[0049] In the description of the present application, it should be understood that the orientation words such as "front", "back", "up", "down", "left", "right", "horizontal", "vertical", "vertical", "horizontal" and "top", "bottom" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, without the opposite description, these orientation words do not indicate and imply that the device or element indicated must have a specific orientation or be constructed and operated in a specific orientation, therefore it cannot be understood as a limitation on the protection scope of the present application; The orientation words "inside" and "outside" refer to the inside and outside relative to the contour of each component.

[0050] For the convenience of description, here the area relative terms such as "on", "above", "upper surface", "upper" and the like can be used to describe the area position relationship of one or more components or features shown in the figure with other components or features. It should be understood that the area relative terms not only include the orientation of the components described in the figure, but also include different orientations in use or operation. For example, if the components in the figure are inverted as a whole, the components "above" or "on" other components or features will include the case of "below" or "under" other components or structures. Thus, the example term "above" can include both "above" and "below". In addition, these components or features can also be positioned at other different angles (for example, rotated by 90 degrees or other angles), and all these cases are intended to be included herein.

[0051] It should be noted that the terms used herein are only for the purpose of describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and furthermore, it should be understood that when the terms "comprise" and / or "include" are used in the specification, it means that the features, steps, operations, components, assemblies and / or combinations thereof are present.

[0052] It should be noted that the terms "first", "second", and the like in the description and claims of the utility model and the above drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the utility model described herein can be implemented in an order other than those illustrated or described herein.

[0053] The utility model has been described by the above embodiment, but it should be understood that the above embodiment is only for the purpose of example and illustration, and is not intended to limit the utility model to the scope of the described embodiments. In addition, those skilled in the art can understand that the utility model is not limited to the above embodiments, and more variations and modifications can be made according to the teachings of the utility model, which all fall within the scope of the utility model claimed. The protection scope of the utility model is defined by the attached claims and their equivalent scope.

Claims

1. A processing apparatus, characterized by, The application relates to a material moving device and a processing device. The material moving device comprises a material rack arranged along a first direction and a material moving mechanism for moving materials between the material rack and a waiting position along the first direction; and the processing device comprises a feeding mechanism, a processing mechanism and a discharging mechanism, the feeding mechanism and the discharging mechanism are arranged along the first direction, the processing mechanism is arranged between the feeding mechanism and the discharging mechanism, the processing mechanism has a receiving position, the feeding mechanism is used for moving the materials from the waiting position to the receiving position along a second direction perpendicular to the first direction, and the discharging mechanism is used for moving the processed materials from the receiving position to the waiting position along the second direction. In the second direction, the feeding mechanism and the discharging mechanism are arranged on the same side of the material moving device.

2. The processing apparatus according to claim 1, wherein In the first direction, the feeding mechanism and the material rack are arranged on two sides of the discharging mechanism.

3. The processing apparatus of claim 1, wherein, The feeding mechanism comprises a first material taking and placing assembly, and the discharging mechanism comprises a second material taking and placing assembly, the first material taking and placing assembly and the second material taking and placing assembly are movable along the second direction between above the receiving position and above the waiting position, so as to move the materials from the waiting position to the receiving position before processing and move the materials from the receiving position to the waiting position after processing.

4. The processing apparatus of claim 1, wherein, The discharging mechanism comprises a lifting assembly for driving the second material taking and placing assembly to lift, the first material taking and placing assembly is at a first height when moving the materials along the second direction, and the second material taking and placing assembly is at a second height when moving the materials along the second direction, the second height is greater than the first height.

5. The processing apparatus of claim 4, wherein, The lifting assembly comprises a locking cylinder, and the lifting assembly drives the second material taking and placing assembly to lift under the driving of the locking cylinder.

6. The processing apparatus of claim 5, wherein, The discharging mechanism comprises a mounting rack, a transmitting sensor and a receiving sensor are arranged on a side of the mounting rack facing the material rack, a signal transmission line exists between the transmitting sensor and the receiving sensor, and a qualified position of the materials on the material rack is located on one side of the signal transmission line, and unqualified materials on the material rack shield the signal transmission line.

7. The processing apparatus of claim 1, wherein The material moving mechanism comprises a third guide rail and a third material taking and placing assembly, the third material taking and placing assembly is connected to the third guide rail and is movable along the first direction between the material rack and the waiting position, so as to move the materials between the material rack and the waiting position, and a positioning assembly is arranged on one side of the third guide rail in the second direction, and the waiting position is located on the positioning assembly.

8. The processing apparatus of claim 1, wherein, The positioning assembly comprises a carrier and two limiting strips, the two limiting strips extend along the first direction, and the two limiting strips are arranged on two sides of the carrier along the second direction, and the waiting position is located on the carrier and between the two limiting strips.

9. The processing apparatus of claim 8, wherein, A light source is arranged above the positioning assembly, and a camera for shooting the materials in the waiting position is arranged above the light source.

10. The processing apparatus of claim 8, wherein, ​ 11. The processing apparatus of claim 1, wherein, The processing device comprises a laser processing device, the processing mechanism comprises a processing platform and a laser unit, the processing platform is movable between a processing position and the receiving position, and the laser unit is used for processing the material to be processed located on the processing platform at the processing position.

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