Jacking mechanism and detection device

Abstract

The utility model relates to a jacking mechanism and a detection device, the jacking mechanism comprises a jacking frame and a plurality of ejector pins, the ejector pins are movably arranged on the jacking frame and can move in the direction close to or away from a base body, and the ejector pins can move and abut against the gap between two adjacent panels. According to the jacking mechanism provided by the invention, the plurality of ejector pins move towards the direction close to the base body, so that the plurality of ejector pins correspondingly abut against the gap between the two adjacent panels, the base body is integrally and horizontally supported, the bad phenomena of bending, collapse and the like in the middle of the base body are avoided, the overall flatness of the base body is ensured in the detection process of the base body, and the detection efficiency of the base body is improved. The reliability of detection results such as the performance and the appearance of the base body is improved, the ejector pins move in the direction away from the base body so that jacking supporting of the jacking mechanism on the base body can be relieved, and the base body can be conveniently taken, placed and replaced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of panel manufacturing, in particular to a jacking mechanism and a detection device. BACKGROUND

[0002] With the development of display industry, various display modules for user interaction are applied more and more widely. OLED (Organic Light-Emitting Diode) as an active light-emitting technology is widely used in mobile phones, televisions and other display products due to its excellent color, contrast and flexibility. In order to ensure the production quality of display panels, performance, appearance and other detection operations need to be performed on display panels before they are put into the market.

[0003] In the detection process of display panels, in order to improve the detection efficiency of display panels, a plurality of display panels are carried by a carrier to form a base for batch detection. Since the carrier carries a plurality of display panels, under the action of self-weight, the middle position of the base will appear deflection, collapse and other adverse phenomena, which will affect the detection results of the performance and appearance of the base. UTILITY MODEL CONTENT

[0004] Therefore, it is necessary to provide a jacking mechanism and a detection device to solve the problem that the middle position of the base formed by a plurality of display panels will appear deflection, collapse and other adverse phenomena in the detection process.

[0005] A jacking mechanism for jacking a base, the base comprising a plurality of panels arranged in an array, the jacking mechanism comprising:

[0006] a jacking frame;

[0007] a plurality of jacking pins, the plurality of jacking pins being movably arranged on the jacking frame and being capable of moving towards or away from the base, the jacking pins being capable of moving and abutting at a gap between two adjacent panels.

[0008] In one embodiment, the jacking mechanism further comprises a jacking module, a transmission module and a sliding seat, the jacking module and the transmission module are arranged on the jacking frame, the jacking module is in transmission connection with the sliding seat for driving the sliding seat to move in the Z direction, the transmission module is in transmission connection with the sliding seat for driving the sliding seat to move in the X direction and / or the Y direction, and the plurality of jacking pins are arranged on the sliding seat.

[0009] In one embodiment, the plurality of jacking pins are arranged at intervals on the sliding seat and are capable of sliding relative to the sliding seat.

[0010] In one of the embodiments, the ejector pin comprises a fixed part and an abutting part arranged on the fixed part, the fixed part is slidingly arranged on the sliding seat, and the abutting part can abut on the gap between two adjacent panels.

[0011] In one of the embodiments, the sliding seat is provided with a track groove, the fixed part comprises a sliding block and a sleeve arranged on the sliding block, the sliding block is slidingly arranged on the track groove, the abutting part is movably arranged on the fixed part, and the abutting part can move towards the base in the direction of approaching or moving away from the base relative to the fixed part.

[0012] In one of the embodiments, the sleeve is provided with a limiting groove penetrating through the side wall of the sleeve, and the extending direction of the limiting groove is consistent with the moving direction of the abutting part.

[0013] The abutting part is provided with a limiting column, the limiting column is arranged in the limiting groove, and the limiting column can move along the extending direction of the limiting groove.

[0014] In one of the embodiments, the connection part between the abutting part and the fixed part is provided with an elastic member, and the elastic direction of the elastic member is consistent with the moving direction of the abutting part.

[0015] In one of the embodiments, the jacking module comprises a jacking drive, a plurality of transmission shafts and a support plate, the jacking drive is arranged on the jacking frame and is in transmission connection with the plurality of transmission shafts, the support plate is connected to the end of the plurality of transmission shafts away from the jacking drive, and the plurality of transmission shafts are arranged at intervals along the circumferential direction of the jacking frame.

[0016] The transmission module comprises a rotary drive, a transmission gear, a guide rail and a rack in meshing connection with the transmission gear, the rotary drive is arranged on the jacking frame and is in transmission connection with the transmission gear, the guide rail is arranged on the support plate, the sliding seat is slidingly arranged on the guide rail through the rack, and the extending direction of the rack is consistent with the extending direction of the guide rail.

[0017] In one of the embodiments, the jacking mechanism comprises a first ejector pin group and a second ejector pin group, the first ejector pin group and the second ejector pin group are arranged at intervals along the Y direction, the first ejector pin group comprises a plurality of ejector pins, and the plurality of ejector pins in the first ejector pin group are arranged at intervals along the X direction, the second ejector pin group comprises a plurality of ejector pins, and the plurality of ejector pins in the second ejector pin group are arranged at intervals along the X direction.

[0018] A detection device for jacking detection of a base, the base comprises a plurality of panels arranged in an array, and the detection device comprises:

[0019] The jacking mechanism according to any one of the above technical solutions.

[0020] The jacking mechanism and the detection device, the plurality of jacks are moved towards the direction close to the base body, so that the plurality of jacks are correspondingly abutted at the gap between the adjacent two panels, so as to horizontally support the base body as a whole, avoid the deflection and collapse of the middle position of the base body, and ensure the overall flatness of the base body during the detection process of the base body, improve the performance and appearance of the base body, and improve the reliability of the detection result. The plurality of jacks are moved away from the base body, so as to release the jacking support of the jacking mechanism on the base body, and facilitate the taking, placing and replacing operations of the base body. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The position of the base body in the detection process in some embodiments is shown.

[0022] Figure 2 The structure of the jacking mechanism provided in some embodiments is shown.

[0023] Figure 3 The structure of the jack provided in some embodiments is shown.

[0024] Figure 4 The structure of the jacking mechanism provided in some embodiments is shown.

[0025] Figure 5 The structure of the jacking mechanism provided in some embodiments is shown. Figure 4 The local enlarged view of the A area in the middle.

[0026] Figure 6 The structure of the detection device provided in some embodiments is shown.

[0027] REFERENCE SIGNS:

[0028] 100, jacking mechanism;

[0029] 110, jacking frame; 120, jack; 121, fixed part; 1211, sliding block; 1212, sleeve; 1213, limiting groove; 122, abutting part; 1221, limiting column; 123, elastic member; 130, jacking module; 131, jacking driving member; 132, transmission shaft; 133, support plate; 134, guide member; 140, transmission module; 141, rotary driving member; 142, transmission gear; 143, guide rail; 144, rack; 150, sliding seat; 151, track groove; 160, first jack group; 170, second jack group;

[0030] 200, base body; 210, panel; 300, carrier; 400, detection device. DETAILED DESCRIPTION

[0031] In order to make the above objectives, features and advantages of the present application more clear and comprehensible, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in many different ways from what is described herein, and by one of ordinary skill in the art can make similar improvements without departing from the spirit of the present application, and therefore the present application is not limited to the specific embodiments disclosed below.

[0032] In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0033] In addition, if the terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "multiple" appears, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0034] In the present application, unless otherwise specifically defined and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be broadly understood. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0037] The technical solutions provided by the embodiments of this application are described below with reference to the accompanying drawings.

[0038] Currently, see Figure 1 As shown, during the inspection of panel 210, in order to improve the inspection efficiency of panel 210, multiple panels 210 are generally supported by a carrier 300 to form a substrate 200 for batch inspection of multiple panels 210. Since the carrier 300 supports multiple panels 210, under its own weight, the middle position of the substrate 200 may experience defects such as deflection and collapse, affecting the inspection results of the substrate 200's performance and appearance.

[0039] Based on the above issues, please refer to... Figure 2 As shown, this application provides a lifting mechanism 100, which includes a lifting frame 110 and multiple lifting pins 120. The lifting mechanism 100 is used to lift a base 200, which includes multiple arrayed panels 210. Exemplarily, in this embodiment, the panels 210 can be display panels for mobile phones, computers, cameras, etc.

[0040] A plurality of jackscrews 120 are movably arranged on the jacking frame 110, and the plurality of jackscrews 120 are capable of moving towards the side close to or away from the base body 200. The jackscrews 120 are capable of moving and abutting at the gap between the adjacent two panels 210. Exemplarily, the plurality of jackscrews 120 are arranged below the base body 200. When the plurality of jackscrews 120 synchronously move towards the side close to the base body 200, the plurality of jackscrews 120 are capable of corresponding abutting at the gap between the adjacent two panels 210. When the plurality of jackscrews 120 synchronously move towards the side away from the base body 200, the jacking mechanism 100 is capable of being released from the jacking support to the base body 200.

[0041] The jacking mechanism 100 is capable of moving the plurality of jackscrews 120 towards the side close to the base body 200, so that the plurality of jackscrews 120 corresponding abut at the gap between the adjacent two panels 210, thereby supporting the base body 200 as a whole, avoiding the middle position of the base body 200 from being deflected or collapsed, and ensuring the overall flatness of the base body 200 during the detection process of the base body 200, thereby improving the reliability of the detection results of the performance and appearance of the base body 200. The plurality of jackscrews 120 are capable of moving towards the side away from the base body 200, so that the jacking mechanism 100 is released from the jacking support to the base body 200, thereby facilitating the taking, placing and replacing operations of the base body 200.

[0042] In order to avoid the middle position of the base body 200 from being deflected or collapsed, in an embodiment, referring to FIG. 1, Figures 1-3 The jacking mechanism 100 further comprises a jacking module 130, a transmission module 140 and a sliding seat 150. The jacking module 130 and the transmission module 140 are arranged on the jacking frame 110, and the plurality of jackscrews 120 are arranged on the sliding seat 150. The jacking module 130 is in transmission connection with the sliding seat 150, and the jacking module 130 is used for driving the sliding seat 150 to move along the Z direction. Exemplarily, the jacking module 130 is capable of driving the sliding seat 150 to move along the Z direction as shown in FIG. 2, so that the sliding seat 150 drives the jackscrews 120 to move towards the side close to or away from the base body 200. Figure 2 The transmission module 140 is in transmission connection with the sliding seat 150, and the transmission module 140 is used for driving the sliding seat 150 to move along the X direction and / or the Y direction. Exemplarily, the transmission module 140 is capable of driving the sliding seat 150 to move along the X direction and / or the Y direction as shown in FIG. 3, so that the sliding seat 150 drives the jackscrews 120 to move in the horizontal plane. Figure 2 Thus, the jacking module 130 cooperates with the transmission module 140 to drive the sliding seat 150 to move in the XYZ three-dimensional space, so that the plurality of jackscrews 120 corresponding abut at the gap between the adjacent two panels 210, thereby supporting the base body 200 as a whole, avoiding the middle position of the base body 200 from being deflected or collapsed.

[0043] Since the gap position between the two adjacent panels 210 will be offset after the panels 210 of different sizes are placed on the carrier 300, the position of the support abutting of the ejector pin 120 will also change. Based on this, in an embodiment, as shown in Figures 1-3 The plurality of ejector pins 120 are arranged at intervals on the sliding seat 150, and the plurality of ejector pins 120 are all slidable relative to the sliding seat 150. By sliding the ejector pins 120 on the sliding seat 150, the distance between the two adjacent ejector pins 120 can be adjusted to adapt to the abutting support of the panels 210 of different sizes. After the detection of the base body 200 is completed, the ejector pins 120 can be reset by sliding on the sliding seat 150, which can avoid interference with the subsequent other mechanisms (such as a mechanical hand) for taking, feeding, placing, etc. of the base body 200.

[0044] Specifically, as shown in Figures 1-3 The ejector pin 120 includes a fixed portion 121 and an abutting portion 122, and the abutting portion 122 is arranged on the fixed portion 121. The fixed portion 121 is slidably arranged on the sliding seat 150, and the abutting portion 122 can abut at the gap between the two adjacent panels 210 by sliding the ejector pin 120 on the sliding seat 150, so as to realize the horizontal support of the base body 200, and avoid the occurrence of bending, collapse, etc. at the middle position of the base body 200.

[0045] Further, as shown in Figure 4 and Figure 5 The sliding seat 150 is provided with a track groove 151. Exemplarily, the track groove 151 is along Figure 4The X direction and the Y direction are shown. The fixing part 121 comprises a sliding block 1211 and a sleeve 1212, and the sleeve 1212 is arranged on the sliding block 1211. The sliding block 1211 is slidingly arranged in the track groove 151, and the sliding block 1211 is locked to the sliding seat 150 by bolts, rivets or other connectors. When it is necessary to adjust the position of the ejector pin 120, the locking relationship between the sliding block 1211 and the sliding seat 150 can be released, and the position of the ejector pin 120 can be adjusted by sliding the sliding block 1211 in the track groove 151. When the ejector pin 120 is adjusted to the preset position, the locking relationship between the sliding block 1211 and the sliding seat 150 is re-established, and the ejector pin 120 is fixed at the preset position to abut and support the base body 200, thereby avoiding the free movement of the ejector pin 120 during abutting. The abutting part 122 is movably arranged in the fixing part 121, and the abutting part 122 can move towards or away from the base body 200 relative to the fixing part 121. When the ejector pin 120 supports the base body 200 horizontally, the abutting part 122 can buffer the abutting force of the base body 200 on the ejector pin 120, thereby avoiding the breakage of the ejector pin 120 due to excessive instantaneous force acting on the ejector pin 120 during abutting of the base body 200, and avoiding the damage of the base body 200 caused by the force of the ejector pin 120 on the surface of the base body 200.

[0046] In an embodiment, referring to Figure 3 As shown, the sleeve 1212 is provided with a limiting groove 1213 penetrating through the side wall thereof, and the extending direction of the limiting groove 1213 is consistent with the movement direction of the abutting part 122. For example, the extending direction of the length of the limiting groove 1213 is along the vertical direction. Figure 3 As shown, the abutting part 122 protrudes a limiting column 1221. Preferably, the limiting column 1221 is integrally formed on the abutting part 122 by injection molding, extrusion or other methods, so as to simplify the forming method of the limiting column 1221 on the abutting part 122, and improve the structural strength between the abutting part 122 and the limiting column 1221. The limiting column 1221 is inserted into the limiting groove 1213, and the limiting column 1221 can move along the extending direction of the limiting groove 1213. The limiting groove 1213 can limit the movement stroke of the limiting column 1221, thereby avoiding the separation of the abutting part 122 from the fixing part 121 due to excessive movement stroke.

[0047] Preferably, the sleeve 1212 is provided with limiting grooves 1213 on opposite sides, and the abutting part 122 protrudes two limiting columns 1221 corresponding to the limiting grooves 1213. The two limiting columns 1221 are respectively inserted into the corresponding two limiting grooves 1213, and the cooperation between the two limiting grooves 1213 and the two limiting columns 1221 can improve the stability of the abutting part 122 during movement.

[0048] Further, referring to Figure 3 As shown, the elastic member 123 is arranged at the joint of the abutting portion 122 and the fixing portion 121, and the elastic direction of the elastic member 123 is consistent with the moving direction of the abutting portion 122. When the top pin 120 horizontally supports the base body 200, the abutting portion 122 abuts at the gap between the two panels 210, and during the abutting process of the abutting portion 122, the elastic member 123 can buffer the abutting force of the top pin 120 applied to the base body 200, so as to avoid the breakage of the top pin 120 due to the too large instantaneous force applied to the top pin 120 during the abutting process of the top pin 120 to the base body 200, and when the top pin 120 abuts to the surface of the base body 200 due to the displacement deviation, the force applied to the surface of the base body 200 by the top pin 120 will not scratch or scratch the base body 200. That is to say, the flexible contact of the top pin 120 to the base body 200 during the abutting process is realized by the elastic member 123, so as to avoid the breakage of the top pin 120 or the scratch of the base body 200 during the abutting process, and the top pin 120 and the base body 200 are protected.

[0049] Preferably, the abutting portion 122 is provided with a flexible member at the end portion to be abutted to the base body 200, such as a plastic pad, a silica gel pad, etc. Moreover, the elastic member 123 can be a reset spring, and the elastic member 123 is arranged outside the abutting portion 122, and the abutting force between the top pin 120 and the base body 200 is buffered by the elastic deformation of the elastic member 123. Of course, in other feasible embodiments, the elastic member 123 can also be an elastic pad, an elastic sheet, etc., and the specific element type of the elastic member 123 is not limited in the application.

[0050] In an embodiment, referring to Figures 1-5As shown, the jacking module 130 comprises a jacking driving member 131, a plurality of transmission shafts 132 and a support plate 133. The jacking driving member 131 is arranged on the jacking frame 110 by welding, screwing or the like, and is in transmission connection with the plurality of transmission shafts 132. The support plate 133 is connected to the end of the plurality of transmission shafts 132 away from the jacking driving member 131. The plurality of transmission shafts 132 are arranged at intervals along the circumferential direction of the jacking frame 110. The power of the jacking driving member 131 is transmitted to the support plate 133 through the plurality of transmission shafts 132, which can improve the stability of the support plate 133 during movement. The transmission module 140 comprises a rotating driving member 141, a transmission gear 142, a guide rail 143 and a rack 144. The rotating driving member 141 is arranged on the jacking frame 110 by welding, screwing or the like, and is in transmission connection with the transmission gear 142. The guide rail 143 is arranged on the support plate 133. The sliding seat 150 is slidingly arranged on the guide rail 143 through the rack 144. The rack 144 is in the same extension direction as the guide rail 143. The guide rail 143 can guide the sliding direction of the sliding seat 150. The transmission gear 142 and the rack 144 are in meshing connection. The jacking driving member 131 and the rotating driving member 141 are any one of a driving motor and a driving cylinder.

[0051] The jacking mechanism 100 described above can be used to adjust the Z-direction position of the ejector pin 120. When the Z-direction position of the ejector pin 120 needs to be adjusted, the jacking driving member 131 outputs power to the transmission shaft 132. The transmission shaft 132 drives the support plate 133 to move towards the Z-direction Figure 2 The Z-direction movement of the support plate 133 can indirectly adjust the Z-direction position of the sliding seat 150, and further adjust the Z-direction position of the ejector pin 120. When the X-direction / Y-direction position of the ejector pin 120 needs to be adjusted, the rotating driving member 141 outputs power to the transmission gear 142. The transmission gear 142 rotates to change the meshing position with the rack 144. Since the rack 144 is slidingly arranged on the guide rail 143, the rack 144 drives the sliding seat 150 to slide on the guide rail 143 to adjust the X-direction / Y-direction position of the sliding seat 150, and further adjust the X-direction / Y-direction position of the ejector pin 120.

[0052] Preferably, the jacking module 130 further comprises a guide member 134, such as a guide rod or a guide column. The guide member 134 extends towards the Z-direction. The guide member 134 guides the movement of the support plate 133 to ensure the adjustment accuracy of the Z-direction position of the ejector pin 120.

[0053] In an embodiment, referring to Figure 1 , Figure 2 and Figure 4As shown, the jacking mechanism 100 comprises a first group of jacking pins 160 and a second group of jacking pins 170. The first group of jacking pins 160 and the second group of jacking pins 170 are arranged in the Y direction, the first group of jacking pins 160 comprises a plurality of jacking pins 120, and the plurality of jacking pins 120 in the first group of jacking pins 160 are arranged in the X direction, the second group of jacking pins 170 comprises a plurality of jacking pins 120, and the plurality of jacking pins 120 in the second group of jacking pins 170 are arranged in the X direction, that is, part of the plurality of jacking pins 120 form the first group of jacking pins 160, and the other jacking pins 120 form the second group of jacking pins 170. The first group of jacking pins 160 and the second group of jacking pins 170 cooperate to form a supporting plane, thereby improving the stability of supporting the base 200. Moreover, the first group of jacking pins 160 and the second group of jacking pins 170 can be adjusted in the Y direction, and the jacking pins 120 in the first group of jacking pins 160 and the jacking pins 120 in the second group of jacking pins 170 can be adjusted in the X direction, that is, the positions of the jacking pins 120 in the horizontal plane are adjusted to adapt to the stable abutting support of panels 210 of different specifications and sizes.

[0054] In addition, referring to Figure 1 、 Figure 2 and Figure 6 , the present application also provides a detection device 400, the detection device 400 comprises the jacking mechanism 100 of the above technical solution, and the detection device 400 is used for jacking detection of the base 200, such as the detection device 400 can perform performance and appearance detection of the base 200 after jacking the base 200, and the base 200 comprises a plurality of panels 210 arranged in an array.

[0055] The above detection device 400, the plurality of jacking pins 120 move towards the direction close to the base 200, so that the plurality of jacking pins 120 abut at the gap between the adjacent two panels 210 to support the base 200 horizontally as a whole, thereby avoiding the occurrence of deflection, collapse and other adverse phenomena at the middle position of the base 200, so as to ensure the overall flatness of the base 200 during the detection process of the base 200, and improve the reliability of the detection results of the performance and appearance of the base 200.

[0056] The technical features of the above-described embodiments can be combined arbitrarily. In order to make the description simple, not all possible combinations of the technical features in the above-described embodiments are described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0057] The above embodiments only express several implementation ways of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation to the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, which all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A jacking mechanism for jacking a base, the base comprising a plurality of panels arranged in an array, characterised in that, The jacking mechanism comprises: a jacking frame; a plurality of jacking pins movably arranged in the jacking frame and capable of moving towards or away from the base, the jacking pins being capable of moving and abutting at the gap between two adjacent panels.

2. The jacking mechanism of claim 1, wherein The jacking mechanism further comprises a jacking module, a transmission module and a sliding seat, the jacking module and the transmission module being arranged in the jacking frame, the jacking module being in transmission connection with the sliding seat for driving the sliding seat to move in the Z direction, the transmission module being in transmission connection with the sliding seat for driving the sliding seat to move in the X direction and / or the Y direction, and the plurality of jacking pins being arranged in the sliding seat and capable of sliding relative to the sliding seat.

3. The jacking mechanism of claim 2, wherein, The plurality of jacking pins are arranged at intervals in the sliding seat and capable of sliding relative to the sliding seat.

4. The jacking mechanism of claim 3, wherein The jacking pin comprises a fixed portion and an abutting portion arranged on the fixed portion, the fixed portion being slidably arranged in the sliding seat, and the abutting portion being capable of abutting at the gap between two adjacent panels.

5. The jacking mechanism of claim 4, wherein, The sliding seat is provided with a track groove, the fixed portion comprises a sliding block and a sleeve arranged on the sliding block, the sliding block being slidably arranged in the track groove, and the abutting portion being movably arranged in the fixed portion and capable of moving towards or away from the base relative to the fixed portion.

6. The jacking mechanism of claim 5, wherein, The sleeve is provided with a limiting groove penetrating through the side wall thereof, the extending direction of the limiting groove being consistent with the moving direction of the abutting portion. The abutting portion is provided with a limiting column protruding therefrom, the limiting column being arranged in the limiting groove and capable of moving along the extending direction of the limiting groove.

7. The jacking mechanism of claim 5, wherein, The connection between the abutting portion and the fixed portion is provided with an elastic member, the elastic direction of the elastic member being consistent with the moving direction of the abutting portion.

8. The jacking mechanism of claim 2, wherein, The jacking module comprises a jacking drive member, a plurality of transmission shafts and a support plate, the jacking drive member being arranged in the jacking frame and in transmission connection with the plurality of transmission shafts, the support plate being connected to the end portions of the plurality of transmission shafts away from the jacking drive member, and the plurality of transmission shafts being arranged at intervals along the circumferential direction of the jacking frame. The transmission module comprises a rotary drive member, a transmission gear, a guide rail and a rack in meshing connection with the transmission gear, the rotary drive member being arranged in the jacking frame and in transmission connection with the transmission gear, the guide rail being arranged in the support plate, the sliding seat being slidably arranged in the guide rail through the rack, and the extending direction of the rack being consistent with that of the guide rail.

9. The jacking mechanism of claim 1, wherein, The jacking mechanism comprises a first jacking pin group and a second jacking pin group, the first jacking pin group and the second jacking pin group being arranged at intervals along the Y direction, the first jacking pin group comprising a plurality of jacking pins arranged at intervals along the X direction, and the second jacking pin group comprising a plurality of jacking pins arranged at intervals along the X direction.

10. An apparatus for detecting lifting of a substrate comprising a plurality of panels arranged in an array, the apparatus comprising: a first sensor for detecting a first panel of the plurality of panels; a second sensor for detecting a second panel of the plurality of panels; and a controller for determining if the first panel and the second panel are in a predetermined position relative to each other. The detection device comprises: The jacking mechanism according to any one of claims 1-9.

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