Cathode waterway improvement device based on magnetron sputtering

Abstract

The utility model discloses a cathode waterway improvement device based on magnetron sputtering, which is characterized in that the upper part of a magnetic control piece body is sealed and covered by an upper cover plate piece to form a cylindrical mechanism with an open bottom, a magnetic control assembly is accommodated in a cylindrical cavity, and a target piece forms a sealing cover for the bottom of the magnetic control piece body; a connecting piece is fixed to the upper portion of the magnetic control assembly in a penetrating mode. The top where the connecting piece is located extends out of the upper cover plate piece upwards. A water inlet channel and a water outlet channel are arranged at the top of the upper cover plate piece, and the water inlet channel and the water outlet channel respectively penetrate through the upper cover plate piece and a middle cavity where the magnetic control piece body is located, so that water flow forms convection in the water inlet channel and the water outlet channel. According to the device, in the actual use link, compared with the previous clamping sleeve installation, the adopted quick insertion mode can prevent water in the cathode from flowing out in the maintenance of target replacement, and a water path can be more conveniently and quickly disassembled, so that the time cost and the efficiency of target replacement maintenance can be improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer processing equipment technical field, concretely relates to a cathode waterway improvement device based on magnetron sputtering. BACKGROUND

[0002] Wafer sputtering is a skill in semiconductor manufacturing process, is mainly used for depositing thin film on silicon wafer, and high-energy ions generated by sputtering source bombard target material, and atom or molecule on the surface of target material is built and deposited on base material to form thin film.

[0003] High temperature is generated in the sputtering of wafer, at this time, the excess heat needs to be taken away by cooling water, the traditional cathode is connected by a sleeve, after a cycle of target material is completed, the target needs to be replaced and the maintenance equipment is needed, the cathode as a whole needs to be disassembled, the traditional sleeve joint has more disassembled parts, and it is time-consuming and laborious.Magnetron sputtering needs to be carried out under high vacuum conditions to ensure the stability of plasma and the purity of thin film.Water leakage can destroy the vacuum environment, at the same time, the sputtering chamber contains multiple electrodes and circuits, and water leakage can cause circuit short circuit, damage the equipment, even cause safety accidents, and also affect the normal progress of sputtering process. UTILITY MODEL CONTENTS

[0004] In view of the defects of the prior art, the utility model aims at providing a cathode waterway improvement device based on magnetron sputtering, which solves the above technical problems existing in the prior art.

[0005] The utility model can be realized by the following technical scheme:

[0006] A cathode waterway improvement device based on magnetron sputtering, comprising a magnetic control body, an upper cover plate, a driving part, a target material,

[0007] The upper part of the magnetic control body is sealed by the upper cover plate, forming a cylindrical mechanism with the bottom open, and the magnetron assembly is contained in the cylindrical cavity, and the target material forms a seal on the bottom of the magnetic control body.

[0008] A connecting piece is fixedly arranged at the upper part of the magnetron assembly, the top of the connecting piece extends upward out of the upper cover plate, and the rotation of the connecting piece synchronously drives the rotational movement of the magnetron assembly.

[0009] The top of the upper cover plate is provided with a water inlet channel and a water outlet channel, and the water inlet channel and the water outlet channel are respectively arranged in the middle cavity of the magnetic control body and the magnetic control body.

[0010] Further, the connecting piece comprises a driving shaft, a driving gear piece, a driven gear piece and a positioning column, the driving gear piece is in meshing transmission with the driven gear piece, the driving shaft is externally connected with a motor piece and synchronously drives the rotation of the driving gear piece at the output end of the driving shaft, and the driving gear piece is fixedly arranged at the middle part of the positioning column.

[0011] The positioning column penetrates and is fixed at the connecting position of the center of the magnetic control assembly, and the rotation of the magnetic control assembly connected with the positioning column is synchronously driven by the rotation of the driving gear piece.

[0012] Further, the water inlet channel and the water outlet channel are respectively arranged on the two sides of the upper cover plate piece and are centrally symmetrically arranged.

[0013] Further, a backwater channel is arranged on the upper cover plate piece, and the backwater channel is in communication with the cavity formed in the middle part of the magnetic control body.

[0014] Further, the middle part of the positioning column is a through cavity structure and forms the backwater channel, and a plurality of groups of water passing holes are arranged at the bottom of the positioning column, so that the water passing holes are in communication with the internal cavity of the magnetic control body.

[0015] Further, the upper part of the backwater channel is threadedly connected with a third quick-change head through an elbow piece.

[0016] Further, the water inlet channel comprises a first connecting female head and a first quick-change male head, the first connecting female head is an integral molding mechanism with the upper cover plate piece and is in communication with the middle cavity of the magnetic control body.

[0017] The first quick-change male head is threadedly connected at the upper part of the first connecting female head.

[0018] Further, the water outlet channel comprises a second connecting female head and a second quick-change male head, the second connecting female head is an integral molding structure with the upper cover plate piece and is in communication with the middle cavity of the magnetic control body.

[0019] The second quick-change male head is threadedly connected at the upper part of the second connecting female head.

[0020] Further, the lower surface of the target piece is flat.

[0021] The beneficial effects of the utility model are as follows:

[0022] 1. In the actual use link, the quick plug mode adopted can prevent water in the cathode from flowing out, can more conveniently and quickly disassemble the waterway, and can improve the time cost and efficiency of target replacement maintenance.

[0023] 2. The target material used in this device serves as the bottom cover, providing a uniform horizontal magnetic field distribution. Subsequently, the rotation of the magnetron assembly is achieved through the driving component, which helps to achieve a more uniform plasma density and a higher sputtering rate.

[0024] 3. The inlet and outlet water channels of this device use quick-connect fittings for easy and rapid replacement and maintenance. The quick-connect fittings include a female connector and a quick-change male connector, which are connected by threads for quick disassembly.

[0025] 4. This device is equipped with a return water channel for recycling or reusing discharged water. The return water channel is integrated with the positioning column and has a water passage hole at the bottom to allow water to be pumped out of the cavity. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0027] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0028] Figure 2 This is a top view of an embodiment of the present invention.

[0029] Figure 3 This is a first-view cross-sectional structural diagram of an embodiment of the present utility model;

[0030] Figure 4 This is an embodiment of the present utility model. Figure 3 A partial structural diagram at point A in the middle;

[0031] Figure 5 This is a second-view cross-sectional structural schematic diagram of an embodiment of the present invention. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0033] like Figure 1 , Figure 2 As shown, this utility model embodiment provides an improved cathode water circuit device based on magnetron sputtering, including a magnetron control body 1, an upper cover plate 2, a drive component 3, and a target material 4.

[0034] The upper part of the magnetic control body 1 is capped by the upper cover plate 2 to form a bottom-opened cylindrical mechanism (i.e. the middle part where the magnetic control body 1 is located forms a cavity part that can be accommodated), the magnetic control assembly 11 is accommodated in the cylindrical cavity, and the target material 4 forms a cap for the bottom of the magnetic control body 1, and at this time the lower surface of the target material 4 is flat. Such a flat target material can provide a more uniform horizontal magnetic field distribution, which helps to achieve a more uniform plasma density and a higher sputtering rate.

[0035] As shown in Figure 5 , a connecting piece 12 is fixed through the upper part of the magnetic control assembly 11, the top of the connecting piece 12 extends upward through the upper cover plate 2, and the rotation of the connecting piece 12 synchronously drives the rotational movement of the magnetic control assembly 11; the connecting piece 12 includes a drive shaft 31, a driving gear piece 32, a driven gear piece 33, and a positioning column 34, the driving gear piece 32 is in meshing transmission with the driven gear piece 33, the drive shaft 31 is externally connected with a motor, and the rotation of the driving gear piece 32 at the output end of the drive shaft 31 is synchronously driven, and the driving gear piece 32 is fixedly arranged at the middle part of the positioning column 34; the positioning column 34 penetrates and is fixed to the connecting position of the center of the magnetic control assembly 11, and the rotation of the positioning column 34 synchronously drives the rotation of the magnetic control assembly 11 connected with the positioning column 34.

[0036] That is, in use, the rotation of the drive shaft 31 is driven by the externally connected output power source, thereby realizing the rotation of the driving gear piece 32 and the driven gear piece 33 (at this time, the driving gear piece 121 and the driven gear piece 33 are in meshing transmission), that is, the positioning column 34 is implanted into the center position of the magnetic control assembly 11, and the synchronous rotation of the magnetic control assembly 11 is realized by the rotation of the positioning column 34, so that the magnetic control assembly 11 can provide a more uniform horizontal magnetic field distribution.

[0037] As shown in Figure 3 , Figure 4 , the top of the upper cover plate 2 is provided with a water inlet channel 21 and a water outlet channel 22, and the water inlet channel 21 and the water outlet channel 22 are respectively penetrated through the upper cover plate 2 and the middle cavity of the magnetic control body 1, so that the water flow forms a convection in the water inlet channel 21 and the water outlet channel 22, that is, after the water enters from the water inlet channel 21, it enters the cavity of the magnetic control body 1, and through the flow of the water itself, the cooling of the magnetic control assembly 11 in the inner cavity of the magnetic control body 1 can be realized. The water inlet channel 21 and the water outlet channel 22 are respectively arranged on both sides of the upper part of the upper cover plate 2 and are centrally symmetrically arranged, at this time the water flow can achieve the maximum coverage effect in the middle cavity of the magnetic control body 1, thereby effectively cooling the magnetic control assembly 11.

[0038] The water inlet channel 21 comprises a first connecting female head 211 and a first quick-change male head 212. The first connecting female head 211 is integrally formed with the upper cover plate 2 and is in communication with the middle cavity of the magnetic control body 1. The first quick-change male head 212 is located on the upper part of the first connecting female head 211 and is connected by threads, that is, a 3 / 8 external thread is connected to a 1 / 2 external thread to connect a 1 / 2 female head quick plug. The 1 / 2 male head quick plug is connected to a water pipe through a 1 / 2 external thread and a 1 / 2 sleeve-welded pipe and a 1 / 2 pagoda. The first connecting female head 211 and the first quick-change male head 212 can be disassembled and quickly plugged.

[0039] The water outlet channel 22 comprises a second connecting female head 221 and a second quick-change male head 222. The second connecting female head 221 is integrally formed with the upper cover plate 2 and is in communication with the middle cavity of the magnetic control body 1. The second quick-change male head 222 is located on the upper part of the second connecting female head 221 and is connected by threads, that is, a 3 / 8 sleeve is connected to a 3 / 8 external thread to connect a 3 / 8 male head quick plug. The 3 / 8 female head quick plug is connected to a water pipe through a 3 / 8 external thread and a 1 / 2 sleeve-welded pipe and a 1 / 2 pagoda. At this time, the second connecting female head 221 and the second quick-change male head 222 can be disassembled and quickly plugged.

[0040] When it is necessary to replace the magnetic control assembly 11 in the inner cavity of the magnetic control body 1, it is not necessary to disassemble separately. Water is injected through the water inlet channel 21, and water is discharged through the water outlet channel 22 to achieve overall cooling. Then, the first quick-change male head 212 is disassembled from the first connecting female head 211, and the second quick-change male head 222 is disassembled from the second connecting female head 221, that is, the magnetic control body 1 is disassembled as a whole. Then, another magnetic control body 1 with a magnetic control assembly 11 is directly connected to the first quick-change male head 212 and the second quick-change male head 222, greatly improving the convenience of replacement.

[0041] A water return channel 23 is arranged on the upper cover plate 2 and is in communication with the cavity formed in the middle of the magnetic control body 1. When the device stops running, the water return channel 23 can remove the excess water in the magnetic control body 1. A 3 / 8 external thread is connected to a 3 / 8 external thread to connect a 3 / 8 female head quick plug. The 3 / 8 male head quick plug is connected to a water pipe through a 3 / 8 external thread and a 3 / 8 sleeve-welded pipe and a 3 / 8 pagoda. The upper part of the water return channel 23 is connected to an external third quick-change head 232 through a bend piece 233.

[0042] The middle part where the positioning column 34 is located is a cavity structure penetrating through, and forms the backwater channel 23 (that is, the backwater channel 23 forms an integral whole with the positioning column 34 at this time), and a plurality of groups of water passing holes 231 are arranged at the bottom of the positioning column 34, so that the water passing holes 231 are communicated with the internal cavity where the magnetic control body 1 is located, and when the backwater channel 23 pumps water, all the accumulated water in the cavity where the magnetic control body 1 is located can be pumped out.

[0043] The design of the whole system allows water to flow into the middle cavity of the magnetic control body 1 through the water inlet channel 21, and then be discharged through the water outlet channel 22, and at the same time, the discharged water is recycled or reused through the backwater channel 23. This design helps to realize the effective circulation and temperature control of the cooling water in the magnetic sputtering process.

[0044] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. An improved water path device based on a magnetron sputtering cathode, comprising a magnetron control body (1), an upper cover plate member (2), a driving member (3), and a target material member (4), characterized in that the upper part of the magnetron control body (1) is capped by the upper cover plate member (2) to form a cylindrical mechanism with an open bottom, and a magnetron assembly (11) is accommodated in the cylindrical cavity; the target material member (4) forms a cap for the bottom of the magnetron control body (1); a driving member (3) is fixed through the upper part of the magnetron assembly (11); the top of the driving member (3) extends upward out of the upper cover plate member (2); the rotation of the driving member (3) synchronously drives the rotation of the magnetron assembly (11); a water inlet channel (21) and a water outlet channel (22) are provided on the top of the upper cover plate member (2) and are respectively communicated with the middle cavity of the magnetron control body (1) to form a convection in the water inlet channel (21) and the water outlet channel (22); the driving member (3) comprises a driving shaft (31), a driving gear member (32), a driven gear member (33), and a positioning column (34); the driving gear member (32) is in meshing transmission with the driven gear member (33); the driving shaft (31) is externally connected with a motor member and synchronously drives the rotation of the driving gear member (32) at the output end of the driving shaft (31); the driving gear member (32) is fixedly arranged at the middle part of the positioning column (34); the positioning column (34) is fixed at the connecting position of the center of the magnetron assembly (11) and synchronously drives the rotation of the magnetron assembly (11) connected with the positioning column (34) through the rotation of the driving gear member (32); the water inlet channel (21) and the water outlet channel (22) are respectively arranged on the two sides of the upper part of the upper cover plate member (2) and are centrally symmetrically arranged; a backwater channel (23) is arranged on the upper cover plate member (2) and is communicated with the cavity formed in the middle part of the magnetron control body (1); the middle part of the positioning column (34) is a through cavity structure and forms the backwater channel (23); a plurality of water passing holes (231) are arranged at the bottom of the positioning column (34) to communicate the water passing holes (231) with the internal cavity of the magnetron control body (1); the upper part of the backwater channel (23) is threadedly connected with a third quick-change head (232) through an elbow member (233); the water inlet channel (21) comprises a first connecting female head (211) and a first quick-change male head (212); the first connecting female head (211) is integrally formed with the upper cover plate member (2) and is communicated with the middle cavity of the magnetron control body (1); and the first quick-change male head (212) is threadedly connected with the upper part of the first connecting female head (211). ​ ​ ​ 2. The magnetic control sputtering based cathode water route improvement device according to claim 1, wherein, ​ ​ 3. The magnetic control sputtering based cathode water path improvement device according to claim 1, characterized in that, ​ 4. The magnetic control sputtering based cathode water path improvement device according to claim 2, characterized in that, ​ 5. The magnetic control sputtering based cathode waterway improvement device according to claim 4, characterized in that, ​ 6. The magnetic control sputtering based cathode waterway improvement device according to claim 5, characterized in that, ​ 7. The magnetic control sputtering based cathode water path improvement device according to claim 1, wherein, ​ ​ 8. The magnetic control sputtering based cathode water route improvement device according to claim 1, wherein, The water outlet channel (22) comprises a second connecting female head (221) and a second quick-change male head (222), the second connecting female head (221) is in an integral molding structure with the upper cover plate (2) and is in communication with the middle cavity where the magnetic control body (1) is located. The second quick-change male head (222) is located on the upper threaded connection of the second connecting female head (221).

9. The magnetron sputtering based cathode water path improvement device of claim 1, wherein, The lower surface of the target material piece (4) is flat.

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