Target core for magnetron sputtering

Abstract

The utility model discloses a target core for magnetron sputtering. The target core comprises a shell and end covers at the two ends of the shell, a plurality of adjusting assemblies are arranged in the shell at intervals in the length direction. A magnetic strip is further arranged in the shell and connected with a plurality of adjusting assemblies, and the height of the magnetic strip is adjusted under the action of the adjusting assemblies. Cooling chambers are symmetrically arranged on the two sides of the shell, and the target core is cooled through cooling water circularly flowing in the cooling chambers. And a sealing flange is arranged between the end cover and the shell and is used for preventing cooling water in the cooling chamber from entering. The end covers at the two ends of the target core and the sealing flanges used for sealing inside the end covers are all detachably connected, the cooling chamber and the sealing flanges are also connected in an embedded mode, and the magnetic strips and the magnetic boots in the target core can be detached for maintenance by opening the end cover and the sealing flange on any side. Compared with a traditional target core structure, the structure is more ingenious, and disassembly and maintenance are more convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to target core structure technical field, especially a target core for magnetron sputtering. BACKGROUND

[0002] The magnetron sputtering coating is a widely used coating deposition process. The sputtering coating is that inert gas is bombarded to the surface of the target material under the action of the electric field, and the molecules, atoms, ions and electrons on the surface of the target material are sputtered and deposited on the substrate to form a film.

[0003] In the coating process, the quality of the magnetron sputtering coating equipment is very high, and the magnetic field intensity distribution of the magnetron sputtering cathode is particularly important. In the coating process, the magnetic field intensity ratio of the two ends of the target material to the middle of the target material is improper, which causes the etching speed of the end area of the target material to be faster than that of the middle area of the target material, and the etching profile of the surface of the target material is uneven.

[0004] The magnetic shoe is used in the target core (also called magnetic bar) to improve the magnetic field distribution of the end position of the target core, weaken the horizontal magnetic field intensity in the etching area caused by the traditional target core structure, greatly weaken the excessive etching phenomenon of the end position of the target material, and improve the utilization rate of the target material.

[0005] When the traditional target core (magnetic bar) is maintained, the entire target core (magnetic bar) needs to be disassembled for maintenance, which leads to a complex maintenance process and a long disassembly and maintenance time. UTILITY MODEL CONTENTS

[0006] The utility model discloses a target core for magnetron sputtering, which only needs to open the end cover and sealing flange on any side to disassemble the magnetic strip and magnetic shoe in the target core for maintenance.

[0007] To solve the above technical problems, the utility model provides a target core for magnetron sputtering, which comprises a shell and end covers at both ends of the shell.

[0008] A plurality of adjusting assemblies are arranged in the shell along the length direction at intervals.

[0009] The shell is also provided with a magnetic strip, and the magnetic strip is connected with the adjusting assemblies, and the height of the magnetic strip is adjusted under the action of the adjusting assemblies.

[0010] Cooling chambers are symmetrically arranged on both sides of the shell, and the target core is cooled by the circulating cooling water in the cooling chambers.

[0011] A sealing flange is arranged between the end cover and the shell to prevent the cooling water in the cooling chamber from entering.

[0012] Preferably, the two cooling chambers are independently cooled chambers which are detachably installed on both sides of the shell through the sealing flanges, and the target core is cooled by heat exchange through the partition wall.

[0013] Preferably, water grooves are symmetrically formed on both sides of the end cover, and the two water grooves correspond to the two cooling chambers respectively, and the target core is cooled by circulating cooling water through the two water grooves.

[0014] Preferably, the cooling chamber comprises a plane contact plate and an arc-shaped extension plate, and the cooling chamber is formed by the plane contact plate and the arc-shaped extension plate which are connected to each other.

[0015] Preferably, the sealing flange is embeddedly installed in the end groove at both ends of the shell, and at least one ear block is arranged at the edge of the sealing flange, and the cooling chamber is installed on both sides of the shell through the ear block.

[0016] Preferably, a plurality of ear grooves are formed on the plane contact plate of the cooling chamber, the ear grooves correspond to the ear blocks at the edge of the sealing flange one by one, and the cooling chamber is installed on both sides of the shell through the embedding of the ear blocks and the ear grooves.

[0017] Preferably, a connecting hole is formed through the ear block, a bolt is arranged in the connecting hole, and the sealing flange and the end cover are fixedly connected through the bolt.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] The end cover at both ends of the target core and the sealing flange inside the end cover for sealing are detachably connected, and the cooling chamber and the sealing flange are also embeddedly connected, so that the magnetic strip and the magnetic shoe in the target core can be disassembled and maintained by opening any side end cover and sealing flange, and compared with the traditional target core structure, the structure is more ingenious, and disassembly and maintenance are more convenient. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is the structure schematic view of the target core for magnetron sputtering provided by the utility model;

[0021] Figure 2 is the sectional view of the target core for magnetron sputtering provided by the utility model;

[0022] Figure 3 is the side view of the target core for magnetron sputtering provided by the utility model;

[0023] Figure 4 is the connection schematic view of the sealing flange provided by the utility model;

[0024] Figure 5It is the partial structure schematic view of the cooling chamber provided by the utility model.

[0025] Figure 6 It is the layout view of the water outlet small hole provided by the utility model.

[0026] In the figure: 1, shell; 2, end cover; 201, water tank; 3, adjusting assembly; 4, magnetic stripe; 5, cooling chamber; 501, plane contact plate; 502, arc expansion plate; 503, ear groove; 504, water outlet small hole; 6, sealing flange; 601, ear block; 602, connecting hole. DETAILED DESCRIPTION

[0027] The utility model makes further detailed description in combination with the drawings and specific embodiment. According to the following description and claims, the advantages and features of the utility model will be more clear. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clear and assist the purpose of the description of the embodiment of the utility model.

[0028] In the description of the utility model, it needs to be understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, a particular orientation and operation, and therefore cannot be understood as a limitation on the utility model.

[0029] In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrally connected, can be mechanical connection, can also be electrical connection, can be directly connected, can also be indirectly connected through intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances. EMBODIMENT

[0030] The utility model provides a kind of target core for magnetron sputtering, please refer to Figure 1 And Figure 2, including the shell 1 and the end cover 2 at both ends of the shell 1; a plurality of adjusting assemblies 3 are arranged at intervals along the length direction inside the shell 1; a magnetic stripe 4 is further arranged inside the shell 1, and the magnetic stripe 4 is connected with the plurality of adjusting assemblies 3, and the height of the magnetic stripe 4 is adjusted under the action of the adjusting assemblies 3; the cooling chambers 5 are symmetrically arranged at both sides of the shell 1, and the target core is cooled by the cooling water circulating in the cooling chambers 5; the sealing flanges 6 are arranged between the end cover 2 and the shell 1, so as to block the cooling water in the cooling chambers 5.

[0031] Further, the two cooling chambers 5 are independent cooling chambers, which are detachably attached to both sides of the shell 1 through the sealing flanges 6, and the target core is cooled and cooled by heat exchange through the partition wall.

[0032] Specifically, as shown in Figure 3 , water grooves 201 are symmetrically arranged at both sides of the end cover 2, and the two water grooves 201 correspond to the two cooling chambers 5 respectively, and the target core is cooled by circulating and introducing cooling water through the two water grooves 201.

[0033] In an embodiment, the circulating cooling water enters from the water groove 201 of one end cover 2 and flows out from the water groove 201 of the other end cover 2.

[0034] In an embodiment, as shown in Figure 6 , the circulating cooling water enters from the water groove 201 of one end cover 2, and when the water groove 201 of the other end cover 2 is closed, the circulating cooling water flows out from a plurality of water outlet small holes 504 arranged along the length direction at the bottom of the cooling chamber 5.

[0035] Specifically, as shown in Figure 4 and Figure 5 , the cooling chamber 5 includes a plane contact plate 501 and an arc-shaped expansion plate 502, and the cooling chamber 5 is composed of the plane contact plate 501 and the arc-shaped expansion plate 502 connected with each other; the sealing flange 6 is embeddedly installed in the end groove at both ends of the shell 1, and at least one ear block 601 is arranged at the edge of the sealing flange 6, and the cooling chamber 5 is installed at both sides of the shell 1 through the ear block 601.

[0036] Further, a plurality of ear grooves 503 are arranged on the plane contact plate 501 of the cooling chamber 5, the ear grooves 503 correspond to the ear blocks 601 at the edge of the sealing flange 6 one by one, and the cooling chamber 5 is installed at both sides of the shell 1 through the embedding of the ear blocks 601 and the ear grooves 503.

[0037] And, a connecting hole 602 is arranged through the ear block 601, a bolt is arranged in the connecting hole 602, and the sealing flange 6 and the end cover 2 are fixedly connected through the bolt.

[0038] The end cover 2 at both ends of the target core and the sealing flange 6 for sealing inside the end cover are detachably connected, and the cooling chamber 5 and the sealing flange 6 are also embeddedly connected, and the magnetic strip and the magnetic shoe in the target core can be disassembled for maintenance by opening the end cover 2 and the sealing flange 6 on any side, and compared with the traditional target core structure, the structure is more ingenious, and disassembly and maintenance are more convenient.

[0039] The above description is only a description of the preferred embodiment of the utility model, and does not limit the scope of the utility model in any way, and any change or modification made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A target core for magnetron sputtering, characterized by, It comprises a shell (1) and end covers (2) at both ends of the shell (1); A plurality of adjusting assemblies (3) are arranged at intervals along the length direction inside the shell (1); A magnetic strip (4) is further arranged inside the shell (1) and connected with the plurality of adjusting assemblies (3), and the height of the magnetic strip (4) is adjusted under the action of the adjusting assemblies (3); Cooling chambers (5) are symmetrically arranged at both sides of the shell (1), and the target core is cooled by the cooling water circulating in the cooling chambers (5); A sealing flange (6) is arranged between the end cover (2) and the shell (1) to prevent the cooling water in the cooling chamber (5) from entering.

2. A target core for magnetron sputtering as claimed in claim 1, characterized in that Both of the cooling chambers (5) are independent cooling chambers which are detachably attached to both sides of the shell (1) through the sealing flange (6) and cooled by the heat exchange through the partition wall.

3. A target core for magnetron sputtering as claimed in claim 2, wherein Water grooves (201) are symmetrically arranged on both sides of the end cover (2), and the two water grooves (201) correspond to the two cooling chambers (5) respectively, and the target core is cooled by the cooling water circulating in the two water grooves (201).

4. A target core for magnetron sputtering as defined in claim 2, wherein The cooling chamber (5) comprises a plane contact plate (501) and an arc-shaped expansion plate (502), and the cooling chamber (5) is composed of the plane contact plate (501) and the arc-shaped expansion plate (502) connected with each other.

5. A target core for magnetron sputtering as claimed in claim 4, wherein The sealing flange (6) is embeddedly installed in the end groove at both ends of the shell (1), and at least one ear block (601) is arranged at the edge of the sealing flange (6), and the cooling chamber (5) is installed at both sides of the shell (1) through the ear block (601).

6. A target core for magnetron sputtering as claimed in claim 5, characterized in that A plurality of ear grooves (503) are arranged on the plane contact plate (501) of the cooling chamber (5), and the ear grooves (503) correspond to the ear blocks (601) at the edge of the sealing flange (6) one by one, and the cooling chamber (5) is installed at both sides of the shell (1) through the embedding of the ear block (601) and the ear groove (503).

7. A target core for magnetron sputtering as defined in claim 5, wherein A connecting hole (602) is arranged through the ear block (601), a bolt is arranged in the connecting hole (602), and the sealing flange (6) and the end cover (2) are fixedly connected through the bolt.

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