High-energy ion magnetic control cathode device

Abstract

The utility model discloses a high-energy ion magnetic control cathode device, which belongs to the technical field of magnetron sputtering devices, is assembled in a vacuum cavity and comprises a cathode shell, a magnet, a target material and a cathode component, the cathode component is provided with an opening, the target material is arranged at the opening of the cathode shell, the magnet is arranged in the cathode shell, and the magnet is arranged in the cathode shell. The cathode assembly is arranged on the cathode shell and is used for being connected with a power supply; the magnet comprises an annular magnet located above the edge of the target material and a magnetic field segmentation magnet arranged within the surrounding range of the annular magnet, so that a non-equilibrium magnetic field is formed in the cathode device. According to the scheme, the annular magnet and the magnetic field segmentation magnet are arranged in a matched mode, so that the interior of the cathode assembly is in a non-equilibrium magnetic field state, and consumption of the target material is more uniform.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum magnetron sputtering device technical field, especially, relate to a kind of high-energy ion magnetron cathode device. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition (PVD). General sputtering method can be used to prepare metal, semiconductor, insulator and other multi-materials, and has the advantages of simple equipment, easy control, large plating area and strong adhesion.

[0003] The main working part of the existing magnetron sputtering equipment is the cathode device, which usually includes target material, magnet and cathode assembly. The magnet is usually placed at the center position above the target material. The cathode device under this setting will be preferentially broken down at the edge of the target material due to the strong magnetic field near the magnet, resulting in low utilization of the target material. Therefore, a new scheme is needed to solve the above problems. SUMMARY

[0004] The utility model aims at providing a kind of high-energy ion magnetron cathode device to solve the problems raised in the above background.

[0005] To achieve the above object, the utility model employs one technical scheme: a kind of high-energy ion magnetron cathode device, assembled in vacuum cavity, including cathode shell, magnet, target material and cathode assembly, the cathode assembly exists opening, the target material is placed at the opening of cathode shell, the magnet is arranged in cathode shell, and the cathode assembly is arranged in cathode shell and used to be connected with power supply.

[0006] The magnet includes a ring-shaped magnet above the edge of the target material and a magnetic field dividing magnet within the ring-shaped magnet's surrounding range, so as to form a non-equilibrium magnetic field in the cathode device.

[0007] Preferably, an electromagnetic coil is arranged on the cathode shell, the electromagnetic coil is consistent with the magnetic field direction of the magnet, and the target material, magnet and electromagnetic coil are sequentially arranged in the front-rear direction.

[0008] Preferably, a liquid cooling assembly is arranged between the magnet and the target material, and the liquid cooling assembly includes a one-way flow channel cavity, an inlet pipe and an outlet pipe connected with the one-way flow channel cavity and arranged at both ends of the one-way flow channel cavity, respectively.

[0009] Preferably, the magnet is arranged in a sealed shell, and a fixing module is arranged on the cathode shell, the fixing module comprising a pressing member, a tightening member and a fixing member, the pressing member being capable of pressing against one end of the sealed shell to tightly fit the sealed shell, the one-way flow channel cavity and the target material, the tightening member being capable of adjusting the pressing force of the pressing member on the sealed shell, and the fixing member being capable of fixing the position of the pressing member.

[0010] Preferably, a wire slot is arranged on the cathode shell, and the electromagnetic coil is arranged in the wire slot.

[0011] Preferably, a fixing frame is arranged on the cathode shell, and the wire slot is arranged on the fixing frame, and a liquid cooling copper pipe is arranged on the fixing frame.

[0012] Preferably, a closed stepped limiting lap joint block, a pad block and a connecting block are arranged in the cathode shell, the target material is lapped on the lower stepped surface of the limiting lap joint block, the pad block is lapped on the lap joint block, the one-way flow channel cavity is lapped on the lap joint block, the one-way flow channel cavity is gap-fitted with the target material, and the pressing member is used to press the one-way flow channel cavity against the pad block.

[0013] Preferably, the annular magnet and the magnetic field division magnet are respectively spliced by a plurality of magnetic blocks.

[0014] Preferably, the annular magnet is rectangular.

[0015] The cathode assembly is in a non-uniform magnetic field state, and the consumption of the target material is more uniform.

[0016] The composite magnetic field formed by the electromagnetic coil and the magnet ensures that the target material particle sputtering is more delicate.

[0017] The liquid cooling assembly can effectively prolong the service life of the cathode device.

[0018] The liquid cooling copper pipe can cool the connecting frame, and further prolong the service life of the cathode device. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a schematic diagram of the mechanism of the utility model;

[0020] Figure 2 is Figure 1 a sectional view in the A-A direction;

[0021] Figure 3 is Figure 1 a sectional view in the B-B direction;

[0022] Figure 4It is the fixed module structure schematic view of the utility model;

[0023] Figure 5 It is the internal structure schematic view of one-way flow channel cavity in the utility model;

[0024] Figure 6 It is the internal structure schematic view of sealing shell in the utility model;

[0025] In the drawing: 1, cathode shell;2, annular magnet;3, magnetic field segmentation magnet;4, target material;5, wire slot;6, fixed frame;7, placing groove;8, sealing shell;81, sealing upper buckle plate;82, sealing lower buckle plate;9, one-way flow channel cavity;91, liquid cooling cavity upper buckle plate;92, liquid cooling cavity lower buckle plate;10, abutting piece;11, tight adjusting piece;12, fixing piece;13, liquid inlet pipe;14, liquid outlet pipe;15, cathode assembly. DETAILED DESCRIPTION

[0026] The preferred embodiments of the utility model are described in detail below with reference to the drawings, so that the advantages and features of the utility model can be more easily understood by those skilled in the art, and the protection scope of the utility model can be more clearly and explicitly defined.

[0027] Embodiment:

[0028] Referring to Figure 1 , Figure 6 , a high-energy ion magnetron cathode device is assembled in a vacuum cavity, comprising a cathode shell 1, a magnet, a target material 4 and a cathode assembly 15, the cathode shell 1 is a tubular body with two open ends, the target material 4 is placed at one side opening of the cathode shell 1, the magnet is arranged in the cathode shell 1, and the cathode assembly 15 is arranged in the cathode shell 1 and used for being connected with a power supply;The magnet comprises an annular magnet 2 located above the edge of the target material 4 and a magnetic field segmentation magnet 3 located within the annular magnet 2, so that a non-equilibrium magnetic field is formed in the cathode device.

[0029] Among them, referring to Figure 2 , the cathode shell 1 is provided with a fixed frame 6, the cathode shell 1 is provided with a wire slot 5, the wire slot 5 is provided with an electromagnetic coil, the electromagnetic coil is consistent with the magnetic field direction of the magnet, and the target material 4, the magnet and the electromagnetic coil are sequentially arranged in the front-rear direction.

[0030] Among them, the wire slot 5 is arranged on the fixed frame 6, the fixed frame 6 is annular block, the placing groove 7 is arranged in the surface of the fixed frame 6, and the liquid cooling copper pipe is arranged in the placing groove 7.

[0031] The cathode shell 1 is provided with an electromagnetic coil, the electromagnetic coil is consistent with the magnetic field direction of the magnet, and the target material 4, the magnet and the electromagnetic coil are sequentially arranged in the front-rear direction.

[0032] Wherein, refer to Figure 3 、 Figure 5 , the magnet and target 4 are provided with a liquid cooling assembly, the liquid cooling assembly includes a liquid cooling cavity upper buckle plate 91 and a liquid cooling cavity lower buckle plate 92, the liquid cooling cavity upper buckle plate 91 and the liquid cooling cavity lower buckle plate 92 form a one-way flow channel cavity 9, the liquid cooling cavity upper buckle plate 91 is inserted with an inlet pipe 13 and an outlet pipe 14 which are respectively arranged at both ends of the one-way flow channel cavity 9 and communicate with the one-way flow channel cavity 9.

[0033] Wherein, refer to Figure 4 、 Figure 6 , the magnet is arranged in a sealed shell 8, the sealed shell 8 is formed by buckling a sealed upper buckle plate 81 and a sealed lower buckle plate 82, and a fixing module is arranged on the cathode shell 1, the fixing module includes a pressing member, a tightening member 11 and a fixing member 12, one end of the pressing member can be pressed against the sealed shell 8 to make the sealed shell 8, the one-way flow channel cavity 9 and the target 4 tightly fit, the tightening member 11 can adjust the pressing force applied by the pressing member to the sealed shell 8, and the fixing member 12 is used to fix the position of the pressing member, in the embodiment, the pressing member is a long bolt, the end of the long bolt at the low pressure is smooth, an abutting hole (not shown) for positioning is formed on the sealed upper buckle plate 81, the tightening member 11 is a long strip-shaped block fixed on the cathode shell 1 and provided with a threaded hole, the pressing member is threadedly connected with the threaded hole of the tightening member 11 to adjust the extension length of the pressing member, meanwhile, two pressing members are arranged on one tightening member 11, and the two pressing members are fixed by thread connection after the pressing action is completed, so that the loosening of the pressing member can be avoided, and at least two groups of fixing modules are arranged on the cathode shell 1.

[0034] Wherein, the cathode shell 1 is provided with a closed stepped limiting lap block, a pad block and a connecting block, the target 4 is lapped on the lower stepped surface of the limiting lap block, the pad block is lapped on the lap block, the one-way flow channel cavity 9 is lapped on the lap block, the one-way flow channel cavity 9 is gap-fitted with the target 4, and the pressing member 10 is used to press the one-way flow channel cavity 9 against the pad block, the lap block, the pad block and the connecting block can be fixed together by bolts.

[0035] Wherein, the annular magnet 2 and the magnetic field dividing magnet 3 are respectively spliced by a plurality of magnetic blocks.

[0036] Wherein, the annular magnet 2 is rectangular, and the magnetic field dividing magnet 3 is in the shape of “|” or I.

[0037] Working principle and process:

[0038] In use, the scheme is characterized in that the annular magnet 2 and the magnetic field segmentation magnet 3 are cooperatively arranged to make the cathode assembly 15 in a non-uniform magnetic field state, so that the consumption of the target material 4 is more uniform, and meanwhile, the composite magnetic field formed by the electromagnetic coil and the magnet ensures that the sputtering of the target material 4 particles is more delicate.

[0039] The above is only an embodiment of the present application, and does not limit the patent range of the present application, and any equivalent structural transformation or direct or indirect application in other related technical fields by using the content of the present application specification and drawings is also included in the patent protection range of the present application.

Claims

1. A high-energy ion magnetron cathode device, assembled in a vacuum chamber, characterized in that: The cathode device comprises a cathode shell (1), a magnet, a target material (4) and a cathode assembly (15), the cathode shell (1) has an opening, the target material (4) is arranged at the opening of the cathode shell (1), the magnet is arranged in the cathode shell (1), and the cathode assembly (15) is arranged in the cathode shell (1) and is connected with a power supply. The magnet comprises a ring-shaped magnet (2) arranged above the edge of the target material (4) and a magnetic field segmentation magnet (3) arranged in the range surrounded by the ring-shaped magnet (2), so that a non-equilibrium magnetic field is formed in the cathode device.

2. A high-energy ion magnetron cathode device according to claim 1, characterized in that: An electromagnetic coil is arranged on the cathode shell (1), the electromagnetic coil is consistent with the direction of the magnetic field of the magnet, and the target material (4), the magnet and the electromagnetic coil are sequentially arranged in the front-rear direction.

3. The high-energy ion magnetron cathode device of claim 1, wherein: A liquid cooling assembly is arranged between the magnet and the target material (4), and the liquid cooling assembly comprises a one-way flow channel cavity (9), an inlet pipe (13) and an outlet pipe (14) which are respectively arranged at two ends of a flow channel of the one-way flow channel cavity (9) and are in communication with the one-way flow channel cavity (9).

4. A high-energy ion magnetron cathode device according to claim 3, characterized in that: The magnet is arranged in a sealed shell (8), a fixing module is arranged on the cathode shell (1), the fixing module comprises a pressing part (10), an adjusting part (11) and a fixing part (12), one end of the pressing part (10) is pressed against the sealed shell (8) so that the sealed shell (8), the one-way flow channel cavity (9) and the target material (4) are tightly attached to each other, the adjusting part (11) can adjust the pressing force applied by the pressing part (10) to the sealed shell (8), and the fixing part (12) is used for fixing the position of the pressing part (10).

5. A high-energy ion magnetron cathode device according to claim 2, characterized in that: A wire slot (5) is arranged on the cathode shell (1), and the electromagnetic coil is arranged in the wire slot (5).

6. A high-energy ion magnetron cathode device according to claim 5, characterized in that: A fixing frame (6) is arranged on the cathode shell (1), the wire slot (5) is arranged on the fixing frame (6), and a liquid cooling copper pipe is arranged on the fixing frame (6).

7. A high-energy ion magnetron cathode device according to claim 4, characterized in that: A limiting lap joint block with a closed ladder, a cushion block and a connecting block are arranged in the cathode shell (1), the target material (4) is lapped on the lower ladder surface of the limiting lap joint block, the cushion block is lapped on the lap joint block, the one-way flow channel cavity (9) is lapped on the lap joint block, the one-way flow channel cavity (9) is gap-fitted with the target material (4), and the pressing part (10) is used for pressing the one-way flow channel cavity (9) against the cushion block.

8. The high-energy ion magnetron cathode device of claim 1, wherein: The ring-shaped magnet (2) and the magnetic field segmentation magnet (3) are respectively spliced by a plurality of magnetic blocks.

9. The high-energy ion magnetron cathode device of claim 1, wherein: The ring-shaped magnet (2) is in the shape of a rectangle.

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