Vacuum molecular pump pumping speed regulator

Abstract

The utility model discloses a pumping speed regulator of a vacuum molecular pump, which belongs to the technical field of vacuum molecular pumps and comprises a first fixing plate, a first baffle is fixedly connected to the side edge of the first fixing plate, and a limiting ring is rotatably connected to the lower side of the first baffle. A second baffle used for adjusting the pumping speed of the vacuum molecular pump is fixedly connected to the side, away from the first baffle, of the limiting ring, a first rotating shaft rotationally connected with the first baffle is fixedly connected to the upper side of the second baffle, and a second rotating shaft is clamped to the upper side of the first rotating shaft; in the using process of the device, the rotary knob is rotated to drive the second rotating shaft, the first rotating shaft and the second baffle to rotate, the size of a baffle formed by combining the second baffle and the first baffle is adjusted, and the size of an air suction opening is adjusted; therefore, the speed of the gas entering the pump body is changed, and the pumping speed of the vacuum molecular pump is adjusted.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum molecular pump technical field especially a kind of vacuum molecular pump pumping speed regulator. BACKGROUND

[0002] The pumping mechanism of molecular pump is different from the mechanism of volumetric mechanical pump, which relies on the volume change of pump cavity to pump air. Molecular pump relies on the momentum transmitted to gas molecules by the surface of high-speed moving rigid body in the molecular flow region, so that the gas molecules produce directional flow in the direction of the rigid body surface, thereby achieving the purpose of pumping. The phenomenon of carrying gas molecules by the surface of high-speed moving rigid body and making them move in a certain direction is called molecular drag phenomenon.

[0003] The current vacuum molecular pump pumping speed regulator adjusts the pumping speed of vacuum molecular pump by adjusting the speed of rotor. Continuous adjustment may cause the reduction of rotor life and damage, resulting in increased cost and quality, and replacement difficulty.

[0004] Therefore, in view of the above situation, it is urgent to design and produce a vacuum molecular pump pumping speed regulator to meet the needs of actual use. INVENTION CONTENTS

[0005] The utility model aims at providing a kind of vacuum molecular pump pumping speed regulator to solve the problems raised in the background art.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of vacuum molecular pump pumping speed regulator, including the first fixed plate, the side of the first fixed plate is fixedly connected with the first baffle, the lower side of the first baffle is rotatably connected with the limit ring, the side of the limit ring away from the first baffle is fixedly connected with the second baffle for the pumping speed regulation of vacuum molecular pump, the upper side of the second baffle is fixedly connected with the first rotating shaft rotatably connected with the first baffle, the upper side of the first rotating shaft is clamped with the second rotating shaft, the end of the second rotating shaft away from the first rotating shaft is fixedly connected with knob, the upper side of the first fixed plate is provided with the second fixed plate.

[0007] Preferably, the upper side of the second fixed plate is screwed with a fixing bolt for fixing the second fixed plate and the first fixed plate, and the upper side of the second fixed plate is provided with a sliding rail.

[0008] Preferably, the side of the sliding rail is slidably connected with a moving frame for auxiliary pumping speed regulation of vacuum molecular pump, and the side of the moving frame is connected with a shielding cloth connected with the sliding rail.

[0009] Preferably, the side of the shielding cloth is connected with a skeleton slidably connected with the sliding rail, and the side of the moving frame is provided with a magnetic block.

[0010] Preferably, the side of the slide rail is provided with a limiting plate connected with the second fixed plate, and the side of the second fixed plate is provided with a filter plate sleeved with the knob.

[0011] Preferably, the lower side of the first fixed plate is provided with a pump body for composing a vacuum molecular pump, and the upper side of the pump body is provided with an air suction port.

[0012] Preferably, the lower side of the pump body is provided with an air exhaust port, and the inside of the pump body is provided with a protective net.

[0013] Compared with the prior art, the technical effects and advantages of the utility model are as follows:

[0014] The vacuum molecular pump suction speed regulator adjusts the size of the combined baffle between the second baffle and the first baffle by rotating the knob to drive the second rotating shaft, the first rotating shaft and the second baffle to rotate, adjusts the size of the air suction port, changes the speed of the gas entering the pump body, and realizes the adjustment of the suction speed of the vacuum molecular pump.

[0015] The size of the air suction port is adjusted by moving the moving frame to drive the skeleton and the shielding cloth to move, and the suction speed of the vacuum molecular pump is adjusted. DRAWINGS

[0016] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0017] Fig. 1 It is a structural schematic view of the utility model;

[0018] Fig. 2 It is a structural schematic view of the first baffle of the utility model;

[0019] Fig. 3 It is a structural schematic view of the second baffle of the utility model.

[0020] Explanation of reference signs:

[0021] In the figure: 1, pump body; 2, exhaust port; 3, first fixed plate; 4, first baffle; 5, first rotating shaft; 6, second baffle; 7, protective net; 8, second fixed plate; 9, sliding rail; 10, limiting plate; 11, filter plate; 12, magnetic suction block; 13, moving frame; 14, skeleton; 15, shielding cloth; 16, air inlet; 17, limiting ring; 18, second rotating shaft; 19, knob; 20, fixing bolt. DETAILED DESCRIPTION

[0022] In the following description, a large number of specific details are given to provide a more thorough understanding of the present application. However, it is apparent to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, some technical features known in the art are not described to avoid obscuring the present application.

[0023] Unless the direction indicated by the definition is separately indicated, the directions such as up, down, left, right, front, back, inside and outside involved in the present application are based on the directions such as up, down, left, right, front, back, inside and outside in the drawings shown in the present application, which are explained herein.

[0024] The connection mode can adopt existing modes such as bonding, welding, bolt connection, etc., and the actual needs are accurate.

[0025] In order to solve the problem that adjusting the rotor speed for adjusting the vacuum molecular pump suction speed may continuously adjust, which may cause the rotor life to be reduced and damaged with a probability, resulting in increased cost and quality, and the replacement is not easy, such as Figs. 1 to 3The vacuum molecular pump speed regulator shown includes a first fixed plate 3, the side of the first fixed plate 3 is fixedly connected with a first baffle 4, the lower side of the first baffle 4 is rotatably connected with a limiting ring 17, the side of the limiting ring 17 away from the first baffle 4 is fixedly connected with a second baffle 6 for vacuum molecular pump speed adjustment, the upper side of the second baffle 6 is fixedly connected with a first rotating shaft 5 rotatably connected with the first baffle 4, the rotating connection between the first baffle 4 and the first rotating shaft 5 is provided with a rubber pad, which provides friction for the rotation of the second baffle 6, so that the second baffle 6 can only be rotated by manpower and cannot be naturally rotated, the upper side of the first rotating shaft 5 is clamped with a second rotating shaft 18, one end of the second rotating shaft 18 away from the first rotating shaft 5 is fixedly connected with a knob 19, the upper side of the first fixed plate 3 is provided with a second fixed plate 8, the upper side of the second fixed plate 8 is screwed with a fixing bolt 20 for fixing the second fixed plate 8 and the first fixed plate 3, the upper side of the second fixed plate 8 is provided with a sliding rail 9, the sliding groove of the sliding rail 9 is provided with a rubber pad, which provides friction for the sliding of the moving frame 13 and the skeleton 14, so that the moving frame 13 and the skeleton 14 can only be moved by manpower and cannot be naturally moved, the side of the sliding rail 9 is slidably connected with a moving frame 13 for assisting the vacuum molecular pump speed adjustment, the side of the moving frame 13 is connected with a shielding cloth 15 connected with the sliding rail 9, the side of the shielding cloth 15 is connected with a skeleton 14 slidably connected with the sliding rail 9, the side of the shielding cloth 15 is provided with a sliding block, which facilitates the sliding connection with the sliding rail 9, and the side of the moving frame 13 is provided with a magnetic block 12.

[0026] The side of the sliding rail 9 is provided with a limiting plate 10 connected with the second fixed plate 8, the side of the limiting plate 10 is provided with a magnetic block 12, which facilitates the fixing of the moving frame 13, the side of the second fixed plate 8 is provided with a filter plate 11 sleeved with the knob 19, the filter plate 11 is provided with a groove, which facilitates the sleeving with the knob 19, the first fixed plate 3 and the second fixed plate 6 are provided with threaded holes, which facilitate the screwing with the fixing bolt 20, the filter plate 11 and the protective net 7 can be detached and replaced, the lower side of the first fixed plate 3 is provided with a pump body 1 for composing a vacuum molecular pump, the upper side of the pump body 1 is provided with an air inlet 16, the lower side of the pump body 1 is provided with an air outlet 2, and the inside of the pump body 1 is provided with a protective net 7.

[0027] All structures are heat-resistant and waterproof, and the instruments are heat-resistant and waterproof.

[0028] Working principle

[0029] The vacuum molecular pump speed regulator, in use, rotates the knob 19 to drive the second rotating shaft 18 to rotate, drives the first rotating shaft 5 to rotate through the rotation of the second rotating shaft 18, drives the second baffle 6 to move through the rotation of the first rotating shaft 5, adjusts the size of the suction port 16 through the combination between the second baffle 6 and the first baffle 4, pulls the moving frame 13 to drive the shielding cloth 15 to move, drives the framework 14 to move through the movement of the shielding cloth 15, supports the shielding cloth 15, adjusts the size of the suction port 16 through the size of the shielding cloth 15.

[0030] Finally, it should be noted that: first, in the description of the present application, it should be pointed out that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, which can be mechanical connection or electrical connection, or the communication between two elements, or direct connection, "up", "down", "left", "right" and the like are only used to indicate the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change;

[0031] Secondly: the utility model discloses the embodiment of the drawings, only relate to the structure involved in the embodiment of the present disclosure, other structures can refer to the usual design, under the condition of no conflict, the same embodiment and different embodiments of the utility model can be combined with each other;

[0032] Finally: the above only for the preferred embodiment of the utility model has, and does not limit the utility model, any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model, should be included in the protection scope of the utility model.

Claims

1. A vacuum molecular pump speed regulator comprising a first fixed plate (3), characterized in that: The side of the first fixed plate (3) is fixedly connected with a first baffle (4), the lower side of the first baffle (4) is rotatably connected with a limiting ring (17), the side, away from the first baffle (4), of the limiting ring (17) is fixedly connected with a second baffle (6) for adjusting the pumping speed of a vacuum molecular pump, the upper side of the second baffle (6) is fixedly connected with a first rotating shaft (5) rotatably connected with the first baffle (4), the upper side of the first rotating shaft (5) is clamped with a second rotating shaft (18), one end of the second rotating shaft (18), away from the first rotating shaft (5), is fixedly connected with a knob (19), and the upper side of the first fixed plate (3) is provided with a second fixed plate (8).

2. A vacuum molecular drag speed regulator according to claim 1, characterized in that: The upper side of the second fixed plate (8) is screwed with a fixing bolt (20) for fixing the second fixed plate (8) and the first fixed plate (3), and the upper side of the second fixed plate (8) is mounted with a sliding rail (9).

3. A vacuum molecular drag speed regulator according to claim 2, characterized in that: The side of the sliding rail (9) is slidably connected with a moving frame (13) for assisting in adjusting the pumping speed of a vacuum molecular pump, and the side of the moving frame (13) is connected with a shielding cloth (15) connected with the sliding rail (9).

4. A vacuum molecular drag speed regulator according to claim 3, characterized in that: The side of the shielding cloth (15) is connected with a framework (14) slidably connected with the sliding rail (9), and the side of the moving frame (13) is mounted with a magnetic block (12).

5. A vacuum molecular drag speed regulator according to claim 4, characterized in that: The side of the sliding rail (9) is mounted with a limiting plate (10) connected with the second fixed plate (8), and the side of the second fixed plate (8) is mounted with a filter plate (11) sleeved with the knob (19).

6. A vacuum molecular drag speed regulator according to claim 5, characterized in that: The lower side of the first fixed plate (3) is mounted with a pump body (1) for composing a vacuum molecular pump, and the upper side of the pump body (1) is provided with an air inlet (16).

7. A vacuum molecular drag speed regulator according to claim 6, characterized in that: The lower side of the pump body (1) is provided with an air outlet (2), and the inside of the pump body (1) is mounted with a protective net (7).

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