Pipe body connecting structure, coaxial sleeve structure and plasma source

Abstract

The utility model belongs to the field of connecting pieces, and particularly relates to a pipe body connecting structure, a coaxial sleeve structure and a plasma source, and the pipe body connecting structure comprises a connector, a compactor and a connecting assembly; the connector comprises a barrel I and a limiting ring arranged in the barrel I; the compactor comprises a barrel II with openings in the two ends, the outer wall of the barrel II is arranged on the inner wall of the barrel I in a sliding mode, a limiting part is formed at the end, inserted into the barrel I, of the barrel II, the compactor further comprises a locking structure used for locking the relative positions of the barrel I and the barrel II, and a limiting ring, the barrel I and the limiting part define a connecting assembly containing space I; the connecting assembly comprises at least two sealing rings arranged in the connecting assembly containing space I and sliding extrusion rings arranged between every two sealing rings. The inner wall of the cylinder II, the inner wall of the sliding extrusion ring and the inner wall of the limiting ring are spaced from the outer wall of the pipe body. The pipe body connecting structure can be used for carrying out lossless, rapid and reliable sealing connection on the pipe body.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of connecting piece, specifically relates to a pipe body connecting structure, coaxial sleeve structure and plasma source. BACKGROUND

[0002] For the thin-walled pipe, brittle material pipe or pipe body with special coating / plating layer: the threaded connection is easy to cause the pipe body to break or the thread to be damaged due to stress concentration;The high-temperature thermal stress of welding is extremely easy to cause the thin-walled pipe or brittle pipe to deform and crack, and can destroy the surface coating;The sleeve type connection relies on the sharp cutting edge to bite into the pipe wall to realize sealing and fixing, although the connection strength is higher, but can cause permanent indentation or even scratch on the pipe body surface, not only affect the pipe body strength, but also destroy its corrosion resistance, and is unacceptable under the application requirement of requiring smooth and non-damaged pipe wall.Therefore, a new type of pipe body connecting structure is urgently needed, which can realize non-destructive, rapid and reliable sealing connection of the pipe body. SUMMARY

[0003] The utility model solves the technical problem to provide a pipe body connecting structure, coaxial sleeve structure and plasma source that can non-destructively, rapidly and reliably seal and connect the pipe body.

[0004] The utility model provides a pipe body connecting structure, including connector, pressure closer and connecting assembly;

[0005] The connector includes the cylinder body I and the limiting ring arranged in the cylinder body I;

[0006] The pressure closer includes the cylinder body II with two open ends, the outer wall of the cylinder body II is arranged on the inner wall of the cylinder body I in sliding mode, and the one end of the cylinder body II inserted into the cylinder body I forms the limiting part, further includes the locking structure for locking the relative position of the cylinder body I and the cylinder body II, the limiting ring side wall, the inner wall of the cylinder body I and the limiting part side wall form the connecting assembly containing space I in the surrounding;

[0007] The connecting assembly includes at least two sealing rings arranged in the connecting assembly containing space I and the sliding extrusion ring arranged between every two sealing rings;

[0008] The inner wall of the cylinder body II, the inner wall of the sliding extrusion ring and the inner wall of the limiting ring have interval with the outer wall of the pipe body;

[0009] When the cylinder body II is moved to make the limiting part close to the limiting ring, the both sides space of connecting assembly containing space I is tightened and extruded connecting assembly, the sealing ring and the sliding extrusion ring extrude each other, make the sealing ring deforms along the pipe body axial direction, and the inner wall of the sealing ring is tightly matched with the pipe body.

[0010] Further, the locking structure is an external thread arranged on the outer wall of the barrel I and an internal thread arranged on the inner wall of the barrel II.

[0011] Further, the locking structure is a flange plate I arranged on the opening side of the barrel I and a flange plate II arranged on the barrel II at the opening side of the barrel I, and the locking structure further comprises a detachable connecting structure connecting the flange plate I and the flange plate II.

[0012] Further, the side wall of the limiting ring, the sliding extrusion ring and the limiting part is a slope, and the slopes on both sides of the sealing ring form a tapered structure with a small gap on the side close to the inner wall of the barrel I and a large gap on the side close to the outer wall of the barrel I.

[0013] Further, the outer wall of the sliding extrusion ring is gap-fitted with the inner wall of the barrel I.

[0014] The utility model also provides a coaxial sleeve structure, including two groups of pipe body connecting structure, one group of pipe body connecting structure's barrel I and another pipe body connecting structure's barrel II are connected with each other, and the pipe body includes an inner tube and an outer tube, one pipe body connecting structure is connected with the inner tube, and the other pipe body connecting structure is connected with the outer tube.

[0015] Further, the end face of the outer tube has a spacing with the opposite limiting ring.

[0016] Further, the inner wall of the outer tube and the outer wall of the inner tube form a flow channel, and a communication pipe for communicating the spacing and the flow channel is arranged on the side wall of the barrel I.

[0017] The utility model also provides a coaxial sleeve structure, including two groups of pipe body connecting structure, one group of pipe body connecting structure's barrel I and another pipe body connecting structure's barrel II are connected with each other, and the pipe body includes an inner tube and an outer tube, one pipe body connecting structure is connected with the inner tube, and the other pipe body connecting structure is connected with the outer tube.

[0018] One end of the inner tube of the coaxial sleeve structure is used for connecting a gas supply device, and the other end is used for connecting a vacuum chamber.

[0019] One communication pipe is used for inputting cooling medium into the flow channel, and the other communication pipe is used for outputting the cooling medium in the flow channel.

[0020] Further, the utility model also provides a plasma source, including the coaxial sleeve structure.

[0021] The utility model discloses a pipe body connecting structure, and the whole pipe body connecting structure is fixedly attached on the pipe body through two sealing rings, can realize the installation of pipe body without damage, and the sealing ring is elastically compressed, not through the sharp blade mouth to bite into the pipe wall or through the hard sleeve to extrude and close, so that the connecting structure does not cause any scratch or permanent deformation on the surface of the pipe body. This makes it perfect for thin-walled pipes, or pipes with plating or anticorrosive layer, and maintains the integrity and corrosion resistance of the pipe body.

[0022] At least two sealing rings not only form a multi-stage seal but also automatically guide the pipe body to a centered position during the sealing ring compression process. This double-ring design effectively corrects the initial installation eccentricity of the pipe body, ensuring that the pipe body axis coincides with the axis of the pipe body connection structure. This allows each sealing ring to uniformly and concentrically wrap around the pipe body, avoiding one-sided wear and incomplete sealing caused by eccentricity, and significantly improving the concentricity and sealing reliability of the connection. At this time, each sealing ring is independently and uniformly axially compressed and radially expanded, forming multiple tight sealing contact surfaces with the outer wall of the pipe body. This greatly enhances the sealing reliability; even if a single sealing ring has a minor defect, the other sealing rings can still effectively prevent media leakage, making it particularly suitable for high-pressure, pulsed, or vibrating conditions.

[0023] The double sealing rings also ensure that the axis of the pipe body coincides with the axis of the pipe body connection structure.

[0024] Moreover, the entire pipe connection structure is highly efficient to install. The entire connection process only requires inserting the pipe into place, then moving the clamp axially and locking it to complete the sealing and locking. There is no need for welding, brazing, thread cutting, or the use of large torque wrenches and other professional tools, which greatly simplifies the operation process and reduces the technical requirements for operators. It is especially suitable for rapid installation in confined spaces or on-site. Attached Figure Description

[0025] Appendix Figure 1 This is a schematic diagram of the self-cooled plasma source device in this utility model;

[0026] Appendix Figure 2 This is a front view of the self-cooled plasma source device of this utility model;

[0027] Appendix Figure 3 For the appendix Figure 2 Sectional view along line AA;

[0028] Appendix Figure 4 For the appendix Figure 3 A magnified view of a section at point B in the middle;

[0029] Appendix Figure 5 For the appendix Figure 3 A magnified view of a section at point C.

[0030] In the figure, 1-connector; 11-cylinder I; 111-flange I; 12-limiting ring; 2-clamping device; 21-cylinder II; 211-flange II; 22-limiting part; 3-connecting assembly; 31-sealing ring; 32-sliding compression ring; 4-pipe body; 41-inner pipe; 42-outer pipe; 43-flow channel; 5-gas connection; 6-electromagnetic coil radio frequency ionization device; 7-flange; 8-connecting pipe. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of the present application.

[0032] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), and if the specific posture changes, the directional indications also change accordingly.

[0033] In addition, the description of "first", "second" and the like in the present application is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0034] In the present application, unless otherwise specifically defined and limited, the terms "connection", "fixing" and the like should be understood broadly, for example, "fixing" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection, or physical connection or wireless communication connection; can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In addition, the technical solutions of each embodiment of the present application can be combined with each other, but it must be based on the fact that those skilled in the art can realize it, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the scope of protection required by the present application.

[0036] As shown in the accompanying drawings, the present application provides a pipe body connecting structure, referring to the accompanying drawings, Figure 1 As shown in the accompanying drawings, the present application provides a pipe body connecting structure, referring to the accompanying drawings, Figure 5 The pipe body connecting structure comprises a connector 1, a presser 2 and a connecting assembly 3. Figure 5

[0037] ​The connector 1 comprises a barrel Ⅰ 11 and a limiting ring 12 arranged in the barrel Ⅰ 11, preferably, the limiting ring 12 is arranged at one side of the barrel Ⅰ 11;

[0038] The pressing device 2 comprises a barrel Ⅱ 21 with two open ends, the outer wall of the barrel Ⅱ 21 is slidably arranged on the inner wall of the barrel Ⅰ 11, and the barrel Ⅱ 21 is inserted into one end of the barrel Ⅰ 11 to form a limiting part 22, further comprising a locking structure for locking the relative position of the barrel Ⅰ 11 and the barrel Ⅱ 21, the side wall of the limiting ring 12, the inner wall of the barrel Ⅰ 11 and the side wall of the limiting part 22 form a connecting assembly accommodating space Ⅰ, and the inner wall of the connecting assembly accommodating space Ⅰ is an open space for sealing and fixedly connecting the sealing ring 31 in the connecting assembly 3 and the pipe body 4;

[0039] The connecting assembly 3 comprises at least two sealing rings 31 arranged in the connecting assembly accommodating space Ⅰ and a sliding extrusion ring 32 arranged between each two sealing rings 31;

[0040] The inner wall of the barrel Ⅱ 21, the inner wall of the sliding extrusion ring 32 and the inner wall of the limiting ring 12 are spaced from the outer wall of the pipe body 4;

[0041] When the barrel Ⅱ 21 is moved to make the limiting part 22 close to the limiting ring 12, the two side spaces of the connecting assembly accommodating space Ⅰ are tightened to extrude the connecting assembly 3, the sealing ring 31 and the sliding extrusion ring 32 are extruded to each other, the sealing ring 31 is deformed along the axial direction of the pipe body 4, and the inner wall of the sealing ring 31 is tightly matched with the pipe body 4.

[0042] The cross-sectional shape of the pipe body 4 can be rectangular, triangular or circular, and the cross-sectional shape of the barrel Ⅰ 11, the barrel Ⅱ 21, the limiting ring 12, the sealing ring 31 and the sliding extrusion ring 32 is consistent with the cross-sectional shape of the pipe body 4, that is, the pipe body connecting structure is suitable for different cross-sections of the pipe body 4. Figures 1-5 In the embodiment shown, the cross-sectional shape of the pipe body 4, the barrel Ⅰ 11, the barrel Ⅱ 21, the limiting ring 12, the sealing ring 31 and the sliding extrusion ring 32 is circular.

[0043] The pipe body connecting structure provided by the utility model can realize the installation of the pipe body 4 without damage, and the sealing ring 31 is elastically compressed instead of being bitten into the pipe wall through a sharp blade or being extruded and closed through a hard sleeve, so that the connecting structure will not scratch or permanently deform the surface of the pipe body 4.

[0044] At least two sealing rings 31 can not only form a multi-stage seal, but also can automatically guide the pipe body 4 to the central position during the compression of the sealing ring 31. The double-ring (or multi-ring) design effectively corrects the initial installation eccentricity of the pipe body 4, ensures that the axis of the pipe body 4 coincides with the axis of the pipe body connection structure, so that each sealing ring 31 can uniformly and concentrically wrap the pipe body 4, avoiding the problem of one-sided wear and poor sealing caused by eccentricity, and significantly improving the concentricity and sealing reliability of the connection. At this time, each sealing ring 31 is independently and uniformly axially extruded and radially expanded, forming multiple tight sealing contact surfaces with the outer wall of the pipe body 4. The sealing reliability can be greatly enhanced, and even if a single sealing ring 31 has a slight defect, other sealing rings 31 can still effectively prevent medium leakage, especially suitable for high-pressure, pulse or vibration working conditions.

[0045] The double sealing ring 31 can also ensure that the axis of the pipe body 4 coincides with the axis of the pipe body connection structure (a single sealing ring 31 may slightly rotate around the sealing ring as a fulcrum).

[0046] Moreover, the entire pipe body connection structure is efficient to install, and the entire connection process only needs to insert the pipe body 4 into place, then axially move (such as push or tighten) the compressor 2 to lock, so as to complete the sealing and locking. Without welding, brazing, threading or using large torque wrenches and other professional tools, the operation process is greatly simplified, the technical requirements for the operator are reduced, and it is especially suitable for quick installation in a small space or on site.

[0047] In one embodiment, the locking structure is an external thread provided on the outer wall of the cylinder body I 111 and an internal thread provided on the inner wall of the cylinder body II 221. In this embodiment, the external thread and the internal thread are suitable for the circular outer wall of the cylinder body I 111 and the circular inner wall of the cylinder body II 221. The cooperation of the external thread and the internal thread not only serves as a sliding structure, but also as a locking structure, and can be locked in any position after being screwed in, further simplifying the connection difficulty.

[0048] In another embodiment, the locking structure is a flange plate I 111 provided on the opening side of the cylinder body I 111 and a flange plate II 211 provided on the opening side of the cylinder body I 111. The locking structure further includes a detachable connecting structure connecting the flange plate I 111 and the flange plate II 211, wherein the detachable connecting structure can be a bolt assembly. In this embodiment, there is no need to process threads on the cylinder body I 111 and the cylinder body II 221, which can simplify the structure and production cost while ensuring the clamping stability.

[0049] In one embodiment, the side wall of the limiting ring 12, the sliding extrusion ring 32 and the limiting portion 22 is a slope, and the slopes on both sides of the sealing ring 31 form a tapered structure with a small gap near the inner wall of the cylinder body I 111 and a large gap near the outer wall of the pipe body 4.

[0050] In the embodiment, the side walls of the limiting ring 12, the sliding extrusion ring 32 and the limiting part 22 are all designed as inclined surfaces, so that the installation space of the sealing ring 31 is a conical structure. When the presser 2 is axially pushed, the interaction of the inclined surfaces can convert the axial pushing force into a radial extrusion force acting on the sealing ring 31. The conical matching structure of the inclined surfaces and the sealing ring 31 makes the force on the sealing ring 31 extremely uniform and smooth from the root to the lip, avoiding the stress concentration phenomenon caused by the sharp or right-angle structure. The root tearing or local damage of the sealing ring 31 under high pressure extrusion is effectively prevented. In addition, in the initial moving stage of the presser 2, the conical structure with a small gap can quickly produce preliminary compression on the sealing ring 31, forming a pre-seal. The inclined surfaces provide a natural guide for the movement of the sliding extrusion ring 32 and the sealing ring 31, making the extrusion process more smooth and stable, and avoiding the deflection or jamming of the assembly during compression.

[0051] In one embodiment, the outer wall of the sliding extrusion ring 32 is in gap cooperation with the inner wall of the barrel I 11. In this way, the sliding of the sliding extrusion ring 32 on the inner wall of the barrel I 11 is smooth, and the sliding extrusion ring 32 can be prevented from contacting the pipe body 4.

[0052] With reference to the accompanying drawings Figure 4 The utility model also provides a coaxial sleeve structure, including two groups above-mentioned pipe body connecting structure, one pipe body connecting structure's barrel I 11 and another pipe body connecting structure's barrel II 21 are connected with each other, and the pipe body 4 includes an inner tube 41 and an outer tube 42, one pipe body connecting structure connects the inner tube 41, and the other pipe body connecting structure connects the outer tube 42.

[0053] In the embodiment, the two groups of pipe body connecting structures can independently and automatically center the inner tube 41 and the outer tube 42 for fixing and sealing. This ensures that the inner tube 41 and the outer tube 42 always maintain high concentricity at the entire connection port, and when the fluid flows between the outer wall of the inner tube 41 and the inner wall of the outer tube 42, a uniform flow channel can be provided for the fluid flow. In addition, the two groups of pipe body connecting structures can simultaneously and independently seal two independent flow channels (the flow channel between the outer wall of the inner tube 41 and the inner wall of the outer tube 42 and the flow channel in the inner tube 41). It completely prevents any cross leakage between the medium in the inner tube channel and the medium in the outer sleeve channel, and also prevents leakage between the inner and outer media and the external environment.

[0054] In addition, the installation of the inner tube 41 and the outer tube 42 is extremely simple and fast. During installation, the inner tube 41 and the outer tube 42 are only needed to be inserted into the corresponding pipe body connecting structure, and then a compression operation is performed. The two sets of sleeve body connecting structures solve the centering, fixing and sealing problems of the inner tube 41 and the outer tube 42 at one time, greatly simplify the assembly process of the coaxial sleeve, reduce the installation complexity and the requirement for the operation personnel's skills, and ensure the consistency and reliability of the assembly quality.

[0055] In one embodiment, the end surface of the outer tube 42 has a spacing with the opposite limiting ring 12. The spacing can avoid the end surface of the outer tube 42 abutting the hard limiting ring 12, realize the isolation of the outer tube 42 in all directions with the hard object, and improve the reliability.

[0056] In one embodiment, the inner wall of the outer tube 42 and the outer wall of the inner tube 41 form a flow channel 43, and the side wall of the barrel I 11 is provided with a communication pipe 8 communicating with the spacing and the flow channel 43.

[0057] In the embodiment, the outer flow channel is communicated with the flow channel 43 between the inner wall of the outer tube 42 and the outer wall of the inner tube 41 by reserving the spacing between the end surface of the outer tube 42 and the limiting ring 12 and arranging the communication pipe 8 on the side wall of the barrel I 11. At this time, the external pipeline only needs to be directly connected to the communication pipe 8 to complete the butt joint with the flow channel 43. This greatly simplifies the complex pipeline arrangement outside the equipment, reduces the use of additional tees, elbows and other pipe fittings, and reduces the system complexity, potential leakage points and installation cost.

[0058] The utility model also provides a kind of plasma source, including above-mentioned coaxial sleeve structure, the inner tube 41 of coaxial sleeve structure is used to connect gas supply device in one end, and the other end is used to connect vacuum chamber;

[0059] One communication pipe 8 is used to input cooling medium to the flow channel 43, and another communication pipe 8 is used to output cooling medium in the flow channel 43;

[0060] It also includes electromagnetic coil radio frequency ionization device 6 for ionizing gas in the inner tube 41, which is sleeved outside the outer tube 42.

[0061] Reference is made to the drawings Figure 1 And the drawings Figure 2 Take the inner tube 41 and the outer tube 42 as quartz tubes for example, the inner tube 41 and the outer tube 42 can be used to form a self-cooled plasma source device. At this time, one end of the inner tube 41 is used to connect a gas supply device, and reference is made to the drawings Figure 5 The end of the inner tube 41 can be connected to a gas connection piece 5 through a group of tube body connection structures, the gas connection piece 5 is arranged on the barrel I 11 of the tube body connection structure, and the other end is used to connect a vacuum chamber. Specifically, the outer wall of the barrel I 11 of the connector 1 on the side of the inner tube 41 connected to the vacuum chamber is provided with a flange plate 7, and the flange plate 7 is used to connect the vacuum chamber. In this way, the whole self-cooled plasma source and the vacuum chamber are fixed.

[0062] The electromagnetic coil radio frequency ionization device 6 comprises an electromagnetic coil sleeved outside, which can generate a uniform axial magnetic field to obtain uniform, stable and efficient ionization of the gas in the inner tube 41, and form high-quality plasma.

[0063] The flow channel 43 between the inner tube 41 and the outer tube 42 can be used for flowing the liquid transparent cooling medium. At this time, the two ends of the inner tube 41 and the outer tube 42 are connected by two sets of tube body connection structures, so that the height coaxiality of the inner tube 41 and the outer tube 42 in the whole axial direction is realized, the inner tube 41 and the outer tube 42 are fixed by the flexible sealing ring 31, and the risk of micro-cracks or even breakage of the inner tube 41 and the outer tube 42 is fundamentally prevented, and the long-term operation reliability and service life of the plasma source core component are greatly improved.

[0064] Because the cooling structure is additionally provided, the plasma load impedance is stabilized, the radio frequency energy transmission efficiency and stability are improved, and the radio frequency reflected power of the plasma source is strictly controlled to be not more than 0.5% of the radio frequency input power through actual measurement. The effect of the cooling structure is proved. The principle is that the cooling structure maintains the temperature of the plasma load in a stable state, avoids the dramatic change of the plasma impedance caused by high temperature. When the load impedance is stable, it can keep a very high match with the output impedance of the radio frequency power supply (the power supply of the electromagnetic coil radio frequency ionization device 6), so that most of the radio frequency energy (more than 99.5%) is effectively absorbed by the plasma for ionizing the gas, instead of being reflected back. This improves the energy utilization efficiency, and more importantly, greatly reduces the impact and potential damage to the radio frequency power supply, and ensures the long-life reliable operation of the power supply equipment. At the same time, because the impedance is very stable, the generated plasma can maintain a high steady state, which is beneficial to scientific research and engineering application.

[0065] In addition, the inner tube 41 and the outer tube 42 are made of transparent materials (such as quartz glass, sapphire, etc.), which provide an optical channel for directly observing the plasma state.

[0066] At this time, an optical detection device for observing ionization in the inner tube 41 through the inner tube 41 and the outer tube 42 can also be installed. The high coaxiality of the inner tube 41 and the outer tube 42 becomes the basis for non-destructive optical detection. Specifically: if the inner tube 41 and the outer tube 42 are not coaxial, the flow channel gap between the two will be uneven. When the cooling medium flows in the flow passage 43, an uneven fluid lens effect will be generated, which will severely distort the observation light path, causing the image captured by the optical detection device to be distorted, jittered, blurred, and unable to accurately determine the ignition, stability, and morphology of the plasma. The connection structure of the inner tube 41 and the outer tube 42 in the utility model ensures that the gap of the flow passage 43 is uniform. This makes the cooling medium form a stable, symmetrical laminar flow or uniform flow, greatly eliminating optical distortion caused by fluid flow, thereby ensuring the high definition, high fidelity, and high precision of the optical detection picture, providing a reliable optical basis for process monitoring and scientific research. At the same time, the cooling medium can be uniformly wrapped around the inner tube 41, performing efficient heat exchange in all directions, rapidly removing the huge heat generated by the plasma ionization process and the coil heating device, and preventing the plasma source from being damaged due to overheating.

[0067] The above is only the embodiment of the present application, and does not limit the present application. Any person skilled in the art can make many possible changes, modifications or modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, and the equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present application should fall within the scope of protection of the technical solution of the present application.

Claims

1. A pipe connection structure, characterized in that, Includes connector (1), clamp (2) and connection assembly (3); The connector (1) includes a cylindrical body I (11) and a limiting ring (12) disposed inside the cylindrical body I (11). The clamping device (2) includes a cylindrical body II (21) with openings at both ends. The outer wall of the cylindrical body II (21) is slidably disposed on the inner wall of the cylindrical body I (11), and the end of the cylindrical body II (21) inserted into the cylindrical body I (11) forms a limiting part (22). It also includes a locking structure for locking the relative positions of the cylindrical body I (11) and the cylindrical body II (21). The side wall of the limiting ring (12), the inner wall of the cylindrical body I (11), and the side wall of the limiting part (22) enclose a connecting component accommodating space I. The connecting component (3) includes at least two sealing rings (31) disposed within the connecting component accommodating space I and a sliding compression ring (32) disposed between each pair of sealing rings (31). The inner wall of the cylinder II (21), the inner wall of the sliding extrusion ring (32) and the inner wall of the limiting ring (12) are spaced from the outer wall of the tube (4); When the cylinder II (21) is moved so that the limiting part (22) moves closer to the limiting ring (12), the two sides of the connecting component accommodating space I tighten and squeeze the connecting component (3), the sealing ring (31) and the sliding extrusion ring (32) squeeze each other, so that the sealing ring (31) deforms along the axial direction of the tube (4), and the inner wall of the sealing ring (31) is tightly fitted with the tube (4).

2. The pipe connection structure as described in claim 1, characterized in that, The locking structure consists of an external thread on the outer wall of cylinder I (11) and an internal thread on the inner wall of cylinder II (21).

3. The pipe connection structure as described in claim 1, characterized in that, The locking structure consists of flange I (111) located on the opening side of cylinder I (11) and flange II (211) located on the opening side of cylinder II (21) outside cylinder I (11). The locking structure also includes a detachable connection structure connecting flange I (111) and flange II (211).

4. The pipe connection structure as described in claim 1, characterized in that, The sidewalls of the limiting ring (12), the sliding extrusion ring (32) and the limiting part (22) are inclined surfaces. The inclined surfaces on both sides of the sealing ring (31) form a conical structure with a small gap on the side near the inner wall of the cylinder I (11) and a large gap on the side near the outer wall of the tube (4).

5. The pipe connection structure as described in claim 4, characterized in that, The outer wall of the sliding extrusion ring (32) is clearance-fitted with the inner wall of the cylinder I (11).

6. A coaxial sleeve structure, characterized in that, It includes two sets of tube connection structures as described in any one of claims 1-5, wherein the tube connection structure of one set of tube connection structure is connected to the tube body I (11) and the tube connection structure of the other set of tube connection structure is connected to each other, and the tube body (4) includes an inner tube (41) and an outer tube (42), wherein one set of tube connection structure is connected to the inner tube (41) and the other set of tube connection structure is connected to the outer tube (42).

7. The coaxial sleeve structure as described in claim 6, characterized in that, There is a gap between the end face of the outer tube (42) and the opposite limiting ring (12).

8. The coaxial sleeve structure as described in claim 7, characterized in that, A flow channel (43) is formed between the inner wall of the outer tube (42) and the outer wall of the inner tube (41), and a connecting pipe (8) with a connecting spacing and flow channel (43) is provided on the side wall of the cylinder I (11).

9. A plasma source, characterized in that, Including the coaxial sleeve structure as described in claim 8; One end of the inner tube (41) of the coaxial sleeve structure is used to connect the gas supply device, and the other end is used to connect the vacuum chamber; One of the connecting pipes (8) is used to input the cooling medium into the flow channel (43), and the other connecting pipe (8) is used to output the cooling medium in the flow channel (43); It also includes an electromagnetic coil radio frequency ionization device (6) installed outside the outer tube (42) for ionizing the gas inside the inner tube (41).

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