Chemical supply system
By introducing primary and backup chemical supply units and a secondary integrated distributor into the chemical supply system, the problem of production stoppage during equipment failure was solved, the system achieved stable supply and monitoring, and equipment costs were reduced.
Patent Information
- Application Number
- CN202423203088.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-24
AI Technical Summary
The existing chemical supply system requires shutdown and production stoppage when the chemical supply unit malfunctions or needs maintenance, which affects production progress and poses safety hazards. Furthermore, the existing buffer tanks cannot guarantee a stable supply.
Design a chemical supply system comprising primary and backup chemical supply units, which are connected to primary and backup branch pipes via a two-stage integrated distributor. The system is equipped with a valve assembly box driven by clean and dry air and an ultrasonic flow meter to achieve primary/backup switching and flow monitoring. The backup unit uses high-pressure nitrogen as its power source.
When the main unit fails or is under maintenance, the backup unit can quickly replace the supply, improve system stability, reduce equipment costs, and ensure stable material supply through flow monitoring to avoid work stoppages and production shutdowns.
Smart Images
Figure CN223595674U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to material supply system technical field, specifically relates to a chemical supply system. BACKGROUND
[0002] In the industrial processing process, some chemicals are often needed to assist in completing the corresponding process. For example, in the integrated circuit manufacturing process, various electronic grade chemicals are needed, which are delivered to the production line through the chemical supply system and are mainly used for cleaning, wet etching, coating and developing processes.
[0003] Referring to Figure 1 The existing chemical supply device includes a chemical supply unit 110, a main pipe 120, a first shunt 130, a second shunt 140, and a plurality of branch pipes 141. The chemical supply unit 110 is installed with a barrel, a conveying pump, a gas-liquid separator, a pre-filter, a supply pump, a post-filter, and an electric control module (not specifically shown in the figure).
[0004] In actual use, the amount of some chemicals such as concentrated sulfuric acid, hydrogen peroxide, and isopropyl alcohol is relatively large, and the capacity of the barrel in the chemical supply unit 110 is limited. In order to ensure safe supply, the existing chemical supply device is also provided with a chemical buffer tank 150 for storing chemicals. The chemicals in the barrel are stored in the buffer tank 150 through the conveying pump, the gas-liquid separator, and the pre-filter, and then the chemicals in the buffer tank 150 are supplied to the main pipe through the supply pump and the post-filter; the main pipe enters the second shunt 140 after being shunted by the first shunt 130, and the second shunt 140 shunts the chemicals to the specific production line or station; the electric control module is used to control the operation of various pumps and valve bodies on the pipeline.
[0005] In combination with Figure 1 and Figure 2 The existing chemical supply device has a three-way valve as the first shunt 130, which is arranged on the main pipe 120. The chemicals shunted by the first shunt 130 are connected to the second shunt 140 through the first branch pipe 131. In the prior art, the second shunt 140 is a valve group box with multiple inputs and outputs. The second shunt is formed by multiple valve paths 141 in the valve group box, and then the chemicals are supplied to the specific production line or station. Of course, the shunting assembly can also be a more level shunting assembly.
[0006] Although the chemical buffer tank 150 provided in the prior art can ensure sufficient supply of the chemical supply unit 110, it cannot guarantee safe and stable operation of the chemical supply unit 110. For example, when the chemical supply unit 110 fails or needs maintenance, it often needs to be stopped for repair, which will seriously affect the production progress and there will be a safety hazard of overloading operation. Utility model content
[0007] The utility model aims at providing an improved chemical supply system, aiming at improving the operation stability of the chemical supply system. The utility model is realized by the following technical solutions:
[0008] A chemical supply system, comprising a main chemical supply device and a standby chemical supply device, each having a chemical supply unit, a main pipe, a first shunt, and a first branch pipe; characterized in that: it further comprises a second comprehensive shunt, the second comprehensive shunt comprising two input branches and multiple sets of shunt valve paths, the first branch pipe of the main chemical supply device and the first branch pipe of the standby chemical supply device being connected to the two input branches respectively, and a switch valve being arranged on each of the two input branches.
[0009] As a preferred technical solution, the second comprehensive shunt comprises a valve group box, a clean dry air inlet and an exhaust gas outlet are arranged on the valve group box, and a digital air pressure gauge is arranged on the exhaust gas outlet.
[0010] As a preferred technical solution, a leakage sensor is arranged at the bottom of the valve group box, and an ultrasonic flowmeter is arranged outside each of the multiple sets of shunt valve paths.
[0011] As a preferred technical solution, the chemical supply unit of the main chemical supply device comprises a first casing, a main barrel, a conveying pump, a gas-liquid separator, a pre-filter, a supply pump, a post-filter, a first pipeline assembly, and a first electric control module, the main barrel, the conveying pump, the gas-liquid separator, the pre-filter, the supply pump, and the post-filter are sequentially connected through the first pipeline assembly and installed in the first casing, and the first electric control module is arranged on the first casing and controls the actions of the conveying pump, the supply pump, and the first pipeline assembly.
[0012] As a preferred technical solution, the chemical supply unit of the standby chemical supply device comprises a second casing, a high-pressure nitrogen gas supply assembly, a standby barrel, a gas-liquid separator, a double filter, a second pipeline assembly, and a second electric control module, the standby barrel, the gas-liquid separator, and the double filter are sequentially connected through the second pipeline assembly and installed in the second casing; a first output of the high-pressure nitrogen gas supply assembly is connected to the standby barrel to provide power for discharging chemicals from the standby barrel; a second output of the high-pressure nitrogen gas supply assembly is connected to the double filter to provide dry gas for cleaning the double filter; and the second electric control module is arranged on the second casing and controls the actions of the high-pressure nitrogen gas supply assembly and the second pipeline assembly.
[0013] As a preferred technical scheme, the chemical supply unit of the standby chemical supply device further comprises an ultrapure water supply assembly, and a first output of the ultrapure water supply assembly is connected to the double filter for cleaning the double filter.
[0014] As a preferred technical scheme, the chemical supply unit of the standby chemical supply device further comprises a CDA supply assembly connected to the CDA in the second shell.
[0015] As a preferred technical scheme, the chemical supply unit of the standby chemical supply device further comprises a waste gas recovery assembly, a first recovery end of the waste gas recovery assembly is connected to the cavity of the second shell, a second recovery end is connected to the first output of the high-pressure nitrogen gas supply assembly, and a third recovery end is connected to the exhaust end of the gas-liquid separator.
[0016] As a preferred technical scheme, a third output of the high-pressure nitrogen gas supply assembly is connected to a jet gun, and a second output of the ultrapure water supply assembly is connected to a water gun.
[0017] As a preferred technical scheme, the chemical supply unit of the main chemical supply device and the chemical supply unit of the standby chemical supply device are connected through an interaction pipeline.
[0018] As a preferred technical scheme, the standby outlet of the chemical supply unit of the main chemical supply device and the standby outlet of the chemical supply unit of the standby chemical supply device are connected to each other through the interaction pipeline.
[0019] The chemical supply system provided by the utility model, through setting up standby chemical supply device, simultaneously through designing special two-stage comprehensive shunt, make main chemical supply device primary branch pipe and standby chemical supply device primary branch pipe can choose one to supply chemical, and shunt to specific production line or station. The utility model discloses under the premise of not influencing the stable supply of the original system, when the supply unit of the main chemical supply device fails or is maintained, the chemical supply unit of the standby chemical supply device can be used as standby, improve the stability of the supply system, in addition, the standby chemical supply device can also be conveniently used to replace material introduction. In addition, each valve path of the two-stage comprehensive shunt is provided with a flowmeter, and instantaneous flow and cumulative flow data of each branch pipe can be obtained, so that monitoring and main / standby switching are facilitated. Furthermore, the chemical supply unit of the standby chemical supply device uses high-purity nitrogen gas as a chemical delivery power source, and compared with using a diaphragm pump as a power source, the equipment manufacturing cost is lower. Finally, the chemical supply units of the main chemical supply device and the standby chemical supply device are connected through the interaction pipeline, so that when one of them is temporarily stopped, the other can be used to supply material. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 A schematic diagram of a configuration of an existing chemical supply device.
[0021] Figure 2 A schematic diagram of a configuration of a secondary flow divider of an existing chemical supply device.
[0022] Figure 3 A schematic diagram of a configuration of a chemical supply system according to an embodiment of the present application.
[0023] Figure 4 A schematic diagram of a configuration of a secondary comprehensive flow divider of a chemical supply system according to an embodiment of the present application.
[0024] Figure 5 A schematic diagram of a configuration of a chemical supply unit of a standby chemical supply device of a chemical supply system according to an embodiment of the present application. DETAILED DESCRIPTION
[0025] The technical solutions of the embodiments of the present application will be explained and described below in conjunction with the drawings of the embodiments of the present application. However, the following embodiments are only preferred embodiments of the present application, and are not all. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative labor are all within the protection scope of the present application.
[0026] In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise", "front", "back", and the like are all based on the orientations or relative positional relationships shown in the drawings, and are intended to facilitate clear description of the structure of the product or device, and are not intended to limit the actual orientation of the product or device in the process of production, use, sale, etc.
[0027] In addition, the terms "first" and "second" are only used for the purpose of distinguishing in the description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more, unless otherwise explicitly limited.
[0028] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "set", "fix", "assemble" and so on should make broad sense, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be direct connection, also can indirectly connect through intermediate medium, can be two element internal communication.
[0029] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through another feature between them.
[0030] As shown in Figure 3 The utility model provides a chemical supply system, including main chemical supply device 100, standby chemical supply device 200 and secondary comprehensive shunt 300, and main chemical supply device includes: first chemical supply unit 110, the first main pipe 120 that is connected with first chemical supply unit output end, the first primary shunt 130 that is set up on first main pipe 120, and the first primary branch pipe 131 that is connected in the shunt output end of first primary shunt 130, and standby chemical supply device includes: second chemical supply unit 210, the second main pipe 220 that is connected with second chemical supply unit output end, the second primary shunt 230 that is set up on second main pipe 220, the second primary branch pipe 231 that is connected in the shunt output end of second primary shunt.
[0031] As shown in Figure 4 The secondary comprehensive shunt 300 includes first input branch 301, second input branch 302 and multiple sets of shunt valve paths 303, and the multiple sets of shunt valve paths 303 are connected in communication with the first input branch 301 and the second input branch 302. The first primary branch pipe 131 of the main chemical supply device 100 is connected to the first input branch 301, the second primary branch pipe 231 of the standby chemical supply device 200 is connected to the second input branch 302, a first switch valve 304 is provided on the first input branch 301, a second switch valve 305 is provided on the second input branch 302, and the two switch valves are used to control the on-off of the two input branches, so that the two input branches can be switched and used.
[0032] Combination Figure 4 As shown in the figure, the secondary comprehensive flow divider 300 includes a valve group box 310, which is provided with a clean dry air (CDA) inlet 311 and an exhaust gas (EXH) outlet 312, and the exhaust gas outlet 312 is provided with a digital pressure gauge DPS. By introducing CDA into the valve group box 310, the opening and closing of multiple groups of flow valve paths 303 are controlled as the driving force of pneumatic valves; the digital pressure gauge DPS provided at the exhaust gas outlet 312 can monitor whether the exhaust gas is discharged smoothly in real time.
[0033] Referring to Figure 4 As shown in the figure, the valve group box 310 of the secondary comprehensive flow divider 300 is provided at the bottom with a leakage sensor 314 for detecting whether there is leakage in the valve path inside the valve group box 310. In addition, the outer surface of the multiple groups of flow valve paths 303 is respectively provided with an ultrasonic flow meter 315.
[0034] The chemical supply unit 110 of the main chemical supply device 100 described above includes a first casing, a main tank, a transfer pump, a gas-liquid separator, a pre-filter, a supply pump, a post-filter, a first pipeline assembly, and a first electric control module. The main tank, the transfer pump, the gas-liquid separator, the pre-filter, the supply pump, and the post-filter are sequentially connected through the first pipeline assembly and installed in the first casing. The first electric control module is arranged on the first casing and controls the actions of the transfer pump, the supply pump, and the first pipeline assembly. The structure and working principle of the main chemical supply device 100 are prior art, which will not be described here.
[0035] Referring to Figure 5 As shown in the figure, the standby chemical supply device 200 provided in the embodiment includes a second casing 211, a high-pressure nitrogen gas supply assembly 212, a standby tank 213, a gas-liquid separator 214, a double filter 215, a second pipeline assembly 216, and a second electric control module 217. The standby tank 213, the gas-liquid separator 214, and the double filter 215 are sequentially connected through the second pipeline assembly 216 and installed in the second casing 211. The second pipeline assembly 216 refers to all pipelines, control valve bodies, and monitoring units for connecting the above-mentioned components or devices to each other.
[0036] Referring to Figure 5As shown, the first output of the high-pressure nitrogen supply assembly 212 is connected to the standby chemical tank 213 to provide driving force for discharging chemicals from the standby chemical tank; the second output of the high-pressure nitrogen supply assembly 212 is connected to the double filter 215 to provide dry gas for cleaning the double filter 215; the second electric control module 217 is arranged on the second casing 211 and controls the actions of the high-pressure nitrogen supply assembly 212 and the second pipeline assembly 216 (specifically, some electrically controlled valves and flow and pressure monitoring units in the second pipeline assembly 216).
[0037] Continuing to refer to Figure 5 , the chemical supply unit of the standby chemical supply device further includes an ultrapure water supply assembly 218, the first output of the ultrapure water supply assembly 218 is connected to the double filter 215 (i.e. Figure 5 the two U1 interfaces are connected), to provide water for cleaning the double filter 215.
[0038] Continuing to refer to Figure 5 , the chemical supply unit 210 of the standby chemical supply device 200 further includes a CDA supply assembly 219 for supplying CDA into the second casing 211. Similarly, by supplying CDA into the second casing 211, the CDA serves as driving force for the pneumatic valves and removes gaseous chemicals generated by volatilization in the casing.
[0039] Continuing to refer to Figure 5 , the chemical supply unit 210 of the standby chemical supply device 200 further includes a waste gas recovery assembly 209, the first recovery end of the waste gas recovery assembly 209 is connected to the cavity of the second casing 211, the second recovery end is connected to the first output of the high-pressure nitrogen supply assembly 212, and the third recovery end is connected to the exhaust end of the gas-liquid separator (i.e. Figure 5 the two E1 interfaces are connected).
[0040] Among them, the standby chemical tank 213 is two, which are used in turn; correspondingly, the first output of the high-pressure nitrogen supply assembly 212 is also divided into two branches, which are respectively connected to the two standby chemical tanks 213; correspondingly, the second recovery end of the waste gas recovery assembly 209 is also divided into two branches, which are respectively connected to the two branches of the first output of the high-pressure nitrogen supply assembly 212.
[0041] Continuing to refer to Figure 3 , the third output of the high-pressure nitrogen supply assembly 212 is connected to a gas gun 208, and the second output of the ultrapure water supply assembly 218 is connected to a water gun 207; the water gun 207 and the gas gun 208 are used for cleaning and drying during maintenance and replacement of filter elements.
[0042] Please refer again to As shown, the chemical supply unit 110 of the main chemical supply device 100 and the chemical supply unit 210 of the standby chemical supply device 200 are connected through an interaction pipeline 400. By connecting the chemical supply units of the main chemical supply device and the standby chemical supply device through the interaction pipeline 400, one of the supply units can replace the other to supply chemicals when one is suspended. Specifically, the chemical standby outlet of the chemical supply unit 110 of the main chemical supply device 100 and the chemical standby outlet of the chemical supply unit 210 of the standby chemical supply device 200 are connected to each other through the interaction pipeline 400.
[0043] As can be seen from the above, the chemical supply system provided by the embodiment, by providing a standby chemical supply device and designing a special secondary comprehensive diverter, the primary branch pipes of the main chemical supply device and the primary branch pipes of the standby chemical supply device can supply chemicals selectively and be branched to specific production lines or stations. The utility model improves the stability of the supply system without affecting the stable supply of the original system, and the chemical supply unit of the standby chemical supply device can be used as a backup when the supply unit of the main chemical supply device fails or is being repaired. In addition, the standby chemical supply device can also be used conveniently to replace material introduction. Furthermore, each valve path of the secondary comprehensive diverter is provided with a flow meter, so that the instantaneous flow and cumulative flow data of each branch pipe can be obtained, which facilitates monitoring and main-standby switching. Moreover, the chemical supply unit of the standby chemical supply device uses high-purity nitrogen gas as a chemical delivery power source, which is lower in equipment manufacturing cost than using a diaphragm pump as a power source.
[0044] The above embodiments are only for full disclosure and not to limit the utility model, any equivalent technical features based on the creative spirit of the utility model and without creative labor should be considered as the scope disclosed by the application.
Claims
1. A chemical supply system characterized by: The main chemical supply device and the standby chemical supply device respectively have a chemical supply unit, a main pipe, a first shunt and a first branch pipe; The second comprehensive shunt further comprises a valve group box, the valve group box is provided with a clean dry air inlet and a waste gas outlet, and the waste gas outlet is provided with a digital air pressure gauge.
2. The chemical supply system of claim 1, wherein: The bottom of the valve group box is provided with a leakage sensor, and the outer surfaces of the plurality of shunt valve groups are respectively provided with ultrasonic flow meters.
3. The chemical supply system of claim 2, wherein: The chemical supply unit of the main chemical supply device comprises a first casing, a main barrel, a conveying pump, a gas-liquid separator, a pre-filter, a supply pump, a post-filter, a first pipeline assembly and a first electric control module.
4. The chemical supply system of claim 1, wherein: The chemical supply unit of the standby chemical supply device comprises a second casing, a high-pressure nitrogen supply assembly, a standby barrel, a gas-liquid separator, a double filter, a second pipeline assembly and a second electric control module.
5. The chemical supply system of claim 1, wherein: The chemical supply unit of the standby chemical supply device further comprises an ultrapure water supply assembly, and a first output of the ultrapure water supply assembly is connected to the double filter for cleaning the double filter.
6. The chemical supply system of claim 5, wherein: The chemical supply unit of the standby chemical supply device further comprises a CDA supply assembly for supplying CDA into the second casing.
7. The chemical supply system of claim 5, wherein: The chemical supply unit of the standby chemical supply device further comprises a waste gas recovery assembly, a first recovery end of the waste gas recovery assembly is connected to a cavity of the second casing, a second recovery end is connected to a first output of the high-pressure nitrogen supply assembly, and a third recovery end is connected to an exhaust end of the gas-liquid separator.
8. The chemical supply system of claim 5, wherein: A third output of the high-pressure nitrogen supply assembly is connected to a jet gun, and a second output of the ultrapure water supply assembly is connected to a water gun.
9. The chemical supply system of claim 6, wherein: The chemical supply unit of the main chemical supply device and the chemical supply unit of the standby chemical supply device are connected through an interaction pipeline.
10. The chemical supply system of claim 1, wherein: The standby outlet of the chemical supply unit of the main chemical supply device and the standby outlet of the chemical supply unit of the standby chemical supply device are connected through the interaction pipeline.
11. The chemical supply system of claim 10, wherein: