Reaction chamber assembly of plasma combustion water washing type tail gas equipment

Abstract

The utility model relates to the field of semiconductor tail gas treatment. The utility model provides a plasma combustion water washing type tail gas equipment reaction chamber assembly, which comprises a first reaction chamber, a first air chamber, a first air chamber upper wall and a second reaction chamber, a plasma combustor assembly is arranged above the first reaction chamber, a plurality of tail gas inlet pipes are arranged on the side surface of the first reaction chamber, and the second reaction chamber is arranged on the side surface of the second reaction chamber. The tail gas inlet pipe is communicated with the first reaction cavity; a first air inlet is formed in the first air cavity, an annular groove is formed in the upper wall of the first air cavity, and the first air cavity is communicated with the first reaction cavity through the annular groove. And the first inclined plate and the second inclined plate are arranged in parallel at an interval to form a channel for introducing air. According to the plasma combustion washing type tail gas equipment reaction cavity assembly, air is concentrated in one place, it is ensured that the air and tail gas are fully mixed and react around plasma flames, the mixing efficiency of airflow is improved, and the tail gas treatment effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor tail gas processing field especially, and relates to a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly. BACKGROUND

[0002] Plasma combustion water washing type tail gas equipment utilizes the high temperature and high energy characteristics of plasma, ignites after mixing fuel and oxidant (such as air, oxygen), generates high-temperature plasma flame. Plasma combustion has high energy conversion and utilization efficiency, can quickly heat reactants, is suitable for high-temperature reaction and waste treatment.

[0003] But in prior art, plasma combustion generates high temperature up to thousands of degrees Celsius, air enters into the airflow in reaction cavity is relatively dispersed, leading to processing tail gas is not uniform, in addition, dispersed tail gas airflow can reduce the contact area of plasma flame and tail gas, leading to energy utilization is not sufficient, reaction rate slows down.

[0004] Therefore, prior art is urgent to solve. SUMMARY

[0005] The utility model relates to a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly for the deficiency of prior art, based on above-mentioned problem, the utility model provides a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly, ensure that air is introduced into first reaction cavity in one place, improve the mixing efficiency of air and tail gas, ensure sufficient contact.

[0006] The technical scheme of the utility model is realized as follows:

[0007] A kind of plasma combustion water washing type tail gas equipment reaction cavity assembly, including first reaction cavity, first air cavity, first air cavity upper wall and second reaction cavity, the upper portion of the first reaction cavity is provided with plasma burner assembly, the side of the first reaction cavity is provided with several tail gas inlet pipes, the tail gas inlet pipe is communicated with first reaction cavity;First air cavity is provided with first air inlet on the upper portion, the first air cavity upper wall has annular groove, and the first air cavity is communicated with first reaction cavity by annular groove.

[0008] The plasma combustion water washing type tail gas equipment reaction cavity assembly as described above further includes first air cavity side wall, the end of the first air cavity upper wall is provided with the first inclined plate inclined downward, the end of the first air cavity side wall is provided with the second inclined plate inclined downward, and the first inclined plate and the second inclined plate are arranged in parallel and spaced to form a channel for accommodating air introduction.

[0009] The plasma combustion water washing type tail gas equipment reaction cavity assembly as described above further includes second air cavity, and the second air cavity is arranged at the lower end of the second reaction cavity.

[0010] The second reaction cavity is sequentially provided with a second reaction cavity inner wall, a second reaction cavity intermediate wall and a second reaction cavity shell from inside to outside.

[0011] The lower end of the second reaction cavity shell is provided with a second air inlet, and the second air inlet is connected with a blower.

[0012] The upper portion of the air hole is provided with a third inclined plate which is inclined downward, one end of the third inclined plate is connected with the second reaction cavity inner wall, and the other end of the third inclined plate is connected with the second reaction cavity intermediate wall.

[0013] The reaction cavity assembly further comprises a first cooling cavity which is arranged above the first air cavity.

[0014] The reaction cavity assembly further comprises a second cooling cavity which is arranged between the second reaction cavity intermediate wall and the second reaction cavity shell.

[0015] The tail gas inlet is inclined downward and is equidistantly spaced.

[0016] The inner wall of the tail gas inlet is coated with refractory mortar.

[0017] Compared with the prior art, the reaction cavity assembly has the following advantages and beneficial effects:

[0018] 1. The reaction cavity assembly is provided with a plurality of tail gas inlets, air enters the first air cavity through the first air inlet, and then enters the first reaction cavity through the annular groove.

[0019] 2. The first inclined plate and the second inclined plate are arranged in parallel and are spaced apart to form a channel for containing air introduction.

[0020] 3. The utility model provides a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly, set second air cavity, air is inhaled by air blower, air into the second reaction cavity through air hole is on one hand participate in secondary processing, with tail gas secondary reaction, on the other hand play the role of cooling, high-temperature tail gas is mixed with cooling air in second reaction cavity, gradually cooling, reduce the influence of high temperature to equipment, prolong equipment life. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme of the utility model or prior art, the following will be to the embodiment or prior art description needed to use the drawing do simple introduction, obviously, the following description is only one embodiment of the utility model, for the person skilled in the art comes, without creative labor, can also obtain other drawings according to these drawings.

[0022] Figure 1 The utility model provides a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly structure schematic diagram;

[0023] Figure 2 For Figure 1 A-A sectional view of;

[0024] Figure 3 For Figure 2 C part local enlarged view of;

[0025] Figure 4 For Figure 2 D part local enlarged view of.

[0026] In the drawing, 1-tail gas inlet pipe, 11-tail gas inlet, 2-first cooling cavity, 3-first reaction cavity, 4-first air cavity, 5-second reaction cavity, 6-second air cavity, 7-second cooling cavity, 8-connection column, 9-baffle, 31-plasma burner assembly, 41-first air inlet, 42-first air cavity upper wall, 421-annular groove, 422-first inclined plate, 43-first air cavity side wall, 431-second inclined plate, 51-second reaction cavity inner wall, 52-second reaction cavity middle wall, 53-second reaction cavity shell, 54-second air inlet, 55-air hole, 56-third inclined plate. DETAILED DESCRIPTION

[0027] In the following description, it is to be understood that the terms "first", "second", etc., are used only to differentiate one element from another, and do not require or imply any actual relationship or order between the elements. In fact, the first element can also be referred to as the second element, and vice versa. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such structure, device or equipment. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the structure, device or equipment including the element. The various embodiments herein are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. The terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like in this paper indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description herein, unless otherwise specified and limited, the terms "mount", "connect", "connect" should be understood broadly, for example, it can be a mechanical connection or an electrical connection, or a communication between two elements, or a direct connection, or an indirect connection through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances. In this paper, unless otherwise stated, the term "a plurality of" means two or more.

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0029] As Figures 1-3As shown in the drawings, a kind of plasma combustion water washing type tail gas equipment reaction cavity assembly, including first reaction cavity 3, first air cavity 4, first air cavity upper wall 42 and second reaction cavity 5, the upper of the first reaction cavity 3 is provided with plasma burner assembly 31, the side of the first reaction cavity 3 is provided with several tail gas pipes 1, the tail gas pipe 1 is communicated with first reaction cavity 3;First air cavity 4 is provided with first air inlet 41, the first air cavity upper wall 42 has annular groove 421, and the first air cavity 4 is communicated with first reaction cavity 3 by annular groove 421.

[0030] Preferably, it further includes first air cavity side wall 43, the end of the first air cavity upper wall 42 is provided with the first inclined plate 422 inclined downward, the end of the first air cavity side wall 43 is provided with the second inclined plate 431 inclined downward, and the first inclined plate 422 and the second inclined plate 431 are arranged in parallel and are spaced apart to form a channel for accommodating air introduction.Under the flow guide of the first inclined plate 422 and the second inclined plate 431, it is ensured that air is concentrated in one place when entering the first reaction cavity 3, air flow is avoided to be dispersed, air and tail gas are fully mixed, and the efficiency of plasma combustion is improved;The parallel and spaced apart arrangement forms a narrow channel, ensures that air is uniformly distributed when entering, and improves the treatment effect of plasma combustion.

[0031] Preferably, the first air cavity upper wall 42 and the first air cavity side wall 43 are provided with connecting column 8.The connecting column 8 provides structural support, enhances the overall stability of the first air cavity 4, and ensures that the equipment maintains good performance during long-time operation.

[0032] As shown in the drawings, Figure 4 Preferably, it further includes second air cavity 6, and the second air cavity 6 is arranged at the lower end of the second reaction cavity 5.

[0033] Preferably, the second reaction cavity 5 is sequentially provided with second reaction cavity inner wall 51, second reaction cavity intermediate wall 52 and second reaction cavity shell 53 from inside to outside.

[0034] Preferably, the lower end of the second reaction cavity shell 53 is provided with second air inlet 54, and a blower (not shown in the figure) is circumscribed to the second air inlet 54;The second reaction cavity intermediate wall 52 is provided with air hole 55, and the second air cavity 6 is communicated with the second reaction cavity 5 through the air hole 55.

[0035] Preferably, the upper of the air hole 55 is provided with the third inclined plate 56 inclined downward, one end of the third inclined plate 56 is connected with the second reaction cavity inner wall 51, and the other end of the third inclined plate 56 is connected with the second reaction cavity intermediate wall 52.

[0036] Under this condition, the additional air is introduced through the second air inlet 54 to ensure sufficient oxygen supply; the design of the vent hole 55 and the third inclined plate 56 ensures that the air is uniformly introduced into the second reaction cavity 5, and the incompletely decomposed tail gas in the primary treatment continues to react with the oxygen in the air for further decomposition and conversion, thereby improving the treatment effect; in addition, the mixing of cold air with high-temperature tail gas reduces the temperature of the tail gas, reduces the impact of high temperature on the equipment, prolongs the service life of the equipment, and improves the stability and safety of the system.

[0037] Preferably, the first cooling cavity 2 is further included and is arranged above the first air cavity 4. The first cooling cavity 2 absorbs the heat of the high-temperature tail gas in the first reaction cavity 3 by introducing a cooling medium, thereby reducing the temperature of the tail gas.

[0038] Preferably, the second cooling cavity 7 is further included and is located between the intermediate wall 52 of the second reaction cavity and the second reaction cavity shell 53, and the second cooling cavity 7 is separated from the second air cavity 6 by the partition plate 9. The cooling of the second cooling cavity 7 ensures that the temperature of the tail gas is appropriate when entering the subsequent treatment stage, thereby improving the treatment efficiency.

[0039] Preferably, the tail gas inlet pipe 1 includes tail gas inlets 11 that are arranged inclined downward at equal intervals. Such a design optimizes the introduction of the tail gas flow, ensures uniform distribution of the tail gas, and improves the mixing efficiency of the tail gas and air.

[0040] Preferably, the inner wall of the tail gas inlet 11 is coated with refractory mortar, which effectively prevents thermal damage of the high-temperature tail gas to the tail gas inlet pipe 1.

[0041] The principle of the utility model is as follows:

[0042] In actual work, the tail gas is cooled by the first cooling cavity 2 through the tail gas inlet 11 of the tail gas inlet pipe 1, enters the first reaction cavity 2, and is concentrated to the middle position of the first reaction cavity 2 due to the equidistantly and downwardly inclined tail gas inlet 11; the air enters the first reaction cavity 2 through the first air inlet 41, the first inclined plate 422 and the second inclined plate 431 are arranged in parallel and are spaced apart to form a channel for accommodating air introduction, so that the air is also concentrated to the middle position of the first reaction cavity 2, so that the air and the tail gas are fully mixed and reacted around the plasma flame of the plasma burner assembly 31, the mixing efficiency of the air flow is improved, and the tail gas treatment effect is improved; in addition, when the unreacted tail gas enters the lower end of the second reaction cavity 5 through the first reaction cavity 2, the air is introduced into the second reaction cavity 5 through the air inlet hole 55 under the action of the air blower (not shown in the figure), and the air entering the second air cavity 6 is concentrated again under the action of the third inclined plate 56, on the one hand, participates in the secondary treatment and reacts with the unreacted tail gas, and on the other hand, plays a cooling role; the high-temperature tail gas is mixed with the cooling air in the second reaction cavity 5, gradually cools down, reduces the influence of high temperature on the equipment, and prolongs the service life of the equipment.

[0043] The plasma combustion water washing type tail gas equipment reaction cavity assembly improves the mixing efficiency of the air and the tail gas, ensures sufficient contact, reduces the temperature of the tail gas, and prolongs the service life of the equipment.

[0044] The above is only the preferred embodiment of the utility model, and it should be pointed out that for ordinary skilled persons in the technical field, some improvements and refinements can be made without departing from the principles of the utility model, and these improvements and refinements should also be regarded as the protection range of the utility model.

Claims

1. A reaction chamber assembly for a plasma combustion water-washing exhaust gas equipment, characterized in that, It includes a first reaction chamber (3), a first air chamber (4), an upper wall (42) of the first air chamber, and a second reaction chamber (5). A plasma burner assembly (31) is provided above the first reaction chamber (3). Several exhaust gas pipes (1) are provided on the side of the first reaction chamber (3). The exhaust gas pipes (1) are connected to the first reaction chamber (3). A first air inlet (41) is provided on the first air chamber (4). The upper wall (42) of the first air chamber has an annular groove (421). The first air chamber (4) is connected to the first reaction chamber (3) through the annular groove (421).

2. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 1, characterized in that, It also includes a first air cavity sidewall (43), the end of the upper wall (42) of the first air cavity is provided with a downwardly inclined first inclined plate (422), the end of the first air cavity sidewall (43) is provided with a downwardly inclined second inclined plate (431), and the first inclined plate (422) and the second inclined plate (431) are arranged in parallel and spaced apart to form a channel for accommodating air introduction.

3. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 2, characterized in that, It also includes a second air cavity (6), which is located at the lower end of the second reaction cavity (5).

4. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 3, characterized in that, The second reaction chamber (5) is provided with an inner wall (51), a middle wall (52), and an outer shell (53) from the inside to the outside.

5. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 4, characterized in that, The lower end of the outer shell (53) of the second reaction chamber is provided with a second air inlet (54), and the second air inlet (54) is connected to a blower; the middle wall (52) of the second reaction chamber is provided with a vent hole (55), and the second air chamber (6) is connected to the second reaction chamber (5) through the vent hole (55).

6. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 5, characterized in that, A downwardly inclined third inclined plate (56) is provided above the vent (55). One end of the third inclined plate (56) is connected to the middle wall (52) of the second reaction chamber, and the other end of the third inclined plate (56) is connected to the middle wall (52) of the second reaction chamber.

7. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 5, characterized in that, It also includes a first cooling chamber (2), which is located above the first air chamber (4).

8. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 7, characterized in that, It also includes a second cooling chamber (7), which is located between the intermediate wall (52) of the second reaction chamber and the outer shell (53) of the second reaction chamber, and the second cooling chamber (7) is separated from the second air chamber (6) by a partition (9).

9. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to any one of claims 1 to 8, characterized in that, The exhaust pipe (1) includes an exhaust port (11), which is equidistantly and inclined downwards.

10. The plasma combustion water-washing exhaust gas equipment reaction chamber assembly according to claim 9, characterized in that, The inner wall of the exhaust port (11) is coated with refractory mortar.

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