Workpiece supporting structure in annealing furnace

Abstract

The utility model relates to the technical field of use of annealing furnaces, in particular to a workpiece supporting structure in an annealing furnace, which is used for supporting a workpiece main body to avoid damage to the surface flatness and integrity of the workpiece, so that the safety and the high efficiency in the production process are improved, favorable conditions are created for stable operation of a production line, and the production efficiency is improved. The refractory brick structure of the supporting assembly can provide strong supporting performance in a high-temperature environment, stability of a workpiece in the annealing process is ensured, workpiece deformation or damage caused by insufficient supporting in the heat treatment process is avoided, meanwhile, the refractory bricks have high temperature resistance and oxidation resistance, and the service life of the refractory bricks is prolonged. The service life of the supporting structure is prolonged, and the stability of the internal environment of the annealing furnace is ensured while the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to annealing furnace use technical field, concretely relates to a workpiece support structure in annealing furnace. BACKGROUND

[0002] Annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafers can be heated to activate dopants, convert a film to a film or a film to a wafer substrate interface, densify a deposited film, change the state of a growing film, repair implant damage, move dopants or transfer dopants from one film to another or from a film into a wafer substrate. Annealing furnaces can be integrated into other furnace processing steps, such as oxidation, or can be processed by themselves. Annealing furnaces are done by equipment specifically designed for heating semiconductor wafers.

[0003] In the prior art, when workpieces are transported into the annealing furnace, two methods are generally used. One is to use a forklift to lift the workpieces and put them into the furnace. However, in this method, the forklift operating arm cannot easily exit the furnace without changing the position and state of the workpieces. The other method is to put the workpieces into the furnace by clamping the two sides of the workpieces with a clamping mechanism. However, if the workpieces are too heavy or too large, a large force is required to clamp them. This method can easily damage the surface flatness and integrity of the workpieces. Neither of the two methods has an effective and reasonable support structure, which can affect work efficiency and production efficiency. Therefore, it is necessary to make improvements. SUMMARY

[0004] The utility model aims at overcoming the defects of the prior art and provides a workpiece support structure in an annealing furnace to solve the above problems.

[0005] The utility model discloses a workpiece support structure in an annealing furnace, which comprises a furnace body and a hearth arranged in the furnace body, the inner bottom of the hearth is provided with a support plate through a quick-release assembly, the upper end of the support plate is provided with a support assembly formed by stacking a plurality of refractory bricks, and the upper surface of the support assembly abuts against the main body of the workpiece in the hearth.

[0006] Preferably, the quick-release assembly comprises a mounting piece arranged at the lower end of the support plate, the inner bottom of the hearth is provided with a groove, the two sides of the groove are provided with extension grooves, a compression spring is arranged in the extension grooves, the end of the compression spring is provided with a movable block, and the two sides of the mounting piece are provided with matching grooves for embedding the movable blocks.

[0007] Preferably, the movable block has an isosceles trapezoidal cross-sectional shape.

[0008] Preferably, the side surface of the support plate is provided with a handle.

[0009] Preferably, the middle part of the handle is sleeved with a silica gel sleeve.

[0010] The utility model has the following beneficial effects:

[0011] 1. The workpiece support structure in the annealing furnace, when conveying the workpiece main body into the furnace body, the workpiece main body is placed on the upper surface of the support assembly through the forklift operation arm, the forklift is controlled to make the forklift operation arm descend and then exit the furnace body, when the workpiece main body needs to be taken out of the furnace body, the forklift is controlled to make the forklift operation arm be located below the workpiece main body, then the workpiece main body is lifted to a height and then lifted out, the utility model supports the workpiece main body through the support structure, avoids the damage to the surface flatness and completeness of the workpiece, improves the safety and efficiency in the production process, creates favorable conditions for the stable operation of the production line, the firebrick structure of the support assembly can provide strong support performance in a high temperature environment, ensures the stability of the workpiece in the annealing process, and avoids the deformation or damage of the workpiece due to insufficient support in the heat treatment process. Meanwhile, the high temperature resistance and oxidation resistance of the firebrick help to prolong the service life of the support structure, improve the production efficiency, and ensure the stability of the internal environment of the annealing furnace.

[0012] 2. The quick release assembly comprises a mounting piece arranged at the lower end of the support plate, the inner bottom of the hearth is provided with a groove inwardly, the two sides of the groove are provided with extension grooves, compression springs are arranged in the extension grooves, the end portions of the compression springs are provided with movable blocks, and the two sides of the mounting piece are provided with matching grooves for embedding the movable blocks. The elastic property of the compression springs applies horizontal direction support to the mounting piece, and the mounting stability of the mounting piece is improved. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are only one embodiment of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0014] Figure 1 It is the whole structure schematic diagram of the utility model;

[0015] Figure 2 It is Figure 1 The enlarged view of A;

[0016] Figure 3 It is the cooperation structure schematic diagram of the handle and the silica gel sleeve of the utility model;

[0017] Figure 4The utility model discloses a schematic diagram of the position relation of the fork truck operation arm and the support assembly.

[0018] Figure 5 The utility model discloses a schematic diagram of the position relation of the fork truck operation arm and the support assembly.

[0019] The marks in the drawing are:

[0020] 1, furnace body, 2, hearth, 3, support plate, 4, quick release assembly, 41, mounting piece, 42, recess, 43, extension groove, 44, compression spring, 45, movable block, 46, matching groove, 5, support assembly, 6, handle, 7, silica gel cover, 8, fork truck operation arm, 9, workpiece main body. Specific implementation

[0021] In order to make the technical means, the creation features, the purpose and the effect of the utility model easy to understand, the following will clearly and completely describe the technical scheme in the specific implementation of the utility model, so as to further illustrate the utility model, obviously, the specific implementation described is only a part of the implementation of the utility model, rather than all the styles.

[0022] The following will be combined with the attached Figures 1-5 The utility model will be further described in detail.

[0023] Example 1:

[0024] A workpiece support structure in annealing furnace, including furnace body 1 and the hearth 2 of setting in furnace body 1, the inner bottom of hearth 2 is equipped with support plate 3 by quick release assembly 4, the material of support plate 3 is silicon carbide, and silicon carbide has stable high-temperature resistance, and the upper end of support plate 3 is equipped with the support assembly 5 of being piled up by several refractory bricks, and the upper surface of support assembly 5 abuts the workpiece main body 9 in hearth 2.

[0025] When using specifically, for example, Figures 4-5As shown, when the workpiece body 9 is transported into the furnace body 1, the workpiece body 9 is placed on the upper surface of the support assembly 5 through the forklift operation arm 8, then the forklift is controlled to lower the forklift operation arm 8 and exit the furnace body 1, when it is needed to take out the workpiece body 9 from the furnace body 1, the forklift is controlled to be below the workpiece body 9, then the forklift operation arm 8 is lifted to lift the workpiece body 9 to a height and then lift it out, the utility model supports the workpiece body 9 through the support structure, avoids the damage to the surface flatness and the completeness of the workpiece, improves the safety and efficiency in the production process, creates favorable conditions for the stable operation of the production line, the firebrick structure of the support assembly 5 can provide strong support performance in a high temperature environment, ensures the stability of the workpiece in the annealing process, and avoids the deformation or damage of the workpiece due to insufficient support in the heat treatment process. At the same time, the high temperature resistance and oxidation resistance of the firebrick itself help to prolong the service life of the support structure, improve the production efficiency, and also ensure the stability of the internal environment of the annealing furnace.

[0026] In the embodiment, as shown, Figure 2 The quick release assembly 4 includes a mounting piece 41 arranged at the lower end of the support plate 3, the inner bottom of the hearth 2 is provided with a recess 42 inwardly, the two sides of the recess 42 are provided with extension grooves 43, the compression springs 44 are installed in the extension grooves 43, the end portions of the compression springs 44 are provided with movable blocks 45, the two sides of the mounting piece 41 are provided with matching grooves 46 for embedding the movable blocks 45, the material of the mounting piece 41 is silicon carbide, the compression springs 44 are SPEC high-temperature-resistant springs produced by the United Spring Company of the United States, and when the quick release assembly 4 is used, the end portion of the compression spring 44 is pushed into the extension groove 43 when the lower end of the mounting piece 41 descends, and when the bottom surface of the mounting piece 41 abuts against the bottom surface of the recess 42, the movable block 45 enters the matching groove 46 to apply horizontal support to the mounting piece 41 under the elastic property of the compression spring 44, thereby improving the mounting stability of the mounting piece 41, and the operation is simple and the use cost is low.

[0027] In the embodiment, the cross-sectional shape of the movable block 45 is isosceles trapezoidal, and when the movable block 45 is embedded in the matching grooves 46 on the two sides of the mounting piece 41 under the action of the compression spring 44, the isosceles trapezoidal movable block 45 can effectively increase the convenience of installation and the feasibility of disassembly. This shape design makes it easy to remove the mounting piece 41 from the hearth 2 when it is needed to disassemble or install the mounting piece 41, without the need for complex tools, effectively reducing the physical expenditure of personnel and the time cost of equipment maintenance.

[0028] In the embodiment, the side surface of the support plate 3 is provided with a handle 6, and the staff can install and disassemble the support plate 3 by gripping the handle 6.

[0029] In the embodiment, the middle part of the handle 6 is sleeved with a silica gel sleeve 7, the silica gel has excellent heat insulation property, and the safety of the staff is improved.

[0030] The working principle of the utility model is as follows: the workpiece support structure in the annealing furnace, including furnace body 1 and the hearth 2 of setting in furnace body 1, the inner bottom of hearth 2 is equipped with support plate 3 through quick release assembly 4, the material of support plate 3 is silicon carbide, silicon carbide has stable high temperature resistance, the upper end of support plate 3 is equipped with the support aggregate 5 that is piled up by several refractory bricks, the upper surface of support aggregate 5 abuts the workpiece main body 9 in hearth 2.

[0031] Specific use, when conveying workpiece main body 9 enters furnace body 1, after workpiece main body 9 is placed on the upper surface of support aggregate 5 by forklift operating arm 8, the forklift is controlled to make forklift operating arm 8 descend and then exit furnace body 1, when workpiece main body 9 needs to be taken out of furnace body 1, the forklift is controlled to make forklift operating arm 8 be located below workpiece main body 9, then forklift operating arm 8 is lifted to lift workpiece main body 9 to height and then lift out, the utility model supports workpiece main body 9 through support structure, avoids the damage to the surface flatness and completeness of workpiece, improves the safety and efficiency in the production process, creates favorable conditions for the stable operation of production line, the refractory brick structure of support aggregate 5 can provide strong support performance in high temperature environment, ensures the stability of workpiece in the annealing process, avoids the deformation or damage of workpiece due to insufficient support in the heat treatment process. Meanwhile, the high temperature resistance and oxidation resistance of refractory brick itself help to prolong the service life of support structure, improve the production efficiency, and also ensure the stability of the internal environment of annealing furnace.

[0032] Quick release assembly 4 includes mounting piece 41 arranged at the lower end of support plate 3, the inner bottom of hearth 2 is inwardly provided with recess 42, the two sides of recess 42 are provided with extension groove 43, compression spring 44 is installed in extension groove 43, the end of compression spring 44 is provided with movable block 45, the two sides of mounting piece 41 are provided with matching groove 46 for embedding movable block 45, the material of mounting piece 41 is silicon carbide, compression spring 44 selects SPEC high temperature resistant spring produced by American United Spring Company, when quick release assembly 4 is used, the end of compression spring 44 is pushed into extension groove 43 when the lower end of mounting piece 41 descends, when the bottom surface of mounting piece 41 abuts the bottom surface of recess 42, movable block 45 enters matching groove 46 to apply horizontal support to mounting piece 41 under the elastic property of compression spring 44, improve the installation stability of mounting piece 41, simple operation and low cost.

[0033] It should be noted that according to the needs of implementation, each component described in the embodiments of the present application can be split into more components, or two or more components or parts of components can be combined into new components to achieve the purpose of the embodiments of the present application. The above embodiments only express several implementation modes of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent of the present application. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of protection of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A workpiece support structure inside an annealing furnace, comprising a furnace body (1) and a furnace chamber (2) disposed within the furnace body (1), characterized in that: The bottom of the furnace chamber (2) is provided with a support plate (3) via a quick-release assembly (4). The upper end of the support plate (3) is provided with a support assembly (5) made of several refractory bricks. The upper surface of the support assembly (5) abuts against the workpiece body (9) inside the furnace chamber (2).

2. The workpiece support structure in an annealing furnace according to claim 1, characterized in that: The quick-release assembly (4) includes a mounting piece (41) disposed at the lower end of the support plate (3). The inner bottom of the furnace chamber (2) is provided with a groove (42) extending inward. The groove (42) has extension grooves (43) on both sides. The extension grooves (43) are provided with compression springs (44). The end of the compression springs (44) is provided with movable blocks (45). The mounting piece (41) has mating grooves (46) on both sides for the movable blocks (45) to be inserted.

3. The workpiece support structure in an annealing furnace according to claim 2, characterized in that: The cross-sectional shape of the movable block (45) is an isosceles trapezoid.

4. The workpiece support structure in an annealing furnace according to claim 1, characterized in that: The support plate (3) is provided with a handle (6) on its side.

5. The workpiece support structure in an annealing furnace according to claim 4, characterized in that: A silicone sleeve (7) is fitted over the middle of the handle (6).

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