Magnetron sputtering target cover

Abstract

The utility model discloses a magnetron sputtering target cover, which relates to the technical field of magnetron sputtering and comprises a target cover main body, a base is arranged below the target cover main body, a target material is arranged on the upper surface of the base, the outer wall of the target material is sleeved with a pressing ring in a sliding mode, and the pressing ring is fixedly connected with the base through a bolt. The target cover main body is connected to the outer wall of the pressing ring in a sleeving mode, the target cover main body is in threaded connection with the pressing ring, and a limiting mechanism used for limiting movement of the target cover main body is arranged on the target cover main body. Through the limiting mechanism, the target cover main body can be quickly mounted and dismounted, and the height of the target cover main body is automatically limited, so that the target material replacement efficiency can be further improved, and meanwhile, the target cover main body is conveniently replaced, so that the target cover main body is efficiently maintained.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering technical field, concretely is a magnetron sputtering target cover. BACKGROUND

[0002] Magnetron sputtering is a kind of high-speed low-temperature sputtering coating technology, utilizes the interaction of magnetic field and electric field to enhance sputtering process, is used to make various functional thin films and coating, improves the performance and service life of product, its characteristics are fast, temperature is low, and the application is wide, and target cover is a kind of device for protecting and assisting target material in magnetron sputtering equipment, is closed figure by cover surface and side, cover surface is equipped with sputtering window and at least one metal wire, metal wire two ends are fixed to side, and its projection is located at sputtering window.

[0003] When using magnetron sputtering technology, in order to obtain different film systems, different target materials of different materials are usually selected to replace, and when the performance of target cover is reduced, damaged or worn, etc., the target cover needs to be replaced.

[0004] When the existing target material is replaced, the target cover and the compression ring need to be disassembled in sequence and placed separately, and when the target material is replaced, the target cover and the compression ring need to be installed in sequence, but in this process, a certain gap needs to be reserved between the inner wall top end of the target cover and the compression ring top end, and each time the target material is replaced, the target cover is rotated and limited by tools, in order to further improve the efficiency of replacing the target material. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a magnetron sputtering target cover to solve the problems in the background art.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] A magnetron sputtering target cover, comprising a target cover main body, a base is arranged below the target cover main body, a target material is arranged on the upper surface of the base, a compression ring is slidably sleeved on the outer wall of the target material, the compression ring is fixedly connected with the base through bolts, the target cover main body is sleeved on the outer wall of the compression ring, the target cover main body is threadedly connected with the compression ring, and a limiting mechanism for limiting the movement of the target cover main body is arranged on the target cover main body.

[0008] On the basis of the above technical scheme, the utility model also provides the following optional technical scheme:

[0009] In an optional scheme, the limiting mechanism comprises a connecting assembly arranged on the target cover main body.

[0010] The connecting assembly comprises a fixed ring fixedly connected to the top end of the target shield body, an outer wall of the fixed ring is sleeved with a connecting swivel ring, and the connecting swivel ring is threadedly connected with the fixed ring.

[0011] The connecting swivel ring is provided with a supporting assembly.

[0012] In an alternative, the supporting assembly is a connecting sleeve ring arranged below the connecting swivel ring, and the connecting sleeve ring is slidingly connected with the fixed ring.

[0013] The connecting swivel ring is provided with a rotating assembly.

[0014] In an alternative, the rotating assembly is a limiting swivel ring fixedly connected to the bottom end of the connecting swivel ring, an outer shape of a vertical section of the limiting swivel ring is in a T shape, and the connecting sleeve ring is slidingly sleeved on the outer wall of the limiting swivel ring.

[0015] The limiting swivel ring is provided with a rolling assembly.

[0016] In an alternative, the rolling assembly comprises a plurality of rolling balls circumferentially and equidistantly arranged at the bottom end of the limiting swivel ring, the rolling balls are all rotationally connected with the limiting swivel ring, and the rolling balls are all in contact with the inner wall of the connecting sleeve ring.

[0017] The connecting sleeve ring is provided with a sliding assembly.

[0018] In an alternative, the sliding assembly comprises two sliding sleeve plates symmetrically fixedly connected to the outer wall of the connecting sleeve ring, and the sliding sleeve plates are symmetrically arranged outside the target shield body.

[0019] The sliding sleeve plate is provided with a guiding assembly.

[0020] In an alternative, the guiding assembly comprises a fixed rod arranged at the end of the sliding sleeve plate away from the base, and the fixed rod is fixedly connected with the base through the sliding sleeve plate.

[0021] The fixed rod is provided with a limiting assembly.

[0022] In an alternative, the limiting assembly is a limiting baffle fixedly connected to the end of the fixed rod away from the base, the limiting baffle is located at the end of the sliding sleeve plate away from the base, the end of the sliding sleeve plate away from the base is rotationally connected with a cam through a damping rotating shaft, and the cam is in contact with the outer wall of the limiting baffle.

[0023] Compared with the prior art, the utility model has the beneficial effects as follows:

[0024] This utility model, through the setting of a limiting mechanism, enables the rapid installation and disassembly of the target cover body and automatically limits the height of the target cover body, thereby further improving the efficiency of target replacement. At the same time, the convenient replacement of the target cover body allows for efficient maintenance of the target cover body. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this utility model.

[0026] Figure 2 This is a schematic diagram of the connection structure between the connecting collar and the limiting rotating ring of this utility model.

[0027] Figure 3 This is a schematic diagram of the target cover body and the explosion structure of the pressure ring of this utility model.

[0028] Figure 4 For the present utility model Figure 2 A magnified schematic diagram of the structure at point A in the diagram.

[0029] In the diagram: 1. Target cover body; 201. Limiting baffle; 202. Fixing rod; 203. Fixing ring; 204. Connecting rotating ring; 205. Sliding sleeve; 206. Connecting collar; 207. Limiting rotating ring; 208. Ball bearing; 209. Cam; 3. Target material; 4. Pressure ring; 5. Base. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0031] like Figures 1-4 As shown, this embodiment provides a magnetron sputtering target cover, which includes a target cover body 1, a base 5 is provided below the target cover body 1, a target material 3 is provided on the upper surface of the base 5, a pressure ring 4 is slidably sleeved on the outer wall of the target material 3, the pressure ring 4 is fixedly connected to the base 5 by bolts, the target cover body 1 is sleeved on the outer wall of the pressure ring 4, the target cover body 1 is threadedly connected to the pressure ring 4, and a limiting mechanism for limiting the movement of the target cover body 1 is provided on the target cover body 1;

[0032] The limiting mechanism includes: a connecting component disposed on the target cover body 1;

[0033] The connecting components include: a fixing ring 203 fixedly connected to the top of the target cover body 1, a connecting rotating ring 204 sleeved on the outer wall of the fixing ring 203, and the connecting rotating ring 204 being threadedly connected to the fixing ring 203;

[0034] A support component is provided on the connecting ring 204;

[0035] The support assembly is a connecting sleeve 206 arranged below the connecting collar 204, and the connecting sleeve 206 is in sliding connection with the fixing ring 203;

[0036] The connecting collar 204 is provided with a rotating assembly;

[0037] In the embodiment, when the target material 3 is replaced, the target cover body 1 is moved along the outer wall of the compression ring 4 by screwing, and the fixing ring 203 is moved and rotated by screwing the connecting collar 204 under the pushing of the target cover body 1. At this time, the target cover body 1 can be rotated and disassembled by the limiting mechanism;

[0038] When the target cover body 1 is separated from the compression ring 4 by moving and is moved above the compression ring 4, the target cover body 1 is stopped and is flipped to dislocate the target cover body 1 from the compression ring 4, so that the target material 3 can be replaced by disassembling the compression ring 4;

[0039] When the target material 3 is replaced and the compression ring 4 is installed and fixed, the above operation is reversed to quickly install the target cover body 1. In this process, the height of the target cover body 1 can be automatically limited by the limiting mechanism when the height of the target cover body 1 needs to be limited, thereby further improving the efficiency of replacing the target material 3;

[0040] When the target cover body 1 needs to be replaced, the connecting collar 204 is separated from the target cover body 1 by the limiting mechanism, and then the target cover body 1 is separated from the compression ring 4 by rotating. Then, the new target cover body 1 is rotated and sleeved on the outer wall of the compression ring 4 by screwing, and then the connecting collar 204 is reversely operated to achieve the purpose of conveniently replacing the target cover body 1;

[0041] As shown in Figures 2-4 The rotating assembly is a limiting collar 207 fixedly connected to the bottom end of the connecting collar 204. The limiting collar 207 has a T-shaped vertical cross-section. The connecting sleeve 206 is slidably sleeved on the outer wall of the limiting collar 207, and the T-shaped outer shape limits the rotation of the connecting sleeve 206 and the limiting collar 207;

[0042] The limiting collar 207 is provided with a rolling assembly;

[0043] The rolling assembly comprises a plurality of rolling balls 208 arranged equidistantly around the bottom end of the limiting collar 207. The rolling balls 208 are in rotational connection with the limiting collar 207, and the rolling balls 208 are in contact with the inner wall of the connecting sleeve 206. The plurality of rolling balls 208 effectively reduce the friction between the connecting sleeve 206 and the limiting collar 207;

[0044] The connecting sleeve 206 is provided with a sliding assembly;

[0045] As shown in Figures 1-4 The sliding assembly comprises two sliding sleeve plates 205 symmetrically fixedly connected to the outer wall of the connecting sleeve ring 206, and the two sliding sleeve plates 205 are symmetrically arranged outside the target cover body 1.

[0046] The sliding sleeve plate 205 is provided with a guide assembly.

[0047] The guide assembly comprises a fixed rod 202 arranged at the end of the sliding sleeve plate 205 away from the base 5, the fixed rod 202 penetrates through the sliding sleeve plate 205 and is fixedly connected to the base 5, and a straight sliding groove is formed at the position where the sliding sleeve plate 205 and the fixed rod 202 are connected, for the sliding of the fixed rod 202.

[0048] The fixed rod 202 is provided with a limiting assembly.

[0049] The limiting assembly is a limiting baffle 201 fixedly connected to the end of the fixed rod 202 away from the base 5, the limiting baffle 201 is located at the end of the sliding sleeve plate 205 away from the base 5, the end of one sliding sleeve plate 205 away from the base 5 is rotatably connected with a cam 209 through a damping rotating shaft, the cam 209 is in contact with the outer wall of the limiting baffle 201, and through the cooperation between the sliding assembly, the guide assembly and the limiting assembly, the sliding sleeve plate 205 can be guided and limited in position, and the height of the target cover body 1 can be automatically limited in position.

[0050] The above embodiment provides a magnetron sputtering target cover, wherein when the target material 3 is replaced, the target cover body 1 is rotated and moved along the outer wall of the compression ring 4 through the thread at this time, and the fixed ring 203 is driven to move and rotate by the thread through the driving of the connecting rotating ring 204 under the pushing of the target cover body 1, the limiting rotating ring 207 is rotated under the driving of the connecting rotating ring 204 at this time, the connecting sleeve ring 206 drives the sliding sleeve plate 205 to slide along the outer wall of the fixed rod 202 under the driving of the connecting rotating ring 204 through the limiting rotating ring 207, the cam 209 is separated from the outer wall of the limiting baffle 201 under the driving of one sliding sleeve plate 205 at this time, and the friction between the limiting rotating ring 207 and the connecting sleeve ring 206 is effectively reduced through the ball 208, so that the target cover body 1 can be rotated and disassembled.

[0051] When the fixed rod 202 is in contact with the inner wall of the bottom end of the sliding sleeve plate 205, the target cover body 1 is separated from the compression ring 4 by moving above the compression ring 4 at this time, and then the target cover body 1 is stopped from rotating and is flipped around the fixed rod 202 as the axis, and the sliding sleeve plate 205 is rotated along the outer wall of the fixed rod 202 under the driving of the connecting sleeve ring 206, so that the target cover body 1 and the compression ring 4 are dislocated, so as to facilitate the disassembly of the compression ring 4 and realize the replacement of the target material 3.

[0052] When the target material 3 is replaced and the compression ring 4 is installed and fixed, the above operation is reversed to quickly install the target cover body 1. In this process, when the height of the target cover body 1 needs to be limited, the cam 209 is rotated to the appropriate angle. When one sliding cover plate 205 is lowered, the outer wall of the limiting baffle 201 is blocked by the cam 209, so that the height of the target cover body 1 can be automatically limited, thereby further improving the efficiency of replacing the target material 3.

[0053] When the target cover body 1 needs to be replaced, the connecting rotating ring 204 is rotated. At this time, the connecting rotating ring 204 is raised along the outer wall of the fixed ring 203 through the thread, and the connecting sleeve ring 206 drives the sliding cover plate 205 to slide along the outer wall of the fixed rod 202 through the limiting rotating ring 207. When the connecting rotating ring 204 and the fixed ring 203 are separated from each other, the connecting rotating ring 204 is moved with the fixed rod 202 as the axis, so that the connecting rotating ring 204 and the fixed ring 203 are dislocated. Then, the target cover body 1 and the compression ring 4 are separated from each other. After that, the new target cover body 1 is screwed onto the outer wall of the compression ring 4. Then, the connecting rotating ring 204 is reversed to achieve the purpose of conveniently replacing the target cover body 1.

[0054] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A magnetron sputtering target cover, comprising a target cover body (1), a base (5) is arranged below the target cover body (1), an upper surface of the base (5) is provided with a target material (3), an outer wall of the target material (3) is slidingly sleeved with a compression ring (4), the compression ring (4) is fixedly connected with the base (5) through bolts, the target cover body (1) is sleeved on the outer wall of the compression ring (4), and the target cover body (1) is threadedly connected with the compression ring (4), characterized in that, The target cover body (1) is provided with a limiting mechanism for limiting the movement of the target cover body (1).

2. A magnetron sputter target shield according to claim 1, wherein, The limiting mechanism comprises a connecting assembly provided on the target cover body (1). The connecting assembly comprises a fixed ring (203) fixedly connected to the top end of the target cover body (1), and a connecting swivel ring (204) sleeved on the outer wall of the fixed ring (203), wherein the connecting swivel ring (204) is threadedly connected with the fixed ring (203). A supporting assembly is arranged on the connecting swivel ring (204).

3. A magnetron sputter target shield according to claim 2, wherein, The supporting assembly is a connecting sleeve ring (206) arranged below the connecting swivel ring (204), and the connecting sleeve ring (206) is slidingly connected with the fixed ring (203). A rotating assembly is arranged on the connecting swivel ring (204).

4. A magnetron sputter target shield according to claim 3, wherein, The rotating assembly is a limiting swivel ring (207) fixedly connected to the bottom end of the connecting swivel ring (204), and the vertical cross-section of the limiting swivel ring (207) has a T-shaped outer shape, and the connecting sleeve ring (206) is slidingly sleeved on the outer wall of the limiting swivel ring (207). A rolling assembly is arranged on the limiting swivel ring (207).

5. A magnetron sputter target shield according to claim 4, wherein, The rolling assembly comprises a plurality of rolling balls (208) circumferentially and equidistantly arranged at the bottom end of the limiting swivel ring (207), wherein each of the rolling balls (208) is rotatably connected with the limiting swivel ring (207), and each of the rolling balls (208) is in contact with the inner wall of the connecting sleeve ring (206). A sliding assembly is arranged on the connecting sleeve ring (206).

6. A magnetron sputter target shield according to claim 5, wherein, The sliding assembly comprises two sliding sleeve plates (205) symmetrically fixedly connected to the outer wall of the connecting sleeve ring (206), and the two sliding sleeve plates (205) are symmetrically arranged on the outer side of the target cover body (1). A guide assembly is arranged on the sliding sleeve plate (205).

7. A magnetron sputter target shield according to claim 6, wherein The guide assembly comprises a fixed rod (202) arranged on the end of the sliding sleeve plate (205) away from the base (5), and the fixed rod (202) is fixedly connected with the base (5) through the sliding sleeve plate (205). A limiting assembly is arranged on the fixed rod (202).

8. A magnetron sputter target shield according to claim 7, wherein, The limiting assembly is a limiting baffle (201) fixedly connected to the end of the fixed rod (202) away from the base (5), and the limiting baffle (201) is located at the end of the sliding sleeve plate (205) away from the base (5), and the end of one sliding sleeve plate (205) away from the base (5) is rotatably connected with a cam (209) through a damping rotating shaft, and the cam (209) is in contact with the outer wall of the limiting baffle (201).

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