Magnetic bar structure convenient to disassemble and assemble

Abstract

The utility model belongs to the technical field of magnetron sputtering, and discloses a magnetic bar structure convenient to disassemble and assemble, which comprises a bottom support, three parallel first sliding chutes are arranged on the bottom support, a second sliding chute is arranged at the lower end of each first sliding chute, a rotationally connected threaded rod is arranged in each second sliding chute along the length direction of the second sliding chute, and a driving block is in threaded connection with the threaded rod. The driving block is slidably connected into the second sliding groove, and the upper end of the driving block is fixedly connected with at least two positioning columns. Third sliding grooves are formed in the mounting plates, inserting strips are fixedly connected to the lower ends of the mounting plates, and at least two positioning holes are formed in the positions, close to the closed ends of the third sliding grooves, of the lower surfaces of the inserting strips; the lower ends of the magnets are fixedly connected with sliding blocks. When the mounting plates with the magnets are sequentially mounted on the bottom support, the mounting plates which are not provided with the magnets and the mounting plates which are provided with the magnets are staggered, so that the magnetic field attraction between the mounting plates and the mounting plates can be reduced, and the risk that fingers are pinched is further reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the magnetron sputtering technical field, concretely relates to a magnet bar structure convenient to dismount. BACKGROUND

[0002] The magnetron sputtering coating is the current widely used coating deposition process. The principle of sputtering coating is that inert gas is bombarded to the surface of target material under the action of electric field, and molecules, atoms, ions and electrons on the surface of target material are sputtered out and splashed to the substrate to deposit into film.

[0003] The quality requirement of magnetron sputtering coating equipment is very high, and the uniform distribution of magnetic field intensity of magnetron sputtering cathode is particularly important. The magnetic field is generated by cathode magnet bar, and the cathode magnet bar is composed of many magnets placed side by side on the magnetic shoe, and the magnetic shoe has a plurality of accommodating grooves for inserting the magnets, and the distance between the accommodating grooves is very close. When the magnet and the magnetic shoe are assembled, a strong magnetic force is generated, which may cause the following risks:

[0004] If the operator assembles by hand, the magnets in the adjacent accommodating grooves are easily sucked and pinched, even the safety risk of pinching the fingers. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the purpose of the utility model is to provide a magnet bar structure convenient to dismount, which solves the problems in the background art.

[0006] The purpose of the utility model can be realized by the following technical scheme:

[0007] A magnet bar structure convenient to dismount, comprising:

[0008] A bottom support, three first sliding grooves are arranged in parallel on the bottom support along the length direction thereof, one end of the first sliding groove is in an open shape, and the other end is in a closed shape, a second sliding groove is arranged in the lower end of each first sliding groove along the length direction thereof and communicated with the first sliding groove, a threaded rod is rotatably arranged in the second sliding groove along the length direction thereof, a driving block is threadedly connected to the threaded rod, the driving block is slidably connected in the second sliding groove, and at least two positioning columns are fixedly connected to the upper end of the driving block;

[0009] Three mounting plates, a third sliding groove is arranged on the mounting plate along the length direction thereof, one end of the third sliding groove is in an open shape, and the other end is in a closed shape, and a plug strip is fixedly connected to the lower end of the mounting plate along the length direction thereof, at least two positioning holes are arranged on the lower surface of the plug strip and close to the closed end of the third sliding groove;

[0010] A plurality of magnets, the lower end of the magnet is fixedly connected with a sliding block.

[0011] The technical scheme, principles and technical effects are as follows:

[0012] After sequentially inserting the sliders at the lower ends of the magnets into the third sliding grooves on the mounting plates from the open ends of the third sliding grooves, the magnets are pre-installed on the three mounting plates, then the threaded rod is rotated to drive the driving block to move to the open end of the first sliding groove, the positioning hole at the lower end of the insertion strip is aligned with the positioning column, the positioning column is inserted into the positioning hole, the threaded rod is reversely rotated to drive the driving block to move, the driving block drives the insertion strip and the mounting plate to move together, the insertion strip is inserted from the open end of the first sliding groove, the mounting of the mounting plate and the bottom support is realized, and the mounting of the magnets is realized, so as to avoid that the magnetic field between the two mounting plates is too large.

[0013] In a preferred example, one end of the threaded rod is fixedly connected with a hexagonal head.

[0014] In a preferred example, the top end of the positioning column is a hemispherical structure.

[0015] In a preferred example, a baffle is detachably connected to the open end of the third sliding groove on the mounting plate.

[0016] In a preferred example, ear plates are fixedly connected to the two sides of the open end of the third sliding groove on the mounting plate, threaded holes are formed in the ear plates, perforations are formed in the two ends of the baffle, and the baffle is screw-connected with the threaded holes through the perforations.

[0017] In a preferred example, a notch is formed in the open end of the first sliding groove on the bottom support.

[0018] In a preferred example, the two ends of the second sliding groove are closed.

[0019] The nouns, conjunctions or adjectives involved in the above technical scheme are explained as follows:

[0020] Fixed connection refers to the connection of parts or components after being fixed, without any relative movement. It is divided into detachable connection and non-detachable connection.

[0021] (1) The detachable connection is to fix the parts together by using screws, keys and wedge pins. This connection mode can be disassembled during maintenance, and the parts will not be damaged. However, the specifications of the connecting parts (such as the length of the bolt, key and wedge pin) must be correct, and the fastening must be appropriate.

[0022] (2) Non-removable connections mainly refer to welding, riveting, and tenon joints. Since disassembly is required by forging, sawing, or oxy-acetylene cutting during repair or replacement, the parts generally cannot be reused. At the same time, attention should be paid to the process quality, technical inspection, and remedial measures (such as correction, polishing, etc.) when making connections.

[0023] A threaded connection is a detachable connection in which threaded parts (or the threaded portion of the connected parts) are joined together as one unit.

[0024] A sliding connection refers to two objects that are in contact but not fixed, and can slide relative to each other.

[0025] A rotating connection is a connection between parts that allows the parts to rotate relative to each other.

[0026] The beneficial effects of this utility model are:

[0027] After inserting the slider at the lower end of the magnet into the third groove of the mounting plate through the opening end of the third groove, magnets are pre-installed on all three mounting plates. Next, rotate the threaded rod to drive the drive block to move to the opening end of the first groove. Align the positioning hole at the lower end of the insert with the positioning post, insert the positioning post into the positioning hole, and then rotate the threaded rod in the opposite direction to drive the drive block to move. The drive block moves the insert and the mounting plate together, and the insert is inserted from the opening end of the first groove, thus installing the mounting plate and the base, and then installing the magnet. To avoid excessive magnetic attraction between the two mounting plates, when installing the mounting plates with magnets on the base, the mounting plates with magnets that have not yet been installed are staggered with the mounting plates with magnets that have already been installed. This reduces the magnetic attraction between them and thus reduces the risk of fingers being pinched. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a first-view schematic diagram of the overall structure of an embodiment of the present utility model;

[0030] Figure 2 This is a second-view schematic diagram of the overall structure of an embodiment of this utility model;

[0031] Figure 3 This is a schematic diagram of the connection structure between the base and the mounting plate according to an embodiment of the present utility model;

[0032] Figure 4 This is an embodiment of the present utility model. Figure 3 Schematic diagram of the structure at point A in the middle;

[0033] Figure 5 is the installation plate structure schematic diagram of the embodiment of the utility model;

[0034] Figure 6 is the magnet structure schematic diagram of the embodiment of the utility model. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the utility model will be apparently and completely described in conjunction with the drawings in the embodiments of the utility model. Apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0036] In the description of the utility model, it is understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, which are only for the convenience of describing the utility model and simplifying the description, and are not indicative or suggestive of the components or elements indicated having a specific orientation, being constructed and operated in a specific orientation, and therefore cannot be understood as limiting the utility model.

[0037] According to the conception of the present application, an embodiment of the magnetic rod structure convenient to disassemble is described herein. Figures 1 to 6 Specifically, the magnetic rod structure is configured as a split structure, which has the cooperation of the bottom support 1, the installation plate 4, the magnet 5 and the like, after sequentially inserting the slider 51 at the lower end of the magnet 5 into the third sliding groove 41 on the installation plate 4 from the opening end of the third sliding groove 41, at this time, the magnet 5 is pre-installed on each of the three installation plates 4, then rotating the threaded rod 2 drives the driving block 3 to move to the opening end of the first sliding groove 11, aligning the positioning hole 43 at the lower end of the insertion strip 42 with the positioning column 31, then inserting the positioning column 31 into the positioning hole 43, and then reversely rotating the threaded rod 2 to drive the driving block 3 to move, the driving block 3 drives the insertion strip 42 and the installation plate 4 to move together, the insertion strip 42 is inserted from the opening end of the first sliding groove 11, the installation of the installation plate 4 and the bottom support 1 is realized, and then the installation of the magnet 5 is realized, in order to avoid the magnetic field force between the two installation plates 4 being too large, sequentially installing the installation plate 4 with the magnet 5 on the bottom support 1.

[0038] As shown in Figures 1 to 4 , a magnetic rod structure convenient to disassemble comprises:

[0039] The bottom support 1 is provided with three first sliding grooves 11 arranged in parallel along the length direction of the bottom support 1, one end of the first sliding groove 11 is in an open state, and the other end is in a closed state, and the lower end of each first sliding groove 11 is provided with a second sliding groove 12 communicated with the first sliding groove 11 along the length direction of the first sliding groove 11, a threaded rod 2 is arranged in the second sliding groove 12 along the length direction of the second sliding groove 12, a driving block 3 is threadedly connected to the threaded rod 2, the driving block 3 is slidably connected in the second sliding groove 12, and the upper end of the driving block 3 is fixedly connected with at least two positioning columns 31.

[0040] Three mounting plates 4 are provided with a third sliding groove 41 arranged along the length direction of the mounting plate 4, one end of the third sliding groove 41 is in an open state, and the other end is in a closed state, and the lower end of the mounting plate 4 is fixedly connected with a plug strip 42 along the length direction of the mounting plate 4, and at least two positioning holes 43 are formed in the lower surface of the plug strip 42 and close to the closed end of the third sliding groove 41.

[0041] A plurality of magnets 5 are fixedly connected with sliding blocks 51 at the lower end of the magnets 5.

[0042] After sequentially inserting the sliding blocks 51 at the lower end of the magnets 5 into the third sliding grooves 41 on the mounting plates 4 from the open ends of the third sliding grooves 41, at this time, the magnets 5 are pre-installed on the three mounting plates 4, then the threaded rod 2 is rotated to drive the driving block 3 to move to the open end of the first sliding groove 11, the positioning holes 43 at the lower end of the plug strip 42 are aligned with the positioning columns 31, then the positioning columns 31 are inserted into the positioning holes 43, and then the threaded rod 2 is reversely rotated to drive the driving block 3 to move, the driving block 3 drives the plug strip 42 and the mounting plate 4 to move together, the plug strip 42 is inserted into the open end of the first sliding groove 11, the mounting of the mounting plate 4 and the bottom support 1 is realized, and then the mounting of the magnets 5 is realized, and in order to avoid that the magnetic field suction force between the two mounting plates 4 is too large, the mounting plates 4 with the magnets 5 are sequentially mounted on the bottom support 1.

[0043] In one embodiment of the utility model, in order to facilitate the rotation of threaded rod 2, one end of threaded rod 2 is fixedly connected with hexagonal head 21.

[0044] In one embodiment of the utility model, in order to facilitate the quick insertion of positioning column 31 into positioning hole 43, the top end of positioning column 31 is in a hemispherical structure.

[0045] In one embodiment of the utility model, after the installation of magnet 5 is completed, in order to avoid that magnet 5 is separated from third sliding groove 41, the open end of third sliding groove 41 on mounting plate 4 is detachably connected with baffle 6.

[0046] In one embodiment of the utility model, the two sides of the opening end of the third sliding groove 41 on the mounting plate 4 are fixedly connected with the ear plates 44, the ear plates 44 are provided with threaded holes, the both ends of the baffle 6 are provided with through holes, and the bolt 7 is threadedly connected with the threaded holes through the through holes. When the magnet 5 is installed, the baffle 6 is connected with the mounting plate 4 by using the bolt 7, the opening end of the third sliding groove 41 is plugged, and the magnet 5 can be prevented from being separated from the third sliding groove 41.

[0047] In one embodiment of the utility model, in order to facilitate the insertion of the positioning column 31 at the upper end of the driving block 3 into the positioning hole 43, realize the connection between the insertion strip 42 and the driving block 3, and facilitate the insertion of the insertion strip 42 into the positioning hole 43, the opening end of the first sliding groove 11 on the bottom support 1 is provided with the notch 13.

[0048] In one embodiment of the utility model, in order to prevent the driving block 3 from being separated from the second sliding groove 12, the both ends of the second sliding groove 12 are closed.

[0049] In the description of the specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are contained in at least one embodiment or example of the utility model. In the specification, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0050] The basic principles, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above embodiments, and the above embodiments and the description in the specification are only illustrative of the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. A magnetic bar structure which is easy to disassemble, characterized by comprising: Include: The bottom support (1), three parallel first sliding slot (11) is set up on the length direction of the bottom support (1), the first sliding slot (11) one end is open, the other end is closed, the lower end of each first sliding slot (11) is provided with second sliding slot (12) along its length direction, the second sliding slot (12) is provided with rotating connection screw rod (2) along its length direction, the screw rod (2) is connected with driving block (3), the driving block (3) is connected in the second sliding slot (12), the upper end of the driving block (3) is fixedly connected with at least two positioning column (31); Three mounting plates (4), the third sliding slot (41) is set up on the length direction of the mounting plate (4), the third sliding slot (41) one end is open, the other end is closed, the lower end of the mounting plate (4) is fixedly connected with insertion strip (42) along its length direction, the lower surface of the insertion strip (42) and close to the closed end of the third sliding slot (41) is provided with at least two positioning hole (43); Several magnets (5), the lower end of the magnet (5) is fixedly connected with sliding block (51).

2. The magnetic bar structure of claim 1, wherein, One end of the screw rod (2) is fixedly connected with hex head (21).

3. A magnetic bar structure according to claim 2, wherein The top of the positioning column (31) is hemispherical structure.

4. The magnetic bar structure of claim 3, wherein, The mounting plate (4) is detachably connected with baffle (6) on the opening end of the third sliding slot (41).

5. A magnetic bar structure according to claim 4, wherein The mounting plate (4) is fixedly connected with ear plate (44) on both sides of the opening end of the third sliding slot (41), the ear plate (44) is provided with threaded hole, the both ends of the baffle (6) are provided with perforation, and the bolt (7) is screwed with the threaded hole through the perforation.

6. A magnetic bar structure according to claim 5, wherein The bottom support (1) is provided with notch (13) on the opening end of the first sliding slot (11).

7. The magnetic bar structure of claim 1, wherein, The both ends of the second sliding slot (12) are closed.

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