Source bottle heating device of atomic layer deposition equipment

Abstract

The utility model discloses a source bottle heating device of atomic layer deposition equipment, and relates to the technical field of source bottle heating. The device comprises a heating cylinder, a sealing ring is arranged in the heating cylinder, a temperature sensing mechanism is arranged on one side of the heating cylinder, a liquid changing hole is formed in the side wall of the heating cylinder, a connecting hose is fixedly installed in the liquid changing hole, an external box is fixedly installed at the other end of the connecting hose, and the connecting hose is communicated with the external box. A stirring mechanism is arranged on the side wall of the external box, and a heating mechanism is arranged on the external box. According to the heating device, the size of the whole heating device can be reduced by installing the external box outside the device, meanwhile, due to the fact that more parts are not installed in the atomic deposition device, the heating device can be conveniently installed and detached, meanwhile, adjustment can be conducted according to the size of the device, and the heating device is convenient to use. And therefore, popularization and use of the atomic deposition equipment can be facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to source bottle heating technical field, concretely relates to a source bottle heating device of atomic layer deposition equipment. BACKGROUND

[0002] Atomic layer deposition is a kind of method that can be plated in single-atom film form on the substrate surface layer by layer, and deposition film is formed by alternately passing gas-phase precursor pulse into reactor and chemisorption and reaction on deposition matrix.

[0003] At present, the reaction gas used in atomic deposition is mostly stored in reaction source bottle, in order to ensure that the gas pressure outputted by reaction source bottle is stable, it needs to be heated in general case, but the existing equipment heating structure is mostly arranged in the equipment interior, and the universal volume of heating device is larger, so it cannot be installed in small-volume atomic layer deposition equipment, not only installation and dismounting are inconvenient, but also the popularization and use of equipment are greatly limited, therefore a source bottle heating device of atomic layer deposition equipment is proposed. UTILITY MODEL CONTENTS

[0004] The utility model aims at: for solving the existing equipment heating structure mostly arranged in the equipment interior, and the universal volume of heating device is larger, so it cannot be installed in small-volume atomic layer deposition equipment, not only installation and dismounting are inconvenient, but also the popularization and use of equipment are greatly limited, the utility model provides a source bottle heating device of atomic layer deposition equipment.

[0005] The utility model discloses a technical scheme in the specific implementation to realize the above-mentioned purpose:

[0006] A source bottle heating device of atomic layer deposition equipment, including heating cylinder, the sealing ring is arranged in the heating cylinder, and the temperature sensing mechanism is arranged on one side of the heating cylinder, the side wall of the heating cylinder is provided with the liquid replacement hole, and the connecting hose is fixedly installed in the liquid replacement hole, one end of the connecting hose is fixedly installed with the external box, and the connecting hose and the external box are connected and communicated, the side wall of the external box is provided with the stirring mechanism, and the heating mechanism is arranged on the external box.

[0007] Preferably, the temperature sensing mechanism includes an assembly plate, the assembly plate is fixedly installed on one side of the heating cylinder, and a temperature sensor is fixedly installed on the side wall of the assembly plate, one end of the temperature sensor extends into the heating cylinder.

[0008] Preferably, the stirring mechanism includes a support shaft, one end of the support shaft is rotatably installed on the side wall of the external box, and a stirring piece is arranged on the side wall of the support shaft, a driving motor is fixedly installed on the side wall of the external box, and one end of the output shaft of the driving motor is fixedly connected with the support shaft.

[0009] Preferably, the stirring piece comprises a stirring ring, which is fixedly sleeved on the side wall of the support rotating shaft, and a plurality of stirring plates are fixedly installed on the side wall of the stirring ring.

[0010] Preferably, a plurality of the stirring rings are linearly distributed on the support rotating shaft, and are equidistantly distributed.

[0011] Preferably, the heating mechanism comprises a heating plate, which is fixedly installed on the inner side wall of the external box, a control panel is fixedly installed on the side wall of the external box, and the control panel and the heating plate are electrically connected, the external box is provided with a movable cover plate, and the movable cover plate is insertedly installed in the external box.

[0012] The utility model discloses the beneficial effects are as follows:

[0013] 1、 in the utility model, install the source bottle that stores gas in the heating cylinder, then start the heating plate in the external box through the control panel, make the heating plate raise the heat conducting oil in the external box, so that the heat in the external box is transmitted to the heating cylinder through the connecting hose, then make the material in the source bottle obtain stable gas pressure feed to the deposition equipment, so that the volume of the whole heating device can be reduced by installing the external box outside the equipment, and at the same time, since more parts are not installed in the atomic deposition equipment, the installation and dismounting of the heating device can be facilitated, and the volume of the equipment can also be adjusted, thereby facilitating the popularization and use of the atomic deposition equipment. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is the front view integral three-dimensional connection structure schematic diagram of the utility model;

[0015] Fig. 2 It is the side view integral three-dimensional connection structure schematic diagram of the utility model;

[0016] Fig. 3 It is the partial section three-dimensional structure schematic diagram of the external box in the utility model.

[0017] Fig. 1, heating cylinder; 2, source bottle body; 3, sealing ring; 4, assembly plate; 5, temperature sensor; 6, connecting hose; 7, external box; 8, movable cover plate; 9, control panel; 10, driving motor; 11, liquid exchange hole; 12, heating plate; 13, support rotating shaft; 14, stirring ring; 15, stirring plate. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0020] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0021] In the description of the embodiments of the present application, it should be noted that the directions or position relationships indicated by the terms "inner", "outer", "upper", etc. are based on the directions or position relationships shown in the drawings, or the directions or position relationships of the present application product when it is usually placed, which are only for the convenience of describing the present application and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a particular direction, be constructed and operated in a particular direction, therefore, cannot be understood as a limitation on the present application.

[0022] As shown in Figs. 1-3 A source bottle heating device of an atomic layer deposition equipment, including a heating cylinder 1, a sealing ring 3 is arranged in the heating cylinder 1, and the sealing ring 3 arranged can reduce heat loss. One side of the heating cylinder 1 is provided with a temperature sensing mechanism, the temperature sensing mechanism includes an assembly plate 4, one side of the assembly plate 4 is fixedly installed on the heating cylinder 1, and a temperature sensor 5 is fixedly installed on the side wall of the assembly plate 4, one end of the temperature sensor 5 extends into the heating cylinder 1, and the temperature sensor 5 arranged can better detect the temperature of heating.

[0023] The side wall of the heating cylinder 1 is provided with a liquid changing hole 11, and the liquid changing hole 11 is fixedly installed with a connecting hose 6, the other end of the connecting hose 6 is fixedly installed with an external box 7, the connecting hose 6 and the external box 7 are in communication, and the heating oil is arranged between the heating cylinder 1 and the external box 7. The heating mechanism is arranged on the external box 7, and the heating mechanism comprises a heating plate 12, the heating plate 12 is fixedly installed on the inner side wall of the external box 7, the control panel 9 is fixedly installed on the side wall of the external box 7, and the control panel 9 and the heating plate 12 are electrically connected, the external box 7 is provided with a movable cover plate 8, the movable cover plate 8 is inserted and installed in the external box 7, and the movable cover plate 8 and the side wall of the external box 7 are connected by bolts. The movable cover plate 8 can open the external box 7, so that the internal components can be maintained.

[0024] The side wall of the external box 7 is provided with a stirring mechanism, the stirring mechanism comprises a support shaft 13, one end of the support shaft 13 is rotatably installed on the side wall of the external box 7, and the side wall of the support shaft 13 is provided with a stirring piece, the stirring piece comprises a stirring ring 14, the stirring ring 14 is fixedly sleeved on the side wall of the support shaft 13, and a plurality of stirring plates 15 are fixedly installed on the side wall of the stirring ring 14. The plurality of stirring plates 15 can better drive the heat conduction oil in the external box 7 to flow.

[0025] The stirring ring 14 is provided with a plurality of stirring rings 14, the plurality of stirring rings 14 are linearly distributed on the support shaft 13, and the plurality of stirring rings 14 are equidistantly distributed, the side wall of the external box 7 is fixedly installed with a driving motor 10, and one end of the output shaft of the driving motor 10 is fixedly connected with the support shaft 13. The driving motor 10 drives the equidistantly distributed stirring rings 14 to better transfer the heat generated by the heating plate 12 to the heat conduction oil.

[0026] In summary: when assembling the heating device in the equipment, the source bottle body 2 storing gas is installed in the heating cylinder 1, then the source bottle body 2 is communicated with the heating cylinder 1 and installed in the equipment, then the heating plate 12 and the driving motor 10 in the external box 7 are started by the control panel 9, so that the heating plate 12 raises the heat conduction oil in the external box 7, then the driving motor 10 drives the support shaft 13 and the stirring plate 15 to flow, so that the heat is quickly conducted and dissipated, then the heat in the external box 7 is transferred to the heating cylinder 1 through the connecting hose 6, and the temperature sensor 5 detects the temperature in real time and transmits it to the control panel 9, so that the staff can control the heating temperature, so that the heating cylinder 1 stably heats the material in the source bottle body 2, and the material in the source bottle body 2 obtains stable gas pressure for feeding the deposition equipment.

[0027] The above description enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A source bottle heating device of an atomic layer deposition apparatus, characterized by, The utility model provides heating cylinder (1), be provided with sealing ring (3) in heating cylinder (1), and one side of heating cylinder (1) is provided with temperature sensing mechanism, the sidewall of heating cylinder (1) is opened with liquid change hole (11), and the liquid change hole (11) is fixedly installed with the connecting hose (6), the other end of connecting hose (6) is fixedly installed with external box (7), and the connecting hose (6) and external box (7) are communicated and are arranged, the sidewall of external box (7) is provided with stirring mechanism, and external box (7) is provided with heating mechanism.

2. The source bottle heating apparatus of claim 1, wherein The temperature sensing mechanism includes an assembly plate (4), one side of the assembly plate (4) is fixedly installed on the heating cylinder (1), and a temperature sensor (5) is fixedly installed on the sidewall of the assembly plate (4), one end of the temperature sensor (5) extends into the heating cylinder (1).

3. The source bottle heating apparatus of claim 1, wherein the source bottle is made of a material having a thermal conductivity of 10 W / mK or more. The stirring mechanism includes a support shaft (13), one end of the support shaft (13) is rotatably installed on the sidewall of the external box (7), and a stirring part is arranged on the sidewall of the support shaft (13), a drive motor (10) is fixedly installed on the sidewall of the external box (7), and one end of the output shaft of the drive motor (10) is fixedly connected with the support shaft (13).

4. The source bottle heating apparatus of claim 3, wherein the heating unit comprises a plurality of heating units, and each of the plurality of heating units is arranged to heat a corresponding one of the plurality of source bottles. The stirring part includes a stirring ring (14), the stirring ring (14) is fixedly sleeved on the sidewall of the support shaft (13), and a plurality of stirring plates (15) are fixedly installed on the sidewall of the stirring ring (14).

5. The source bottle heating apparatus of claim 4, wherein the heating unit comprises a plurality of heating elements, and the plurality of heating elements are arranged in a plurality of groups, and each of the plurality of groups is arranged to heat a corresponding one of the plurality of source bottles. The stirring ring (14) is provided with a plurality of stirring rings (14), the plurality of stirring rings (14) are linearly distributed on the support shaft (13), and the plurality of stirring rings (14) are equidistantly distributed.

6. The source bottle heating apparatus of claim 1, wherein The heating mechanism includes a heating plate (12), the heating plate (12) is fixedly installed on the inner sidewall of the external box (7), a control panel (9) is fixedly installed on the sidewall of the external box (7), and the control panel (9) and the heating plate (12) are electrically connected, the external box (7) is provided with a movable cover plate (8), and the movable cover plate (8) is inserted and installed in the external box (7).

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