Special gas inlet gas circuit device

Abstract

The utility model discloses a special gas inlet gas circuit device which comprises a cavity and a crucible, the crucible is arranged in the cavity, a connecting guide pipe is inserted into the upper portion of the cavity, one end of the connecting guide pipe is connected with an equal-diameter three-way pipe, special gas is guided in along a gas inlet of the equal-diameter three-way pipe, and the other end of the connecting guide pipe is connected with a gas outlet of the equal-diameter three-way pipe. One end, far away from the equal-diameter three-way pipe, of the connecting guide pipe is connected with a graphite rod, and the graphite rod is inserted into the crucible, so that special gas is introduced into the crucible along the graphite rod; and the connecting guide pipe is connected with a view window so as to measure the temperature in the crucible. According to the special gas inlet gas circuit device provided by the utility model, the graphite rod is connected to the connecting guide pipe, and special gas enters along the gas inlet connected with the equal-diameter three-way pipe, passes through the connecting guide pipe and enters the crucible through the graphite rod, so that the crucible is rapidly, uniformly and completely filled with the special gas, and the growth quality of crystals is ensured. The structure is simple, manufacturing is easy, operation is convenient, the defects of a traditional air inlet mode can be effectively overcome, and feasibility is high.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of Sic single crystal growth equipment, especially a gas path device of special gas inlet. BACKGROUND

[0002] The special gas control technology ensures the optimal state of gas supply in the semiconductor manufacturing process through precise flow control, real-time monitoring of gas purity and pressure, and strict management of the entire gas environment, thereby ensuring that the semiconductor device can be accurately manufactured according to the design specifications.

[0003] The role of special gas in SiC growth mainly manifests in the following aspects:

[0004] 1. Providing necessary reactants: In the process of SiC growth, special gas participates in chemical reactions as a reactant to form the required crystal structure. For example, in the chemical vapor deposition (CVD) process, special gases such as silane and methane are used to provide silicon and carbon sources, and SiC crystals are generated through chemical reactions;

[0005] 2. Controlling growth conditions and rate: The flow, pressure, and concentration of special gas have an important influence on the growth rate and crystal quality of SiC. By accurately controlling these parameters, the growth conditions can be optimized to obtain high-quality SiC crystals;

[0006] 3. Influencing crystal structure and performance: The type and proportion of special gas can affect the structure and performance of SiC crystals. For example, different gas compositions and proportions can result in SiC crystals with different morphologies and electrical properties, which are very important for specific applications;

[0007] 4. Improving production efficiency and reducing cost: By accurately controlling the use of special gas, the growth efficiency of SiC crystals can be improved, and the waste rate can be reduced, thereby reducing production costs.

[0008] Traditional equipment directly designs a special gas interface on the cavity. Due to the relatively large volume of the chamber, it becomes slow and uneven for the special gas to completely fill the crucible, affecting the crystal growth environment and thus affecting the crystal growth quality.

[0009] Therefore, it is urgent to design a special gas inlet gas path device to solve the problem of the above-mentioned special gas fully entering the crucible. Utility model content

[0010] To solve the technical problem of directly designing a special gas interface on the cavity in the background art, due to the relatively large volume of the chamber, the special gas completely fills the crucible slowly and unevenly, affecting the crystal growth environment and thus affecting the crystal growth quality, a special gas inlet gas path device is provided to solve the problem of the special gas fully entering the crucible.

[0011] To achieve the above object, the technical scheme of the gas path device for special gas intake is as follows:

[0012] The gas path device for special gas intake comprises a cavity and a crucible, the crucible is arranged in the cavity, a connecting guide pipe is inserted into the cavity from above, one end of the connecting guide pipe is connected with an equal-diameter three-way pipe, special gas is introduced along the gas inlet of the equal-diameter three-way pipe, a graphite rod is connected with the end of the connecting guide pipe away from the equal-diameter three-way pipe, the graphite rod is inserted into the crucible, so that the special gas is introduced into the crucible along the graphite rod, and a window is connected with the connecting guide pipe, so as to measure the temperature inside the crucible.

[0013] Further, one end of the connecting guide pipe is provided with an internal thread, one end of the graphite rod is provided with a thread structure, and the graphite rod is screwed with the connecting guide pipe through the thread structure.

[0014] Further, a first opening is arranged above the cavity, the connecting guide pipe is inserted into the cavity along the first opening, and the first flange plate of the connecting guide pipe is screwed with the first opening of the cavity through a first clamp.

[0015] Further, a second flange plate is connected with the connecting guide pipe, the second flange plate is arranged above the first flange plate, and the second flange plate is screwed with the first connecting port of the equal-diameter three-way pipe through a second clamp.

[0016] Further, a second connecting port is arranged on the side wall of the equal-diameter three-way pipe, the second connecting port and the gas inlet are screwed through a third clamp, so that the gas inlet is connected with the equal-diameter three-way pipe.

[0017] Further, a third connecting port is arranged at the end of the equal-diameter three-way pipe away from the first connecting port, and the third connecting port is connected with the window through a fourth clamp.

[0018] Further, a second opening is arranged on the crucible, the second opening and the first opening are arranged on the same straight line, so that the graphite rod is inserted into the second opening of the crucible in the vertical direction.

[0019] Further, the gas inlet comprises a third flange plate and a connecting pipe, one end of the connecting pipe is connected with the third flange plate perpendicularly, and the end of the connecting pipe away from the third flange plate is connected with the special gas inlet pipe.

[0020] Further, a first sealing ring is clamped between the first flange plate and the first opening, so that the cavity is sealed.

[0021] Further, a second sealing ring is connected with the first connecting port, the second connecting port and the third connecting port, so that the gas path connected with the connecting guide pipe, the equal-diameter three-way pipe and the gas inlet is sealed.

[0022] The gas path device for special gas intake has the following advantages:

[0023] The special gas enters through the gas inlet connected with the equal-diameter tee pipe, passes through the connecting guide pipe, and enters the crucible through the graphite rod, so that the special gas quickly and uniformly fully fills the crucible, and the growth quality of the crystal is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a whole structure schematic view of the gas path device of the special gas gas inlet of the utility model;

[0025] Figure 2 It is a structure schematic view of the connecting guide pipe of the gas path device of the special gas gas inlet of the utility model;

[0026] Figure 3 It is a structure schematic view of the gas inlet of the gas path device of the special gas gas inlet of the utility model;

[0027] Figure 4 It is a structure schematic view of the window of the gas path device of the special gas gas inlet of the utility model.

[0028] Mark description in the drawing:

[0029] 1, cavity; 2, crucible; 3, connecting guide pipe; 4, equal-diameter tee pipe; 5, gas inlet; 6, graphite rod; 7, window; 8, first opening; 9, second opening; 10, first flange plate; 11, second flange plate; 12, third flange plate; 13, first connecting port; 14, second connecting port; 15, third connecting port; 16, first clamp; 17, second clamp; 18, third clamp; 19, fourth clamp; 20, connecting pipe. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model, obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor are within the protection scope of the utility model.

[0031] The person skilled in the art can understand that although some embodiments herein include certain features instead of other features included in other embodiments, the combination of features of different embodiments means being within the scope of the utility model and forming different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0032] Reference will now be made to the drawings Figure 1 to the drawings Figure 4 The utility model discloses a gas path device of special gas intake.

[0033] As Figure 1 The utility model discloses a gas path device of special gas intake, including cavity 1 and crucible 2, crucible 2 sets up in cavity 1, and the cavity 1 top inserts and connects guide pipe 3, and one end of connecting guide pipe 3 is connected with equal diameter three -way pipe 4, and special gas is guided into along the gas inlet 5 of equal diameter three -way pipe 4, and the one end of connecting guide pipe 3 is connected with graphite rod 6 away from equal diameter three -way pipe 4, and graphite rod 6 inserts into crucible 2, so that special gas passes into crucible 2 along graphite rod 6, and the window 7 is connected on connecting guide pipe 3 to measure the temperature inside crucible 2.

[0034] Through connecting graphite rod 6 on connecting guide pipe 3, special gas enters along the gas inlet 5 connected with equal diameter three -way pipe 4, passes through connecting guide pipe 3, and enters into crucible 2 through graphite rod 6, so that special gas fills crucible 2 completely quickly and evenly, and the quality of crystal growth is guaranteed.

[0035] Further, as Figure 1 And Figure 2 The one end of connecting guide pipe 3 is equipped with internal thread, and the one end of graphite rod 6 is the thread structure, and graphite rod 6 is screwed with connecting guide pipe 3 through the thread structure, and the top of cavity 1 is equipped with first opening 8, and connecting guide pipe 3 inserts into cavity 1 along first opening 8, and the first flange plate 10 of connecting guide pipe 3 is screwed tightly with the first opening 8 of cavity 1 through first clamp 16, and the second flange plate 11 is connected on connecting guide pipe 3, and the second flange plate 11 is located above first flange plate 10, and the second flange plate 00 is screwed tightly with the first connecting port 13 of equal diameter three -way pipe 1 through second clamp 17.

[0036] In the embodiment, preferably, the port of the one end of connecting guide pipe 3 is internal thread structure, and the one end of graphite rod 6 is external thread structure, and graphite rod 6 is connected on connecting guide pipe 3 by screwing the external thread structure of graphite rod 6 with the internal thread structure of connecting guide pipe 3, and graphite rod 6 is selected to make the temperature in crucible 2 reach at least 2000 DEG C or above, and metal material cannot bear such high temperature, so graphite rod 6 of graphite material is used to pass special gas into crucible 2, and provides stable environment for crystal growth.

[0037] The first opening 8 is located at the center of the upper surface of the cavity 1. The connecting guide pipe 3 is inserted into the first opening 8 in the vertical direction, so that the connecting guide pipe 3 is inserted into the cavity 1. The outer wall of the connecting guide pipe 3 is connected with the first flange plate 10. Preferably, the first flange plate 10 is connected perpendicularly to the outer wall of the connecting guide pipe 3 in the circumferential direction of the connecting guide pipe 3. The first flange plate 10 and the flange plate of the first opening 8 are tightened by the first clamp 16.

[0038] Preferably, the outer wall of the connecting guide pipe 3 is connected with the second flange plate 11, which is parallel to the first flange plate 10 and located at the upper end of the connecting guide pipe 3. The second flange plate 11 is connected with the first connecting port 13 of the equal-diameter tee pipe 4 through the second clamp 17, so as to realize the communication between the equal-diameter tee pipe 4 and the connecting guide pipe 3.

[0039] Further, as shown in Figure 1 and Figure 4 , the side wall of the equal-diameter tee pipe 4 is provided with the second connecting port 14. The second connecting port 14 and the air inlet 5 are tightened by the third clamp 18, so as to connect the air inlet 5 to the equal-diameter tee pipe 4. The end of the equal-diameter tee pipe 4 away from the first connecting port 13 is provided with the third connecting port 15, which is connected with the viewing window 7 through the fourth clamp 19. The crucible 2 is provided with the second opening 9, which is located on the same straight line with the first opening 8, so as to vertically insert the graphite rod 6 into the second opening 9 of the crucible 2.

[0040] In this embodiment, preferably, the side wall of the equal-diameter tee pipe 4 is connected with a branch pipe, and the second connecting port 14 is connected to the branch pipe. The second connecting port 14 is connected with the air inlet 5 through the third clamp 18, so as to realize the sealed structure between the air inlet 5 and the equal-diameter tee pipe 4.

[0041] The upper end of the equal-diameter tee pipe 4 is the third connecting port 15, which is sealed and connected with the viewing window 7 through the fourth clamp 19. Preferably, the viewing window 7 is a vacuum viewing window, which can play a sealing role and can also be used as a temperature measurement window.

[0042] The upper end of the crucible 2 is provided with the second opening 9. Preferably, the crucible 2 is located at the lower side inside the cavity 1, and the second opening 9 of the crucible 2 is located on the same straight line with the first opening 8 of the cavity 1 in the vertical direction, so as to ensure that the graphite rod 6 can be inserted into the crucible 2 in the vertical direction after the connecting guide pipe 3 enters the cavity 1 through the first opening 8.

[0043] Further, as shown in Figure 1 and Figure 3The air inlet 5 comprises a third flange plate 12 and a connecting pipe 20, one end of the connecting pipe 20 is connected with the third flange plate 12 perpendicularly, and the other end of the connecting pipe 20 is connected with a special gas inlet pipe; the first flange plate 10 and the first opening 8 are clamped with a first sealing ring, so that the cavity 1 is sealed; the first connecting port 13, the second connecting port 14 and the third connecting port 15 are all connected with a second sealing ring, so that the gas path connected by the connecting guide pipe 3, the equal-diameter tee pipe 4 and the air inlet 5 is sealed.

[0044] In the embodiment, the air inlet 5 is composed of the third flange plate 12 and the connecting pipe 20, preferably, the connecting pipe 20 is connected with the third flange plate 12 perpendicularly, and the connecting pipe 20 is connected with the special gas inlet pipe, so that the special gas enters the equal-diameter tee pipe 4 through the connecting pipe.

[0045] The first flange plate 10 and the first opening 8 are clamped with a first sealing ring; the first connecting port 13 and the second flange plate 11, the second connecting port 14 and the third flange plate 15 of the air inlet 5, and the third connecting port 15 and the window port 7 are all clamped with a second sealing ring, so that the gas path connected by the connecting guide pipe 3, the equal-diameter tee pipe 4 and the air inlet 5 is in a sealed state, preferably, the first sealing ring and the plurality of second sealing rings are all O-rings.

[0046] The assembly steps of the gas path device of the special gas inlet in the utility model are as follows:

[0047] Firstly, the graphite rod 6 is screwed into the connecting guide pipe 3, then the other end of the graphite rod 6 is inserted into the crucible 2, the first flange plate 10 of the connecting guide pipe 3 and the first opening 8 of the cavity 1 are clamped with a first sealing ring, and the first clamp 16 is tightened;

[0048] Then, the second flange plate 11 of the connecting guide pipe 3 and the first connecting port 13 of the equal-diameter tee pipe 4 are clamped with a second sealing ring, and the second clamp 17 is tightened;

[0049] Then, the third flange plate 12 of the air inlet 5 and the second connecting port 14 are clamped with a second sealing ring, the third clamp 18 is tightened, the window port 7 and the third connecting port 15 are clamped with a second sealing ring, and the fourth clamp 19 is tightened;

[0050] Finally, the special gas inlet pipe is connected with the connecting pipe 20 of the air inlet 5, the special gas enters the crucible 2 through the graphite rod 6 connected by the connecting guide pipe 3 along the equal-diameter tee pipe 1.

[0051] The utility model discloses a gas path device based on special gas admission, through the graphite bar 6 of screwing in the one end of connecting guide pipe 3, and the special gas enters along with the gas inlet 5 of equal diameter tee pipe 4 connection, passes through connecting guide pipe 3, and through graphite bar 6 enters into the crucible 2, makes the special gas full filling crucible 2 quickly and evenly, guarantees the growth quality of crystal.

[0052] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments are not required to be exhausted. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. An air path device for special gas intake, characterized by, The utility model provides a special gas heating device, including cavity and crucible, the crucible is arranged in the cavity, the connecting guide pipe is inserted above the cavity, one end of connecting guide pipe is connected with equal diameter tee pipe, and special gas is guided into along the gas inlet of equal diameter tee pipe, the graphite rod is connected with the one end of connecting guide pipe away from equal diameter tee pipe, and the graphite rod is inserted into the crucible, so that special gas is guided into the crucible along the graphite rod, and the window is connected on connecting guide pipe to measure the temperature inside the crucible.

2. The gas passage device according to claim 1, wherein The one end of connecting guide pipe is provided with internal thread, and the one end of graphite rod is provided with threaded structure, and the graphite rod is screwed with connecting guide pipe through threaded structure.

3. The gas path device of claim 1, wherein The first opening is arranged above the cavity, and the connecting guide pipe is inserted into the cavity along the first opening, and the first flange plate of connecting guide pipe is screwed with the first opening of cavity through the first clamp.

4. The gas path device according to claim 3, wherein The second flange plate is connected on connecting guide pipe, and the second flange plate is located above the first flange plate, and the second flange plate is screwed with the first connecting port of equal diameter tee pipe through the second clamp.

5. The gas path device of claim 4, wherein The second connecting port is arranged on the side wall of equal diameter tee pipe, and the second connecting port and gas inlet are screwed through the third clamp, so that the gas inlet is connected on equal diameter tee pipe.

6. The gas path device of claim 4, wherein The third connecting port is arranged on the one end of equal diameter tee pipe away from the first connecting port, and the third connecting port is connected with the window through the fourth clamp.

7. The gas path device of claim 2, wherein The second opening is arranged on the crucible, and the second opening is located on the same straight line with the first opening, so that the graphite rod is inserted into the second opening of crucible along the vertical direction.

8. The gas path device of claim 5, wherein The gas inlet includes the third flange plate and the connecting pipe, and the one end of connecting pipe is connected with the third flange plate perpendicularly, and the one end of connecting pipe away from the third flange plate is connected with the special gas inlet pipe.

9. The gas path device of claim 3, wherein The first sealing ring is clamped between the first flange plate and the first opening, so that the cavity is sealed.

10. The gas path device of claim 6, wherein The second sealing ring is connected on the first connecting port, the second connecting port and the third connecting port, so that the gas path connected with connecting guide pipe, equal diameter tee pipe and gas inlet is sealed.

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