Lifting device and deposition equipment

Abstract

The utility model discloses a lifting device and deposition equipment. The lifting device comprises a support, a movable assembly, a driving assembly and a carrying plate. The movable assembly comprises a fixed part and a movable part, the fixed part is connected to the support, the movable part is connected to the fixed part, and the movable part is driven to move in the first direction relative to the fixed part; the driving assembly is connected to the fixed part and comprises a driving part, and the driving part is connected to the movable part so as to drive the movable part to move; the carrying plate is connected to the movable part, moves along with the movable part in the first direction and is used for carrying a sample. According to the lifting device, the distance between the carrying plate and the spraying assembly can be conveniently adjusted, and the deposition efficiency of samples is improved. The deposition equipment with the lifting device also has the advantages.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of atomic layer deposition equipment, especially to a lifting device and deposition equipment. BACKGROUND

[0002] In the atomic layer deposition process, the distance between the spray assembly and the object plate for spraying deposition material is often adjusted to improve the uniformity and density of the atomic layer deposition film.

[0003] In the related art, the distance between the object plate and the spray assembly is changed by replacing spray assemblies of different thicknesses. However, this method requires the spray plate to be disassembled and assembled when adjusting the distance, which is relatively complicated and requires more cost, resulting in low deposition efficiency of the sample. SUMMARY

[0004] The utility model aims at at least one of the technical problems existing in the prior art. To this end, the utility model provides a lifting device that can conveniently adjust the distance between the object plate and the spray assembly and improve the deposition efficiency of the sample.

[0005] The utility model further provides a deposition equipment with the above lifting device.

[0006] The lifting device according to the first aspect of the utility model comprises a support, a movable assembly, a driving assembly, and an object plate.

[0007] The movable assembly comprises a fixed part and a movable part. The fixed part is connected to the support, and the movable part is connected to the fixed part and moves along a first direction relative to the fixed part under the drive. The driving assembly is connected to the fixed part and comprises a driving part connected to the movable part to drive the movable part to move. The object plate is connected to the movable part and moves along the first direction with the movable part. The object plate is used to carry the sample.

[0008] The lifting device according to the utility model has the following advantages: the support supports and fixes the movable assembly, the driving assembly, and the object plate, so that the object plate can carry the sample for deposition processing. The driving part of the driving assembly is connected to the movable part, so that the movable part can move along the first direction relative to the fixed part, thereby driving the object plate to move, and the distance between the object plate and the spray assembly is adjusted, which simplifies the operation of distance adjustment and reduces the cost required for adjustment.

[0009] According to some embodiments of the utility model, the lifting device further includes a sealing element, the sealing element is connected to the movable part and is arranged between the movable part and the object plate along the first direction, the inside of the sealing element defines a sealed cavity, the object plate is formed with an extension along the first direction, and the extension is arranged in the sealed cavity.

[0010] According to some embodiments of the utility model, the sealing element has opposite first and second ends along the first direction, the first end is connected to the movable part, and the second end is fixedly arranged, the sealing element is telescopically connected to the movable part and the object plate, and the first end moves along the first direction with the movable part.

[0011] According to some embodiments of the utility model, the lifting device further includes a limiting element, the limiting element is connected to one side of the movable part facing the sealing element, the limiting element corresponds to the second end along the first direction, and the limiting element moves along the first direction with the movable part.

[0012] According to some embodiments of the utility model, the limiting element includes a connecting part and an adjusting part connected to each other, the connecting part is connected to one side of the movable part facing the sealing element, and the adjusting part moves along the first direction relative to the connecting part.

[0013] According to some embodiments of the utility model, the movable part includes a supporting element and a movable element connected to each other, the movable element is movably connected to the fixed part and the driving part and drives the supporting element to move along the first direction relative to the fixed part, and the object plate is connected to the supporting element.

[0014] According to some embodiments of the utility model, the movable element is slidably connected to the fixed part, and the movable element can slide along the first direction relative to the fixed part to drive the supporting element to move;

[0015] Or, the movable element is rotatably connected to the fixed part, the movable element has a central axis, and the movable element can rotate around the central axis relative to the fixed part to drive the supporting element to move.

[0016] According to some embodiments of the utility model, the movable assembly is spaced apart from two fixed parts along the second direction, two movable elements are connected to the two fixed parts respectively, and the supporting element is connected to the two movable elements to move along the first direction relative to the fixed parts, and the first direction and the second direction intersect.

[0017] According to some embodiments of the utility model, the movable assembly further includes a guide rail, the guide rail is connected to the fixed part and is arranged along the first direction, and the lifting device further includes a sensor, and the sensor is connected to the guide rail.

[0018] The deposition device according to the second aspect of the present application comprises a bin body, a spraying assembly and the lifting device described in any of the above embodiments.

[0019] The bin body defines a deposition cavity; the spraying assembly is connected to the bin body and arranged in the deposition cavity, and is used for introducing deposition material into the deposition cavity; the support of the lifting device is connected to the bin body, the object plate is accommodated in the deposition cavity and corresponds to the spraying assembly in the first direction, and the object plate moves relative to the spraying assembly in the first direction.

[0020] The deposition device according to the embodiment of the present application has at least the following beneficial effects: the object plate is driven to move in the first direction by the driving assembly of the lifting device. Since the object plate corresponds to the spraying assembly in the first direction, the distance between the object plate and the spraying assembly can be changed when the object plate moves, thereby simplifying the operation of adjusting the distance and improving the deposition efficiency of the sample.

[0021] Additional aspects and advantages of the present application will be described in part in the following description, become apparent from the following description, or be understood from the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0022] The present application will be further described below in combination with the drawings and embodiments, wherein:

[0023] Figure 1 FIG. 1 is a schematic view of the lifting device in the embodiment of the present application;

[0024] Figure 2 FIG. 2 is an exploded view of the lifting device in the embodiment of the present application;

[0025] Figure 3 FIG. 3 is a schematic view of the lifting device in the embodiment of the present application;

[0026] Figure 4 FIG. 4 is a schematic view of the connection between the support and the movable assembly in the embodiment of the present application;

[0027] Figure 5 FIG. 5 is an enlarged view of A in FIG. 4; Figure 4

[0028] Figure 6 FIG. 6 is a schematic view of the deposition device in the embodiment of the present application.

[0029] REFERENCE SIGNS:

[0030] ​Deposition device 10; lifting device 100; support 110; movable assembly 120; fixed part 121; transmission shaft 1211; movable part 122; support 1221; movable piece 1222; guide rail 123; driving assembly 130; driving part 131; coupling 132; object plate 140; extension 141; sealing piece 150; sealing cavity 151; first end 152; second end 153; flange 154; limiting piece 160; connecting part 161; adjusting part 162; sensor 170; bin body 200; deposition cavity 210; spraying assembly 300. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only, and are used to explain the present application, and cannot be understood as a limitation of the present application.

[0032] In the description of the present application, it should be understood that, in relation to the orientation description, for example, the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0033] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0034] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical scheme.

[0035] In the description of the present utility model, the description of the reference terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present utility model. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0036] The lifting device of the first aspect embodiment of the present utility model and the deposition equipment of the second aspect embodiment will be described below with reference to the accompanying drawings of the present specification. It should be noted that, in order to facilitate description and understanding, in the embodiments of the present utility model, the downward direction is taken as the first direction, and the left-right direction is taken as the second direction. The first direction and the second direction intersect each other.

[0037] The present utility model provides a deposition equipment 10. Referring to Figures 1 to 6 It should be noted that, in order to facilitate the display of the structure inside the bin body 200, Figure 6 The bin body 200 and the components connected to the bin body 200 are processed in cross section in the drawings, Figure 6 The oblique lines in the drawings are cross-section lines. The deposition equipment 10 includes a bin body 200, a spraying assembly 300 and a lifting device 100. The interior of the bin body 200 defines a deposition cavity 210, which is used to accommodate a sample for deposition processing. The spraying assembly 300 is connected to the bin body 200 and is arranged in the deposition cavity 210. The materials required for deposition (such as gas containing target deposition material chemical elements, steam) are introduced by the spraying assembly 300. The support 110 is fixedly connected to the bin body 200, the object plate 140 is accommodated in the deposition cavity 210, and the object plate 140 corresponds to the spraying assembly 300 in the upward and downward direction, so that the material for deposition can be conducted to the surface of the sample to react with the sample. The object plate 140 can move relative to the spraying assembly 300 in the upward and downward direction, so as to change the distance between the object plate 140 and the spraying assembly 300.

[0038] Specifically, in this embodiment, the carrier plate 140 and the spraying assembly 300 are arranged in the up-down direction. In other embodiments, the carrier plate 140 and the spraying assembly 300 can also be arranged in the left-right direction, or arranged in the front-back direction, or arranged in other directions, as long as the deposited substance can be sprayed onto the sample. After the sample is placed on the carrier plate 140, the distance between the spraying assembly 300 and the carrier plate 140 is adjusted by controlling the driving part 131 to drive the carrier plate 140 to move in the up-down direction relative to the spraying assembly 300, so that the deposited substance reacts with the surface of the sample to be deposited, thereby improving the uniformity and density of the atomic layer deposition film. After completing the first round of deposition reaction, the first round of deposited substance is cleaned by the spraying assembly 300 to pass in the cleaning gas, so that the deposition cavity 210 is in a clean state. Then new deposition substance is passed through the spraying assembly 300 to perform the second round of deposition reaction. Repeat this process until the sample reaches the desired deposition effect.

[0039] The deposition equipment 10 of the embodiment of the utility model drives the carrier plate 140 to move in the up-down direction through the driving assembly 130 of the lifting device 100. Since the carrier plate 140 corresponds to the spraying assembly 300 in the up-down direction, the distance between the carrier plate 140 and the spraying assembly 300 can be changed when the carrier plate 140 moves, thereby simplifying the operation of adjusting the distance and improving the deposition efficiency of the sample.

[0040] The first aspect embodiment of the utility model provides a lifting device 100 for improving the deposition efficiency of the sample, referring to Figure 1 and Figure 2 The lifting device 100 includes a support 110, a movable assembly 120, a driving assembly 130 and a carrier plate 140, wherein the support 110 is used to provide support and fixation for the movable assembly 120, the driving assembly 130 and the carrier plate 140. The movable assembly 120 includes a fixed part 121 and a movable part 122. The fixed part 121 is connected to the support 110 to fix the movable assembly 120 on the support 110. The movable part 122 is connected to the fixed part 121. In this embodiment, the movable part 122 is arranged on the side of the fixed part 121 away from the support 110. Since the movable part 122 will move in the up-down direction relative to the fixed part 121 under the driving, the relative arrangement of the movable part 122 and the support 110 can avoid the support 110 hindering the movement of the movable part 122. In other embodiments, the movable part 122 can also be arranged on the side different from the side of the fixed part 121 connected to the support 110, that is, the movable part 122 and the support 110 are connected to different sides of the fixed part 121. In another embodiment, the movable part 122 and the support 110 can be connected to the same side of the fixed part 121. As long as the movable part 122 has sufficient movement space.

[0041] The driving assembly 130 is connected to the fixed part 121. The driving assembly 130 comprises a driving part 131 connected to the movable part 122 to drive the movable part 122 to move up and down relative to the fixed part 121. In this embodiment, the movable part 122 is driven to move relative to the fixed part 121 by a motor, and the driving part 131 is a motor shaft of the motor. The driving part 131 is connected to the movable part 122 through a coupling 132 to provide power for the movement of the movable part 122. In other embodiments, the movable part 122 can also be driven to move relative to the fixed part 121 by hydraulic drive or internal combustion engine drive. The object plate 140 is connected to the movable part 122, and the object plate 140 is used to carry the sample to be deposited. Under the driving of the driving part 131, the movable part 122 drives the object plate 140 to move up and down, so as to realize the lifting of the object plate 140.

[0042] Specifically, when the sample needs to be deposited, the sample needs to be carried on the object plate 140. Then the driving part 131 is controlled to drive the movable part 122 to move up and down, and at the same time, the object plate 140 is driven by the movable part 122 to move up and down with the sample, so as to move away from or close to the spraying assembly 300 according to the need of depositing the sample, and to realize the adjustment between the object plate 140 and the spraying assembly 300. The spraying assembly 300 is used to conduct the deposition material to react with the sample to realize atomic layer deposition.

[0043] In the related art, when the distance between the spraying assembly 300 and the object plate 140 needs to be adjusted, the distance between the spraying assembly 300 and the object plate 140 is often adjusted by a small amount or different thickness of the spraying assembly 300 is replaced, so as to change the distance between the object plate 140 and the spraying assembly 300. Thus, the operation steps of adjusting the distance are complicated, and the time, labor and material costs are high. The lifting device 100 of the embodiment of the utility model supports and fixes the movable assembly 120, the driving assembly 130 and the object plate 140 through the support 110, so that the object plate 140 can carry the sample for deposition processing. And the driving part 131 is connected to the movable part 122, the movable part 122 can move up and down relative to the fixed part 121 by controlling the operation of the driving part 131, so as to drive the object plate 140 to move, thereby realizing the distance adjustment between the object plate 140 and the spraying assembly 300, and simplifying the operation of the distance adjustment and reducing the cost of the adjustment.

[0044] In some embodiments, reference can be made to Figure 1 , Figure 2 and Figure 6As shown, the lifting device 100 further comprises a sealing member 150, which is connected to the movable part 122 at a side of the movable part 122 facing the carrier plate 140, and is arranged between the movable part 122 and the carrier plate 140. The sealing member 150 has a hollow structure inside, which defines a sealing cavity 151. A side of the carrier plate 140 facing the sealing member 150 extends in the up-down direction to form an extension 141, and the extension 141 is arranged in the sealing cavity 151 to connect and fix the carrier plate 140 with the sealing member 150.

[0045] Specifically, when the carrier plate 140 carries the sample for deposition processing, the deposition cavity 210 where the sample is located needs to be vacuumized to effectively avoid the interference of gas on the deposition process (e.g., oxidation reaction of the sample), so as to ensure the deposition quality and stability. Since the carrier plate 140 needs to be connected with the heating plate and other components in the deposition cavity 210, and the heating plate needs to be connected with the power supply through the wire, the wire needs to extend out of the deposition cavity 210 to reduce the accelerated aging of the wire caused by the vacuum environment. The wire is led out of the extension 141 of the carrier plate 140 and accommodated in the sealing cavity 151. The sealing member 150 can avoid the wire from being abraded due to extrusion when the carrier plate 140 moves along with the movable part 122 in the up-down direction, so as to protect the wire. Meanwhile, the sealing member 150 can also protect the vacuum environment in the deposition cavity 210, so as to avoid the gas in the atmospheric environment from entering the deposition cavity 210 to destroy the vacuum environment, thereby improving the deposition quality and efficiency of the sample. In this embodiment, the sealing member 150 is connected and fixed to the movable part 122 through the flange 154. The flange 154 can not only provide sufficient connection strength for the connection between the sealing member 150 and the movable part 122, but also provide good air tightness at the connection to prevent gas from entering the sealing member 150. In other embodiments, the sealing member 150 can also be connected to the fixed part 121 in a fixed manner (e.g., welding), or in a detachable manner such as threaded connection or clamp connection.

[0046] Further, in some embodiments, as shown in Figure 1 、 Figure 2 and Figure 6 , the sealing member 150 has a first end 152 and a second end 153 arranged opposite to each other in the up-down direction, wherein the first end 152 and the second end 153 are two ends of the sealing member 150, the first end 152 is connected to the movable part 122, and the second end 153 is fixedly arranged. The sealing member 150 can be arranged between the movable part 122 and the carrier plate 140 in an extendable manner, so that the first end 152 can move along with the movable part 122 in the up-down direction.

[0047] Specifically, as shown in Figure 6As shown, the first end 152 of the sealing member 150 is connected and fixed to the movable part 122 through the flange 154, and the second end 153 is connected to the bottom of the chamber body 200 to achieve fixed connection, and the second end 153 is kept stationary relative to the chamber body 200. When the movable part 122 moves up and down relative to the chamber body 200 to change the distance between the carrier plate 140 and the spraying assembly 300, the sealing member 150 will also be stretched or contracted accordingly. Since the lead wire will be compressed or stretched when the movable part 122 moves, the height of the lead wire in the up-down direction will change. Through the stretching and contraction of the sealing member 150, the height of the sealing member 150 in the up-down direction can be adapted to the lead wire, so that the sealing member 150 can contain the lead wire in the sealing cavity 151 in the state of contraction or stretching, thereby protecting the lead wire and prolonging the service life of the lead wire. Moreover, through the stretching and contraction of the sealing member 150, the same sealing effect can be provided to the deposition cavity 210 when the movable part 122 moves, avoiding the situation that air leakage occurs when the movable part 122 moves, thereby damaging the vacuum environment of the deposition cavity 210. In this embodiment, the sealing member 150 is a bellows. In other embodiments, the sealing member 150 can also be a hose or a rubber tube made of a material with good elasticity or stretchability.

[0048] Further, in some embodiments, referring to Figure 1 、 Figure 2 and Figure 6 , the lifting device 100 further comprises a limiting member 160 connected to one side of the movable part 122 facing the sealing member 150, the limiting member 160 corresponds to the second end 153 of the sealing member 150 in the up-down direction, and the limiting member 160 moves up and down with the movable part 122.

[0049] Specifically, referring to Figure 6 , the limiting member 160 is connected and fixed to the movable part 122. When the movable part 122 moves up and down relative to the chamber body 200, the limiting member 160 also moves up and down. The limiting member 160 corresponds to the second end 153 in the up-down direction, that is, the limiting member 160 is arranged below the second end 153, and when the limiting member 160 moves with the movable part 122, the limiting member 160 will abut against the second end 153 as the limiting member 160 continuously rises. Since the second end 153 is fixedly arranged, when the limiting member 160 is lifted upward to abut against the second end 153, the limiting member 160 will be clamped between the second end 153 and the movable part 122, thereby limiting the movement of the movable part 122 and avoiding the possibility that the movable part 122 continues to lift the carrier plate 140 upward, resulting in collision between the carrier plate 140 and the spraying assembly 300.

[0050] Further, in some embodiments, referring to Figure 2 andFigure 6 As shown, the limiting member 160 comprises a connecting portion 161 and an adjusting portion 162 connected with each other, wherein the connecting portion 161 is connected to the side of the movable portion 122 facing the sealing member 150, and the adjusting portion 162 is movably connected to the connecting portion 161, and the adjusting portion 162 can move up and down relative to the connecting portion 161. Specifically, when different samples are processed, the spacing between the object plate 140 and the spraying assembly 300 also needs to be different, and at this time, the object plate 140 has a maximum sliding stroke relative to the spraying assembly 300, that is, the minimum spacing between the object plate 140 and the spraying assembly 300. By adjusting the extension and retraction of the adjusting portion 162 relative to the connecting portion 161, the height of the object plate 140 lifted up and down when the adjusting portion 162 and the second end 153 abut can be changed, so as to control the maximum sliding stroke of the object plate 140. Therefore, by adjusting the extension and retraction of the adjusting portion 162, the sliding stroke of the object plate 140 can be controlled for different deposition samples, and further collision between the object plate 140 and the spraying assembly 300 is avoided, and the application range of the lifting device 100 is improved.

[0051] In some embodiments, referring to Figure 1 and Figure 2 As shown, the movable portion 122 comprises a support member 1221 and a movable member 1222 connected with each other. The movable member 1222 is connected to the fixed portion 121 and is driven to move up and down relative to the fixed portion 121. The support member 1221 is used to support the object plate 140, and the support member 1221 moves with the movable member 1222 to realize the movement of the object plate 140. Specifically, the support member 1221 is arranged on the side of the fixed portion 121 away from the support base 110. The movable member 1222 is connected to the fixed portion 121 and connected to the driving portion 131 and driven by the driving portion 131 to drive the support member 1221 to move along the first direction relative to the fixed portion 121. The sealing member 150, the limiting member 160 and the object plate 140 are all connected to the support member 1221, and the sealing member 150, the limiting member 160 and the object plate 140 move up and down with the support member 1221 to change the spacing between the object plate 140 and the spraying assembly 300, thereby realizing the function of freely controlling the spraying distance.

[0052] In some embodiments, the movable member 1222 is slidably connected to the fixed portion 121, and the movable member 1222 can slide up and down relative to the fixed portion 121 to drive the movement of the support member 1221. Specifically, referring to Figures 2 to 4As shown, in one of the examples, the inner portion of the fixed part 121 is provided with a transmission shaft 1211, which belongs to a part of the movable part 122, and is connected to the driving part 131 of the driving assembly 130. The transmission shaft 1211 rotates around its own axis under the driving of the driving part 131. The transmission shaft 1211 is provided with a threaded structure, and the movable part 1222 is threadedly connected to the transmission shaft 1211. When the transmission shaft 1211 rotates, the movable part 1222 moves along the transmission shaft 1211 in the up-down direction under the action of the threaded structure, so as to realize the up-down sliding of the movable part 1222 relative to the fixed part 121.

[0053] In another example, the movable part 122 further includes a belt and two rollers. The two rollers are separately arranged in the up-down direction and are connected to the fixed part 121, and one of the rollers is connected to the driving part 131 and is driven by the driving part 131. When the driving part 131 rotates, the roller connected to the driving part 131 also rotates with the driving part 131. The belt is sleeved on the two rollers. When the roller connected to the driving part 131 rotates, the belt also rotates under the friction force of the roller and the belt, so as to drive the other roller to rotate. Since the two rollers are arranged in the up-down direction, the belt is also arranged in the up-down direction. The movable part 1222 is connected to one side of the belt in the left-right direction, and when the belt rotates, the movable part 1222 slides in the up-down direction due to the rotation of the belt. In other embodiments, the movable part 1222 can also slide relative to the fixed part 121 in the up-down direction through gear transmission or chain transmission.

[0054] In other embodiments, the movable part 1222 is rotationally connected to the fixed part 121, and the movable part 1222 has a central axis and can rotate relative to the fixed part 121 around the central axis to drive the support part 1221 to move. Specifically, in one of the examples, the movable part 1222 is an eccentric circular structure, such as a cam. The movable part 1222 is connected to the driving part 131. When the driving part 131 starts to rotate, the movable part 1222 also rotates around its own central axis with the driving part 131. The support part 1221 abuts against the outer wall surface of the cam structure, and under the rotation of the movable part 1222, the support part 1221 can move in the up-down direction to different heights, so as to realize the lifting of the object plate 140. If the eccentric circle is a central symmetric structure (such as a circle), the center of the eccentric circle is arranged eccentrically with the axis of the driving part 131, that is, the central axis is arranged eccentrically with the axis. If the eccentric circle is a non-central symmetric structure, the center of the eccentric circle can be arranged concentrically with the axis of the driving part 131.

[0055] In another example, the movable member 1222 is a gear structure, and the movable member 1222 has external teeth. The movable member 1222 is driven by the driving part 131 to rotate. The support member 1221 is connected to the external teeth of the movable member 1222 through a worm. The worm is arranged in the up-down direction, and one end of the worm is connected to the movable member 1222 and the other end of the worm is connected to the support member 1221. The outer surface of the worm has helical teeth, and the helical teeth and the external teeth are matched. When the movable member 1222 rotates, the external teeth will engage with the helical teeth, so that the worm moves in the up-down direction, thereby bringing the movement of the support member 1221.

[0056] Further, in some embodiments, referring to Figures 2 to 4 As shown, the movable assembly 120 has two fixed parts 121 arranged in the left-right direction, and the two fixed parts 121 are arranged separately. The two fixed parts 121 are respectively connected with the movable member 1222, and the support member 1221 is connected to the two movable members 1222 and moves in the up-down direction relative to the fixed part 121.

[0057] Specifically, the two movable members 1222 are arranged separately in the left-right direction, thereby avoiding the outer wall surfaces of the two movable members 1222 from contacting each other and causing friction when the two movable members 1222 respectively slide on the corresponding fixed part 121, and the outer wall surfaces of the two movable members 1222 are damaged. The support member 1221 is respectively connected to the two movable members 1222 at both ends in the left-right direction, and the two movable members 1222 cooperate to drive the support member 1221 to move in the up-down direction. Since the sealing member 150, the limiting member 160 and the object plate 140 are all connected to the support member 1221, and the support member 1221 is connected to the movable member 1222, the movable member 1222 will bear most of the weight. By arranging two movable members 1222, the two movable members 1222 can jointly bear the force from the support member 1221, thereby reducing the stress on a single movable member 1222, and reducing the wear of the movable member 1222 and improving the activity stability of the movable member 1222. Moreover, since the movable member 1222 is connected to the fixed part 121 and moves relative to the fixed part 121, friction will be generated between the movable member 1222 and the fixed part 121 when the movable member 1222 moves. By arranging two movable members 1222 to reduce the weight borne by a single movable member 1222, the friction between the movable member 1222 and the fixed part 121 can be reduced, thereby reducing the wear between the movable member 1222 and the fixed part 121 and improving the service life of the movable member 1222 and the fixed part 121.

[0058] In some embodiments, referring to Figure 4 and Figure 5As shown, the movable assembly 120 further comprises a guide rail 123 connected to the fixed part 121 and arranged in the up-down direction. The lifting device 100 further comprises a sensor 170 connected to the guide rail 123. The sensor 170 is used to sense the moving stroke of the movable part 1222 to provide data for the controller.

[0059] Specifically, since the movable part 1222 moves in the up-down direction relative to the fixed part 121, the guide rail 123 is arranged in the up-down direction, and the sensor 170 is connected to the guide rail 123 in the up-down direction. In this embodiment, the number of sensors 170 is multiple, and the multiple sensors 170 are arranged in the up-down direction to test the moving stroke of the movable part 1222 in segments respectively, so as to improve the accuracy of the acquisition of the moving distance of the movable part 1222, to provide the displacement data of the movable part 1222 for the controller, and to judge whether the distance between the object plate 140 and the spraying assembly 300 meets the requirements through the displacement data of the movable part 1222. In other embodiments, the number of sensors 170 can also be one, or two, or other multiple number of features.

[0060] The embodiments of the utility model are described in detail above in combination with the drawings, but the utility model is not limited to the above-mentioned embodiments, and various changes can be made within the knowledge range possessed by the ordinary skilled in the art without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Elevator, characterized in that The lifting device comprises: a support; a movable assembly comprising a fixed part connected to the support and a movable part connected to the fixed part and movable relative to the fixed part along a first direction; a driving assembly connected to the fixed part, the driving assembly comprising a driving part connected to the movable part to drive the movable part to move; and a carrier plate connected to the movable part, the carrier plate following the movable part to move along the first direction, the carrier plate being used to carry a sample.

2. The lift device of claim 1, wherein, The lifting device further comprises a seal connected to the movable part and arranged between the movable part and the carrier plate along the first direction, an inner part of the seal defining a sealed cavity, the carrier plate being formed with an extension extending along the first direction, the extension being arranged in the sealed cavity.

3. The lift device of claim 2, wherein, The seal has opposite first and second ends along the first direction, the first end being connected to the movable part and the second end being fixedly arranged, the seal being telescopically connected to the movable part and the carrier plate, the first end following the movable part to move along the first direction.

4. The lift device of claim 3, wherein, The lifting device further comprises a limiting part connected to a side of the movable part facing the seal, the limiting part corresponding to the second end along the first direction, the limiting part following the movable part to move along the first direction.

5. The lift device of claim 4, wherein, The limiting part comprises a connecting part connected to the side of the movable part facing the seal and an adjusting part movable relative to the connecting part along the first direction.

6. The lift device of claim 1, wherein, The movable part comprises a supporting part and a movable part connected to each other, the movable part being movably connected to the fixed part and the driving part and leading the supporting part to move relative to the fixed part along the first direction, the carrier plate being connected to the supporting part.

7. The lift device of claim 6, wherein, The movable part is slidingly connected to the fixed part, the movable part being slidable relative to the fixed part along the first direction to lead the supporting part to move; or, the movable part is rotatably connected to the fixed part, the movable part having a central axis, the movable part being rotatable relative to the fixed part about the central axis to lead the supporting part to move.

8. The lift device of claim 6, wherein, The movable assembly is spaced apart from two fixed parts along a second direction, the two fixed parts being respectively connected with the movable part, the supporting part being connected to the two movable parts to move relative to the fixed parts along the first direction, the first direction and the second direction intersecting.

9. The lift device of claim 1, wherein, The movable assembly further comprises a guide rail connected to the fixed part and arranged along the first direction, the lifting device further comprising a sensor connected to the guide rail.

10. Deposition apparatus, characterized in that, The lifting device comprises: a bin body defining a deposition cavity; a spraying assembly connected to the bin body and arranged in the deposition cavity, the spraying assembly being used to introduce a deposition material into the deposition cavity; and the lifting device according to any one of claims 1 to 9, the support being connected to the bin body, the carrier plate being accommodated in the deposition cavity and corresponding to the spraying assembly along the first direction, the carrier plate moving relative to the spraying assembly along the first direction.

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