Process equipment

Abstract

The utility model discloses process equipment, and relates to the technical field of manufacturing equipment. The process equipment comprises a cabinet body, a cabinet door assembly, a guide rail assembly, a driving assembly and a plurality of locking assemblies. The upper end of a door body of the cabinet door assembly is rotationally connected with the sliding base through a hinge structure, the driving assembly is used for driving the cabinet door assembly to slide along the guide rail assembly, and the locking assembly is used for driving the door body to be close to the cabinet body so that the door body can block an opening of the cavity. According to the process equipment disclosed by the embodiment of the invention, the door body can move relative to the sliding base through the hinge structure, and the door body can conveniently open or close the opening of the cabinet body in cooperation with the driving assembly and the locking assembly, so that better sealing performance is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of manufacturing equipment, in particular to a process equipment. BACKGROUND

[0002] In the manufacturing field, some process equipment needs to have a sealed chamber to meet the process needs, such as a coating equipment. Some process equipment with horizontally sliding opening cabinet doors usually uses manual door opening, and then uses a handle to lock after being in place. When facing larger equipment, this operation is relatively laborious. In the related art, a ground rail or a crown block is used to horizontally move the door to realize the opening and closing of the door. However, the door needs to be closely attached to the cabinet in the opening direction of the cabinet to ensure sealing. The existing equipment is difficult to ensure the sealing of the door after being moved in place, and usually needs a ground rail, a crown block or other driving structures with high precision, which is high in cost. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present application is to provide a process equipment which can conveniently realize the opening and closing of the door and ensure better sealing.

[0004] In order to achieve the above purpose, the present application provides a process equipment, which comprises a cabinet, a cabinet door assembly, a guide rail assembly, a driving assembly and a plurality of locking assemblies. The cabinet forms a chamber with an opening. The guide rail assembly is connected to the cabinet. The cabinet door assembly comprises a door body, a sliding base and a hinge structure. The upper end of the door body is rotatably connected to the sliding base through the hinge structure. The sliding base is in sliding cooperation with the guide rail assembly so that the door body can selectively block or avoid the opening of the chamber. The driving assembly comprises a driving motor, a driving gear and a rack. One of the rack and the driving motor is arranged on the cabinet door assembly, and the other is arranged on the cabinet. The output end of the driving motor is connected to the driving gear. The driving gear is in engagement with the rack. The driving motor is used to drive the cabinet door assembly to slide along the guide rail assembly. The locking assemblies are used to drive the door body to approach the cabinet so that the door body blocks the opening of the chamber.

[0005] In an optional embodiment, the driving motor is fixedly connected to the sliding base, and the rack is connected to the top of the cabinet.

[0006] In an optional embodiment, the guide rail assembly comprises an upper guide rail. At least two first rollers are arranged on the sliding base. Each first roller is arranged in a spaced manner along the sliding direction of the sliding base. The outer circumferential side of the first roller abuts against the upper side of the upper guide rail.

[0007] In an optional embodiment, at least two second rollers are further arranged on the sliding base. Each second roller is arranged in a spaced manner along the sliding direction of the sliding base. The outer circumferential side of the second roller abuts against the lower side of the upper guide rail.

[0008] In an optional embodiment, the outer circumferential side of the first roller and the second roller is provided with a limiting groove, the opening width of the limiting groove is greater than the bottom width, the upper side and the lower side of the upper rail respectively abut into the limiting groove of the first roller and the second roller, and the upper rail abuts against the side wall of the limiting groove.

[0009] In an optional embodiment, the two side walls of the limiting groove are conical surfaces, the bottom wall of the limiting groove is a cylindrical surface, the upper rail has two slope surfaces at an included angle, and the two slope surfaces of the upper rail respectively abut against the two side walls of the limiting groove.

[0010] In an optional embodiment, the rail assembly comprises a lower rail, the lower rail is provided with a guide groove, and the lower end of the door body is in sliding fit with the guide groove.

[0011] In an optional embodiment, the sliding base has a first limit position and a second limit position along the sliding stroke of the rail assembly, the rail assembly comprises a first blocking piece and a second blocking piece, the first blocking piece is used for blocking the sliding base at the first limit position, and the second blocking piece is used for blocking the sliding base at the second limit position, wherein when the sliding base is at the first limit position, the door body blocks the opening of the cavity, and when the sliding base is at the second limit position, the door body avoids the opening of the cavity.

[0012] In an optional embodiment, the hinge structure comprises a first hinge seat, a connecting piece and a second hinge seat, the first hinge seat is arranged on the sliding base, the second hinge seat is arranged on the door body, and the two ends of the connecting piece are respectively hinged to the first hinge seat and the second hinge seat.

[0013] In an optional embodiment, the cabinet door assembly comprises at least two hinge structures, and the at least two hinge structures are arranged at intervals in the sliding direction of the sliding base.

[0014] In an optional embodiment, the locking assembly comprises a locking driving piece, a plug rod and a limiting piece, the locking driving piece is in transmission connection with the plug rod, the limiting piece is connected to the plug rod, the locking driving piece is used for driving the plug rod to move between a locking position and an unlocking position, the door body is provided with a locking piece, the locking piece is provided with a locking gap, when the door body moves to a position of blocking the opening of the cavity along the rail assembly, the locking gap can be inserted and matched with the plug rod located at the unlocking position, and in the process that the plug rod is driven by the locking driving piece to move to the locking position, the limiting piece can push the locking piece and drive the door body to move to the opening of the cavity, so that the door body blocks the opening of the cavity.

[0015] Through the above technical solution, the cabinet door assembly can move along the guide rail assembly under the drive of the drive assembly, thereby switching the door body between a position that blocks the cabinet cavity opening and a position that avoids the cavity opening. The door body and the sliding base are rotatably connected by a hinge structure, allowing the door body to have a certain amount of displacement in the direction facing the cavity opening. When the door body is driven by the drive assembly to the position that blocks the opening, the locking assembly can drive the door body to move towards the cabinet opening, so that the door body blocks the cabinet opening. It can be seen that the process equipment of this application embodiment allows the door body to move relative to the sliding base through the hinge structure, and in conjunction with the drive assembly and the locking assembly, allows the door body to easily open or close the cabinet opening and ensures better sealing.

[0016] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the process equipment in one embodiment of this application from a first perspective;

[0019] Figure 2 This is a schematic diagram of the process equipment in one embodiment of this application from a second perspective;

[0020] Figure 3 for Figure 1 Enlarged view of section III in the middle;

[0021] Figure 4 This is a partial schematic diagram of the process equipment in one embodiment of this application, omitting the sliding base;

[0022] Figure 5 for Figure 1 A magnified view of a local V-shape;

[0023] Figure 6 This is a schematic diagram of the cooperation between the first roller and the upper guide rail in one embodiment of this application;

[0024] Figure 7 for Figure 1 Enlarged view of section VII in the middle;

[0025] Figure 8 for Figure 1 Enlarged view of section VIII in the middle;

[0026] Figure 9 For Figure 2 Enlarged view of the middle part of the local part IX;

[0027] Figure 10 First installation schematic view of the locking member at the rear end of the door body in an embodiment of the present application;

[0028] Figure 11 Second installation schematic view of the locking member at the rear end of the door body in an embodiment of the present application.

[0029] Icon: 100-cabinet body; 101-chamber; 200-cabinet door assembly; 210-door body; 211-third roller; 220-sliding base; 221-first roller; 222-second roller; 223-limiting groove; 230-hinge structure; 231-first hinge seat; 2311-first fixed part; 232-second hinge seat; 2321-second fixed part; 233-connection member; 234-first hinge shaft; 235-second hinge shaft; 240-locking member; 241-locking gap; 300-rail assembly; 310-upper rail; 311-slope surface; 320-lower rail; 321-guiding groove; 330-stand column; 400-driving assembly; 410-driving motor; 420-driving gear; 430-rack; 500-locking assembly; 510-locking driving member; 520-inserting rod; 530-limiting member. DETAILED DESCRIPTION

[0030] The related process equipment uses a driving mechanism (such as a ground rail or a crown block) to drive the door body to move to the opening of the cabinet body to achieve the closing of the cabinet door. However, the cabinet door only moves in one direction, and it is difficult to ensure that it can be in sealing contact with the cabinet body when it moves to the opening of the cabinet body, so the driving mechanism of the equipment has high precision requirements. Moreover, the reliability of the door body of the related process equipment is poor when it slides.

[0031] In order to improve at least one of the above-mentioned deficiencies in the related art, embodiments of the present application provide a process equipment, by setting a hinge structure at the upper end of the door body, so that the door body can be close to the cabinet body to a certain extent in the direction of the opening, and cooperate with the locking assembly to drive the door body to tightly block the opening of the cabinet body.

[0032] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0033] In the description of the present application, it should be noted that the terms "inner", "outer" and the like indicate the positional or location relationship based on the positional or location relationship shown in the drawings, or the positional or location relationship when the product of the present application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0034] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "set", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0036] Figure 1 A schematic view of a process equipment in a first perspective according to an embodiment of the present application; Figure 2 A schematic view of a process equipment in a second perspective according to an embodiment of the present application; Figure 3 A Figure 1 An enlarged view of the middle part III. As Figures 1 to 3 shown, the process equipment provided by the embodiment of the present application includes a cabinet body 100, a cabinet door assembly 200, a guide rail assembly 300, a driving assembly 400 and a plurality of locking assemblies 500. The cabinet body 100 forms a chamber 101 with an opening, and the chamber 101 can be used for processing products. The guide rail assembly 300 is connected to the cabinet body 100, the cabinet door assembly 200 includes a door body 210, a sliding base 220 and a hinge structure 230, the upper end of the door body 210 is rotatably connected to the sliding base 220 through the hinge structure 230, and the sliding base 220 is slidingly matched with the guide rail assembly 300 to enable the door body 210 to selectively shield or avoid the opening of the chamber 101. The driving assembly 400 includes a driving motor 410, a driving gear 420 and a rack 430, one of the driving motor 410 and the rack 430 is arranged on the cabinet door assembly 200, and the other is arranged on the cabinet body 100, the output end of the driving motor 410 is connected to the driving gear 420, the driving gear 420 is engaged with the rack 430, and the driving motor 410 is used to drive the cabinet door assembly 200 to slide along the guide rail assembly 300, and the locking assembly 500 is used to drive the door body 210 to approach the cabinet body 100 to block the opening of the chamber 101.

[0037] In the embodiment of the present application, the sliding base 220 can drive the door body 210 to move when sliding along the guide rail assembly 300. Since the door body 210 is connected with the sliding base 220 through the hinge structure 230, the door body 210 can be close to or away from the cabinet 100 in the direction of the opening relative to the sliding base 220. When the door body 210 blocks the opening of the cavity 101, the door body 210 is opposite to the opening, and the locking assembly 500 is specifically used to drive the door body 210 blocking the opening to be close to the cabinet 100, so that the door body 210 abuts against the cabinet 100 and blocks the opening of the cavity 101. For the convenience of description, the embodiment of the present application defines that the door body 210 has a closed position, when the door body 210 is at the closed position, the door body 210 blocks the opening (opposite to the opening) and is not driven by the locking assembly 500 to abut against the cabinet 100. When the door body 210 is at the closed position, the door body 210 can be in contact with the cabinet 100 or have a certain gap. Since the movement of the door body 210 driven by the locking assembly 500 can eliminate the gap between the door body 210 and the cabinet 100, or make the door body 210 and the cabinet 100 abut against each other further, so as to ensure the sealing, the process equipment of the embodiment of the present application has relatively low requirements on the installation precision of the driving assembly 400 and the cabinet door assembly 200.

[0038] Specifically in the embodiment, the driving motor 410 is fixedly connected to the sliding base 220, and the rack 430 is connected to the top of the cabinet 100. In other embodiments, the driving motor 410 can be arranged on the top of the cabinet 100, and the rack 430 can be arranged on the sliding base 220.

[0039] The guide rail assembly 300 includes an upper guide rail 310, a lower guide rail 320 and a stand column 330. In the embodiment, one end of the upper guide rail 310 is fixedly connected to the top of the cabinet 100, and a section of the upper guide rail 310 is parallelly spaced apart from the upper edge of the opening of the cabinet 100; the other end of the upper guide rail 310 extends away from the cabinet 100 and is connected with the stand column 330, and the stand column 330 supports the upper guide rail 310. In the embodiment, the upper guide rail 310 plays a supporting and guiding role for the cabinet door assembly 200, and the lower guide rail 320 plays a supporting and guiding role for the lower end of the door body 210. The upper guide rail 310 and the lower guide rail 320 are used in combination to jointly ensure the stability of the cabinet door when sliding.

[0040] Figure 4 A partial view of the process equipment in which the sliding base 220 is omitted in an embodiment of the present application. As shown in FIG. 6, the door body 210 is directly connected with the cabinet 100 through the hinge structure 230, and the door body 210 is directly connected with the cabinet 100 through the hinge structure 230. Figure 4As shown, the sliding base 220 is provided with at least two first rollers 221, each first roller 221 is arranged along the sliding direction of the sliding base 220, and the outer circumferential side of the first roller 221 abuts against the upper side of the upper rail 310. Further, the sliding base 220 is also provided with at least two second rollers 222, each second roller 222 is arranged along the sliding direction of the sliding base 220, and the outer circumferential side of the second roller 222 abuts against the lower side of the upper rail 310. In the embodiment, the number of the first rollers 221 and the second rollers 222 is equal and one-to-one corresponding, each first roller 221 is opposite to the corresponding second roller 222 in the vertical direction, and the first roller 221 and the second roller 222 together clamp the upper rail 310. The first roller 221 and the second roller 222 together clamp the upper rail 310, so that the stability of the cabinet door assembly 200 in the vertical direction is high. In the embodiment, the sliding base 220 is provided with two first rollers 221 and two second rollers 222, and in other embodiments, the number of the first rollers 221 and the second rollers 222 can be adjusted as needed. In the embodiment, the upper side and the lower side of the upper rail 310 refer to the relative two sides of the upper rail 310 in the vertical direction in the use state of the process equipment, when the first roller 221 has a downward movement trend under the gravity or other external force factors, the upper side of the upper rail 310 can support the first roller 221, and when the second roller 222 moves upward (for example, the cabinet door assembly 200 jolts upward), the lower side of the upper rail 310 can block the upward movement of the second roller 222. The cooperation of the first roller 221 and the second roller 222 can improve the stability of the cabinet door assembly 200. It should be understood that the surface of the upper rail 310 abutting against the first roller 221 can be a plane perpendicular to the vertical direction, or can be a slope 311 (see Figure 5 ); the surface of the lower side of the upper rail 310 abutting against the second roller 222 can be a plane parallel to the vertical direction, or can be a slope.

[0041] Figure 5 For Figure 1 is an enlarged view of the partial V in the middle; Figure 6 is a schematic view of the cooperation between the first roller 221 and the upper rail 310 in an embodiment of the application. As Figure 5 and Figure 6As shown, in the present embodiment, the outer circumferential side of the first roller 221 and the second roller 222 is provided with a limiting groove 223, the opening width of the limiting groove 223 is greater than the bottom width, the upper side and the lower side of the upper rail 310 respectively abut into the limiting groove 223 of the first roller 221 and the second roller 222, and the upper rail 310 abuts against the side wall of the limiting groove 223. It should be understood that the depth direction of the limiting groove 223 in the present embodiment is the radial direction of the roller (the first roller 221 and the second roller 222), the opening and the bottom of the limiting groove 223 are opposite in the radial direction of the roller, and the two side walls of the limiting groove 223 are opposite in the axial direction of the roller. By providing the limiting groove 223, the position of the first roller 221 and the second roller 222 in the axial direction relative to the upper rail 310 can be limited, so that the first roller 221 and the second roller 222 are not easy to be separated from the upper rail 310 in the axial direction. Moreover, the opening width of the limiting groove 223 is less than the bottom width, the limiting groove 223 can be gradually contracted, stage-contraction or wave-shaped contraction in the depth direction, so that the two side walls of the limiting groove 223 have a guiding effect. Alternatively, the upper side or the lower side surface of the upper rail 310 is matched with the shape of the two side wall surfaces of the limiting groove 223. When the edge of the upper rail 310 abuts into the limiting groove 223, the position of the first roller 221 and the second roller 222 relative to the upper rail 310 can be adjusted spontaneously. Further, the two side walls of the limiting groove 223 are conical surfaces, the bottom wall of the limiting groove 223 is a cylindrical surface, the upper rail 310 has two slope surfaces 311 at an included angle, and the two slope surfaces 311 of the upper rail 310 respectively abut against the two side walls of the limiting groove 223. In other alternative embodiments, the bottom wall of the roller can also be omitted, so that the two side walls are directly connected at the bottom of the limiting groove 223, and the limiting groove 223 is V-shaped. In the present embodiment, the upper rail 310 is a strip-shaped plate body, the length direction of the upper rail 310 is the sliding direction of the cabinet door assembly 200, the width direction of the upper rail 310 is the up-down direction, and the thickness direction of the upper rail 310 is the horizontal direction. The upper side edge and the lower side edge of the upper rail 310 are respectively provided with the slope surface 311 for abutting against the wall surface of the limiting groove 223, so that the upper rail 310 can be more stable and reliable in cooperation with the first roller 221 and the second roller 222.

[0042] Figure 7 For Figure 1 An enlarged view of the partial VII. As Figure 7As shown, the lower guide rail 320 is provided with a guide groove 321, and the lower end of the door body 210 is in sliding fit with the guide groove 321. By providing the guide groove 321, the lower end of the door body 210 can be guided, so as to avoid large shaking of the lower end of the door body 210, thereby improving the stability of the door body 210. Optionally, the lower end of the door body 210 is in fit with the guide groove 321 through a third roller 211, and the axis of the third roller 211 extends along the vertical direction. It should be noted that the guide groove 321 of the lower guide rail 320 can have a certain width allowance, so that the door body 210 can be slightly displaced in the width direction of the guide groove 321, thereby enabling the locking assembly 500 to drive the door body 210 to abut against the cabinet body 100 and block the opening. When the guide groove 321 guides the door body 210, the outer peripheral surface of the third roller 211 can abut against the side wall of the guide groove 321, which not only avoids direct knocking of the door body 210 against the lower guide rail 320, but also makes the sliding of the door body 210 relative to the lower guide rail 320 more smooth. In other optional embodiments, the lower end surface and the side wall surface of the lower end of the door body 210 can be provided with a ball or other structures instead of the third roller 211. Further, the bottom of the door body 210 can also be provided with a pulley (not shown in the figure) to abut against the bottom wall of the guide groove 321, and the pulley plays a supporting role and reduces the sliding resistance. The pulley can be a common pulley with a fixed extension direction of the rotation axis, or a universal wheel.

[0043] In the embodiments of the present application, the sliding base 220 has a first limit position and a second limit position in the sliding stroke along the guide rail assembly 300. The guide rail assembly 300 includes a first blocking member (not shown in the figure) and a second blocking member (not shown in the figure), the first blocking member is used to block the sliding base 220 at the first limit position, and the second blocking member is used to block the sliding base 220 at the second limit position. When the sliding base 220 is at the first limit position, the door body 210 blocks the opening of the cavity 101 (is in the closed position or blocks the opening of the cabinet body 100), and when the sliding base 220 is at the second limit position, the door body 210 avoids the opening of the cavity 101.

[0044] Further, in order to improve the recognition ability of the position of the door body 210, the cabinet body 100 or the guide rail assembly 300 can also be provided with a position sensor to detect the door body 210 or the sliding base 220. For example, the first blocking member and the second blocking member can be respectively provided with a position sensor, which is used to generate a detection signal when the sliding base 220 reaches the first limit position and the second limit position, and the controller can control related control based on the signal. For example, when it is detected that the sliding base 220 moves to the first limit position, the locking assembly 500 is controlled to drive the door body 210 to block the opening of the cabinet body 100.

[0045] Optionally, the types of the position sensor described above include but are not limited to piezoelectric sensor, photoelectric sensor, proximity switch, ultrasonic ranging device, etc.

[0046] Please refer again to Figure 3 In the embodiment, the hinge structure 230 includes a first hinge seat 231, a connecting piece 233 and a second hinge seat 232, the first hinge seat 231 is arranged on the sliding base 220, the second hinge seat 232 is arranged on the door body 210, and the two ends of the connecting piece 233 are hingedly connected with the first hinge seat 231 and the second hinge seat 232 respectively. In the embodiment, the first hinge seat 231 and the second hinge seat 232 can be connected with the sliding base 220 and the door body 210 respectively by screws. Further, the first hinge seat 231 includes two first fixed parts 2311, the two first fixed parts 2311 are spaced in the sliding direction of the cabinet door assembly 200, and the upper end of the connecting piece 233 is hingedly connected between the two first fixed parts 2311 by a first hinge shaft 234. The second hinge seat 232 includes two second fixed parts 2321, the two second fixed parts 2321 are spaced in the sliding direction of the cabinet door assembly 200, and the lower end of the connecting piece 233 is hingedly connected between the two second fixed parts 2321 by a second hinge shaft 235. Specifically, the rotation axes of the two ends of the connecting piece 233 are parallel to the sliding direction of the cabinet door assembly 200, that is, parallel to the extension direction of the upper guide rail 310. By arranging the first hinge seat 231, the connecting piece 233 and the second hinge seat 232 which are connected in sequence to rotate, the door body 210 has two rotation axes, so it has higher degree of freedom. When the door body 210 rotates as a whole around the sliding base 220, it can keep vertical, so it can be well fitted with the opening edge of the cabinet body 100, improving the sealing performance.

[0047] The cabinet door assembly 200 includes at least two hinge structures 230, the at least two hinge structures 230 are arranged in the sliding direction of the sliding base 220, so the connection reliability between the door body 210 and the sliding base 220 can be improved. Specifically, in the embodiment, the door body 210 is connected with the sliding base 220 by the two hinge structures 230.

[0048] Figure 8 To Figure 1 Enlarged view of partial VIII; Figure 9 To Figure 2 Enlarged view of partial IX. As Figure 8 and Figure 9As shown, the locking assembly 500 comprises a locking driving member 510, a plug rod 520 and a limiting member 530. The locking driving member 510 is in transmission connection with the plug rod 520, and the limiting member 530 is connected to the plug rod 520. The locking driving member 510 is used to drive the plug rod 520 to move between the locking position and the unlocking position. The door body 210 is provided with a locking piece 240, and the locking piece 240 is provided with a locking gap 241. When the door body 210 moves along the guide rail assembly 300 to the position of the opening of the cavity 101, the locking gap 241 can be inserted and matched with the plug rod 520 in the unlocking position. During the process that the plug rod 520 is driven by the locking driving member 510 to move to the locking position, the limiting member 530 can push the locking piece 240 and drive the door body 210 to move to the opening of the cavity 101, so as to block the opening of the cavity 101. In the embodiment, the locking assembly 500 is arranged on the outer side wall of the cabinet body 100 and is adjacent to the opening of the cabinet body 100. Before closing the door, the plug rod 520 is driven to the unlocking position by the locking driving member 510. At this time, the front end of the plug rod 520 and the limiting member 530 protrude forwardly from the front side of the cabinet body 100, that is, they protrude forwardly from the plane where the opening of the cabinet body 100 is located. Then, the door body 210 is moved to the closing position. During this process, the plug rod 520 remains in the unlocking position and can enter the locking gap 241 through the opening of the locking gap 241. At this time, the limiting member 530 is located on the side of the locking piece 240 away from the locking driving member 510. In the embodiment, the size of the limiting member 530 is greater than the width of the locking gap 241. Therefore, during the process that the plug rod 520 is driven by the locking driving member 510 to retract to the locking position, the limiting member 530 can push the locking piece 240 to move to the cabinet body 100. Therefore, the door body 210 can be pressed against the cabinet body 100 to block the opening of the cabinet body 100.

[0049] Optionally, the limiting member 530 has an internal thread, and the plug rod 520 is provided with an external thread. The limiting member 530 is screwed with the plug rod 520. In this way, the position of the limiting member 530 relative to the plug rod 520 can be adjusted. In some embodiments, a nut can be selected as the limiting member 530. The type of the locking driving member 510 includes but is not limited to a pneumatic cylinder, a hydraulic cylinder, a linear motor and the like.

[0050] In the embodiment, four locking assemblies 500 are arranged on the cabinet body 100. Two locking assemblies 500 are arranged on each side of the cabinet body 100 in the horizontal direction. Correspondingly, two locking pieces 240 are arranged on each side of the door body 210 in the horizontal direction. Figure 9 The locking piece 240 at the front end of the door body 210 (i.e., the front end in the sliding direction when the door is closed) is shown, Figure 10Figure 1 shows a first installation diagram of the locking member 240 at the rear end of the door body 210 (i.e. the rear end in the sliding direction when the door is closed) in an embodiment of the present application; Figure 11 Figure 2 shows a second installation diagram of the locking member 240 at the rear end of the door body 210 in an embodiment of the present application. No matter the locking member 240 at the front end of the door body 210 or the locking member 240 at the rear end of the door body 210, the locking notch 241 provided thereon has the same orientation, i.e. both are oriented towards the front of the door body 210 in the process of sliding along the guide rail to the closed position. In order to make the locking assembly 500 cooperating with the locking member 240 at the rear end of the door body 210 not interfere with the sliding of the door body 210, the insertion rod 520 of the locking assembly 500 will not be located in the sliding path of the door body 210 even if it is in the unlocked position, but will be located in the area range between the door body 210 and the cabinet body 100. Therefore, as shown in Figure 10 Figure 2, in order to cooperate with the insertion rod 520 of the locking assembly, a part of the locking member 240 at the rear end of the door body 210 extends to the inner side of the door body 210, and the part extending to the inner side of the door body 210 is provided with the locking notch 241, so as to be able to cooperate with the locking assembly 500. Therefore, the locking notch 241 of the locking member 240 is closer to the cabinet body 100 relative to the inner wall surface of the door body 210. During the process of sliding the door body 210 to the closed position, the locking notches 241 of the locking member 240 at the front end of the door body 210 and the locking member 240 at the rear end of the door body 210 can simultaneously cooperate with the insertion rod 520 (in the unlocked position) of the corresponding locking assembly 500.

[0051] In other embodiments, the number and arrangement of the locking assembly 500 and the locking member 240 can be adjusted as needed.

[0052] In order to improve the sealing effect, the edge of the door body 210 or the edge of the opening on the cabinet body 100 can be provided with a flexible sealing strip. The flexible sealing strip can also make the force between the cabinet body 100 and the door body 210 more uniform, avoiding stress concentration to cause damage to the door body 210 or the cabinet body 100.

[0053] In the present embodiment, the process equipment is a coating equipment for performing a coating process; in alternative embodiments, the process equipment can be equipment for implementing other processes, such as heating equipment, cleaning equipment, etc.

[0054] In summary, the embodiment of the present application provides a process equipment, comprising a cabinet body 100, a cabinet door assembly 200, a guide rail assembly 300, a driving assembly 400 and a plurality of locking assemblies 500, the cabinet body 100 forms a chamber 101 with an opening, the guide rail assembly 300 is connected to the cabinet body 100, the cabinet door assembly 200 comprises a door body 210, a sliding base 220 and a hinge structure 230, the upper end of the door body 210 is rotatably connected with the sliding base 220 through the hinge structure 230, the sliding base 220 is slidingly matched with the guide rail assembly 300 so that the door body 210 can selectively shield or avoid the opening of the chamber 101, the driving assembly 400 comprises a driving motor 410, a driving gear 420 and a rack 430, one of the driving motor 410 and the rack 430 is arranged on the cabinet door assembly 200, and the other is arranged on the cabinet body 100, the output end of the driving motor 410 is connected with the driving gear 420, the driving gear 420 is engaged with the rack 430, the driving motor 410 is used to drive the cabinet door assembly 200 to slide along the guide rail assembly 300, and the locking assembly 500 is used to drive the door body 210 to be close to the cabinet body 100 so that the door body 210 blocks the opening of the chamber 101. The cabinet door assembly 200 of the embodiment of the present application can move along the guide rail assembly 300 under the driving of the driving assembly 400, so as to realize the switching of the door body 210 between the position of shielding the opening of the chamber 101 of the cabinet body 100 and the position of avoiding the opening of the chamber 101. The door body 210 is rotatably connected with the sliding base 220 through the hinge structure 230, so that the door body 210 has a certain displaceable amount in the direction of the opening of the chamber 101, when the door body 210 is driven to the position of shielding the opening by the driving assembly 400, the locking assembly 500 can drive the door body 210 to move towards the opening of the cabinet body 100, so as to block the opening of the cabinet body 100. It can be seen that the process equipment of the embodiment of the present application makes the door body 210 movable relative to the sliding base 220 through the hinge structure 230, and cooperates with the driving assembly 400 and the locking assembly 500, so that the door body 210 can conveniently open or close the opening of the cabinet body 100 and ensure better sealing performance.

[0055] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A process apparatus, characterized by, The cabinet includes a cabinet body, a cabinet door assembly, a guide rail assembly, a driving assembly and a plurality of locking assemblies. The cabinet body forms a chamber with an opening. The guide rail assembly is connected to the cabinet body. The cabinet door assembly includes a door body, a sliding base and a hinge structure. The upper end of the door body is rotatably connected to the sliding base through the hinge structure. The sliding base is slidingly matched with the guide rail assembly so that the door body can selectively shield or avoid the opening of the chamber. The driving assembly includes a driving motor, a driving gear and a rack. One of the driving motor and the rack is arranged on the cabinet door assembly, and the other is arranged on the cabinet body. The output end of the driving motor is connected to the driving gear. The driving gear is engaged with the rack. The driving motor is used to drive the cabinet door assembly to slide along the guide rail assembly. The locking assembly is used to drive the door body to be close to the cabinet body so that the door body blocks the opening of the chamber.

2. The process apparatus according to claim 1, characterized in that The driving motor is fixedly connected to the sliding base. The rack is connected to the top of the cabinet body.

3. The process apparatus according to claim 1, characterized in that The guide rail assembly includes an upper guide rail. The sliding base is provided with at least two first rollers. Each first roller is arranged at intervals along the sliding direction of the sliding base. The outer circumferential side of the first roller abuts against the upper side of the upper guide rail.

4. The process apparatus according to claim 3, characterized in that The sliding base is also provided with at least two second rollers. Each second roller is arranged at intervals along the sliding direction of the sliding base. The outer circumferential side of the second roller abuts against the lower side of the upper guide rail.

5. The process apparatus according to claim 4, characterized in that The outer circumferential side of the first roller and the second roller is provided with a limiting groove. The opening width of the limiting groove is greater than the bottom width. The upper side and the lower side of the upper guide rail respectively abut into the limiting groove of the first roller and the second roller. The upper guide rail abuts against the side wall of the limiting groove.

6. The process apparatus according to claim 5, characterized in that The two side walls of the limiting groove are conical surfaces. The bottom wall of the limiting groove is a cylindrical surface. The upper guide rail has two slope surfaces at an included angle. The two slope surfaces of the upper guide rail respectively abut against the two side walls of the limiting groove.

7. The process apparatus of claim 1, wherein, The guide rail assembly includes a lower guide rail. The lower guide rail is provided with a guide groove. The lower end of the door body is slidingly matched with the guide groove.

8. The process apparatus of claim 1, wherein, The sliding base has a first limit position and a second limit position along the sliding stroke of the guide rail assembly. The guide rail assembly includes a first blocking piece and a second blocking piece. The first blocking piece is used to block the sliding base at the first limit position. The second blocking piece is used to block the sliding base at the second limit position. When the sliding base is at the first limit position, the door body shields the opening of the chamber. When the sliding base is at the second limit position, the door body avoids the opening of the chamber.

9. Process plant according to any one of claims 1-8, characterized in that, The hinge structure includes a first hinge seat, a connecting piece and a second hinge seat. The first hinge seat is arranged on the sliding base. The second hinge seat is arranged on the door body. The two ends of the connecting piece are respectively hinged to the first hinge seat and the second hinge seat.

10. Process plant according to any one of claims 1-8, characterized in that, The cabinet door assembly comprises at least two hinge structures which are arranged at intervals in the sliding direction of the sliding base.

11. Process plant according to any one of claims 1-8, characterized in that The locking assembly comprises a locking driving member, an insertion rod and a limiting member, the locking driving member is in transmission connection with the insertion rod, the limiting member is connected to the insertion rod, and the locking driving member is used to drive the insertion rod to move between a locking position and an unlocking position; the door body is provided with a locking piece, the locking piece is provided with a locking gap, when the door body moves along the guide rail assembly to a position of shielding the opening of the cavity, the locking gap can be inserted and matched with the insertion rod located at the unlocking position, and in the process that the insertion rod is driven by the locking driving member to move to the locking position, the limiting member can push the locking piece and drive the door body to move to the opening of the cavity, so that the door body blocks the opening of the cavity.

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