Device for preventing friction clamping stagnation of graphite air floatation tray
By setting chamfers and opening vent holes on the lower half of the moon, the friction and jamming problem between the graphite air flotation tray and the lower half of the moon is solved, ensuring the tray rotates normally and preventing process failure.
Patent Information
- Application Number
- CN202423104572.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-16
AI Technical Summary
During the growth of semiconductor silicon carbide, friction between the graphite air-floating tray and the lower half of the moon causes jamming, affecting the tray's rotation and leading to process failure.
A chamfer and vent holes are provided on the lower half of the rim to effectively discharge particulate powder, reduce friction, and prevent friction and jamming between the tray and the lower half of the rim.
Effectively removes particulate powder, avoids friction between the tray and the lower half of the tray, ensures the tray can rotate normally, and prevents process failure.
Smart Images
Figure CN223607437U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor silicon carbide growth, specifically relates to a device for preventing graphite gas floating tray from rubbing and sticking. BACKGROUND
[0002] At present, in the field of semiconductor silicon carbide growth, as the lower half moon of horizontal type silicon carbide epitaxial graphite accessory, its main role is to blow and suspend the graphite tray connected with it by gas and rotate.
[0003] Since the tray is suspended to a height of about 10-15 μm, and there are some errors in the processing of graphite parts, especially near the center shaft of the tray, and in the process of stopping rotation, the gas floating tray will rub with the lower half moon and produce some particle powder; due to the outward flow of airflow holes, many particle powders are gradually accumulated in the inner ring between the airflow holes and the center shaft, which will cause friction between the tray and the lower half moon, and in severe cases, it will affect the rotation of the tray, resulting in process failure. UTILITY MODEL CONTENTS
[0004] In view of at least one problem in the prior art described above, the purpose of the utility model is to provide a device for preventing graphite gas floating tray from rubbing and sticking, which can avoid the gradual accumulation of many particle powders in the inner ring between the airflow holes and the center shaft, causing friction between the tray and the lower half moon, and in severe cases, it will affect the rotation of the tray.
[0005] To achieve the above purpose, the utility model adopts the following technical scheme:
[0006] A device for preventing graphite gas floating tray from rubbing and sticking, comprising:
[0007] The lower half moon is provided with a circular tray groove on the top surface, and the bottom surface of the tray groove is provided with a first circular groove, a second circular groove and a through hole in the form of a stepped hole structure; the top of the first circular groove is provided with a chamfer, and the chamfer is provided with a through hole type exhaust hole; the top wall side of the lower half moon is provided with an air inlet hole, and the tray groove is provided with an air outlet hole, and the air inlet hole is connected with the air outlet hole;
[0008] The center shaft is provided in the form of a circular tube; the center shaft is fixedly arranged in the second circular groove;
[0009] The gas floating tray is provided in the form of a circular disc, and the bottom is provided with a circular annular protrusion; the protrusion is rotatably arranged in the first circular groove and rotatably arranged outside the center shaft.
[0010] Preferably, the air outlet hole is arranged as an inclined hole, and the air flow blown in the inclined hole can drive the air floating tray to rotate; the inclined hole is arranged as a vertical hole, and is inclined from bottom to top along the rotating direction of the air floating tray, and the angle range of the inclination is 30° to 60°.
[0011] Preferably, the air outlet hole is arranged as at least two, and a plurality of the air outlet holes are uniformly arranged along the circumference.
[0012] Preferably, the air outlet hole is arranged as an inclined hole, and the air flow blown in the inclined hole can drive the air floating tray to rotate; the inclined hole is arranged as a vertical hole, and is inclined from bottom to top along the rotating direction of the air floating tray, and the angle range of the inclination is 30° to 60°.
[0013] Preferably, the air outlet hole is arranged as at least two, and a plurality of the air outlet holes are uniformly arranged along the circumference.
[0014] Preferably, the chamfer is arranged as a conical shape.
[0015] Preferably, the center rotating shaft is fixed in the second circular groove in an interference fit.
[0016] Preferably, the first circular groove, the second circular groove and the through hole are sequentially and nestedly arranged at the center position of the bottom surface of the tray groove.
[0017] Preferably, the protrusion is arranged at the center position of the bottom surface of the air floating tray.
[0018] Preferably, the bottom surface of the air floating tray is provided with a dust removal groove.
[0019] The utility model discloses a graphite air floating tray and a graphite air floating tray device, which have the following advantages:
[0020] The device for preventing graphite air floating trays from being rubbed and stuck provided by the utility model is characterized in that a chamfer is arranged on the lower half moon part, and an air outlet hole is arranged at the chamfer, so that the air outlet hole can effectively discharge particle dust, thereby reducing the phenomenon that the air floating tray and the lower half moon part cannot rotate due to friction caused by factors such as machining errors and particle dust accumulation. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 FIG. 1 is a structural schematic view of the device for preventing graphite air floating trays from being rubbed and stuck provided by the first embodiment of the utility model.
[0022] Figure 2 FIG. 2 is a first perspective three-dimensional explosion view of the device for preventing graphite air floating trays from being rubbed and stuck provided by the first embodiment of the utility model.
[0023] Figure 3 FIG. 3 is a second perspective three-dimensional explosion view of the device for preventing graphite air floating trays from being rubbed and stuck provided by the first embodiment of the utility model.
[0024] Figure 4is the top view of the lower half moon piece of the device for preventing graphite air float tray from rubbing and sticking provided by the embodiment one of the utility model.
[0025] Figure 5 is Figure 4 The central longitudinal cross-sectional view of the lower half moon piece.
[0026] Markings in the drawings:
[0027] 1 is lower half moon piece, 110 is tray groove, 111 is first circular groove, 112 is second circular groove, 113 is through hole, 114 is chamfer, 101 is air inlet hole, 102 is air outlet hole, 103 is exhaust hole, 2 is central rotating shaft, 3 is air float tray, 310 is protrusion, 320 is dust discharge groove. DETAILED DESCRIPTION
[0028] In order to make the purpose, technical scheme and advantages of the utility model more clear, the technical scheme of the utility model will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the scope of protection of the utility model.
[0029] In the description of the utility model, it needs to be explained that the terms "upper", "lower", "front", "rear" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the system or element indicated must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model, and the arrow direction in the drawing represents the liquid flow direction.
[0030] In the description of the utility model, it needs to be explained that unless otherwise explicitly specified and limited, the terms "assembly", "setting", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication inside two elements. For the ordinary skill in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0031] The utility model provides a kind of device for preventing graphite air float tray from rubbing and sticking, which is by being set exhaust hole on lower half moon piece, particle powder can be discharged through exhaust hole, to avoid the phenomenon that air float tray cannot rotate due to the existence of friction between tray and lower half moon.
[0032] Next, the embodiments of the utility model will be described in detail in combination with the drawings.
[0033] Embodiment One
[0034] Please refer to Figures 1 to 5 The device for preventing graphite gas float tray from rubbing and sticking provided by the embodiment includes a lower half moon piece 1, a center rotating shaft 2 and a gas float tray 3. The cross section of the lower half moon piece 1 is set as a lower half circular ring. A circular tray groove 110 is formed on the top surface of the lower half moon piece 1. A first circular groove 111, a second circular groove 112 and a through hole 113 with a stepped hole structure are formed on the bottom surface of the tray groove 110. A chamfer 114 is arranged on the top of the first circular groove 111. A through hole type exhaust hole 103 is formed on the chamfer 114. An air inlet hole 101 is formed on the side of the top wall of the lower half moon piece 1. An air outlet hole 102 is formed on the tray groove 110. The air inlet hole 101 is connected with the air outlet hole 102. The center rotating shaft 2 is set as a circular tube. The center rotating shaft 2 is fixedly arranged in the second circular groove 112. The gas float tray 3 is set as a circular disc and a circular ring shaped protrusion 310 is arranged on the bottom of the gas float tray 3. The protrusion 310 is rotatably arranged in the first circular groove 111 and rotatably sleeved on the outside of the center rotating shaft 2.
[0035] The lower half moon piece 1 and the gas float tray 3 are both set as graphite pieces. The contact surface between the bottom surfaces of the lower half moon piece 1 and the gas float tray 3 is an entire plane. The gas float tray 3 is fixedly connected and rotatable with the lower half moon piece 1 through the center rotating shaft 2. The gas flows into the air outlet hole 102 from the air inlet hole 101, and then flows out of the air outlet hole 102 to the space between the lower half moon piece 1 and the gas float tray 3, and forms a gas film with a thickness of about 10-15 μm, so that the gas float tray 3 is suspended and rotated. However, due to the factors such as graphite processing precision and accumulated particle dust, the gas float tray 3 may not be able to rotate. Therefore, the device for preventing graphite gas float tray from rubbing and sticking provided by the embodiment sets a chamfer 114 on the top of the first circular groove 111, and a through hole type exhaust hole 103 is formed on the chamfer 114, so that the phenomenon that the gas float tray 3 cannot rotate due to the friction between the gas float tray 3 and the lower half moon piece 1 caused by the factors such as processing error and particle dust accumulation can be effectively reduced through the exhaust hole 103.
[0036] When the gas float tray 3 is suspended and rotated under the action of the gas flow, the top of the center rotating shaft 2 is rotatably arranged in the protrusion 310, so that the center rotating shaft 2 plays a role of fixing the horizontal position of the gas float tray 3, and avoids the horizontal sliding of the gas float tray 3 when it is suspended and rotated.
[0037] Please refer to Figure 4 and Figure 5 Specifically, the air outlet hole 102 is set as an inclined hole, which is convenient for driving the gas float tray 3 to keep suspended and rotated by blowing out the inclined gas flow such as argon gas flow through the inclined hole.
[0038] Please refer to Figure 2、 Figure 4 and Figure 5 As shown in FIG. 1, FIG. 2, and FIG. 3, the air outlet hole 102 is arranged on the bottom surface of the tray groove 110 and outside the first circular groove 111. The air outlet hole 102 is a vertical hole and is inclined from bottom to top along the rotation direction of the air float tray 3. The inclination angle of the air outlet hole 102 is 30° to 60°. When the inclination angle of the air outlet hole 102 is 45°, the rotation effect of the air float tray 3 is the best, which is beneficial to the rotation of the air float tray 3 driven by the air flow in the air outlet hole 102. The cross section of the air outlet hole 102 can be circular.
[0039] Specifically, the air outlet hole 102 is arranged as at least two, and multiple air outlet holes 102 are arranged uniformly along the circumference.
[0040] For example, the air outlet hole 102 is arranged as three, and the three air outlet holes 102 are arranged uniformly along the circumference outside the first circular groove 111.
[0041] Specifically, the air outlet hole 102 is arranged as at least two, and multiple air outlet holes 102 are arranged uniformly along the circumference.
[0042] For example, the air outlet hole 102 is arranged as three, and the three air outlet holes 102 are arranged uniformly along the circumference.
[0043] As shown in FIG. 1, FIG. 2, and FIG. 3, the air outlet hole 102 is arranged on the bottom surface of the tray groove 110 and outside the first circular groove 111. The air outlet hole 102 is a vertical hole and is inclined from bottom to top along the rotation direction of the air float tray 3. The inclination angle of the air outlet hole 102 is 30° to 60°. When the inclination angle of the air outlet hole 102 is 45°, the rotation effect of the air float tray 3 is the best, which is beneficial to the rotation of the air float tray 3 driven by the air flow in the air outlet hole 102. The cross section of the air outlet hole 102 can be circular. Figures 1 to 5
[0044] As shown in FIG. 1, FIG. 2, and FIG. 3, the air outlet hole 102 is arranged on the bottom surface of the tray groove 110 and outside the first circular groove 111. The air outlet hole 102 is a vertical hole and is inclined from bottom to top along the rotation direction of the air float tray 3. The inclination angle of the air outlet hole 102 is 30° to 60°. When the inclination angle of the air outlet hole 102 is 45°, the rotation effect of the air float tray 3 is the best, which is beneficial to the rotation of the air float tray 3 driven by the air flow in the air outlet hole 102. The cross section of the air outlet hole 102 can be circular. Figure 4 and Figure 5 Specifically, the center shaft 2 is fixed in the second circular groove 112 by interference fit. The first circular groove 111, the second circular groove 112, and the through hole 113 are sequentially nested in the center position of the bottom surface of the tray groove 110. The protrusion 310 is arranged in the center position of the bottom surface of the air float tray 3.
[0045] Specifically, the tray groove 110 can be arranged in the center position of the top surface of the lower half moon part 1. That is, the vertical center axes of the top surface of the lower half moon part 1, the tray groove 110, the chamfer 114, the first circular groove 111, the second circular groove 112, the through hole 113, the center shaft 2, the air float tray 3, and the protrusion 310 are coincident.
[0046] As shown in FIG. 1, FIG. 2, and FIG. 3, the air outlet hole 102 is arranged on the bottom surface of the tray groove 110 and outside the first circular groove 111. The air outlet hole 102 is a vertical hole and is inclined from bottom to top along the rotation direction of the air float tray 3. The inclination angle of the air outlet hole 102 is 30° to 60°. When the inclination angle of the air outlet hole 102 is 45°, the rotation effect of the air float tray 3 is the best, which is beneficial to the rotation of the air float tray 3 driven by the air flow in the air outlet hole 102. The cross section of the air outlet hole 102 can be circular. Figure 2 , Figure 4 and Figure 5 Specifically, the chamfer 114 is arranged as a circular cone.
[0047] The diameter of the chamfer 114 can be set to 44-48 mm, and the side surface inclination angle of the chamfer 114 can be set to 10°, that is, the included angle between the side surface of the chamfer 114 and the vertical center axis thereof can be set to 10°, thereby facilitating effective reduction of the phenomenon that the air floating tray 3 cannot rotate due to friction of the center position of the air floating tray 3 with the lower half moon piece 1 caused by machining errors.
[0048] The distance between the vertical center axis of the exhaust hole 103 and the inner side edge of the chamfer 114 can be set to 1 mm.
[0049] Please refer to Figure 3 Specifically, the bottom surface of the air floating tray 3 is provided with a dust discharge groove 320, and the dust discharge groove 320 facilitates discharge of particulate dust.
[0050] The dust discharge groove 320 can be provided as at least two and can be provided as a long strip-shaped groove. The plurality of dust discharge grooves 320 can be arranged in a diverging manner with the center of the air floating tray 3 as the center. The dust discharge groove 320 can discharge dust at the lower part of the air floating tray 3 and has a dust discharge function. At the same time, the dust discharge groove 320 also has an air flow guiding function to assist the rotation of the air floating tray 3. The dust discharge groove 320 is a slanting groove, and the inclination angle thereof is consistent with the projection direction of the air flow of the exhaust hole 102 on the air floating tray 3, which can more effectively resist the rotation of the air floating tray 3.
[0051] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims
1. A device for preventing frictional jamming of a graphite air float tray, characterized by, The utility model relates to a kind of air floatation tray and air floatation tray device, including: Lower half moon piece (1), the cross section of the lower half moon piece (1) is arranged as lower semicircle ring;The top surface of the lower half moon piece (1) is opened circular tray recess (110), and the bottom surface of the tray recess (110) is opened with the first circular recess (111) of stepped hole structure, second circular recess (112) and through hole (113);The top of the first circular recess (111) is provided with chamfer (114), and the chamfer (114) is opened with through-hole type exhaust hole (103);Air inlet hole (101) is opened in the top wall side of the lower half moon piece (1), and air outlet hole (102) is opened in the tray recess (110), and the air inlet hole (101) is connected with the air outlet hole (102); Center rotating shaft (2) is arranged as circular tube;The center rotating shaft (2) is fixedly arranged in the second circular recess (112); Air floatation tray (3) is arranged as disc, and bottom is provided with annular protrusion (310), and the protrusion (310) is rotationally arranged in the first circular recess (111) and rotationally set in the outside of the center rotating shaft (2).
2. The apparatus for preventing frictional jamming of a graphite air float tray of claim 1, wherein, The air outlet hole (102) is arranged as inclined hole, and the airflow blown in the inclined hole can drive the air floatation tray (3) to rotate;The inclined hole is arranged as vertical hole, and is inclined from lower to upper along the rotation direction of the air floatation tray, and the angle range of inclination is 30 °-60 °.
3. The apparatus for preventing frictional jamming of a graphite air float tray of claim 2, wherein, The air outlet hole (102) is arranged as at least two, and multiple air outlet holes (102) are uniformly arranged along circumference.
4. The apparatus for preventing frictional jamming of a graphite air flotation tray according to claim 1, wherein The exhaust hole (103) is arranged as vertical hole.
5. The apparatus for preventing frictional jamming of a graphite air flotation tray according to claim 1, wherein The exhaust hole (103) is arranged as at least two, and multiple air outlet holes (102) are uniformly arranged along circumference.
6. The apparatus for preventing frictional jamming of a graphite air float tray of claim 1, wherein, The chamfer (114) is arranged as conical.
7. The apparatus for preventing frictional jamming of a graphite air float tray of claim 1, wherein, The center rotating shaft (2) is fixed in the second circular recess (112) with interference fit.
8. The apparatus for preventing frictional jamming of a graphite air float tray of claim 1, wherein, The first circular recess (111), the second circular recess (112) and the through hole (113) are sequentially nested in the bottom center position of the tray recess (110).
9. The apparatus for preventing frictional jamming of a graphite air flotation tray according to claim 1, wherein The protrusion (310) is arranged in the bottom center position of the air floatation tray (3).
10. The apparatus for preventing frictional jamming of a graphite air float tray according to any one of claims 1-9, wherein, The bottom of the air floatation tray (3) is opened with dust removal recess (320).