Drying device for Malangori
By introducing control components into the Marangoni drying unit, uniform distribution of airflow and steam was achieved, solving the problems of uneven airflow and poor steam discharge, improving drying efficiency and preventing vent blockage.
Patent Information
- Application Number
- CN202423245960.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-27
AI Technical Summary
In the existing Marangoni drying equipment, the airflow and temperature distribution are uneven during the semiconductor wafer drying process, which affects the drying effect. In addition, impurities are easily accumulated during steam discharge, causing blockage of the exhaust port.
A drying device is designed, comprising control components including a guide plate, a rotating rod, an annular groove, a slide bar, and a motor-driven reciprocating screw. Through the coordinated movement of these components, a uniform distribution of airflow and steam is achieved, and the accumulation of steam impurities is prevented by the scraping action of the vertical rod and the circular plate.
It achieves uniform distribution of airflow and steam, improves drying uniformity and quality, and avoids the accumulation of steam impurities at the exhaust port, keeping the exhaust channel unobstructed.
Smart Images
Figure CN223610544U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to drying technical field, concretely is a kind of drying device for Malangoni. BACKGROUND
[0002] Post-chemical mechanical polishing cleaning is a wet process that is performed to clean and dry a substrate without leaving particles or residues on the substrate, which can negatively impact yield and cause subsequent device failure. In the process of drying a wet substrate, particles in the solution can stick to the substrate, or particles present on the substrate can not be sufficiently removed prior to drying, and can remain on the substrate after drying.
[0003] The Malangoni drying technique utilizes a solvent having a lower surface tension than the bath fluid (i.e., isopropyl alcohol (IPA) vapor) that is introduced into the fluid meniscus formed as the substrate is lifted from the bath. The solvent vapor dissolves into the fluid meniscus, creating a surface tension gradient. The presence of the surface tension gradient causes the fluid to flow away from the low surface tension area at the tip of the drying meniscus and off the substrate, leaving the substrate dry with little to no streaks, spots, and residue marks.
[0004] The existing drying device for Malangoni utilizes resistance wire, infrared heating lamp, etc. to generate local temperature difference in the process of drying semiconductor wafer, so as to cause surface tension gradient, and generate stable and controllable airflow by fan to help carry away evaporated steam, but in the process of steam emission, the flow direction is usually the same direction, which can cause uneven airflow and temperature distribution, thereby affecting the drying effect inside, and the present application provides a drying device for Malangoni. UTILITY MODEL CONTENTS
[0005] The utility model aims at providing a kind of drying device for Malangoni to solve the problems raised in the above background art.
[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of drying device for Malangoni, including machine body, the inner wall of the machine body is fixedly installed with placing plate, infrared heating lamp is provided in the machine body, fan is provided in the machine body, the surface of the machine body is equipped with exhaust hole, the surface of the machine body is fixedly installed with air duct, control assembly that the airflow direction is stirred is provided in the air duct, the control assembly includes: deflector, the surface of the deflector is fixedly installed with rotating rod, the surface of the rotating rod is equipped with annular groove, the surface of the annular groove is slidably connected with slide rod, which can more evenly distribute airflow and steam, help to improve the uniformity and quality of drying.
[0007] Preferably, the control assembly further comprises a swing element, the swing element comprising: a circular plate, the circular plate being rotatably connected to the inner wall of the body, the surface of the circular plate being fixedly connected to the surface of the rotating rod, the circular plate being synchronously rotatable when the rotating rod rotates.
[0008] Preferably, the surface of the circular plate is fixedly provided with a vertical rod, the vertical rod being synchronously circularly movable when the circular plate rotates.
[0009] Preferably, the surface of the sliding rod is fixedly provided with a flat rod, the flat rod penetrating through the body and being slidably connected to the body, the surface of the flat rod being fixedly connected to one end of a spring, the other end of the spring being fixedly provided on the surface of the body, the sliding rod being slidably movable in the annular groove when the flat rod moves.
[0010] Preferably, the surface of the flat rod is fixedly provided with a moving rod, the moving rod being in abutment with the inner wall of the air duct, the flat rod being synchronously slidable when the moving rod moves.
[0011] Preferably, the surface of the moving rod is fixedly provided with a moving ring, the moving ring being penetrated by a reciprocating screw rod and being threadedly connected to the reciprocating screw rod, the moving ring being transversely movable when the reciprocating screw rod rotates.
[0012] Preferably, the inner wall of the air duct is fixedly provided with a vertical plate, the surface of the vertical plate being fixedly provided with a motor, the output shaft of the motor being fixedly connected to the surface of the reciprocating screw rod, the reciprocating screw rod being rotatably connected to the surface of the body, the output shaft of the motor being capable of driving the reciprocating screw rod to circularly move on the surface of the body.
[0013] Compared with the prior art, the utility model provides a kind of drying device for marangoni, with the following beneficial effects:
[0014] 1、the drying device for marangoni, by being provided with control assembly, the output shaft of motor drives reciprocating screw rod to rotate on the surface of body, reciprocating screw rod rotates, moving ring can drive moving rod to slide on the inner wall of air duct, the flat rod fixed on the surface of moving rod can drive sliding rod to slide in annular groove, then rotating rod can circularly move, and since moving ring is transversely reciprocated, then rotating rod can drive guide plate to swing in different directions, this mode can more evenly distribute airflow and steam, help to improve the uniformity and quality of drying.
[0015] 2、the drying device for marangoni, by being provided with vertical rod, rotating rod rotates, the circular plate fixed on the surface of rotating rod can synchronously rotate on the inner wall of body, the vertical rod fixed on the surface of circular plate can constantly scrape the surface of exhaust hole in the process of rotation, this mode can avoid that impurity and particulate in steam accumulate and block at exhaust hole, keep exhaust passage unobstructed, ensure that steam can continuously and smoothly discharge. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is the front view structural schematic diagram of the utility model;
[0017] Figure 2 It is the front view sectional structure schematic diagram of the utility model;
[0018] Figure 3 It is the left side sectional structure schematic diagram of the utility model;
[0019] Figure 4 It is the air duct sectional structure schematic diagram of the utility model.
[0020] In the drawing: 1, machine body;2, placing plate;3, infrared heating lamp;4, fan;5, exhaust hole;6, air duct;7, control assembly;71, deflector;72, rotating rod;73, annular groove;74, sliding rod;75, swing piece;751, round plate;752, vertical rod;753, flat rod;754, spring;755, moving rod;756, moving ring;757, reciprocating screw;758, vertical plate;759, motor. DETAILED DESCRIPTION
[0021] As Figures 1-4 shown, the utility model provides a technical scheme: a kind of drying device for marangoni, including machine body 1, the inner wall of machine body 1 is fixedly installed with placing plate 2, infrared heating lamp 3 is provided in machine body 1, fan 4 is provided in machine body 1, the surface of machine body 1 is equipped with exhaust hole 5, the surface of machine body 1 is fixedly installed with air duct 6, control assembly 7 for the air flow direction of being stirred is provided in air duct 6, control assembly 7 includes: deflector 71, the surface of deflector 71 is fixedly installed with rotating rod 72, annular groove 73 is opened in the surface of rotating rod 72, annular groove 73 surface is slidably connected with sliding rod 74, the flat rod 753 fixed on the surface of moving rod 755 can drive sliding rod 74 sliding in annular groove 73, then rotating rod 72 can carry out circumferential motion, and since moving ring 756 is transverse reciprocating motion, then rotating rod 72 can drive deflector 71 to swing in different direction, this mode can more evenly distribute air flow and steam, help to improve the uniformity and quality of drying.
[0022] The control assembly 7 further comprises a swing member 75, which comprises a circular plate 751 rotatably connected to the inner wall of the body 1, the surface of the circular plate 751 is fixedly connected to the surface of the rotating rod 72, and the rotating rod 72 rotates to synchronously rotate the circular plate 751. The vertical rod 752 is fixedly installed on the surface of the circular plate 751, and the vertical rod 752 performs a circular motion when the circular plate 751 rotates. The flat rod 753 is fixedly installed on the surface of the sliding rod 74, penetrates through the body 1 and is slidably connected to the body 1, one end of the flat rod 753 is fixedly connected to the surface of the spring 754, the other end of the spring 754 is fixedly installed on the surface of the body 1, and the sliding rod 74 can slide in the annular groove 73 when the flat rod 753 moves. The moving rod 755 is fixedly installed on the surface of the flat rod 753 and abuts against the inner wall of the air duct 6, and the flat rod 753 can synchronously slide when the moving rod 755 moves. The moving ring 756 is fixedly installed on the surface of the moving rod 755 and is penetrated by the reciprocating screw rod 757 and is threadedly connected to the reciprocating screw rod 757, and the reciprocating screw rod 757 rotates to make the moving ring 756 perform a transverse motion. The vertical plate 758 is fixedly installed on the inner wall of the air duct 6, the motor 759 is fixedly installed on the surface of the vertical plate 758, the output shaft of the motor 759 is fixedly connected to the surface of the reciprocating screw rod 757, the reciprocating screw rod 757 is rotatably connected to the surface of the body 1, and the output shaft of the motor 759 can drive the reciprocating screw rod 757 to perform a circular motion on the surface of the body 1.
[0023] In the utility model, when using, the semiconductor wafer needed to be dried is overflow rinsed. The purpose of this step is to prevent the object from contacting with air and to prevent pollution, and to form a very thin water film on the surface of the object. After cleaning, the object is placed on the surface of the placing plate 2. After placing, the machine door is closed, the infrared heating lamp 3 is started, the object is dried, local temperature difference is generated, surface tension gradient is caused, and stable and controllable airflow is generated through the fan 4 to help carry away evaporated steam, the Marangoni technology is realized, the steam is discharged from the exhaust hole 5, then flows out from the air duct 6, and in the process of exhausting, the motor 759 on the surface of the vertical plate 758 is started, the output shaft of the motor 759 drives the reciprocating screw rod 757 to rotate on the surface of the machine body 1, when the reciprocating screw rod 757 rotates, the moving ring 756 can drive the moving rod 755 to slide on the inner wall of the air duct 6, the flat rod 753 fixed on the surface of the moving rod 755 can drive the sliding rod 74 to slide in the annular groove 73, then the rotating rod 72 can perform circumferential motion, and since the moving ring 756 performs transverse reciprocating motion, the rotating rod 72 can drive the deflector 71 to swing in different directions, this mode can more evenly distribute airflow and steam, and helps to improve the uniformity and quality of drying, and when the rotating rod 72 rotates, the circular plate 751 fixed on the surface of the rotating rod 72 can synchronously rotate on the inner wall of the machine body 1, the vertical rod 752 fixed on the surface of the circular plate 751 can continuously scrape the surface of the exhaust hole 5 in the process of rotating, this mode can avoid that impurities and particulate matters in the steam accumulate and block at the exhaust hole 5, keep the exhaust passage unobstructed, and ensure that the steam can be continuously and smoothly discharged.
[0024] The utility model has been described in detail above, but some modifications or improvements can be made on the basis of the utility model, which is obvious to those skilled in the art. Therefore, the modifications or improvements without departing from the spirit of the utility model are within the protection scope of the utility model.
Claims
1. A drying device for Malan-goni comprising a body (1), characterized by: The inner wall of the machine body (1) is fixedly installed with a placing plate (2), the machine body (1) is provided with an infrared heating lamp (3), the machine body (1) is provided with a fan (4), the surface of the machine body (1) is provided with an exhaust hole (5), the surface of the machine body (1) is fixedly installed with an air duct (6), the air duct (6) is provided with a control assembly (7) for stirring the airflow direction, the control assembly (7) comprises: a guide vane (71), the surface of the guide vane (71) is fixedly installed with a rotating rod (72), the surface of the rotating rod (72) is provided with an annular groove (73), and the surface of the annular groove (73) is slidably connected with a sliding rod (74).
2. A drying device for use in a Marangoni according to claim 1, characterized in that: The control assembly (7) further comprises a swing piece (75), the swing piece (75) comprises: a circular plate (751), the circular plate (751) is rotatably connected with the inner wall of the machine body (1), and the surface of the circular plate (751) is fixedly connected with the surface of the rotating rod (72).
3. A drying device for use in a Marangoni according to claim 2, characterized in that: The surface of the circular plate (751) is fixedly installed with a vertical rod (752).
4. A drying device for use in a Marangoni according to claim 1, characterized in that: The surface of the sliding rod (74) is fixedly installed with a flat rod (753), the flat rod (753) penetrates through the machine body (1) and is slidably connected with the machine body (1), the surface of the flat rod (753) is fixedly connected with one end of a spring (754), and the other end of the spring (754) is fixedly installed on the surface of the machine body (1).
5. A drying device for use in a Marangoni according to claim 4, characterized in that: The surface of the flat rod (753) is fixedly installed with a moving rod (755), and the moving rod (755) is attached to the inner wall of the air duct (6).
6. A drying apparatus for use in the Malan-goni according to claim 5, characterized in that: The surface of the moving rod (755) is fixedly installed with a moving ring (756), the moving ring (756) is penetrated by a reciprocating screw rod (757) and is threadedly connected with the reciprocating screw rod (757).
7. A drying apparatus for use in the Malanqoni according to claim 1, characterized in that: The inner wall of the air duct (6) is fixedly installed with a vertical plate (758), the surface of the vertical plate (758) is fixedly installed with a motor (759), the output shaft of the motor (759) is fixedly connected with the surface of the reciprocating screw rod (757), and the reciprocating screw rod (757) is rotatably connected with the surface of the machine body (1).