Tubular target material sintering supporting device

Abstract

A tubular target material sintering supporting device comprises a disc base and N L-shaped supporting blocks, a through hole is formed in the middle of the disc base, N sliding ways are evenly distributed on the disc base, a plurality of radial strip-shaped grooves are formed in the positions, between every two adjacent sliding ways, of the disc base, and each L-shaped supporting block is composed of a transverse sliding block and a longitudinal supporting block. The longitudinal supporting block is provided with a plurality of convex blocks for supporting a target material, the end face, making contact with the target material, of each convex block is an arc face, a transverse sliding block of the L-shaped supporting block is arranged in a sliding way of the disc base, the upper end face of the transverse sliding block is flush with the upper end face of the disc base, the width of the sliding way is larger than that of the transverse sliding block, and N is any integer from 3 to 8. The device is provided with the movable L-shaped supporting block, the vertical supporting block of the L-shaped supporting block can make contact with the inner wall of the tube target to provide effective supporting for the tube target, the vertical supporting block can be attached to contraction movement of the inner diameter of the tube target, deformation of the tube target during sintering can be effectively prevented, and target contraction cannot be hindered.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of auxiliary devices of target material sintering, in particular to a kind of tubular target material sintering support device. BACKGROUND

[0002] Tubular target material sintering usually adopts vertical sintering, this sintering method has the advantages of high furnace utilization rate, easy operation, sintering effect is good etc., but in the vertical sintering process, due to gravity, without support in the tube target, it is easy to produce internal collapse, bending and other deformation. With the continuous development of liquid crystal module product light and thin and low price trend, the corresponding glass substrate also appears the trend of obvious large-scale, target material single piece size large-scale is inevitable, and reduce the splicing quantity and high-density target material can effectively reduce the nodulation phenomenon in magnetron sputtering coating process. In order to avoid the problems of low density, internal collapse, bending and other problems in the process of tubular target material sintering, the conventional method in the industry is to design fixed support column inside the tube target, but the inner diameter shrinks in the process of target material sintering densification, and the method of fixed support inner wall will hinder the shrinkage densification of target material.

[0003] Chinese utility model patent CN218065947U discloses a kind of support for rotary target material sintering, the support still is set with immovable support column, when using, rotary target material is sleeved outside support column, the inner wall of rotary target material and the outer wall of support column form chamber, i.e. support column does not contact target material, cannot reach effective support effect, only when target material collapses, support column can provide support;Since shrinkage space needs to be reserved between support column and tube target inner wall, there is still the risk of deformation when tube target sintering. SUMMARY

[0004] The utility model solves the technical problems: provide a kind of tubular target material sintering support device, the device is provided with movable L type support block, the vertical support block of the L type support block can be contacted with tube target inner wall to provide effective support for tube target, can move along with the shrinkage of tube target inner diameter, can effectively prevent deformation when tube target sintering, also will not hinder target material shrinkage, it is conducive to improving target material density.

[0005] The technical scheme for solving the above technical problems is: a tubular target sintering support device, comprising a disc base and N L-shaped support blocks, a through hole is formed in the middle of the disc base, N slide ways are uniformly formed on the disc base, 3-15 radial strip-shaped grooves are formed on the disc base between adjacent two slide ways, the L-shaped support block is composed of a transverse sliding block and a longitudinal support block connected to one end of the transverse sliding block, a plurality of protrusions for supporting the target are arranged on the side of the longitudinal support block facing the transverse sliding block, grooves are formed between the protrusions, the end surface of the protrusion contacting the target is a circular arc surface, the transverse sliding block of the L-shaped support block is arranged in the slide way of the disc base, the end of the transverse sliding block connected with the longitudinal support block faces inwards, the width of the slide way is greater than the width of the transverse sliding block, and N is any integer between 2 and 8.

[0006] Further, the width of the transverse sliding block is 20-50 mm, and the height of the longitudinal support block is 100-800 mm.

[0007] Further, an alumina fine sand layer is arranged in the slide way of the disc base, and the transverse sliding block of the L-shaped support block is arranged on the alumina fine sand layer in the slide way of the disc base.

[0008] Further, an alumina fine sand layer is arranged on the surface of the disc base outside the radial strip-shaped grooves.

[0009] Further, the thickness of the alumina fine sand layer is 1-3 mm.

[0010] Further, the width of the radial strip-shaped groove is 3-10 mm, and the depth is 2-5 mm.

[0011] Due to the above structure, the utility model has the following beneficial effects:

[0012] 1. The L-shaped support block for supporting the target is arranged in the slide way of the disc base, the L-shaped support block can move in the slide way of the disc base, the L-shaped support block can effectively support the inner wall of the tubular target in the sintering process, so that the tubular target is prevented from collapsing and deforming, the inner wall of the target is supported at the same time, the tubular target diameter can be moved without hindering the contraction of the tubular target diameter, and the target density is improved.

[0013] 2. The side of the longitudinal support block of the L-shaped support block contacting the target is provided with protrusions and grooves, the protrusions contact the inner wall of the tubular target to provide support, and the grooves provide space for oxygen flow, so that the contact surface of the target and oxygen is increased without affecting the support effect, and the target density is improved.

[0014] 3. The alumina fine sand layer is arranged between the transverse sliding block of the L-shaped support block and the slide way of the disc base and on the upper surface of the disc base, so that the contraction resistance of the tubular target is reduced.

[0015] 4, The utility model discloses simple structure, easy operation, and low operation intensity.

[0016] Below, the technical characteristics of a kind of tubular target material sintering support device of the utility model are further explained in conjunction with the drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 A kind of tubular target material sintering support device of the utility model solid view.

[0018] Figure 2 A kind of tubular target material sintering support device of the utility model front view.

[0019] Figure 3 A kind of tubular target material sintering support device of the utility model plan view.

[0020] Figure 4 : Figure 3 A-A sectional view.

[0021] Figure 5 A kind of tubular target material sintering support device of the utility model use state diagram.

[0022] In the drawing: 1-disc base, 11-slideway, 12-radial strip-shaped recess, 13-through hole, 2-L-shaped support block, 21-transverse sliding block, 22-longitudinal support block, 23-boss, 24-recess, 3-alumina fine sand layer.

[0023] P indicates tubular target material. DETAILED DESCRIPTION

[0024] For better explaining the purpose, technical scheme and advantages of the utility model, the utility model will be further explained below in conjunction with specific examples. Those skilled in the art should understand that the specific examples described here are only used to explain the utility model, and are not used to limit the utility model.

[0025] Example 1: a kind of tubular target material sintering support device, as Figures 1-4As shown, including disc base 1 and 4 L-shaped support block 2, the disc base 1 middle opening has a through hole 13, the disc base is uniformly provided with 4 slide 11, the disc base of adjacent two slide 11 is provided with 7 radial strip-shaped groove 12, radial strip-shaped groove can increase the contact amount of target oxygen, also can reduce shrinkage resistance.The L-shaped support block 2 is by transverse sliding block 21 and the longitudinal support block 22 of being connected in the transverse sliding block one end, the longitudinal support block 22 is provided with a plurality of upper and lower arrangement for supporting target protrusion 23 on the side surface towards the transverse sliding block, two protrusions form a groove, a longitudinal support block 22 has a plurality of grooves, can increase the contact surface of target and oxygen, the end face of the protrusion 23 and target contact is arc surface.The transverse sliding block 21 of the L-shaped support block is placed in the slide 11 of disc base, the transverse sliding block one end connected with longitudinal support block 22 is inward, i.e. the longitudinal support block 22 can be located above the through hole 13 of disc base, there is a gap between the transverse sliding block and slide, the width of slide 11 is 1-3mm greater than the width of transverse sliding block 21, the L-shaped support block can move in the slide 11 of disc base.

[0026] In the embodiment, the width of the radial strip-shaped groove is 3-10mm, the depth is 2-5mm, the width of the transverse sliding block is 20-50mm, and the height of the longitudinal support block is 100-800mm. As a variation, the number, width and height of the radial strip-shaped groove 12, the transverse sliding block 21 and the longitudinal support block 22 can be adjusted according to actual conditions.

[0027] In the embodiment, the slide 11 of the disc base is provided with an alumina fine sand layer 3 (see Figure 5 ), and the transverse sliding block 21 of the L-shaped support block is placed on the alumina fine sand layer in the slide 11 of the disc base. The upper end surface of the transverse sliding block 21 is slightly higher than the upper end surface of the disc base 1 by 1-3mm, so that the gravity of the tube target can be concentrated on the L-shaped support block 2 during use, and the L-shaped support block 2 can move synchronously without blocking the shrinkage of the tube target and can support the inner wall of the tube target when the tube target shrinks. An alumina fine sand layer 3 is provided on the surface of the disc base outside the radial strip-shaped groove. The thickness of the alumina fine sand layer is 1-3mm, and the diameter of the alumina fine sand is less than 500 microns.

[0028] In the embodiment, the material of the disc base 1 and the L-shaped support block 2 is high-temperature-resistant alumina or silicon carbide, the height of the L-shaped support column is 100-800mm, and the diameter of the disc base is greater than the outer diameter of the tube target blank.

[0029] As a variation of the embodiment, the number of L-shaped support blocks can be increased or decreased according to actual conditions, and is generally 2-8.

[0030] The use process of the utility model is as follows: Figure 5As shown, the ITO tube target embryo is vertically placed on the disc base, the L-shaped support block is located in the ITO tube target embryo, the position of the L-shaped support block is adjusted so that the protrusion of the L-shaped support block is attached to the inner wall of the ITO tube target embryo, and then the sintering is started. During the sintering process, the L-shaped support block moves inward (i.e. in the direction of the through hole of the disc base) along with the shrinkage of the inner diameter of the ITO tube target embryo, which can provide effective support effect for the tube target and will not hinder the shrinkage of the target material.

Claims

1. A tubular target sintering support device, characterized in that: The application relates to a target support device, which comprises a disc base (1) and N L-shaped supporting blocks (2), a through hole (13) is formed in the middle of the disc base, N slide ways (11) are uniformly arranged on the disc base, 3-15 radial strip-shaped grooves (12) are arranged on the disc base between two adjacent slide ways, the L-shaped supporting block (2) is composed of a transverse sliding block (21) and a longitudinal supporting block (22) connected to one end of the transverse sliding block, a plurality of convex blocks (23) for supporting target materials are arranged on the side of the longitudinal supporting block facing the transverse sliding block, grooves (24) are formed between the convex blocks, the end surface of the convex block contacting the target material is a circular arc surface, the transverse sliding block of the L-shaped supporting block is arranged in the slide way of the disc base, the end of the transverse sliding block connected with the longitudinal supporting block faces inwards, the width of the slide way is larger than the width of the transverse sliding block, and N is any integer between 2 and 8.

2. A tubular target sinter support apparatus as defined in claim 1, wherein: The width of the transverse sliding block is 20-50 mm, and the height of the longitudinal supporting block is 100-800 mm.

3. A tubular target sinter support apparatus as defined in claim 1, wherein: An alumina fine sand layer is arranged in the slide way of the disc base, and the transverse sliding block of the L-shaped supporting block is arranged on the alumina fine sand layer in the slide way of the disc base.

4. A tubular target sinter support apparatus as defined in claim 1, wherein: An alumina fine sand layer (3) is arranged on the surface of the disc base outside the radial strip-shaped grooves.

5. A tubular target sinter support apparatus as claimed in claim 3 or 4, wherein: The thickness of the alumina fine sand layer is 1-3 mm.

6. A tubular target sinter support apparatus as defined in claim 1, wherein: The width of the radial strip-shaped groove is 3-10 mm, and the depth is 2-5 mm.

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