A level verification device for semiconductor test equipment

By designing a levelness verification device for semiconductor testing equipment, and using pressure measuring film to form an imprint on the test fixture, the problem of accurately locking the levelness of the sorting machine and test fixture is solved, thereby improving the test yield and efficiency.

CN223610849UActive Publication Date: 2025-11-28SHANGHAI V-TEST SEMICON TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202423087039.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-13
Publication Date
2025-11-28
Estimated Expiration
2034-12-13

AI Technical Summary

Technical Problem

In existing technologies, it is difficult to accurately determine the level of the sorting machine and test fixture, which increases the risk of poor contact during chip testing, reduces test yield and increases costs, and relies on human experience for judgment, resulting in low efficiency.

Method used

Design a levelness verification device for semiconductor testing equipment, including a positioning seat and a pressure-sensitive block. A pressure measuring film is used to form an imprint on the test fixture. The levelness is judged by observing the color change of the imprint. The positioning seat and limiting components are combined to ensure the accurate positioning of the pressure-sensitive block.

Benefits of technology

It enables rapid and accurate verification of the levelness of sorting machines and test fixtures, reduces errors from human experience-based judgment, helps technicians pinpoint problems in a timely manner, and improves testing efficiency and yield.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223610849U_ABST
    Figure CN223610849U_ABST
Patent Text Reader

Abstract

The utility model discloses a levelness verification device for semiconductor test equipment, including positioning seat and pressure -sensitive block, the positioning seat is used for positioning the pressure -sensitive block and is placed in the cleaning tray of semiconductor test equipment, to cooperate the conveying arm of semiconductor test equipment and send the pressure -sensitive block into test fixture, the pressure -sensitive block size is adapted to the inner chamber of test fixture, the pressure -sensitive block includes the bottom plate and pressure measurement film, and the pressure measurement film is pasted on the one end surface of bottom plate. The levelness verification device for semiconductor test equipment provided by the utility model can quickly and accurately verify the levelness of the sorting machine and test fixture, compared with the manual experience judgment mode in the prior art, can make the technical personnel better lock the problem, thereby facilitating the technical personnel to make the coping strategy in time accurately.
Need to check novelty before this filing date? Find Prior Art

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of half chip testing equipment, in particular to a level verification device for semiconductor testing equipment. BACKGROUND

[0002] The sorting machine and the test fixture are the key factors of the chip testing performance, the sorting machine plays the function of distinguishing the good products and the bad products in the testing field. The test fixture is important in the testing field, which is mainly connected with the sorting machine and the testing machine, and the two are connected to form a complete testing chip system. The chip is transported to the testing area position by the test arm of the sorting machine, and after the chip is connected with the test base of the test fixture, the testing machine is powered on to provide power for the test motherboard and the test base through the probe to test.

[0003] However, the sorting machine and the test fixture will usually cause uneven testing due to the aging of the mechanical structure and the wear of the spring needle and the rubber strip of the test fixture in the long-term testing process, which undoubtedly increases the risk of poor contact between the chip and the test fixture in the chip testing process, thereby reducing the testing yield and increasing the testing cost. Therefore, how to accurately lock the problem is very important.

[0004] At present, the level problem of the sorting machine and the test fixture is usually judged by manual experience, which cannot accurately lock the problem and greatly affects the efficiency of the factory. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a level verification device for semiconductor testing equipment, which can quickly and accurately verify the level of the sorting machine and the test fixture, so that the technical personnel can better lock the problem.

[0006] To solve the above technical problems, the utility model provides a level verification device for semiconductor testing equipment, which comprises a positioning seat and a pressure-sensitive block.

[0007] The positioning seat is used for positioning and placing the pressure-sensitive block in the cleaning disc of the sorting machine, so that the test arm of the sorting machine can send the pressure-sensitive block into the test fixture.

[0008] The pressure-sensitive block is matched with the inner cavity of the test fixture in size, and the pressure-sensitive block comprises a bottom plate and a pressure measuring film, which is pasted on one end face of the bottom plate.

[0009] Further, the pressure measuring film is pasted on one end face of the bottom plate by traceless glue.

[0010] Further, the positioning seat comprises a supporting table, a placing disc and a limiting piece.

[0011] The support table is connected with the placing disc and is used for supporting the placing disc;

[0012] The placing disc is used for placing the pressure-sensitive block;

[0013] The limiting piece is installed on the support table and is used for multi-point limiting the pressure-sensitive block placed on the placing disc.

[0014] Further, the limiting piece comprises a plurality of limiting blocks installed on the support table, and the plurality of limiting blocks are distributed at the periphery of the placing disc.

[0015] Further, the limiting block is in an "L" shape, and the limiting block is located at the corner periphery of the placing disc.

[0016] Further, the limiting block has two limiting blocks, and the two limiting blocks are respectively located at the corner periphery of the placing disc.

[0017] Further, the limiting block has a chamfer structure on the inner side of the end away from the support table.

[0018] Compared with the prior art, the semiconductor test equipment level verification device has at least the following beneficial effects:

[0019] The semiconductor test equipment level verification device can quickly and accurately verify the level of the sorting machine and the test clamp, and compared with the manual experience judgment method in the prior art, the semiconductor test equipment level verification device can help the technical personnel to better lock the problem, so that the technical personnel can timely and accurately make a response strategy. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 Fig. 1 is a schematic view of the overall structure of the semiconductor test equipment level verification device in an embodiment of the present application;

[0021] Figure 2 Fig. 2 is a schematic view of the structure of the pressure-sensitive block in an embodiment of the present application;

[0022] Figure 3 Fig. 3 is a schematic view of the structure of the positioning seat in an embodiment of the present application.

[0023] In the figure: 1, positioning seat; 11, support table; 12, placing disc; 13, limiting block; 2, pressure-sensitive block; 21, bottom plate; 22, pressure measurement film; 23, traceless glue. DETAILED DESCRIPTION

[0024] The semiconductor testing equipment level verification device of this utility model will now be described in more detail with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the utility model.

[0025] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0026] like Figure 1 As shown in the figure, this utility model embodiment proposes a levelness verification device for semiconductor testing equipment, including a positioning base 1 and a pressure-sensitive block 2.

[0027] Specifically, the positioning seat 1 is used to position the pressure-sensitive block 2 in the cleaning tray of the sorting machine, so as to cooperate with the test arm of the sorting machine to send the pressure-sensitive block 2 into the test fixture.

[0028] The size of the pressure-sensitive block 2 is adapted to the inner cavity of the test fixture, in conjunction with reference. Figure 2 The pressure-sensitive block 2 includes a base plate 21 and a pressure measuring film 22, which is attached to one end face of the base plate 21.

[0029] In the above embodiment, when verifying the levelness of the test fixture, the pressure-sensitive block 2 is placed in the positioning seat 1, and the test arm of the sorting machine automatically feeds the pressure-sensitive block 2 into the test fixture. The test fixture is pressed down so that the conductive needle of the test fixture contacts the pressure measuring film 22 of the pressure-sensitive block 2 to form an imprint. Based on the characteristics of the pressure measuring film 22, the imprint on the pressure measuring film 22 can provide technicians with a clear fault diagnosis.

[0030] Specifically, pressure measuring film, also known as pressure-sensitive paper, is mainly used for the precise measurement of pressure, pressure distribution, and pressure balance. After pressure is applied, a red area will appear on the film, and the color intensity will change with the pressure. By observing the depth and distribution of the color, one can intuitively understand the distribution and magnitude of the pressure.

[0031] In a preferred embodiment, the pressure measuring film 22 is applied to one end face of the base plate 21 using traceless adhesive 23.

[0032] Traceless glue is a kind of adhesive with special performance, which can firmly bond various materials such as metal, plastic, glass, ceramic, leather, paper, etc., to meet the bonding needs in different scenes. At the same time, traceless glue has removability, which can be relatively easily removed from the bonding surface when the bonded object needs to be replaced or removed, and will not leave a lot of residual glue, reducing the cleaning work and possible damage to the surface of the bonded object.

[0033] Therefore, the pressure measuring film 22 is laid on the base plate 21 by using the traceless glue 23, which ensures the effective and stable installation of the pressure measuring film 22 and facilitates the removal and replacement of the pressure measuring film 22 on the base plate 21, so that the base plate 21 can be repeatedly used.

[0034] In an optional embodiment, the base plate 21 is made of engineering plastic. In production, the engineering plastic is cut to the required size of the product by a machine tool, and the periphery of the main body is polished and ground to ensure that the periphery is uniform and free of dust.

[0035] In the above embodiment, in combination with reference Figure 3 The positioning seat 1 comprises a supporting table 11, a placing disc 12 and a limiting piece. The supporting table 11 is connected with the placing disc 12 and is used for supporting and placing the placing disc 12. The placing disc 12 is used for placing the pressure-sensitive block 2. The limiting piece is installed on the supporting table 11 and is used for limiting the pressure-sensitive block 2 placed on the placing disc 12 at multiple points.

[0036] Specifically, the limiting piece comprises a plurality of limiting blocks 13 installed on the supporting table 11, and the plurality of limiting blocks 13 are distributed at intervals around the periphery of the placing disc 12.

[0037] Further, the limiting block 13 is in the shape of "L", and the limiting block 13 is located at the peripheral corner of the placing disc 12.

[0038] Further, the limiting block 13 has two limiting blocks 13, and the two limiting blocks 13 are respectively located at the peripheral corners of the placing disc 12.

[0039] In the above embodiment, in order to facilitate the placement of the pressure-sensitive block 2 between the two limiting blocks 13, the inner side of the end of the limiting block 13 away from the supporting table 11 is chamfered to form a chamfered structure.

[0040] In summary, the horizontal degree verification device for semiconductor test equipment provided by the utility model has at least the following advantages compared with the prior art:

[0041] The horizontal degree verification device for the semiconductor test equipment can quickly and accurately verify the horizontal degree of the test clamp, compared with the manual experience judgment mode in the prior art, so that the technical personnel can better lock the problem, thereby facilitating the technical personnel to timely and accurately make a response strategy.

[0042] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application also intends to include these modifications and variations.

Claims

1. A levelness verification device for a semiconductor test equipment, characterized by, The positioning seat is used for positioning the pressure-sensitive block in a cleaning disc of a sorting machine, so as to cooperate with a test arm of the sorting machine to send the pressure-sensitive block into a test clamp. The pressure-sensitive block is matched with the inner cavity of the test clamp, and comprises a bottom plate and a pressure measuring film which is pasted on one end surface of the bottom plate. The pressure measuring film is pasted on one end surface of the bottom plate by traceless glue.

2. The levelness verification device for semiconductor test equipment according to claim 1, wherein The positioning seat comprises a supporting table, a placing disc and a limiting piece.

3. The levelness verification device for semiconductor test equipment according to claim 1, wherein The supporting table is connected with the placing disc and is used for supporting the placing disc. The placing disc is used for placing the pressure-sensitive block. The limiting piece is installed on the supporting table and is used for multi-point limiting the pressure-sensitive block placed on the placing disc. The limiting piece comprises a plurality of limiting blocks installed on the supporting table, and the plurality of limiting blocks are distributed at intervals on the periphery of the placing disc.

4. The levelness verification device for semiconductor test equipment according to claim 3, wherein The limiting block is in an "L" shape, and the limiting block is located on the periphery of the corner of the placing disc.

5. The levelness verification device for semiconductor test equipment according to claim 4, wherein The limiting block has two limiting blocks, and the two limiting blocks are respectively located on the peripheries of two opposite corners of the placing disc.

6. The levelness verification device for semiconductor test equipment according to claim 5, wherein The end of the limiting block away from the supporting table has a chamfer structure.

7. The levelness verification device for semiconductor test equipment according to claim 4, wherein ​