CVD (Chemical Vapor Deposition) furnace access carrier

Abstract

The utility model provides a CVD (Chemical Vapor Deposition) furnace entering and exiting carrier, and relates to the technical field of semiconductor chip processing. According to the carrier, the tail of a carrying cylinder is connected with a protective cover through a tail connecting piece, the tail connecting piece seals the tail of the carrying cylinder through a tail plate, the tail connecting piece is connected with the protective cover through a flange plate, and the tail plate is connected with the flange plate through a support, so that the tail plate does not make direct contact with a pull rod, the protective cover protects the flange plate, and the service life of the flange plate is prolonged; even if the flange plate is damaged, the function of the tail plate is not affected, the carrier can still be used continuously, and the service life of the carrier is further prolonged.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip processing technology, specifically to a CVD deposition furnace loading and unloading carrier. Background Technology

[0002] Diodes are the most commonly used basic electronic components. In the process of making passivation protection layers for high-voltage diode chips, a semi-insulating thin film needs to be deposited on the surface of the PN junction through CVD deposition process to eliminate the silicon-oxygen interface effect, thereby improving the reliability of the device in high-temperature and high-humidity environments.

[0003] In the process of fabricating passivation protective layers for chips, wafers are pushed into or pulled out of the reactor during CVD deposition using a pull rod-driven carrier. During this process, the carrier's tail plate is prone to collision with the pull rod, leading to damage. Currently, carriers often use a protective cover connected to a flange at the tail to protect the tail plate. While this can extend the tail plate's lifespan to some extent, once the tail plate is damaged, the entire carrier must be replaced immediately, indicating that the carrier's lifespan needs further improvement.

[0004] To facilitate handling, existing carriers have handles installed on the outer wall of the carrier cylinder. To avoid hindering the carrier's entry into the reactor, the handles are often attached to the outer wall of the carrier cylinder by detachable hoops. However, due to the flange connection to the cover at the head of the carrier, the presence of the flange ring makes it difficult to remove the hoop from the head. Therefore, the hoop needs to be loosened and removed from the tail of the carrier before it enters the induction furnace. However, if the flange connection to the tail of the carrier is a protective cover, the hoop is also difficult to remove from the tail, affecting the convenience of loading and unloading the handle. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a CVD deposition furnace loading and unloading carrier, which solves the problem that the service life of CVD deposition furnace loading and unloading carriers needs to be further improved.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A CVD deposition furnace inlet and outlet carrier, the carrier comprising: a carrier cylinder, a tail connector, and a protective cover;

[0008] The tail connector includes: a tail plate, a bracket, and a flange plate;

[0009] The tail plate is welded to the inner wall of the tail section of the carrier cylinder;

[0010] One end of the bracket is connected to the tail plate, and the other end extends to the outer flange plate of the carrier cylinder;

[0011] The flange plate is provided with a tail hole;

[0012] The protective cover is connected to the flange of the flange plate, and the protective cover has a protective hole that matches the tail hole.

[0013] Preferably, the support is a cylindrical support.

[0014] Preferably, the carrier cylinder and the tail connector are made of quartz material, and the protective cover is made of metal material.

[0015] Preferably, the flange plate has a plurality of first flange holes, and the protective cover has second flange holes that correspond one-to-one with the first flange holes.

[0016] Preferably, the protective cover has several observation holes.

[0017] Preferably, a handle is provided on the outer wall of the carrier cylinder, and the handle is clamped to the outer wall of the carrier cylinder by a hoop.

[0018] Preferably, the diameter C of the tail plate and the inner diameter D of the carrier cylinder satisfy the condition: C≤D.

[0019] Preferably, the flange plate is housed within the cover cavity of the protective cover, and the outer diameter E of the protective cover and the outer diameter F of the carrier cylinder satisfy: E≤F.

[0020] Preferably, the outer diameter G of the bracket and the diameter H of the flange plate satisfy: HG≥1cm.

[0021] Preferably, the diameter J of the tail hole and the diameter K of the protective hole satisfy the condition: J > K.

[0022] This invention provides a CVD deposition furnace loading and unloading carrier. Compared with the prior art, it has the following advantages:

[0023] In this invention, the carrier has a protective cover connected to the tail end of the carrier cylinder via a tail connector. The tail connector closes the tail end of the carrier cylinder via a tail plate and is connected to the protective cover via a flange plate. The tail plate and the flange plate are connected via a bracket, so that the tail plate no longer directly contacts the tie rod. The protective cover protects the flange plate, extending its service life. Furthermore, even if the flange plate is damaged, it will not affect the function of the tail plate, and the carrier can still continue to be used, further extending the service life of the carrier. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1This is an exploded view of the vehicle in an embodiment of this utility model.

[0026] Figure 2 This is a schematic diagram of the structure of the vehicle in an embodiment of this utility model.

[0027] Figure 3 This is a front view of the vehicle in an embodiment of this utility model.

[0028] Figure 4 for Figure 3 Cross-sectional view of AA.

[0029] Figure 5 for Figure 4 Enlarged view of point B in the middle.

[0030] The reference numerals in the figure are set as follows: carrier cylinder 10, tail connector 20, tail plate 21, bracket 22, flange plate 23, tail hole 24, first flange hole 25, protective cover 30, protective hole 31, second flange hole 32, observation hole 33, handle 40, and hoop 41. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model are described clearly and completely. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0032] This application provides a CVD deposition furnace loading and unloading carrier, which solves the problem that the service life of CVD deposition furnace loading and unloading carriers needs to be further improved.

[0033] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0034] Example:

[0035] like Figure 1 , Figure 2 As shown, this utility model provides a CVD deposition furnace inlet and outlet carrier, the carrier including: carrier cylinder 10, tail connector 20 and protective cover 30;

[0036] The tail connector 20 includes: a tail plate 21, a bracket 22, and a flange plate 23;

[0037] The tail plate 21 is welded to the inner wall of the tail section of the carrier cylinder 10;

[0038] One end of the bracket 22 is connected to the tail plate 21, and the other end extends to the outer flange plate 23 of the carrier cylinder 10.

[0039] The flange plate 23 is provided with a tail hole 24;

[0040] The protective cover 30 is flange-connected to the flange plate 23, and the protective cover 30 has a protective hole 31 that matches the tail hole 24.

[0041] The tail hole 24 and the protective hole 31 provide a channel for the pull rod to hook and pull out the vehicle.

[0042] like Figure 1 , Figure 2 , Figure 4 , Figure 5 As shown, the bracket 22 adopts a cylindrical bracket, which improves the bending strength of the bracket 22.

[0043] The carrier cylinder 10 and the tail connector 20 are made of quartz, while the protective cover 30 is made of metal.

[0044] like Figure 1 As shown, the flange plate 23 has a plurality of first flange holes 25, and the protective cover 30 has second flange holes 32 corresponding to the first flange holes 25. The first flange holes 25 and the second flange holes 32 are connected by bolts and nuts to realize the flange connection between the flange plate 23 and the protective cover 30.

[0045] like Figures 1-3 As shown, the protective cover 30 has several observation holes 33 to facilitate observation of the position and condition of the product inside the carrier cylinder 10.

[0046] like Figures 1-3 As shown, a handle 40 is provided on the outer wall of the carrier cylinder 10, and the handle 40 is clamped to the outer wall of the carrier cylinder 10 by a hoop 41.

[0047] like Figure 5 As shown, the diameter C of the tail plate 21 and the inner diameter D of the carrier cylinder 10 satisfy: C≤D; which facilitates the welding of the tail plate 21 to the inner wall of the carrier cylinder 10.

[0048] like Figure 5 As shown, the flange plate 23 is housed in the cover cavity of the protective cover 30, and the outer diameter E of the protective cover 30 and the outer diameter F of the carrier cylinder 10 satisfy: E≤F; which facilitates the loading and unloading of the hoop 41 from the tail of the carrier cylinder 10.

[0049] like Figure 5 As shown, the outer diameter G of the bracket 22 and the diameter H of the flange plate 23 satisfy: HG≥1cm; providing space for the opening of the first flange hole 25 and the installation of bolts and nuts.

[0050] like Figure 5As shown, the diameter J of the tail hole 24 and the diameter K of the protective hole 31 satisfy: J > K; thus, the protective cover 30 effectively protects the tail hole 24.

[0051] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0052] 1. In this embodiment of the utility model, the carrier is connected to the protective cover 30 at the tail end of the carrier cylinder 10 via a tail connector 20. The tail connector 20 closes the tail end of the carrier cylinder 10 via a tail plate 21 and is connected to the protective cover 30 via a flange plate 23. The tail plate 21 and the flange plate 23 are connected via a bracket 22, so that the tail plate 21 no longer directly contacts the tie rod. The protective cover 30 protects the flange plate 23, thereby improving the service life of the flange plate 23. On this basis, even if the flange plate 23 is damaged, it will not affect the function of the tail plate 21, and the carrier can still continue to be used, further improving the service life of the carrier.

[0053] 2. In this embodiment of the utility model, the diameters of the tail connector 20 and the protective cover 30 are both smaller than the outer diameter of the carrier cylinder 10, which facilitates the installation and removal of the hoop 41 of the handle 40 from the tail of the carrier cylinder 10.

[0054] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0055] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A CVD deposition furnace loading and unloading carrier, characterized in that, The carrier includes: a carrier tube (10), a tail connector (20), and a protective cover (30); The tail connector (20) includes: a tail plate (21), a bracket (22), and a flange plate (23); The tail plate (21) is welded to the inner wall of the tail section of the carrier cylinder (10); One end of the bracket (22) is connected to the tail plate (21), and the other end extends to the outer flange plate (23) of the carrier cylinder (10); The flange plate (23) is provided with a tail hole (24); The protective cover (30) is flange-connected to the flange plate (23), and the protective cover (30) has a protective hole (31) that matches the tail hole (24).

2. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The bracket (22) is a cylindrical bracket.

3. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The carrier tube (10) and the tail connector (20) are made of quartz, and the protective cover (30) is made of metal.

4. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The flange plate (23) has a plurality of first flange holes (25), and the protective cover (30) has second flange holes (32) that correspond one-to-one with the first flange holes (25).

5. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The protective cover (30) has several observation holes (33).

6. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The outer wall of the carrier cylinder (10) is provided with a handle (40), and the handle (40) is clamped to the outer wall of the carrier cylinder (10) by a hoop (41).

7. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The diameter C of the tail plate (21) and the inner diameter D of the carrier cylinder (10) satisfy: C≤D.

8. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The flange plate (23) is housed in the cover cavity of the protective cover (30), and the outer diameter E of the protective cover (30) and the outer diameter F of the carrier cylinder (10) satisfy: E≤F.

9. The CVD deposition furnace loading and unloading carrier as described in claim 2, characterized in that, The outer diameter G of the bracket (22) and the diameter H of the flange plate (23) satisfy: HG≥1cm.

10. The CVD deposition furnace loading and unloading carrier as described in claim 1, characterized in that, The diameter J of the tail hole (24) and the diameter K of the protective hole (31) satisfy the condition: J > K.

Images