Crucible upper and single crystal furnace

Abstract

The embodiment of the utility model provides a crucible side and a single crystal furnace, the crucible side comprises a first heat conduction part and a second heat conduction part, the first heat conduction part and the second heat conduction part are connected and enclose to form an accommodating cavity with an open end; in the axial direction of the crucible upper, the first heat conduction part is located above the second heat conduction part, and the opening is formed in the end, away from the second heat conduction part, of the first heat conduction part; at least one heat insulation cavity is formed in the second heat conduction part; along the axial direction of the crucible side, the minimum distance between the end part, far away from the second heat conduction part, of the first heat conduction part and the heat insulation cavity is H2, and the height of the crucible side is H1; wherein H2 is greater than or equal to 1 / 3H1. The temperature of the middle lower part and the bottom of the quartz crucible is reduced, the reaction between the quartz crucible and the silicon liquid is weakened, and the condition that the silicon liquid is brought into the crystal bar crystal growth part through convection is reduced, so that the oxygen content of the crystal bar is reduced.

Description

Technical Field

[0001] This utility model relates to the field of crystal pulling technology, and in particular to a crucible side and a single crystal furnace. Background Technology

[0002] Oxygen in the crystal rod affects the lifespan of monocrystalline silicon, thus impacting the improvement of cell conversion efficiency. During crystal pulling, heat radiates from the heater to the crucible sides, which then transfer heat to the quartz crucible. This significant heat promotes the reaction between the quartz crucible and the molten silicon. In particular, the lower and bottom parts of the quartz crucible react with the molten silicon, generating a large amount of oxygen. This oxygen is carried into the crystal rod growth interface by the convection of the molten silicon, causing an increase in the oxygen content of the crystal rod in the early stages of crystal growth. Furthermore, as crystal pulling continues, the amount of molten silicon in the quartz crucible gradually decreases. The position of the crucible sides and the quartz crucible relative to the heating zone of the heater continuously shifts upwards. The R-curve and bottom of the quartz crucible are closer to the high-temperature zone of the heating zone of the heater, further intensifying the reaction between the R-curve and the molten silicon. More oxygen generated by this reaction enters the crystal rod via the convection of the molten silicon, leading to an increase in the oxygen content of the crystal rod in the later stages of crystal growth. Utility Model Content

[0003] In view of the above problems, embodiments of the present invention are proposed to provide a crucible and a single crystal furnace that overcome or at least partially solve the above problems.

[0004] To address the aforementioned problems, in a first aspect, this utility model discloses a crucible side, comprising:

[0005] A first heat-conducting part and a second heat-conducting part are connected and enclosed to form an open-end receiving cavity;

[0006] Along the axial direction of the crucible side, the first heat-conducting part is located above the second heat-conducting part, the opening is located at the end of the first heat-conducting part away from the second heat-conducting part, and at least one heat-insulating cavity is provided inside the second heat-conducting part;

[0007] Along the axial direction of the crucible side, the minimum distance between the end of the first heat-conducting part away from the second heat-conducting part and the heat insulation cavity is H2, and the height of the crucible side is H1; wherein, H2≥1 / 3H1.

[0008] Secondly, this utility model embodiment discloses a single crystal furnace, including the aforementioned crucible side.

[0009] The embodiments of this utility model have the following advantages:

[0010] In this embodiment of the invention, the first heat-conducting part and the second heat-conducting part are connected and enclosed to form an open-ended receiving cavity, which can be used to place a quartz crucible. Along the axial direction of the crucible side, the first heat-conducting part is located above the second heat-conducting part, and the open end is located at the end of the first heat-conducting part away from the second heat-conducting part. At least one heat-insulating cavity is provided inside the second heat-conducting part. In this way, when the heater radiates heat to the crucible side, the first heat-conducting part can transfer heat to the quartz crucible, and the heat-insulating cavity in the second heat-conducting part can block some heat transfer to the quartz crucible and the silicon liquid, controlling H2≥1 / 3H1, which helps to reduce heat radiation to the lower and bottom parts of the quartz crucible, thereby reducing the temperature of the lower and bottom parts of the quartz crucible, weakening the reaction between the quartz crucible and the silicon liquid, reducing the convection of the silicon liquid into the crystal growth part of the crystal rod, and thus reducing the oxygen content of the crystal rod. Furthermore, it can prevent the insulation cavity from blocking too much heat conduction, which would reduce the output thermal efficiency of the heater. At the same time, it can prevent the insulation cavity from being too close to the top of the crucible side, reducing the impact on the removal of the crucible side and ensuring the life of the crucible side. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of a crucible side according to this utility model;

[0012] Figure 2 This is a schematic diagram of the application of the crucible side of this utility model in a single crystal furnace;

[0013] Figure 3 This is a schematic diagram of another type of crucible side structure of this utility model;

[0014] Figure 4 This is a schematic diagram of another type of crucible side structure of this utility model.

[0015] Explanation of reference numerals in the attached figures:

[0016] 1. Crucible side; 11. Opening; 12. Receiving cavity; 13. First heat-conducting part; 14. Second heat-conducting part; 141. First shell; 142. Second shell; 15. Insulation cavity; 151. Sub-insulation cavity; 2. Quartz crucible; 3. Heater; 4. Insulation cylinder; S. Axial direction. Detailed Implementation

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0019] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] In the Czochralski process for growing single-crystal silicon, thermal components such as a quartz crucible, crucible sides, heaters, and insulation cylinders are arranged inside the single-crystal furnace. Silicon material is placed inside the quartz crucible, which is positioned within the crucible sides to support it. The heaters are arranged around the crucible sides to radiate heat to the quartz crucible, allowing the silicon material to melt and grow crystal rods. The insulation cylinders are fitted over the heaters to provide insulation and prevent heat from radiating to the inner wall of the furnace.

[0022] In actual crystal growth, when the heater radiates heat to the crucible walls, the heated areas are conducted to lower-temperature, indirectly heated areas, including the molten silicon and the lower and bottom parts of the crucible walls. In the early stages of crystal pulling, the upper part of the crucible walls is closer to the high-temperature zone of the heater, transferring heat to the lower and bottom parts of the crucible walls. Simultaneously, some heat from the heater is also radiated to the lower and bottom parts of the crucible walls. The heat from the lower and bottom parts of the crucible walls is then transferred to the quartz crucible. Oxygen generated from the reaction between the quartz crucible and the molten silicon is carried by the convection currents of the molten silicon to the crystal growth interface and enters the crystal rod.

[0023] As crystal pulling continues and the amount of molten silicon in the quartz crucible decreases, the position of the crucible side relative to the heating zone of the heater shifts upwards. More and more of the inner wall and side walls of the quartz crucible, which are not covered by molten silicon, are exposed. Due to the exposure effect of the crucible wall, more radiative heat loss occurs. In order to prevent the molten silicon from crystallizing, the output power of the heater is increased, resulting in more heat being emitted by the heater and more heat being radiated to the outer layer of the crucible side. The temperature in the lower part, R-arc, and bottom region of the quartz crucible is also higher, leading to a more intense reaction between the lower part, R-arc, and bottom region of the quartz crucible and the molten silicon. At this time, the oxygen content entering the crystal rod is higher.

[0024] Therefore, this application provides a crucible side with a heat insulation cavity set within a reasonable range, so that the heat radiated by the heater to the lower and bottom parts of the crucible side is absorbed by the outer layer of the crucible side. The outer layer of the crucible side and the hollow cavity can block and reduce the conduction of this part of the heat to the quartz crucible and the silicon melt, thereby lowering the temperature of the lower and bottom parts of the quartz crucible, weakening the reaction between the quartz crucible and the silicon melt, reducing the oxygen carried into the crystal growth part of the crystal by the convection of the silicon melt, and reducing the oxygen content in the crystal. Specifically,

[0025] In a first aspect, this utility model discloses a crucible side 1, comprising: a first heat-conducting part 13 and a second heat-conducting part 14, the first heat-conducting part 13 and the second heat-conducting part 14 being connected and enclosing to form a receiving cavity 12 with one end open 11; along the axial direction S of the crucible side 1, the first heat-conducting part 13 is located above the second heat-conducting part 14, and the opening 11 is disposed at the end of the first heat-conducting part 13 away from the second heat-conducting part 14; at least one heat-insulating cavity 15 is disposed inside the second heat-conducting part 14. Along the axial direction of the crucible side 1, the minimum distance between the end of the first heat-conducting part 13 away from the second heat-conducting part 14 and the heat-insulating cavity 15 is H2, and the height of the crucible side 1 is H1; wherein, H2 ≥ 1 / 3H1.

[0026] In this embodiment of the invention, the first heat-conducting part 13 and the second heat-conducting part 14 are connected and enclosed to form a receiving cavity 12 with an open end 11. The receiving cavity 12 can be used to place the quartz crucible 2. Along the axial direction of the crucible side 1, the first heat-conducting part 13 is located above the second heat-conducting part 14, and the open end 11 is located at the end of the first heat-conducting part 13 away from the second heat-conducting part 14. At least one heat-insulating cavity 15 is provided inside the second heat-conducting part 14. In this way, when the heater 3 radiates heat to the crucible side 1, the first heat-conducting part 13 can transfer heat to the quartz crucible 2. The heat-insulating cavity 15 in the second heat-conducting part 14 can block some heat transfer to the quartz crucible 2 and the silicon liquid, controlling H2≥1 / 3H1. During crystal growth, this helps to reduce heat radiation to the lower part and bottom of the quartz crucible 2, which can lower the temperature of the lower part and bottom of the quartz crucible 2, weaken the reaction between the quartz crucible 2 and the silicon liquid, reduce the convection of the silicon liquid into the crystal growth part of the crystal rod, and thus reduce the oxygen content of the crystal rod. Furthermore, it can prevent the insulation cavity 15 from occupying too much space in the entire crucible side, thus avoiding excessive heat conduction and reducing the output thermal efficiency of the heater 3. At the same time, it can prevent the insulation cavity 15 from being too close to the top of the crucible side 1, reducing the impact on the disassembly of the crucible side 1 and ensuring the lifespan of the crucible side 1.

[0027] In this embodiment of the invention, the crucible side 1 may include a first heat-conducting part 13 and a second heat-conducting part 14 connected together. The first heat-conducting part 13 and the second heat-conducting part 14 may be integrally formed or spliced ​​together; this embodiment of the invention does not impose specific limitations. Both the first heat-conducting part 13 and the second heat-conducting part 14 are used to transfer the heat from the heater 3 to the quartz crucible 2. Since at least one heat-insulating cavity 15 is provided inside the second heat-conducting part 14, the heat-insulating cavity 15 can absorb some of the heat, making the thermal conductivity of the second heat-conducting part 14 less than that of the first heat-conducting part 13.

[0028] Specifically, along the axial direction of the crucible side 1, the first heat-conducting part 13 can be located above the second heat-conducting part 14. The first heat-conducting part 13 and the second heat-conducting part 14 can enclose and form a receiving cavity 12 with one end open 11. The receiving cavity 12 can be used to place the quartz crucible 2, and the shape of the receiving cavity 12 can be adapted to the shape of the quartz crucible 2. The quartz crucible 2 can enter the receiving cavity 12 through the opening 11.

[0029] Specifically, at least one heat insulation cavity 15 may be provided inside the second heat-conducting part 14. The specific number of heat insulation cavities 15 is not limited in this embodiment of the utility model.

[0030] like Figure 1 and Figure 2As shown, the first heat-conducting part 13 is located above the second heat-conducting part 14. The first heat-conducting part 13 corresponds to the upper part of the quartz crucible 2 and is used to radiate heat to the upper part of the quartz crucible 2. The second heat-conducting part 14 corresponds to the lower middle part and the bottom of the quartz crucible 2 and is used to radiate heat to the lower middle part and the bottom of the quartz crucible 2. During the crystal pulling process, the heater 3 radiates heat to the crucible side 1, and the first heat-conducting part 13 and the second heat-conducting part 14 respectively transfer heat to the quartz crucible 2 to heat the silicon material inside the quartz crucible 2. When the heater 3 radiates heat to the second heat-conducting part 14, the outer layer structure of the second heat-conducting part 14 and the heat insulation cavity 15 can block some of the heat. The second heat-conducting part 14 can block the heat radiated by the heater 3 and the heat reflected by the heat insulation cylinder 4, so that less heat is transferred from the second heat-conducting part 14 to the bottom of the quartz crucible 2 and the silicon liquid. This can reduce the temperature at the bottom of the quartz crucible 2, which is beneficial to weaken the reaction between the quartz crucible 2 and the silicon liquid, reduce the convection of the silicon liquid into the crystal growth part of the crystal rod, and reduce the oxygen content in the crystal rod.

[0031] Furthermore, as crystal pulling continues and the amount of molten silicon in the quartz crucible 2 decreases, the position of the crucible side 1 relative to the heating zone of the heater 3 continuously moves upward. More and more of the inner wall of the quartz crucible 2, which is not covered by molten silicon, is exposed. The second heat-conducting part 14 is close to the heating zone of the heater 3. The second heat-conducting part 14 can effectively block heat radiation to reduce heat conduction to the bottom of the quartz crucible 2, reduce the reaction between the quartz crucible 2 and the molten silicon, thereby reducing the oxygen content of the crystal rod.

[0032] Alternatively, the shape of the heat insulation cavity 15 is not limited to... Figure 1 , Figure 3 and Figure 4 As illustrated, barrel-shaped, bowl-shaped, or any other angular shape is within the protection scope of this utility model patent. The volume of the heat insulation cavity 15 is determined by its upper boundary, lower boundary, inner boundary, and outer boundary. By moving the upper boundary upward, the lower boundary downward, the inner boundary inward, and the outer boundary outward, the volume of the heat insulation cavity 15 can be increased, and vice versa. Under the condition that H2≥1 / 3H1, the larger the volume of the heat insulation cavity 15, the better the effect of the second heat-conducting part 14 in blocking heat radiation and reflection, the lower the temperature at the bottom of the quartz crucible 2 can be, and the more significant the effect on reducing the oxygen content in the crystal rod during the crystal pulling process.

[0033] Furthermore, along the axial direction of the crucible side 1, the minimum distance between the end of the first heat-conducting part 13 furthest from the second heat-conducting part 14 and the heat insulation cavity 15 is H2, and the height of the crucible side 1 along its axial direction is H1, wherein H2 ≥ 1 / 3H1. This ensures that the heat insulation cavity 15 is at a certain distance from the top of the crucible side 1. On the one hand, this guarantees the structural strength of the crucible side 1, reduces the impact on the disassembly of the crucible side 1, and guarantees the lifespan of the crucible side 1. On the other hand, it avoids the heat insulation cavity 15 blocking too much heat, ensuring the heating efficiency of the heater 3 and reducing the wear of the heater 3. In addition, by controlling the relationship between H2 and H1, the heat transferred to the quartz crucible and silicon liquid can be reasonably controlled, avoiding the situation where H2 is less than 1 / 3H1, resulting in an excessively large volume of the heat insulation cavity 15, which would cause heat loss from the crucible side to the quartz crucible and silicon liquid, affecting the stability of the crystal pulling process.

[0034] Specifically, the heat insulation cavity 15 can be an empty cavity, or the heat insulation cavity 15 can be filled with heat insulation material, etc. This utility model embodiment does not make specific limitations in this regard.

[0035] Optionally, the second heat-conducting part 14 includes a first shell 141 and a second shell 142 facing each other along the radial direction of the crucible side 1. A heat-insulating cavity 15 is formed between the end of the first heat-conducting part 13 near the second heat-conducting part 14 and between the first shell 141 and the second shell 142. Along the radial direction of the crucible side 1, the distance between the first shell 141 and the first shell 142 is a first interval L1; the first interval L1 on the side near the first heat-conducting part 13 is less than or equal to the first interval L1 on the side away from the first heat-conducting part 13.

[0036] In this embodiment of the present invention, the first interval L1 on the side near the first heat-conducting part 13 is less than or equal to the first interval L1 on the side away from the heat-conducting part, so that the heat insulation capacity of the side of the second heat-conducting part 14 away from the first heat-conducting part 13 can be greater than or equal to the heat insulation capacity of the side near the first heat-conducting part 13. This makes the heat insulation effect of the second heat-conducting part 14 on the bottom of the quartz crucible 2 better, which helps to reduce the reaction between the lower part or bottom of the quartz crucible 2 and the silicon liquid, and reduces the convection of the silicon liquid into the crystal growth part of the crystal rod, thereby reducing the oxygen content of the crystal rod.

[0037] Specifically, along the axial direction of the crucible side 1, the first shell 141 and the second shell 142 have the same height. Along the radial direction of the crucible side 1, the first shell 141 and the second shell 142 are arranged opposite to each other. The side of the first shell 141 facing the second shell 142 and the side of the second shell 142 facing the first shell 141 are the two side boundaries of the heat insulation cavity 15. Along the radial direction of the crucible side, the first gap L1 between the first shell 141 and the second shell 142 is the thickness of the heat insulation cavity 15.

[0038] Furthermore, increasing the first gap L1 can increase the volume of the heat insulation cavity 15; or, increasing the height of the first shell 141 and the second shell 142 in the axial direction of the crucible side 1 can increase the volume of the heat insulation cavity 15.

[0039] Furthermore, the first interval L1 on the side closer to the first heat-conducting part 13 is equal to the first interval L1 on the side farther from the first heat-conducting part 13, so that the heat insulation cavity 15 has a uniform thickness along the axial direction of the crucible side 1. Setting the first interval L1 on the side closer to the first heat-conducting part 13 to be smaller than the first interval L1 on the side farther from the first heat-conducting part 13 allows the thickness of the heat insulation cavity 15 to increase in the direction away from the first heat-conducting part 13, thereby increasing the heat insulation capacity and further reducing the temperature at the bottom of the quartz crucible 2.

[0040] Specifically, the side of the first housing 141 facing away from the second housing 142 is used to enclose the cavity 12. The first housing 141 can contact the quartz crucible 2 to transfer heat to the quartz crucible 2.

[0041] Optionally, the first housing 141 is bowl-shaped, and the second housing 142 is either bowl-shaped or cylindrical.

[0042] In this embodiment of the present invention, the first housing 141 is bowl-shaped, so that the first housing 141 is adapted to the quartz crucible 2, which facilitates the transfer of heat from the first housing 141 to the quartz crucible 2.

[0043] Specifically, the first housing 141 is bowl-shaped and the second housing 142 is bowl-shaped, which facilitates the adaptation of the second housing 142 to the first housing 141, thereby making it easier to realize that the first gap L1 on the side closer to the first heat-conducting part 13 is equal to the first gap L1 on the side farther away from the first heat-conducting part 13.

[0044] For example, such as Figure 1 As shown, along the direction away from the first heat-conducting part 13, the first shell 141 and the second shell 142 in the arc-shaped region of the first heat-conducting part 13 have a constant first spacing L1 in the radial direction of the crucible side 1.

[0045] Specifically, the first housing 141 is bowl-shaped and the second housing 142 is cylindrical, which makes it easier to make the first gap L1 on the side closer to the first heat-conducting part 13 smaller than the first gap L1 on the side farther away from the first heat-conducting part 13.

[0046] For example, such as Figure 3 As shown, along the direction away from the first heat-conducting part 13, the first gap L1 between the first shell 141 and the second shell 142 in the radial direction of the crucible side 1 increases, and the heat insulation capacity of the heat insulation cavity 15 increases.

[0047] Optionally, the wall thickness of the first housing 141 is L2 along the direction perpendicular to the first housing 141; wherein, 10mm≤L2≤40mm.

[0048] In this embodiment of the invention, the wall thickness of the first shell 141 is greater than or equal to 10 mm, which helps to ensure the structural strength of the first shell 141 and facilitates better support of the quartz crucible 2 by the first shell 141. The wall thickness of the first shell 141 is less than or equal to 40 mm, which avoids the first shell 141 being too thick, ensures that the first shell 141 transfers sufficient heat to the quartz crucible 2, ensures the thermal efficiency of the heater 3, and reduces the power consumption loss of the heater 3.

[0049] For example, the wall thickness of the first housing 141 can be 10mm, 15mm, 18mm, 22mm, 26mm, 30mm, 40mm, etc.

[0050] Optionally, the wall thickness of the second housing 142 is L3 along the direction perpendicular to the second housing 142; wherein, 5mm≤L3≤30mm.

[0051] In this embodiment of the invention, the wall thickness of the second housing 142 is greater than or equal to 5mm, which can prevent the second housing 142 from deforming under high temperature conditions, thereby avoiding interference between the second housing 142 and the heater 3 and preventing safety accidents such as sparking. The wall thickness of the second housing 142 is less than or equal to 30mm, which can prevent the wall thickness of the second housing 142 from being too thick, ensuring the thermal efficiency of the heater 3 and reducing the power consumption loss of the heater 3.

[0052] Specifically, the second housing 142 can block the heat radiated by the heater 3 and the heat reflected by the insulation cylinder 4.

[0053] For example, the wall thickness of the second housing 142 can be 5mm, 9mm, 12mm, 20mm, 25mm, 30mm, etc.

[0054] Optionally, along the axial direction of the crucible side 1, the inner wall surface of the first heat-conducting part 13 is coplanar with the wall surface of at least a portion of the first shell 141.

[0055] In this embodiment of the present invention, the inner wall surface of the first heat-conducting part 13 is coplanar with the inner wall surface of the vertical portion of the first shell 141 along the axial direction of the crucible side 1, so that the first heat-conducting part 13 and the second heat-conducting part 14 are smoothly connected and adapted to the outer wall surface of the quartz crucible 2. In this way, after the quartz crucible 2 softens at high temperature, it can fit well with the inner wall of the crucible side 1, which can prevent the inner wall of the crucible side 1 from being mislaminated and tearing the outer wall of the quartz crucible 2, thereby improving the service life of the quartz crucible 2.

[0056] In some alternative embodiments, along the axial direction of the crucible side 1, the heat insulation cavity 15 includes a plurality of sub-heat insulation cavities 151.

[0057] In this embodiment of the invention, multiple sub-insulation cavities 151 are spaced apart along the axial direction of the crucible side 1, so that the insulation cavities 15 can be segmented within the second heat-conducting part 14, thereby improving the structural strength of the second heat-conducting part 14.

[0058] Specifically, the volumes of two adjacent sub-insulation cavities 151 may be the same or different, the shapes of two adjacent sub-insulation cavities 151 may be the same or different, the extension lengths of two adjacent sub-insulation cavities 151 may be the same or different, and the thicknesses of two adjacent sub-insulation cavities 151 may be the same or different. This embodiment of the present invention does not specifically limit these aspects.

[0059] Specifically, the greater the length of the sub-insulation cavity 151 along the axial direction of the crucible side 1, the greater the thickness along the radial direction of the crucible side 1, the larger the volume of the sub-insulation cavity 151, and the stronger the insulation capacity.

[0060] Optionally, the volume of the sub-insulation cavity 151 away from the first heat-conducting part 13 along the axial direction of the crucible side 1 is larger than the volume of the sub-insulation cavity 151 close to the first heat-conducting part 13.

[0061] In this embodiment of the invention, the further away from the first heat-conducting part 13, the larger the volume of the sub-insulation cavity 151, and the better the heat insulation effect. This is beneficial to reduce the temperature at the bottom of the quartz crucible 2, reduce the reaction between the bottom of the quartz crucible 2 and the silicon liquid, and improve the effect of reducing oxygen content during the crystal pulling process.

[0062] Specifically, along the axial direction of the crucible side 1, the further away from the sub-insulation cavity 151 of the first heat-conducting part 13 and the closer to the bottom of the quartz crucible 2, the larger the volume of the sub-insulation cavity 151, the more heat it can block, and the more it can reduce the temperature at the bottom of the quartz crucible 2, which is beneficial to reducing the oxygen content of the crystal rod.

[0063] Optionally, the length of the sub-insulation cavity 151 away from the first heat-conducting part 13 along the axial direction of the crucible side 1 is greater than the length of the sub-insulation cavity 151 close to the first heat-conducting part 13 along the axial direction of the crucible side 1.

[0064] In this embodiment of the present invention, the further away from the first heat-conducting part 13, the longer the length of the sub-insulation cavity 151 along the axial direction of the crucible side 1, the better the heat insulation effect, which is conducive to reducing the temperature of the bottom of the quartz crucible 2, reducing the reaction between the quartz crucible 2 and the silicon liquid, and improving the effect of reducing oxygen content during the crystal pulling process.

[0065] In some alternative embodiments of this utility model, a heat insulation material is provided inside the heat insulation cavity 15; the heat insulation material is selected from at least one of graphite felt, zirconium oxide or alumina.

[0066] In this embodiment of the invention, heat insulation material is provided in the heat insulation cavity 15, which can further improve the heat insulation effect of the second heat-conducting part 14 and reduce the oxygen content in the crystal rod.

[0067] Specifically, the insulation material should be selected from at least one of graphite felt, zirconium oxide, or alumina to ensure the insulation effect of the insulation material.

[0068] For example, the insulation cavity 15 may be filled with only one of graphite felt, zirconium oxide or alumina material, or it may be filled with two or three of graphite felt, zirconium oxide or alumina material, etc., without specific limitation.

[0069] Specifically, insulation material can be filled into the sub-insulation cavity 151, or insulation material can be filled into at least part of the sub-insulation cavity 151 to adjust the insulation capacity of the sub-insulation cavity 151.

[0070] Furthermore, along the axial direction of the crucible side 1, the more heat insulation material is filled in the sub-insulation cavity 151 further away from the first heat-conducting part 13, the more heat can be blocked, which is beneficial to reducing the oxygen content of the crystal rod.

[0071] In this embodiment of the invention, compared to the prior art where the crucible side 1 does not have a heat insulation cavity 15 in the second heat-conducting part 14, under the same thermal field conditions and crystal pulling process, the use of the crucible side 1 in this embodiment of the invention to pull the crystal rod results in a reduction of at least 2 ppm of oxygen content at the head of the crystal rod and at least 0.5 ppm of oxygen content at the tail of the crystal rod.

[0072] The crucible side described in this embodiment of the present invention has at least the following advantages:

[0073] In this embodiment of the invention, the first heat-conducting part and the second heat-conducting part are connected and enclosed to form an open-ended receiving cavity, which can be used to place a quartz crucible. Along the axial direction of the crucible side, the first heat-conducting part is located above the second heat-conducting part, and the opening is located at the end of the first heat-conducting part away from the second heat-conducting part. The second heat-conducting part has at least one heat-insulating cavity inside. In this way, when the heater radiates heat to the crucible side, the first heat-conducting part can transfer heat to the quartz crucible, and the heat-insulating cavity in the second heat-conducting part can block some heat transfer to the quartz crucible and silicon liquid, controlling H2≥1 / 3H1. This helps to reduce heat radiation to the lower and bottom parts of the quartz crucible, which can lower the temperature of the lower and bottom parts of the quartz crucible, weaken the reaction between the quartz crucible and the silicon liquid, and reduce the convection of the silicon liquid into the crystal growth part of the crystal rod, thereby reducing the oxygen content of the crystal rod. Moreover, it can also avoid the heat-insulating cavity blocking too much heat conduction, which would reduce the output thermal efficiency of the heater. At the same time, it can also prevent the heat-insulating cavity from being close to the top of the crucible side, reducing the impact on the removal of the crucible side and ensuring the life of the crucible side.

[0074] Secondly, this utility model embodiment discloses a single crystal furnace, which may include the aforementioned crucible side.

[0075] The single crystal furnace described in this embodiment of the present invention may specifically include a furnace body and a heater, a quartz crucible, crucible sides, and a heat insulation cylinder disposed within the furnace body; such as Figure 2 As shown, the quartz crucible is placed inside the receiving cavity of the crucible side; the heater is arranged around the crucible side to radiate heat to the quartz crucible through the crucible side; the heat insulation cylinder is sleeved outside the heater to insulate against heat and prevent heat from radiating to the inner wall of the furnace.

[0076] The single crystal furnace described in this embodiment of the present invention has at least the following advantages:

[0077] In this embodiment of the invention, the first heat-conducting part and the second heat-conducting part are connected and enclosed to form an open-ended receiving cavity, which can be used to place a quartz crucible. Along the axial direction of the crucible side, the first heat-conducting part is located above the second heat-conducting part, and the opening is located at the end of the first heat-conducting part away from the second heat-conducting part. The second heat-conducting part has at least one heat-insulating cavity inside. In this way, when the heater radiates heat to the crucible side, the first heat-conducting part can transfer heat to the quartz crucible, and the heat-insulating cavity in the second heat-conducting part can block some heat transfer to the quartz crucible and silicon liquid, controlling H2≥1 / 3H1. This helps to reduce heat radiation to the lower and bottom parts of the quartz crucible, which can lower the temperature of the lower and bottom parts of the quartz crucible, weaken the reaction between the quartz crucible and the silicon liquid, and reduce the convection of the silicon liquid into the crystal growth part of the crystal rod, thereby reducing the oxygen content of the crystal rod. Moreover, it can also avoid the heat-insulating cavity blocking too much heat conduction, which would reduce the output thermal efficiency of the heater. At the same time, it can also prevent the heat-insulating cavity from being close to the top of the crucible side, reducing the impact on the removal of the crucible side and ensuring the life of the crucible side.

[0078] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0079] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0080] The above provides a detailed description of the crucible and single crystal furnace provided by this utility model. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A type of crucible side (1), characterized in that, include: The first heat-conducting part (13) and the second heat-conducting part (14) are connected and enclosed to form a receiving cavity (12) with one end open (11); Along the axial direction of the crucible side (1), the first heat-conducting part (13) is located above the second heat-conducting part (14), and the opening (11) is provided at the end of the first heat-conducting part (13) away from the second heat-conducting part (14); at least one heat-insulating cavity (15) is provided inside the second heat-conducting part (14); Along the axial direction of the crucible side (1), the minimum distance between the end of the first heat-conducting part (13) away from the second heat-conducting part (14) and the heat insulation cavity (15) is H2, and the height of the crucible side (1) is H1; wherein, H2≥1 / 3H1.

2. The crucible side (1) according to claim 1, characterized in that, The second heat-conducting part (14) includes a first shell (141) and a second shell (142) opposite each other along the radial direction of the crucible side (1); the first heat-conducting part (13) near the end of the second heat-conducting part (14), the first shell (141) and the second shell (142) enclose to form the heat insulation cavity (15); Along the radial direction of the crucible side (1), the distance between the first shell (141) and the second shell (142) is a first interval L1; The first interval L1 on the side closer to the first heat-conducting part (13) is less than or equal to the first interval L1 on the side farther away from the heat-conducting part (13).

3. The crucible side (1) according to claim 2, characterized in that, The first shell (141) is bowl-shaped; the second shell (142) is either bowl-shaped or cylindrical.

4. The crucible side (1) according to claim 2, characterized in that, Along the direction perpendicular to the first housing (141), the wall thickness of the first housing (141) is L2; ​​wherein, 10mm≤L2≤40mm; Along the direction perpendicular to the second housing (142), the wall thickness of the second housing (142) is L3; wherein, 5mm≤L3≤30mm.

5. The crucible side (1) according to claim 2, characterized in that, Along the axial direction of the crucible side (1), the inner wall surface of the first heat-conducting part (13) is coplanar with the inner wall surface of at least a portion of the first shell (141).

6. The crucible side (1) according to claim 2, characterized in that, Along the axial direction of the crucible side (1), the heat insulation cavity (15) includes a plurality of sub-heat insulation cavities (151).

7. The crucible side (1) according to claim 6, characterized in that, Along the axial direction of the crucible side (1), the volume of the sub-insulation cavity (151) away from the first heat-conducting part (13) is greater than the volume of the sub-insulation cavity (151) close to the first heat-conducting part (13).

8. The crucible side (1) according to claim 6, characterized in that, The length of the sub-insulation cavity (151) away from the first heat-conducting part (13) along the axial direction of the crucible side (1) is greater than the length of the sub-insulation cavity (151) close to the first heat-conducting part (13) along the axial direction of the crucible side (1).

9. The crucible side (1) according to claim 1, characterized in that, The heat insulation cavity (15) is provided with heat insulation material; the heat insulation material is selected from at least one of graphite felt, zirconium oxide or alumina.

10. A single crystal furnace, characterized in that, Includes the crucible side (1) as described in any one of claims 1-9.

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