Graphite boat drying device and cleaning and drying integrated system

Abstract

The utility model relates to the technical field of graphite boat processing, and discloses a graphite boat drying device and a cleaning and drying integrated system.The graphite boat drying device is applied to drying a cleaned graphite boat and comprises a box body, and a feeding table is arranged at one end, in the horizontal direction, of the box body; an electronic circuit board is arranged in the box body and is used for bearing the graphite boat and generating an alternating magnetic field when alternating current is supplied; the box body is provided with a two-axis moving assembly, the two-axis moving assembly is used for conveying the graphite boat to the electronic circuit board from the feeding table, the graphite boat is heated and dried in an internal heating mode, and the drying efficiency is high.

Description

Technical Field

[0001] This utility model relates to the field of graphite boat processing technology, specifically to a graphite boat drying device and an integrated cleaning and drying system. Background Technology

[0002] Graphite boats are excellent graphite containers with a wide range of applications. For example, they are used in solar cell manufacturing processes to support and transport silicon wafers. However, after prolonged use, especially during the coating process, graphite boats can develop multiple layers of film on their surface, containing numerous impurities. This can affect subsequent use and the production of silicon wafers. Therefore, graphite boats need to be cleaned and dried regularly.

[0003] In order to improve the cleaning and drying efficiency of graphite boats, the cleaning and drying processes are usually integrated into the same equipment. First, acid is used to pickle the graphite boat, followed by water washing and draining, and then it is transported to the drying component for drying. Most existing cleaning and drying equipment uses resistance coil heating and then uses a fan to carry the heat to the surface of the graphite boat to achieve the drying effect, but the above drying method is inefficient. Utility Model Content

[0004] In view of this, the present invention provides a graphite boat drying device and an integrated cleaning and drying system to solve the problem of low drying efficiency of existing cleaning and drying equipment for cleaned graphite boats.

[0005] In a first aspect, this utility model provides a graphite boat drying device for drying a cleaned graphite boat, the drying device comprising:

[0006] The container has a loading platform at one end along the horizontal direction;

[0007] An electronic circuit board is disposed inside the box. The electronic circuit board is used to support the graphite boat and to generate an alternating magnetic field when AC power is applied.

[0008] A two-axis moving assembly is disposed in the housing and is used to transport the graphite boat from the loading platform to the electronic circuit board.

[0009] The graphite boat drying device according to this utility model has at least the following beneficial effects:

[0010] By incorporating an electronic circuit board and a two-axis moving assembly within the chamber, when a cleaned and dry graphite boat is being dried, the two-axis moving assembly automatically transports the graphite boat from the loading platform to the electronic circuit board. Subsequently, the electronic circuit board is activated to generate an alternating magnetic field by energizing alternating current. Because the graphite boat is made of conductive graphite material, the graphite boat placed on the electronic circuit board cuts the alternating magnetic field lines, generating an alternating current (i.e., eddy current) at the bottom of the graphite boat. The eddy current causes the charge carriers at the bottom of the graphite boat to move at high speed and randomly. The charge carriers collide and rub against each other, generating heat energy, thereby achieving heating and drying of the graphite boat through internal heating, resulting in high drying efficiency.

[0011] In one optional embodiment, the housing is provided with a unloading platform at one end of the horizontal direction away from the loading platform, and the two-axis moving assembly is also used to transport the graphite boat from the electronic circuit board to the unloading platform; the housing is provided with a cooling assembly at the position corresponding to the unloading platform.

[0012] In one optional embodiment, the cooling assembly includes an air duct disposed inside the housing, the air duct being disposed opposite to the unloading platform and used to blow air onto the graphite boat located on the unloading platform, one end of the air duct extending outside the housing and connected to a fan.

[0013] In one optional embodiment, the two-axis moving assembly includes a first linear driver and a second linear driver. The first linear driver is disposed within the housing and has a first mounting plate that moves horizontally. The second linear driver is disposed on the first mounting plate and has a second mounting plate that moves vertically. The second mounting plate has a mechanical gripper.

[0014] In one optional embodiment, the first linear actuator includes a first mounting base disposed on the housing, a first lead screw disposed on the first mounting base in a horizontal direction, the first lead screw being driven to rotate by a first motor, a first nut seat disposed on the first lead screw, and a first mounting plate disposed on the first nut seat and slidably connected to the first mounting base in a horizontal direction.

[0015] In one optional embodiment, the first mounting base is provided with a first guide rail at one end relatively close to the first mounting plate, and the first mounting plate is slidably connected to the first guide rail by a first slider.

[0016] In one alternative implementation, two first guide rails are provided, which are arranged opposite each other on both sides of the first lead screw in a vertical direction.

[0017] In one optional embodiment, the second linear actuator includes a second mounting base disposed on the first mounting plate, a second lead screw disposed on the second mounting base in a vertical direction, the second lead screw being driven to rotate by a second motor, a second nut seat disposed on the second lead screw, and the second mounting plate being disposed on the second nut seat and slidably connected to the second mounting base in a vertical direction.

[0018] In one alternative embodiment, the second mounting base is provided with a second guide rail at one end relative to the second mounting plate, and the second mounting plate is slidably connected to the second guide rail by a second slider.

[0019] Secondly, this utility model also provides an integrated cleaning and drying system, including the graphite boat drying device provided in the first aspect above.

[0020] Since the integrated cleaning and drying system includes a graphite boat drying device, which has the same beneficial effects as the graphite boat drying device, it will not be elaborated here. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a partial cross-sectional front view of a graphite boat drying device according to an embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of the structure of a two-axis moving assembly in a graphite boat drying device according to an embodiment of the present invention.

[0024] Explanation of reference numerals in the attached figures:

[0025] 100-Box body, 110-Loading platform, 120-Unloading platform, 200-Electronic circuit board, 310-Air duct, 410-First mounting plate, 420-First mounting base, 430-First lead screw, 440-First motor, 450-First guide rail, 510-Second mounting plate, 520-Second mounting base, 530-Second lead screw, 540-Second motor, 550-Second guide rail. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] In the description of this embodiment, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this embodiment and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this embodiment. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of this embodiment, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment according to the specific circumstances.

[0029] The following is combined with Figures 1 to 2 The following describes embodiments of the present invention.

[0030] According to a first aspect of the present invention, a graphite boat drying device is provided for drying a cleaned graphite boat. The drying device includes a housing 100, with a loading platform 110 at one end of the housing 100 along the horizontal direction. An electronic circuit board 200 is provided inside the housing 100, which is used to support the graphite boat and generate an alternating magnetic field when AC power is applied. The housing 100 is provided with a two-axis moving assembly, which is used to transport the graphite boat from the loading platform 110 to the electronic circuit board 200.

[0031] The graphite boat drying device in this embodiment has an electronic circuit board 200 installed inside the housing 100, and a two-axis moving assembly installed inside the housing 100. When the cleaned and dry graphite boat is dried, the graphite boat located on the loading platform 110 is automatically transported to the electronic circuit board 200 by the two-axis moving assembly. Then, the electronic circuit board 200 is activated to generate an alternating magnetic field by passing an alternating current. Because the graphite boat is made of conductive graphite material, the graphite boat placed on the electronic circuit board 200 cuts the alternating magnetic field lines, generating an alternating current (i.e., eddy current) at the bottom of the graphite boat. The eddy current causes the charge carriers at the bottom of the graphite boat to move at high speed and randomly. The charge carriers collide and rub against each other to generate heat energy, thereby achieving heating and drying of the graphite boat by internal heating, which has high drying efficiency.

[0032] It should be noted that the principle by which the electronic circuit board 200 in the graphite boat drying device of this embodiment heats and dries the graphite boat is the same as the principle by which an induction cooker heats a pot. Specifically, the electronic circuit board 200 includes an electromagnetic coil and a mounting plate. The electromagnetic coil is installed at the bottom of the mounting plate, and the graphite boat to be dried is placed on top of the mounting plate.

[0033] It should be noted that in this embodiment, the molecules inside the graphite boat directly sense magnetic energy to generate heat, resulting in very fast heat start-up. The average preheating time is shortened by more than 60% compared to the resistance coil heating method, while the thermal efficiency is as high as 90% or more. Under the same conditions, it saves 30% to 70% of electricity compared to the resistance coil heating method.

[0034] It is understandable that the electronic circuit board 200 is electrically connected to an external power source (such as the power grid) so that when the electronic circuit board 200 is started, it can be powered by alternating current to generate an alternating magnetic field.

[0035] It is understood that the vertical direction mentioned in the text refers to the height direction of the box body 100. The horizontal and vertical directions are perpendicular to each other. For ease of description, this embodiment uses... Figure 1 The horizontal and vertical directions shown are used as descriptions of the horizontal and vertical directions, respectively, but should not be construed as making explicit limitations on the horizontal and vertical directions.

[0036] In practical applications, the graphite boats that have undergone acid washing and water washing can be drained before being transported to the graphite boat drying device of this embodiment for drying.

[0037] In some embodiments, a discharge platform 120 is provided at one end of the housing 100, which is horizontally opposite to the loading platform 110. The two-axis moving assembly is also used to transport the graphite boat from the electronic circuit board 200 to the discharge platform 120. A cooling assembly is provided at the position of the housing 100 corresponding to the discharge platform 120. On the one hand, the graphite boat to be dried on the loading platform 110 is transported to the electronic circuit board 200 by the two-axis moving assembly for electromagnetic heating to achieve drying. Then, the dried graphite boat is transported to the discharge platform 120 so that the operator can unload it. The whole process is more automated. On the other hand, by providing a cooling assembly at the position of the discharge platform 120, the cooling assembly can dissipate heat from the graphite boat that has just been dried from the electronic circuit board 200 and transported to the discharge platform 120, so that the graphite boat can be quickly cooled to the operating temperature and the operator can be prevented from being burned during the unloading process.

[0038] Specifically, the cooling assembly includes an air duct 310 disposed inside the housing 100. The air duct 310 is positioned opposite the unloading platform 120 and is used to blow air onto the graphite boat located on the unloading platform 120. One end of the air duct 310 extends outside the housing 100 and is connected to a fan. When the graphite boat, after being dried from the electronic circuit board 200, is transported to the unloading platform 120, the fan is activated to blow ambient air through the air duct 310 onto the surface of the graphite boat, thereby achieving heat dissipation.

[0039] In some embodiments, the two-axis moving assembly includes a first linear driver and a second linear driver. The first linear driver is disposed within the housing 100 and has a first mounting plate 410 that moves horizontally. The second linear driver is disposed on the first mounting plate 410 and has a second mounting plate 510 that moves vertically. A mechanical gripper is disposed on the second mounting plate 510. During the process of conveying the graphite boat to be dried from the loading table 110 to the electronic circuit board 200, the first and second linear drivers can drive the mechanical gripper to move horizontally and vertically until the mechanical gripper aligns with and grips the graphite boat to be dried. Then, the first and second linear drivers work together to move the mechanical gripper holding the graphite boat until the graphite boat is placed on the upper surface of the electronic circuit board 200. Finally, the mechanical gripper releases the graphite boat, thus automatically conveying the graphite boat to be dried from the loading table 110 to the electronic circuit board 200. Similarly, during the process of transporting the dried graphite boat on the electronic circuit board 200 to the unloading table 120, the mechanical claw can be driven by the first linear driver and the second linear driver to move in the horizontal and vertical directions until the mechanical claw aligns with the dried graphite boat and clamps it. Then, the first linear driver and the second linear driver work together to move the mechanical claw holding the graphite boat until the graphite boat is placed on the upper surface of the unloading table 120. Then the mechanical claw releases the graphite boat, thus realizing the automatic transport of the dried graphite boat from the electronic circuit board 200 to the unloading table 120.

[0040] It should be noted that the mechanical gripper uses an existing structure capable of gripping and releasing the graphite boat. This embodiment does not improve the structure of the mechanical gripper, and will not be elaborated here.

[0041] The specific structure of the first linear actuator is described in detail here, such as... Figure 2 As shown, specifically, the first linear actuator includes a first mounting base 420 disposed on the housing 100. A first lead screw 430 is disposed on the first mounting base 420 in the horizontal direction. The first lead screw 430 is driven to rotate by a first motor 440. A first nut seat is disposed on the first lead screw 430. A first mounting plate 410 is disposed on the first nut seat and slidably connected to the first mounting base 420 in the horizontal direction. By slidably connecting the first mounting plate 410 to the first mounting base 420, the first nut seat can be prevented from rotating with the first lead screw 430. This ensures that during the rotation of the first lead screw 430 driven by the first motor 440, the first nut seat drives the first mounting plate 410 to move in the horizontal direction, thereby driving the mechanical gripper to move smoothly in the horizontal direction. This ensures that the graphite boat to be dried is conveyed from the loading table 110 to the electronic circuit board 200, or the dried graphite boat is conveyed from the electronic circuit board 200 to the unloading table 120.

[0042] Specifically, a first guide rail 450 is provided at the end of the first mounting base 420 that is relatively close to the first mounting plate 410, and the first mounting plate 410 is slidably connected to the first guide rail 450 via a first slider. The guiding effect of the first guide rail 450 and the first slider in cooperation helps to improve the smoothness of the first mounting plate 410 moving in the horizontal direction under the drive of the first lead screw 430.

[0043] More specifically, two first guide rails 450 are provided, which are vertically opposite each other on both sides of the first lead screw 430. Through the sliding engagement of the two first guide rails 450 and the two first sliders, the sliding connection area between the first mounting plate 410 and the first mounting base 420 in the horizontal direction is increased, further increasing the load-bearing capacity of the first mounting plate 410 and ensuring that the first mounting plate 410, which carries the second linear actuator and the mechanical gripper, moves smoothly in the horizontal direction under the drive of the first linear actuator. More specifically, the first guide rails 450 are configured as dovetail guide rails.

[0044] The above embodiments are merely preferred embodiments of the structure of the first linear driver and do not limit its specific structure. For example, in other embodiments, the first linear driver may also be configured as an electric cylinder, a pneumatic cylinder, or a linear motor, and drive the first mounting plate 410 to reciprocate in the horizontal direction.

[0045] The specific structure of the second linear actuator is described in detail here, such as... Figure 2 As shown, specifically, the second linear actuator includes a second mounting base 520 disposed on the first mounting plate 410. A second lead screw 530 is disposed on the second mounting base 520 in the vertical direction. The second lead screw 530 is driven to rotate by the second motor 540. A second nut seat is disposed on the second lead screw 530. The second mounting plate 510 is disposed on the second nut seat and slidably connected to the second mounting base 520 in the vertical direction. By slidably connecting the second mounting plate 510 to the second mounting base 520, the second nut seat can be prevented from rotating with the second lead screw 530. This ensures that during the rotation of the second lead screw 530 driven by the second motor 540, the second nut seat drives the second mounting plate 510 to move in the vertical direction, thereby driving the mechanical gripper to move smoothly in the vertical direction. This ensures that the graphite boat to be dried is conveyed from the loading table 110 to the electronic circuit board 200, or the dried graphite boat is conveyed from the electronic circuit board 200 to the unloading table 120.

[0046] Specifically, a second guide rail 550 is provided at one end of the second mounting base 520 that is relatively close to the second mounting plate 510, and the second mounting plate 510 is slidably connected to the second guide rail 550 via a second slider. The guiding effect of the second guide rail 550 and the second slider in cooperation helps to improve the smoothness of the second mounting plate 510 moving in the vertical direction under the drive of the second lead screw 530.

[0047] More specifically, two second guide rails 550 are provided, and the two second guide rails 550 are arranged horizontally opposite each other on both sides of the second lead screw 530. Through the sliding engagement of the two second guide rails 550 and the two second sliders, the sliding connection area between the second mounting plate 510 and the second mounting base 520 in the vertical direction is increased, further increasing the load-bearing capacity of the second mounting plate 510, ensuring that the second mounting plate 510 carrying the mechanical claw moves smoothly in the vertical direction under the drive of the second linear actuator. More specifically, the second guide rails 550 are configured as dovetail guide rails.

[0048] The above embodiments are merely preferred embodiments of the structure of the second linear actuator and do not limit its specific structure. For example, in other embodiments, the second linear actuator may also be configured as an electric cylinder, a pneumatic cylinder, or a linear motor, and drive the second mounting plate 510 to reciprocate in the vertical direction.

[0049] In practical applications, the two-axis moving component can also be set as an existing two-axis moving device with a gantry structure, as long as it can drive the mechanical claw to move in both the vertical and horizontal directions.

[0050] According to a second aspect of the present invention, an integrated cleaning and drying system is also provided, including the graphite boat drying device provided in the first aspect of the present invention.

[0051] In this embodiment, the graphite boat drying device in the integrated cleaning and drying system has an electronic circuit board 200 installed inside the housing 100, and a two-axis moving assembly installed inside the housing 100. When the cleaned and dry graphite boat is dried, the graphite boat located on the loading platform 110 is automatically transported to the electronic circuit board 200 by the two-axis moving assembly. Then, the electronic circuit board 200 is activated to generate an alternating magnetic field by passing an alternating current. Because the graphite boat is made of conductive graphite material, the graphite boat placed on the electronic circuit board 200 cuts the alternating magnetic field lines, generating an alternating current (i.e., eddy current) at the bottom of the graphite boat. The eddy current causes the charge carriers at the bottom of the graphite boat to move at high speed and randomly. The charge carriers collide and rub against each other to generate heat energy, thereby achieving heating and drying of the graphite boat by internal heating, which has high drying efficiency.

[0052] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and all such modifications and variations fall within the scope defined by the appended invention.

Claims

1. A graphite boat drying apparatus, used for drying a cleaned graphite boat, characterized in that, The drying device includes: The box body (100) has a loading platform (110) at one end along the horizontal direction; An electronic circuit board (200) is disposed inside the housing (100). The electronic circuit board (200) is used to support the graphite boat and to generate an alternating magnetic field when AC current is applied. A two-axis moving assembly is disposed in the housing (100) and is used to transport the graphite boat from the loading table (110) to the electronic circuit board (200).

2. The graphite boat drying apparatus according to claim 1, characterized in that, The housing (100) is provided with a discharge platform (120) at one end of the horizontal direction away from the loading platform (110). The two-axis moving assembly is also used to transport the graphite boat from the electronic circuit board (200) to the discharge platform (120). The housing (100) is provided with a cooling assembly at the position corresponding to the discharge platform (120).

3. The graphite boat drying apparatus according to claim 2, characterized in that, The cooling assembly includes an air duct (310) disposed inside the housing (100), the air duct (310) being disposed opposite to the unloading platform (120) and used to blow air onto the graphite boat located on the unloading platform (120), one end of the air duct (310) extending outside the housing (100) and connected to a fan.

4. A graphite boat drying apparatus according to any one of claims 1 to 3, characterized in that, The two-axis moving assembly includes a first linear driver and a second linear driver. The first linear driver is disposed inside the housing (100) and is provided with a first mounting plate (410) that moves in the horizontal direction. The second linear driver is disposed on the first mounting plate (410) and is provided with a second mounting plate (510) that moves in the vertical direction. The second mounting plate (510) is provided with a mechanical gripper.

5. The graphite boat drying apparatus according to claim 4, characterized in that, The first linear actuator includes a first mounting base (420) disposed on the housing (100), a first lead screw (430) disposed on the first mounting base (420) in the horizontal direction, the first lead screw (430) being driven to rotate by a first motor (440), a first nut seat disposed on the first lead screw (430), and a first mounting plate (410) disposed on the first nut seat and slidably connected to the first mounting base (420) in the horizontal direction.

6. The graphite boat drying apparatus according to claim 5, characterized in that, The first mounting base (420) is provided with a first guide rail (450) at one end relatively close to the first mounting plate (410), and the first mounting plate (410) is slidably connected to the first guide rail (450) by a first slider.

7. The graphite boat drying apparatus according to claim 6, characterized in that, There are two first guide rails (450), which are arranged opposite each other on both sides of the first lead screw (430) in the vertical direction.

8. The graphite boat drying apparatus according to claim 5, characterized in that, The second linear actuator includes a second mounting base (520) disposed on the first mounting plate (410), a second lead screw (530) disposed on the second mounting base (520) in the vertical direction, the second lead screw (530) being driven to rotate by a second motor (540), a second nut seat disposed on the second lead screw (530), the second mounting plate (510) being disposed on the second nut seat and slidably connected to the second mounting base (520) in the vertical direction.

9. A graphite boat drying apparatus according to claim 8, characterized in that, The second mounting base (520) is provided with a second guide rail (550) at one end relatively close to the second mounting plate (510), and the second mounting plate (510) is slidably connected to the second guide rail (550) by a second slider.

10. An integrated cleaning and drying system, characterized in that, Includes the graphite boat drying apparatus as described in any one of claims 1 to 9.

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