Wafer boat clamping mechanism

Abstract

The utility model relates to the technical field of clamping mechanisms, and discloses a wafer boat clamping mechanism which comprises a first circular plate, a rotating shaft, a second circular plate, a guide rail, a sliding block, a micro-motion sliding table, a first supporting plate, an arc-shaped plate, a connecting rod and a sliding table module. During use, the micro-motion sliding table is controlled to work, the first supporting plate connected with the micro-motion sliding table can be driven to move in the radial direction of the first circular plate, and then one connecting rod can push or pull the second circular plate to rotate clockwise or anticlockwise. And then under the driving of the second circular plate, the rest of the connecting rods can pull or push the rest of the first supporting plates to move in the radial direction of the first circular plate. And finally, the multiple arc-shaped plates can be drawn close to or separated from one another, so that the wafer boat of the cylindrical frame structure is clamped or loosened, and the wafer boat of the cylindrical frame structure can be clamped. And subsequently, the sliding table module is controlled to work, so that the first circular plate can be driven to do linear motion. And finally, the wafer boat of the cylindrical frame structure is carried, and the wafer boat of the cylindrical frame structure is transferred to other stations.

Description

Technical Field

[0001] This application relates to the field of clamping mechanism technology, such as a crystal boat clamping mechanism. Background Technology

[0002] A related technology (Announcement No.: CN216189096U) discloses a crystal boat clamping device, including a lead screw stepper motor, a lead screw nut, a lifting linkage shaft, two transmission plates, two swing shafts, and at least one pair of clamping assemblies. The lead screw nut is mounted on the lead screw of the lead screw stepper motor. A lifting plate is provided on the lead screw nut, and a connecting plate perpendicular to its horizontal plane is provided on the lifting plate. The lifting linkage shaft is connected to the connecting plate and is perpendicular to the side wall of the lead screw. The two swing shafts are arranged parallel to the lifting linkage shaft and are evenly distributed on both sides of the lifting linkage shaft. The two transmission plates are both sleeved on the lifting linkage shaft. The ends of the two transmission plates away from the lifting linkage shaft are respectively connected to different swing shafts. The pair of clamping assemblies are respectively connected to the two swing shafts. The clamping assemblies include a clamping fixing plate connected to the swing shaft and an annular clamping part detachably connected to the clamping fixing plate.

[0003] In implementing the above embodiments, at least the following problems were found in the related technology:

[0004] This crystal boat clamping device uses two swing shafts that are controlled to rotate in opposite directions, thereby causing two clamping plates to swing in opposite directions. Ultimately, the two annular clamping parts clamp or release the crystal boat. The crystal boat can then be transported to other workstations. However, because the clamping surfaces of the two annular clamping parts are both horizontal, it can only clamp crystal boats with rectangular frame structures, but not those with cylindrical frame structures.

[0005] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this application, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0006] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0007] This disclosure provides a crystal boat gripping mechanism capable of gripping a crystal boat with a cylindrical frame structure.

[0008] In some embodiments, the crystal boat clamping mechanism includes: a first circular plate; a rotating shaft rotatably mounted at the center of the bottom surface of the first circular plate; a second circular plate connected to the rotating shaft and coaxially distributed with the first circular plate; guide rails uniformly mounted on the bottom surface of the first circular plate along the radial direction; sliders slidably mounted on multiple guide rails; a micro-motion slide table mounted on the bottom surface of the first circular plate along the radial direction, the micro-motion slide table and multiple guide rails being uniformly distributed around the center of the first circular plate; a first support plate respectively mounted on the moving end of the micro-motion slide table and multiple sliders; an arc-shaped plate respectively connected to multiple first support plates; a connecting rod rotatably mounted between the first circular plate and multiple first support plates; and a slide module connected to the top surface of the first circular plate and configured to drive the first circular plate to perform linear motion; wherein, under the drive of multiple first support plates, multiple arc-shaped plates can form a cylinder.

[0009] Optionally, the connecting rod includes: a connecting rod located between the second circular plate and each of the first support plates; and a joint bearing threadedly connected to both ends of the plurality of connecting rods, wherein the plurality of joint bearings at both ends are respectively installed at the edge of the second circular plate and the plurality of first support plates.

[0010] Optionally, the slide module includes: a first linear slide, wherein the top surface of the first circular plate is connected to the movable end of the first linear slide.

[0011] Optionally, the slide module further includes: a second linear slide, the movement direction of the moving end of the second linear slide being perpendicular to the movement direction of the moving end of the first linear slide; and a second support plate, mounted on the moving end of the second linear slide, with the first linear slide mounted on the second support plate.

[0012] Optionally, the slide module further includes: a third linear slide, the movement direction of the moving end of the third linear slide being perpendicular to the movement direction of the moving end of the second linear slide and the movement direction of the moving end of the first linear slide; and a third support plate, mounted on the moving end of the third linear slide, with the second linear slide mounted on the third support plate.

[0013] Optionally, the slide module further includes: a fourth support plate, on which the third linear slide is mounted; and a support rod connected to the fourth support plate.

[0014] Optionally, it also includes: pads, respectively installed between each of the guide rails and the first circular plate.

[0015] Optionally, it also includes: limiting pieces, respectively installed at both ends of each of the guide rails.

[0016] Optionally, it also includes: a mounted bearing, fitted onto the rotating shaft and installed at the center of the first circular plate.

[0017] The crystal boat gripping mechanism provided in this disclosure can achieve the following technical effects:

[0018] This disclosure provides a crystal boat gripping mechanism, including a first circular plate, a rotating shaft, a second circular plate, guide rails, sliders, micro-motion slides, a first support plate, an arc-shaped plate, connecting rods, and a slide module. The rotating shaft is rotatably mounted at the center of the bottom surface of the first circular plate and can rotate relative to the first circular plate. The second circular plate is connected to the rotating shaft and is coaxially distributed with the first circular plate, moving synchronously with the rotating shaft. Guide rails are evenly mounted on the bottom surface of the first circular plate along its radial direction, each supporting a slidable slider. Slidable sliders are mounted on multiple guide rails, which together provide guidance and support. Micro-motion slides are mounted on the bottom surface of the first circular plate along its radial direction, providing driving force. Micro-motion slides and multiple guide rails are evenly distributed around the center of the first circular plate. The first support plate is mounted on the moving end of the micro-motion slide and multiple sliders, respectively supporting the arc-shaped plate. The arc-shaped plates are connected to multiple first support plates, each designed to abut against the cylindrical frame structure of the crystal boat. Connecting rods are rotatably mounted between the first circular plate and the multiple first support plates, each rod capable of rotation relative to the first circular plate and its connected rods. A sliding module is connected to the top surface of the first circular plate and configured to drive the first circular plate in linear motion to transfer the cylindrical frame structure of the crystal boat. Under the influence of the multiple first support plates, the multiple arc-shaped plates can be arranged into a cylinder.

[0019] In operation, controlling the micro-motion slide table moves the first support plate connected to it radially along the first circular plate. Then, one of the connecting rods pushes or pulls the second circular plate clockwise or counterclockwise. Driven by the second circular plate, the remaining connecting rods pull or push the other first support plates radially along the first circular plate. This allows multiple arc-shaped plates to move closer together or separate, clamping or releasing the cylindrical frame structure of the crystal boat, enabling the gripping of the cylindrical frame structure. Subsequent control of the slide table module moves the first circular plate linearly. Finally, the cylindrical frame structure crystal boat is transported to other workstations.

[0020] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0021] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are considered similar elements. The drawings do not constitute a limitation of scale, and wherein:

[0022] Figure 1 This is a cross-sectional view of a crystal boat clamping mechanism provided in an embodiment of this disclosure;

[0023] Figure 2 yes Figure 1 Schematic diagram of the structure at point AA;

[0024] Figure 3 yes Figure 1 Enlarged structural diagram at point B;

[0025] Figure 4 This is a front view structural schematic diagram of a crystal boat clamping mechanism provided in an embodiment of this disclosure.

[0026] Figure label:

[0027] 1: First circular plate; 2: Rotating shaft; 3: Second circular plate; 4: Guide rail; 5: Slider; 6: Micro-motion slide; 7: First support plate; 8: Arc plate; 9: Connecting rod; 10: Joint bearing; 11: First linear slide; 12: Second linear slide; 13: Second support plate; 14: Third linear slide; 15: Third support plate; 16: Fourth support plate; 17: Support rod; 18: Pad; 19: Limiting plate; 20: Bearing with seat. Detailed Implementation

[0028] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0029] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0030] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better description of the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in the embodiments of this disclosure according to the specific circumstances.

[0031] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0032] Unless otherwise stated, the term "multiple" means two or more.

[0033] In this embodiment of the disclosure, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0034] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0035] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0036] Combination Figures 1 to 4As shown, this embodiment of the present disclosure provides a crystal boat clamping mechanism, including a first circular plate 1, a rotating shaft 2, a second circular plate 3, guide rails 4, sliders 5, micro-motion slides 6, a first support plate 7, an arc-shaped plate 8, connecting rods, and a slide module. The rotating shaft 2 is rotatably mounted at the center of the bottom surface of the first circular plate 1, and can rotate relative to the first circular plate 1. The second circular plate 3 is connected to the rotating shaft 2 and is coaxially distributed with the first circular plate 1, moving synchronously with the rotating shaft 2. Guide rails 4 are evenly mounted on the bottom surface of the first circular plate 1 along its radial direction, each used to support the slidable sliders 5. Slidable sliders 5 are slidably mounted on multiple guide rails 4, and the multiple guide rails 4 and multiple sliders 5 together provide guidance and support. Micro-motion slides 6 are mounted on the bottom surface of the first circular plate 1 along its radial direction, and are used to provide driving force. Micro-motion slides 6 and multiple guide rails 4 are evenly distributed around the center of the first circular plate 1. First support plates 7 are respectively installed on the moving end of the micro-motion slide table 6 and multiple sliders 5, respectively used to support the installation of arc-shaped plates 8. The arc-shaped plates 8 are respectively connected to multiple first support plates 7, respectively used to abut against the crystal boat of the cylindrical frame structure. Connecting rods are rotatably installed between the first circular plate 1 and multiple first support plates 7, and each connecting rod can rotate relative to the first circular plate 1 and the connecting rod connected to it. The slide table module is connected to the top surface of the first circular plate 1 and is configured to drive the first circular plate 1 to perform linear motion to transfer the crystal boat of the cylindrical frame structure. Under the drive of the multiple first support plates 7, the multiple arc-shaped plates 8 can be formed into a cylinder.

[0037] This embodiment of the invention provides a crystal boat clamping mechanism. In use, controlling the micro-motion slide 6 causes the connected first support plate 7 to move radially along the first circular plate 1. Then, one of the connecting rods pushes or pulls the second circular plate 3 to rotate clockwise or counterclockwise. Subsequently, driven by the second circular plate 3, the remaining connecting rods pull or push the remaining first support plates 7 to move radially along the first circular plate 1. Ultimately, this causes multiple arc-shaped plates 8 to move closer together or separate, thereby clamping or releasing the cylindrical frame structure crystal boat, enabling the clamping of the cylindrical frame structure crystal boat. Subsequent control of the slide module causes the first circular plate 1 to perform linear motion. Finally, the cylindrical frame structure crystal boat is transported to other workstations.

[0038] Optionally, combined Figure 1 , Figure 2 and Figure 4As shown, the connecting rod includes a connecting rod 9 and a joint bearing 10. The connecting rod 9 is located between the second circular plate 3 and each of the first support plates 7, and is used to support and mount the joint bearing 10. The joint bearing 10 is threaded to both ends of the multiple connecting rods, and the multiple joint bearings 10 at both ends are respectively mounted on the edge of the second circular plate 3 and the multiple first support plates 7, so that the multiple connecting rods can rotate relative to the second circular plate 3 and the multiple first support plates 7 respectively.

[0039] In this embodiment, the connecting rod includes a connecting rod 9 and a joint bearing 10. During use, rotating the connecting rod 9 changes its extension length within the joint bearings 10 at both ends, ultimately changing the length of the connecting rod and thus adjusting the movement position of the multiple arc-shaped plates 8.

[0040] Optionally, combined Figure 1 and Figure 4 As shown, the slide module includes a first linear slide 11, which provides driving force to achieve linear movement. The top surface of the first circular plate 1 is connected to the moving end of the first linear slide 11.

[0041] In this embodiment, controlling the first linear slide 11 moves the first circular plate 1. This, in turn, moves multiple arc-shaped plates 8 to transport the cylindrical frame structure crystal boat to other workstations.

[0042] Optionally, combined Figure 1 and Figure 4 As shown, the slide module also includes a second linear slide 12 and a second support plate 13. The second linear slide 12 provides driving force to achieve linear movement. The movement direction of the moving end of the second linear slide 12 is perpendicular to the movement direction of the moving end of the first linear slide 11, so as to achieve free movement in two degrees of freedom. The second support plate 13 is mounted on the moving end of the second linear slide 12, and the first linear slide 11 is mounted on the second support plate 13.

[0043] In this embodiment, controlling the second linear slide 12 to operate moves the second support plate 13. This, in turn, moves the first linear slide 11, ultimately moving the multiple arc-shaped plates 8. Working in conjunction with the first linear slide 11, the multiple arc-shaped plates 8 can move freely within a plane, increasing their range of motion. This facilitates the handling of the cylindrical frame structure crystal boat and its transfer to other workstations.

[0044] Optionally, combined Figure 1 and Figure 4As shown, the slide module also includes a third linear slide 14 and a third support plate 15. The third linear slide 14 provides driving force to achieve linear movement. The movement direction of the moving end of the third linear slide 14 is perpendicular to the movement direction of the moving end of the second linear slide 12 and the movement direction of the moving end of the first linear slide 11, so as to achieve free movement in three degrees of freedom. The third support plate 15 is mounted on the moving end of the third linear slide 14, and the second linear slide 12 is mounted on the third support plate 15.

[0045] In this embodiment, controlling the third linear slide 14 moves the third support plate 15, which in turn moves the second linear slide 12, ultimately moving multiple curved plates 8. Working in conjunction with the first linear slide 11 and the second linear slide 12, this allows the multiple curved plates 8 to move freely in three-dimensional space, further increasing their range of motion. This also facilitates the transport of the cylindrical frame structure crystal boat to other workstations.

[0046] Optionally, combined Figure 1 and Figure 4 As shown, the slide module also includes a fourth support plate 16 and a support rod 17. The third linear slide 14 is mounted on the fourth support plate 16. The support rod 17 is connected to the fourth support plate 16.

[0047] In this embodiment, the fourth support plate 16 is used to support and mount the third linear slide 14. One end of the support rod 17 is connected to the fourth support plate 16, and the other end is fixed to the ground or connected to other equipment to support the entire mechanism.

[0048] Optionally, combined Figures 1 to 4 As shown, it also includes a pad 18. The pad 18 is installed between each guide rail 4 and the first circular plate 1.

[0049] In this embodiment, a pad 18 is further included, which is respectively installed between each guide rail 4 and the first circular plate 1. The multiple pads 18 are used to support and elevate the height of the multiple guide rails 4 and the multiple sliders 5.

[0050] Optionally, combined Figures 1 to 4 As shown, it also includes limiting pieces 19. The limiting pieces 19 are respectively installed at both ends of each guide rail 4.

[0051] In this embodiment, limiting pieces 19 are also installed at both ends of each guide rail 4. The multiple limiting pieces 19 at both ends are used to limit the movement of the multiple sliders 5 from the multiple guide rails 4.

[0052] Optionally, combined Figure 1 and Figure 4As shown, it also includes a mounted bearing 20. The mounted bearing 20 is fitted onto the rotating shaft 2 and installed at the center of the first circular plate 1.

[0053] In this embodiment, a seated bearing 20 is also included, which is fitted onto the rotating shaft 2 and mounted at the center of the first circular plate 1. The seated bearing 20 is used to reduce the friction between the rotating shaft 2 and the first circular plate 1 and to improve the accuracy of the rotating shaft 2 when rotating relative to the first circular plate 1.

[0054] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A crystal boat gripping mechanism, characterized in that, include: First circular plate; A rotating shaft is rotatably mounted at the center of the bottom surface of the first circular plate; The second circular plate is connected to the rotating shaft and is distributed along the same axis as the first circular plate; The guide rails are evenly installed on the bottom surface of the first circular plate along the radial direction of the first circular plate. Slider, each slidably mounted on one of the guide rails; A micro-motion slide is installed on the bottom surface of the first circular plate along the radial direction of the first circular plate, and the micro-motion slide and the multiple guide rails are evenly distributed around the center of the first circular plate. The first support plate is respectively installed on the moving end of the micro-motion slide and the multiple sliders; Arc-shaped plates are respectively connected to multiple first support plates; The connecting rods are rotatably mounted between the first circular plate and the plurality of first support plates; The slide module is connected to the top surface of the first circular plate and is configured to drive the first circular plate to perform linear motion. Among them, under the action of multiple first support plates, multiple arc-shaped plates can be formed into a cylinder.

2. The crystal boat clamping mechanism according to claim 1, characterized in that, The link includes: Connecting rods are respectively located between the second circular plate and each of the first support plates; The spherical bearings are threaded to both ends of the plurality of connecting rods, and the plurality of spherical bearings at both ends are respectively installed at the edge of the second circular plate and the plurality of the first support plates.

3. The crystal boat clamping mechanism according to claim 1, characterized in that, The slide module includes: The first linear slide is connected to the moving end of the first circular plate.

4. A crystal boat clamping mechanism according to claim 3, characterized in that, The slide module also includes: The second linear slide has a moving end whose movement direction is perpendicular to the moving end of the first linear slide. The second support plate is installed on the moving end of the second linear slide, and the first linear slide is installed on the second support plate.

5. A crystal boat clamping mechanism according to claim 4, characterized in that, The slide module also includes: The third linear slide, wherein the direction of movement of the moving end of the third linear slide is perpendicular to the direction of movement of the moving end of the second linear slide and the direction of movement of the moving end of the first linear slide. The third support plate is installed on the moving end of the third linear slide, and the second linear slide is installed on the third support plate.

6. A crystal boat clamping mechanism according to claim 5, characterized in that, The slide module also includes: The fourth support plate, on which the third linear slide is mounted; The support rod is connected to the fourth support plate.

7. A crystal boat clamping mechanism according to any one of claims 1 to 6, characterized in that, Also includes: Pads are respectively installed between each of the guide rails and the first circular plate.

8. A crystal boat clamping mechanism according to any one of claims 1 to 6, characterized in that, Also includes: Limiting plates are respectively installed at both ends of each of the guide rails.

9. A crystal boat clamping mechanism according to any one of claims 1 to 6, characterized in that, Also includes: A bearing with a mounting bracket is fitted onto the rotating shaft and installed at the center of the first circular plate.

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