Reaction furnace and processing equipment

Abstract

The utility model provides a reaction furnace and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that horizontal pipe type plasma enhanced chemical vapor deposition equipment is easy to generate sheet fluttering during gas extraction. The reaction furnace comprises a furnace tube assembly, the furnace tube assembly extends in the first horizontal direction, one end of the furnace tube assembly is provided with at least one extraction opening, and the furnace tube assembly is further provided with a reaction cavity extending in the first horizontal direction; the at least one exhaust pipe is connected with the furnace tube assembly and extends into the reaction cavity, the exhaust pipe is located at the top and / or the bottom of the reaction cavity, the exhaust pipe extends in the first horizontal direction, and the side wall of the exhaust pipe is provided with a plurality of exhaust holes which are sequentially distributed in the first horizontal direction. Due to the fact that the exhaust pipe can extract the gas in the reaction cavity from the upper portion and / or the lower portion of the boat structure, the gas flow moves upwards or downwards, and the situation that the flaky materials float due to the movement of the gas flow can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a reaction furnace and a processing device. BACKGROUND

[0002] Semiconductor or photovoltaic materials are widely used in electronic, new energy and other industries. Semiconductor and photovoltaic materials usually need to be chemically treated before being applied to products. Chemical vapor deposition (CVD) technology is one of the processing methods, and CVD technology has been widely used in semiconductor or photovoltaic material processing.

[0003] In a common plasma enhanced chemical vapor deposition (PECVD) process, a vertical tube type PECVD device adopts a furnace mouth gas inlet and a furnace tail gas extraction method when conveying process gas. The furnace tail gas extraction method refers to setting a gas extraction port at the furnace tail, and extracting the gas in the furnace through the gas extraction port. This furnace tail gas extraction method can ensure the uniformity of the gas field in the furnace tube.

[0004] However, the graphite boat used in the traditional vertical tube type PECVD device is provided with a clamping point, and the silicon wafer is fixed by the clamping point. The commonly used horizontal tube type PECVD device usually uses a graphite boat without a clamping point to fix the silicon wafer, and only relies on the gravity of the silicon wafer to place the silicon wafer in the groove of the graphite boat. When extracting the gas in the horizontal tube type PECVD device, if the furnace tail gas extraction method of the vertical tube type PECVD device is still used, the gas flow moving from the furnace to the furnace tail gas extraction port (i.e. moving horizontally) will cause the silicon wafer to float. Therefore, how to extract the gas in the horizontal tube type PECVD device while ensuring that the silicon wafer does not float becomes a problem to be solved. Invention content

[0005] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a reaction furnace and a processing device.

[0006] In a first aspect, an embodiment of the present application provides a reaction furnace, comprising: a furnace tube assembly extending along a first horizontal direction, the furnace tube assembly having at least one gas extraction port at one end thereof, the furnace tube assembly further having a reaction cavity extending along the first horizontal direction, the reaction cavity being configured to accommodate a boat structure, the gas extraction port being in communication with the reaction cavity to enable extraction of process gas in the reaction cavity through the gas extraction port; and at least one gas extraction tube connected to the furnace tube assembly and extending into the reaction cavity, the gas extraction tube being located at a top portion and / or a bottom portion of the reaction cavity, the gas extraction tube extending along the first horizontal direction, and a side wall of the gas extraction tube having a plurality of gas extraction holes arranged in sequence along the first horizontal direction, a first gas extraction hole being located at a first end of the reaction cavity and a last gas extraction hole being located at a second end of the reaction cavity, the gas extraction holes enabling extraction of gas in the reaction cavity to render the reaction cavity in a vacuum state.

[0007] In some embodiments, the plurality of gas extraction holes are uniformly distributed along the first horizontal direction.

[0008] In some embodiments, the furnace tube assembly has a vertical symmetry plane extending along the first horizontal direction, and the number of the gas extraction tubes is at least two, the at least two gas extraction tubes being symmetrically arranged along the vertical symmetry plane.

[0009] In some embodiments, the furnace tube assembly has a vertical symmetry plane extending along the first horizontal direction, and the number of the gas extraction ports is at least two, the at least two gas extraction ports being symmetrically arranged along the vertical symmetry plane.

[0010] In some embodiments, in a case where the gas extraction tube is located at the top portion of the reaction cavity, the gas extraction holes of the gas extraction tube located at the top portion of the reaction cavity are directed downward and / or obliquely downward.

[0011] In some embodiments, the number of the gas extraction tubes located at the top portion of the reaction cavity is at least three, the at least three gas extraction tubes being arranged in sequence along a second horizontal direction, the second horizontal direction intersecting the first horizontal direction, the at least three gas extraction tubes including a first gas extraction tube, a last gas extraction tube, and at least one intermediate gas extraction tube between the first gas extraction tube and the last gas extraction tube, the gas extraction holes of the intermediate gas extraction tube being directed downward, the gas extraction holes of the first gas extraction tube being directed obliquely downward and away from the intermediate gas extraction tube, and the gas extraction holes of the last gas extraction tube being directed obliquely downward and away from the intermediate gas extraction tube.

[0012] In some embodiments, the gas extraction tube is rotationally connected and / or slidingly connected to the furnace tube assembly.

[0013] In some embodiments, the furnace tube assembly comprises: a furnace tube extending along a first horizontal direction, the furnace tube having a reaction cavity, and one end of the furnace tube having an opening communicating with the reaction cavity; a cover plate connected to the one end of the furnace tube and configured to close the opening, the cover plate having at least one gas extraction port and at least one first through hole extending along the first horizontal direction; at least one mounting bracket connected to an inner wall of the furnace tube, the mounting bracket having a second through hole extending along the first horizontal direction; wherein the gas extraction tube passes through the first through hole and the second through hole.

[0014] In a second aspect, an embodiment of the present application provides a processing device, comprising: the reaction furnace of any one of the first aspect, configured to process a sheet material; and a gas extraction assembly configured to extract gas in the reaction cavity through the gas extraction port of the reaction furnace and the gas extraction tube of the reaction furnace.

[0015] In some embodiments, the processing device further comprises: a controller communicatively connected to the gas extraction assembly and configured to control the gas extraction assembly to extract gas in the reaction cavity through the gas extraction tube before processing the sheet material, so that the reaction cavity is in a vacuum state, and to control the gas extraction assembly to extract process gas in the reaction cavity through the gas extraction port during processing of the sheet material.

[0016] The reaction furnace and the processing device provided by the embodiments of the present application can extract gas in the reaction cavity from the top of the reaction cavity through the gas extraction tube located at the top of the reaction cavity, i.e., can extract gas in the reaction cavity from above the boat structure, and the gas flow moves upward, so that the probability of the sheet material floating is relatively low. The gas extraction tube located at the bottom of the reaction cavity can extract gas in the reaction cavity from the bottom of the reaction cavity, i.e., can extract gas in the reaction cavity from below the boat structure, and the gas flow moves downward, so that the probability of the sheet material floating is relatively low. If the gas extraction tubes are arranged at the top and the bottom of the reaction cavity, the gas extraction speed is faster, and the sheet material is less likely to float. Therefore, when the gas in the reaction cavity is extracted to a vacuum state, the gas extraction tube can be used for gas extraction. However, if the gas extraction tube is used for gas extraction during process processing (such as film plating on a silicon wafer), the gas field will be non-uniform, which will affect the uniformity of the film layer thickness. Therefore, during process processing, the gas extraction port can be used for gas extraction. Since the gas pressure in the reaction cavity is relatively low during process processing, the gas flow is relatively smooth even if the gas extraction port is used for gas extraction, which is less likely to cause the sheet material to float. In addition, the gas extraction port has less effect on the uniformity of the gas in the reaction cavity, which reduces the effect of the uniformity of the gas flow on the uniformity of the film layer thickness. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1 Fig. 1 shows a structural schematic diagram of a reaction furnace according to an example embodiment of the present application.

[0019] Figure 2 Fig. 2 shows a front view of a reaction furnace according to an example embodiment of the present application.

[0020] Figure 3 Fig. 3 shows a side view of a reaction furnace according to an example embodiment of the present application.

[0021] Figure 4 Fig. 4 shows a structural schematic diagram of a reaction furnace according to another example embodiment of the present application. Figure 2 Fig. 5 shows a sectional view of the reaction furnace along the direction of AA.

[0022] Figure 5 Fig. 6 shows a structural schematic diagram of an air extraction pipe and a support frame according to an example embodiment of the present application.

[0023] Figure 6 Fig. 7 shows a bottom view of an air extraction pipe and a support frame according to an example embodiment of the present application.

[0024] Figure 7 Fig. 8 shows a structural schematic diagram of a reaction furnace according to another example embodiment of the present application.

[0025] Figure 8 Fig. 9 shows a structural schematic diagram of a processing apparatus according to an example embodiment of the present application.

[0026] Reference Signs:

[0027] 100, reaction furnace; 110, furnace pipe assembly; 111, air extraction port; 112, furnace pipe; 113, cover plate; 114, vertical symmetry plane; 115, mounting frame; 116, connecting member; 1161, disc; 1162, ring; 120, air extraction pipe; 121, air extraction hole; 122, first air extraction pipe; 123, second air extraction pipe; 124, third air extraction pipe; 125, fourth air extraction pipe; 126, air extraction pipe located at the top of the reaction chamber; 127, air extraction pipe located at the bottom of the reaction chamber; 130, support rod assembly; 200, boat structure; 300, processing apparatus; 400, air extraction assembly; 500, controller. DETAILED DESCRIPTION

[0028] With reference to the accompanying drawings, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative effort belong to the scope of the present application.

[0029] Figure 1 Fig. 1 shows a structural schematic diagram of a reaction furnace provided by an example embodiment of the present application, Figure 2 Fig. 2 shows a front view of the reaction furnace provided by an example embodiment of the present application, Figure 3 Fig. 3 shows a side view of the reaction furnace provided by an example embodiment of the present application, Figure 4 Fig. 4 shows a structural schematic diagram of a support frame provided by an example embodiment of the present application, Figure 2 Fig. 5 shows a sectional view of the reaction furnace along the AA direction, Figure 5 Fig. 6 shows a structural schematic diagram of an exhaust pipe and a support frame provided by an example embodiment of the present application, Figure 6 Fig. 7 shows a bottom view of the exhaust pipe and the support frame provided by an example embodiment of the present application, Figure 7 Fig. 8 shows a structural schematic diagram of a reaction furnace provided by another example embodiment of the present application.

[0030] As shown in Figures 1 to 7 An example embodiment of the present application provides a reaction furnace 100, which comprises a furnace tube assembly 110 and at least one exhaust pipe 120. The furnace tube assembly 110 extends along a first horizontal direction (for example, the X direction in Figs. 1, 2, 3, 4, 5, 6, 7 and 8). One end of the furnace tube assembly 110 is provided with at least one exhaust port 111. The furnace tube assembly 110 is also provided with a reaction cavity extending along the first horizontal direction, and the reaction cavity is configured to accommodate a boat structure 200. The exhaust port 111 is in communication with the reaction cavity, so that process gas in the reaction cavity can be extracted through the exhaust port 111. The at least one exhaust pipe 120 is connected to the furnace tube assembly 110 and extends into the reaction cavity. The exhaust pipe 120 is located at the top and / or bottom of the reaction cavity. The exhaust pipe 120 extends along the first horizontal direction, and the side wall of the exhaust pipe 120 is provided with a plurality of exhaust holes 121 arranged in sequence along the first horizontal direction. The first exhaust hole 121 is located at the first end of the reaction cavity, and the last exhaust hole 121 is located at the second end of the reaction cavity. The gas in the reaction cavity can be extracted through the exhaust holes 121, so that the reaction cavity is in a vacuum state. Figure 1 Figure 2 Figure 6 An example embodiment of the present application provides a reaction furnace 100, which comprises a furnace tube assembly 110 and at least one exhaust pipe 120. The furnace tube assembly 110 extends along a first horizontal direction (for example, the X direction in Figs. 1, 2, 3, 4, 5, 6, 7 and 8). One end of the furnace tube assembly 110 is provided with at least one exhaust port 111. The furnace tube assembly 110 is also provided with a reaction cavity extending along the first horizontal direction, and the reaction cavity is configured to accommodate a boat structure 200. The exhaust port 111 is in communication with the reaction cavity, so that process gas in the reaction cavity can be extracted through the exhaust port 111. The at least one exhaust pipe 120 is connected to the furnace tube assembly 110 and extends into the reaction cavity. The exhaust pipe 120 is located at the top and / or bottom of the reaction cavity. The exhaust pipe 120 extends along the first horizontal direction, and the side wall of the exhaust pipe 120 is provided with a plurality of exhaust holes 121 arranged in sequence along the first horizontal direction. The first exhaust hole 121 is located at the first end of the reaction cavity, and the last exhaust hole 121 is located at the second end of the reaction cavity. The gas in the reaction cavity can be extracted through the exhaust holes 121, so that the reaction cavity is in a vacuum state.

[0031] An example embodiment of the present application provides a reaction furnace 100, which comprises a furnace tube assembly 110 and at least one exhaust pipe 120. The furnace tube assembly 110 extends along a first horizontal direction (for example, the X direction in Figs. 1, 2, 3, 4, 5, 6, 7 and 8). One end of the furnace tube assembly 110 is provided with at least one exhaust port 111. The furnace tube assembly 110 is also provided with a reaction cavity extending along the first horizontal direction, and the reaction cavity is configured to accommodate a boat structure 200. The exhaust port 111 is in communication with the reaction cavity, so that process gas in the reaction cavity can be extracted through the exhaust port 111. The at least one exhaust pipe 120 is connected to the furnace tube assembly 110 and extends into the reaction cavity. The exhaust pipe 120 is located at the top and / or bottom of the reaction cavity. The exhaust pipe 120 extends along the first horizontal direction, and the side wall of the exhaust pipe 120 is provided with a plurality of exhaust holes 121 arranged in sequence along the first horizontal direction. The first exhaust hole 121 is located at the first end of the reaction cavity, and the last exhaust hole 121 is located at the second end of the reaction cavity. The gas in the reaction cavity can be extracted through the exhaust holes 121, so that the reaction cavity is in a vacuum state.

[0032] ​​Exemplarily, the boat structure 200 can be a horizontally placed boat structure 200, or can be a vertically placed boat structure 200.

[0033] Exemplarily, the boat structure 200 is configured to accommodate a sheet material, which exemplarily is a silicon wafer, a glass substrate, or a wafer, etc.

[0034] Exemplarily, as shown in Figures 1 to 3 The exhaust pipe 120 includes an exhaust pipe 126 at the top of the reaction chamber and an exhaust pipe 127 at the bottom of the reaction chamber. The exhaust port 111 is arranged between the exhaust pipe 126 at the top of the reaction chamber and the exhaust pipe 127 at the bottom of the reaction chamber in the vertical direction.

[0035] Exemplarily, the furnace pipe assembly 110 includes a furnace pipe 112 and a cover plate 113. The furnace pipe 112 extends along a first horizontal direction, one end of the furnace pipe 112 has an opening, and the cover plate 113 is configured to close the opening. The cover plate 113 has the exhaust port 111, and the cover plate 113 has a first through hole through which the exhaust pipe 120 passes.

[0036] Exemplarily, the cross-sectional shape of the exhaust hole 121 is circular, oval, polygonal (such as rectangular, triangular), etc.

[0037] In the above embodiment, if the exhaust pipe 120 is arranged at the top of the reaction chamber, the exhaust pipe 126 at the top of the reaction chamber can extract the gas in the reaction chamber from the top of the reaction chamber, i.e. the gas in the reaction chamber can be extracted from above the boat structure 200, the gas flow moves upward, and the upward moving gas flow makes the probability of the sheet material floating low. If the exhaust pipe 120 is arranged at the bottom of the reaction chamber, the exhaust pipe 127 at the bottom of the reaction chamber can extract the gas in the reaction chamber from the bottom of the reaction chamber, i.e. the gas in the reaction chamber can be extracted from below the boat structure 200, the gas flow moves downward, and the downward moving gas flow makes the probability of the sheet material floating low. If the exhaust pipe 120 is arranged at the top and bottom of the reaction chamber, the exhaust speed is faster, and the sheet material is less likely to float. Therefore, when the gas in the reaction chamber is extracted to a vacuum state, the exhaust pipe 120 can be used for extraction. However, if the exhaust pipe 120 is used for extraction during process processing (such as film plating on a silicon wafer), it will cause uneven gas field and affect the uniformity of the film layer thickness. Therefore, during process processing, the exhaust port 111 can be used for extraction. Since the gas pressure in the reaction chamber is low during process processing, even if the exhaust port 111 is used for extraction, the gas flow is relatively smooth, and it is not easy to cause the sheet material to float. In addition, the extraction through the exhaust port 111 has less effect on the uniformity of the gas in the reaction chamber, reducing the effect of the uniformity of the gas flow on the uniformity of the film layer thickness.

[0038] In some embodiments, asFigure 6 As shown, the plurality of gas extraction holes 121 are uniformly distributed along the first horizontal direction.

[0039] Exemplarily, the plurality of gas extraction holes 121 can be arranged in sequence along the first horizontal direction at a fixed interval distance, i.e. the interval distance between each adjacent two gas extraction holes 121 is equal.

[0040] By uniformly arranging the gas extraction holes 121, the gas extraction pipe 120 can uniformly extract the gas in the reaction cavity, and reduce the occurrence of sheet material floating.

[0041] In some embodiments, as shown in Figure 3 and Figure 4 , the furnace pipe assembly 110 has a vertical symmetry plane 114 extending along the first horizontal direction, and the number of gas extraction pipes 120 is at least two, and the at least two gas extraction pipes 120 are symmetrically arranged along the vertical symmetry plane 114.

[0042] Exemplarily, four gas extraction pipes 126 are symmetrically arranged at the top of the reaction cavity relative to the vertical symmetry plane 114, and two gas extraction pipes 127 are symmetrically arranged at the bottom of the reaction cavity relative to the vertical symmetry plane 114. By symmetrically arranging the plurality of gas extraction pipes 120, the gas in the reaction cavity can be uniformly and quickly extracted.

[0043] In some embodiments, as shown in Figure 3 and Figure 4 , the furnace pipe assembly 110 has a vertical symmetry plane 114 extending along the first horizontal direction, and the number of gas extraction openings 111 is at least two, and the at least two gas extraction openings 111 are symmetrically arranged along the vertical symmetry plane 114.

[0044] Exemplarily, two gas extraction openings 111 are symmetrically arranged in the reaction cavity relative to the vertical symmetry plane 114. By symmetrically arranging the plurality of gas extraction openings 111, the gas in the reaction cavity can be uniformly and quickly extracted.

[0045] In some embodiments, in the case that the gas extraction pipe 120 is located at the top of the reaction cavity, the gas extraction hole 121 of the gas extraction pipe 126 located at the top of the reaction cavity is directed downward and / or obliquely downward.

[0046] Exemplarily, the plurality of gas extraction pipes 126 located at the top of the reaction cavity are arranged in sequence along a second horizontal direction (such as the Y direction in Figure 3 and Figure 4 , the second horizontal direction intersects the first horizontal direction, and in the second horizontal direction, the gas extraction hole 121 of the gas extraction pipe 126 located in the middle is directed downward, and the gas extraction hole 121 of the gas extraction pipe 126 located at the edge is directed obliquely downward.

[0047] Exemplarily, the obliquely downward direction is a direction having an angle of 30 degrees, 45 degrees or 60 degrees with the vertical direction.

[0048] Through this structure, the gas in the reaction cavity can be quickly extracted by the gas extraction pipe 126 located at the top of the reaction cavity, thereby improving the gas extraction speed.

[0049] In some embodiments, as shown in Figure 3 and Figure 4 , the number of gas extraction pipes 126 located at the top of the reaction cavity is at least three, and the at least three gas extraction pipes 126 are arranged in sequence along the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the at least three gas extraction pipes 126 include a first gas extraction pipe 126, a last gas extraction pipe 126, and at least one intermediate gas extraction pipe 126 between the first gas extraction pipe 126 and the last gas extraction pipe 126, the gas extraction hole 121 of the intermediate gas extraction pipe 126 faces downward, the gas extraction hole 121 of the first gas extraction pipe 126 faces obliquely downward and away from the intermediate gas extraction pipe 126, and the gas extraction hole 121 of the last gas extraction pipe 126 faces obliquely downward and away from the intermediate gas extraction pipe 126.

[0050] Exemplarily, as shown in Figure 3 and Figure 4 , the number of gas extraction pipes 126 located at the top of the reaction cavity is four, and the four gas extraction pipes 126 are arranged in sequence along the second horizontal direction, which are respectively a first gas extraction pipe 122, a second gas extraction pipe 123, a third gas extraction pipe 124 and a fourth gas extraction pipe 125, the gas extraction holes 121 of the second gas extraction pipe 123 and the third gas extraction pipe 124 each face downward, the gas extraction hole 121 of the first gas extraction pipe 122 faces obliquely downward and away from the second gas extraction pipe 123, and the gas extraction hole 121 of the fourth gas extraction pipe 125 faces obliquely downward and away from the third gas extraction pipe 124.

[0051] Through this structure, the gas below can be quickly extracted from various directions by the at least three gas extraction pipes 126 located at the top of the reaction cavity, thereby improving the gas extraction speed.

[0052] In some embodiments, as shown in Figure 3 and Figure 4 , in the case that the gas extraction pipe 120 is located at the bottom of the reaction cavity, the gas extraction hole 121 of the gas extraction pipe 127 located at the bottom of the reaction cavity faces upward and / or obliquely upward.

[0053] Exemplarily, as shown in Figure 3 and Figure 4 , a plurality of gas extraction pipes 127 located at the bottom of the reaction cavity are arranged in sequence along the second horizontal direction, and in the second horizontal direction, the gas extraction hole 121 of the gas extraction pipe 127 located at the bottom of the reaction cavity faces upward.

[0054] In some embodiments, the gas extraction pipe 120 is rotationally connected and / or slidingly connected with the furnace pipe assembly 110.

[0055] Through the structure, the suction pipe 120 is rotatably connected with the furnace pipe assembly 110, so that the orientation of the suction hole 121 of the suction pipe 120 can be flexibly adjusted.

[0056] In some embodiments, as shown in Figures 4 to 6 the furnace pipe assembly includes a furnace pipe 112, a cover plate 113, and at least one mounting bracket 115. The furnace pipe 112 extends along a first horizontal direction, the furnace pipe 112 has a reaction cavity, and one end of the furnace pipe 112 has an opening communicating with the reaction cavity. The cover plate 113 is connected with the one end of the furnace pipe 112 and is configured to close the opening, the cover plate 113 has at least one suction port 111 and at least one first through hole extending along the first horizontal direction. The at least one mounting bracket 115 is connected with the inner wall of the furnace pipe 112, and the mounting bracket 115 has a second through hole extending along the first horizontal direction. Wherein, the suction pipe 120 passes through the first through hole and the second through hole.

[0057] Exemplarily, the mounting bracket 115 and the inner wall of the furnace pipe 112 can be connected through a sintering process.

[0058] Exemplarily, the number of mounting brackets 115 is two, one of which is located near the furnace tail of the furnace pipe 112 (i.e., the end of the furnace pipe 112 close to the cover plate 113), and the other is located near the furnace mouth of the furnace pipe 112 (i.e., the end of the furnace pipe 112 away from the cover plate 113). Since the end of the suction pipe 120 close to the furnace tail needs to extend out of the reaction cavity to communicate with the suction assembly 400, and the end of the suction pipe 120 close to the furnace mouth does not need to extend out of the reaction cavity, the end of the suction pipe 120 close to the furnace tail passes through the second through hole of the mounting bracket 115 close to the furnace tail and passes through the first through hole of the cover plate 113 to extend out of the reaction cavity, and the end of the suction pipe 120 close to the furnace mouth passes through the second through hole of the mounting bracket 115 close to the furnace mouth and is located in the reaction cavity, as shown in Figure 5 Figure 5 the right end of the suction pipe 120 is the end of the suction pipe 120 close to the furnace tail, Figure 5 the left end of the suction pipe 120 is the end of the suction pipe 120 close to the furnace mouth.

[0059] Through the structure, the suction pipe 120 can slide along the first horizontal direction, that is, the position of the suction hole 121 can be adjusted along the first horizontal direction, so that the suction position of the suction pipe 120 can be flexibly adjusted.

[0060] In some embodiments, the suction pipe 126 located at the top of the reaction cavity can pass through the first through hole and the second through hole in sequence, so that the mounting bracket 115 supports the suction pipe 126 located at the top of the reaction cavity; the suction pipe 127 located at the bottom of the reaction cavity only passes through the first through hole and is supported by the inner wall of the bottom of the furnace pipe 112.

[0061] ​In some embodiments, the cross-sectional shape of the first through hole and the second through hole is circular, and the cross-sectional shape of the suction pipe 120 is circular, so that the suction pipe 126 located at the top of the reaction chamber can rotate relative to the first through hole and the second through hole, and the suction pipe 127 located at the bottom of the reaction chamber can rotate relative to the first through hole.

[0062] This structure allows for flexible adjustment of the suction direction of the suction pipe 120.

[0063] In some embodiments, the furnace tube assembly 110 further includes a first threaded connector. The mounting bracket 115 has a first threaded hole, the first threaded connector is threaded into the first threaded hole, and abuts against the exhaust pipe 126 located at the top of the reaction chamber, thereby fixing the orientation of the exhaust pipe 126 at the top of the reaction chamber and preventing rotation of the exhaust pipe 126 at the top of the reaction chamber. The first threaded connector is exemplarily a screw or bolt.

[0064] In some embodiments, the furnace tube assembly 110 further includes a second threaded connector. The cover plate 113 has a second threaded hole, the second threaded connector is threaded into the second threaded hole, and abuts against the exhaust pipe 127 located at the bottom of the reaction chamber, thereby fixing the orientation of the exhaust pipe 127 located at the bottom of the reaction chamber and preventing rotation of the exhaust pipe 127 located at the bottom of the reaction chamber. The second threaded connector is exemplarily a screw or bolt.

[0065] In some embodiments, such as Figure 1 As shown, the furnace tube assembly 110 also includes at least one connector 116. The connector 116 is disposed outside the reaction chamber, and each connector 116 has at least two third through holes extending along a first horizontal direction. The extraction pipe 120 also passes through the third through holes. The connector 116 is connected to the extraction assembly 400. Each connector 116 is configured to close the gap between the extraction pipe 120 and an inlet (such as the inlet of a vacuum pump pipe) of the extraction assembly 400, so that at least two extraction pipes 120 passing through the third through holes on each connector 116 communicate with the extraction assembly 400 through an inlet of the extraction assembly 400.

[0066] For example, each connector 116 has two third through holes.

[0067] For example, in the above embodiment, the third through hole may only allow the evacuation pipe 126 located at the top of the reaction chamber to pass through.

[0068] For example, the connector 116 includes a disk 1161 and an annulus 1162, the disk 1161 having at least two third through holes, the annulus 1162 being connected to the disk 1161 and to the vacuum assembly 400.

[0069] By setting the connecting piece 116, each gas inlet of the gas extraction assembly 400 can extract gas from at least two gas extraction pipes 120, so that the number of gas inlets can be reduced.

[0070] In some embodiments, as shown in Figure 7 The reaction furnace 100 further includes a support rod assembly 130. The support rod assembly 130 is arranged in the reaction cavity and connected with the furnace pipe assembly 110. The support rod assembly 130 is configured to support the boat structure 200 horizontally placed. The boat structure 200 has a placement area configured to carry the sheet-shaped material placed horizontally.

[0071] Exemplarily, the support rod assembly 130 includes at least one support rod, and each support rod is connected with the furnace pipe assembly 110 at two ends.

[0072] Exemplarily, the boat structure 200 is a graphite boat.

[0073] Exemplarily, the gas extraction pipe 126 at the top of the reaction cavity is above the boat structure 200, and the gas extraction pipe 127 at the bottom of the reaction cavity is below the boat structure 200.

[0074] Exemplarily, the sheet-shaped material is a silicon wafer, a glass substrate, or a wafer, etc.

[0075] By such a structure, the boat structure 200 placed in the reaction cavity is in the center of the reaction cavity, and the gas extraction pipe 126 at the top of the reaction cavity can extract gas from above the boat structure 200, and the gas extraction pipe 127 at the bottom of the reaction cavity can extract gas from below the boat structure 200.

[0076] Figure 8 Fig. 1 shows a structural schematic diagram of a processing device provided by an exemplary embodiment of the present application.

[0077] Based on the same concept, as shown in Figure 8 The present application further provides a processing device 300. The processing device 300 includes the reaction furnace 100 and the gas extraction assembly 400. The reaction furnace 100 is configured to process the sheet-shaped material. The gas extraction assembly 400 is configured to extract gas in the reaction cavity through the gas extraction port 111 of the reaction furnace 100 and the gas extraction pipe 120 of the reaction furnace 100.

[0078] Exemplarily, the gas extraction assembly 400 includes a vacuum pump, a gas pipe, a valve, etc. The valve can include a hand-operated plug valve, a pneumatic angle valve, a butterfly valve, etc.

[0079] In some embodiments, as shown in Figure 8As shown, the processing device 300 further comprises a controller 500. The controller 500 is communicatively connected with the gas extraction assembly 400, and is configured to control the gas extraction assembly 400 to extract the gas in the reaction cavity through the gas extraction pipe 120 to make the reaction cavity in a vacuum state before processing the sheet material, and to control the gas extraction assembly 400 to extract the process gas in the reaction cavity through the gas extraction port 111 during processing the sheet material.

[0080] Since the gas extraction assembly 400 has two gas extraction modes, i.e., the mode of extracting gas through the gas extraction pipe 120 and the mode of extracting gas through the gas extraction port 111, by setting the controller 500, the gas extraction assembly 400 can be accurately controlled to switch between the two gas extraction modes.

[0081] The above describes the basic principles of the present application in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present application are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present application. In addition, the above specific details disclosed are only for the purpose of example and for the purpose of understanding, and are not limited to the present application, and the above details do not limit the present application to the must-use specific details.

[0082] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, mean "include but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0083] It should also be noted that in the devices, equipment and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present application.

[0084] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0085] The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of the application to the forms disclosed herein. Although various example aspects and embodiments have been discussed above, those of ordinary skill in the art will appreciate a variety of modifications, alternatives, permutations, additions, and sub-combinations, which fall within the scope of the application.

Claims

1. A reactor furnace characterized by, The application relates to a reaction furnace. The furnace tube assembly extends along a first horizontal direction, one end of the furnace tube assembly is provided with at least one air outlet, and the furnace tube assembly is further provided with a reaction cavity extending along the first horizontal direction, the reaction cavity is configured to accommodate a boat structure, the air outlet is communicated with the reaction cavity so that process gas in the reaction cavity can be extracted through the air outlet. At least one air extraction pipe is connected with the furnace tube assembly and extends into the reaction cavity, the air extraction pipe is located at the top and / or bottom of the reaction cavity, the air extraction pipe extends along the first horizontal direction, and the side wall of the air extraction pipe is provided with a plurality of air extraction holes arranged in sequence along the first horizontal direction, the first air extraction hole is located at the first end of the reaction cavity, and the last air extraction hole is located at the second end of the reaction cavity, the air extraction holes can extract gas in the reaction cavity so that the reaction cavity is in a vacuum state.

2. The reactor of claim 1, wherein The plurality of air extraction holes are uniformly distributed along the first horizontal direction.

3. The reactor according to claim 1 or 2, characterized in that The furnace tube assembly is provided with a vertical symmetry plane extending along the first horizontal direction, and the number of the air extraction pipes is at least two, and the at least two air extraction pipes are symmetrically arranged along the vertical symmetry plane.

4. The reactor according to claim 1 or 2, characterized in that The furnace tube assembly is provided with a vertical symmetry plane extending along the first horizontal direction, and the number of the air outlets is at least two, and the at least two air outlets are symmetrically arranged along the vertical symmetry plane.

5. The reactor according to claim 1 or 2, characterized in that When the air extraction pipe is located at the top of the reaction cavity, the air extraction holes of the air extraction pipe located at the top of the reaction cavity are directed downward and / or obliquely downward.

6. The reactor of claim 5, wherein The number of the air extraction pipes located at the top of the reaction cavity is at least three, the at least three air extraction pipes are arranged in sequence along a second horizontal direction, the second horizontal direction intersects the first horizontal direction, the at least three air extraction pipes include a first air extraction pipe, a last air extraction pipe and at least one intermediate air extraction pipe between the first air extraction pipe and the last air extraction pipe, the air extraction holes of the intermediate air extraction pipe are directed downward, the air extraction holes of the first air extraction pipe are directed obliquely downward and away from the intermediate air extraction pipe, and the air extraction holes of the last air extraction pipe are directed obliquely downward and away from the intermediate air extraction pipe.

7. The reactor according to claim 1 or 2, characterized in that The air extraction pipe is rotationally connected and / or slidingly connected with the furnace tube assembly.

8. The reactor of claim 7, wherein The furnace tube assembly comprises: A furnace tube extending along the first horizontal direction, the furnace tube is provided with the reaction cavity, and one end of the furnace tube is provided with an opening communicated with the reaction cavity; A cover plate connected with one end of the furnace tube and configured to close the opening, the cover plate is provided with at least one air outlet and at least one first through hole extending along the first horizontal direction; At least one mounting frame connected with the inner wall of the furnace tube, the mounting frame is provided with a second through hole extending along the first horizontal direction; The air extraction pipe passes through the first through hole and the second through hole.

9. A processing apparatus characterized by comprising: The application relates to a reaction furnace. An air extraction assembly is configured to extract gas in the reaction cavity through the air outlet of the reaction furnace and the air extraction pipe of the reaction furnace. The application further relates to 10. The processing apparatus of claim 9, wherein, ​ A controller, in communication with the gas extraction assembly, is configured to control the gas extraction assembly to extract the gas in the reaction cavity through the gas extraction pipe to make the reaction cavity in a vacuum state before processing the sheet material, and to control the gas extraction assembly to extract the process gas in the reaction cavity through the gas extraction pipe during processing the sheet material.

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