Cylinder-driven gate valve suitable for ultrahigh vacuum cavity partition

Abstract

The utility model provides an air cylinder driving gate valve suitable for ultrahigh vacuum cavity partition, which comprises a valve body, a valve cover arranged at the top of the valve body, a pressing plate arranged at the top end of the valve cover, a valve plate assembly arranged in the valve body, an air cylinder arranged at the top end of the pressing plate and used for driving the valve plate assembly to lift, and two slots arranged in the valve body, through the arranged valve plate assembly, when the air cylinder drives the valve plate assembly to descend, firstly, the sealing valve plate can descend in the inserting groove and move to the bottom end of the valve body, and in the process, due to the fact that a gap exists between the sealing ring and the through hole, abrasion between the sealing ring and the valve body cannot be caused in the descending process of the sealing valve plate; the middle push plate continuously descends, so that the two sealing valve plates are pushed to move back to back to be tightly attached to the valve body under the action of the adjusting ball and the ball groove, the opening can be sealed through the sealing ring, the sealing effect of the gate valve is improved, the abrasion efficiency of the sealing ring can be effectively reduced, and the service life of the gate valve is prolonged. And the maintenance frequency of the gate valve is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the plug-in valve technical field, concretely relates to a kind of pneumatic cylinder drive plug-in valve suitable for ultra-high vacuum cavity partition. BACKGROUND

[0002] Vacuum plug-in valve is a kind of valve used in vacuum system, and its technical background comes from the development of vacuum technology. In the vacuum system, valve is needed to control the flow of gas to achieve system control and operation. The technical background of vacuum plug-in valve also includes the progress of material science and process technology. Modern vacuum plug-in valve is made of ceramic materials, stainless steel, aluminum alloy and other materials, with corrosion resistance, high temperature, high pressure and other characteristics. At the same time, the use of advanced processing technology and precision machinery equipment also makes the manufacturing of vacuum plug-in valve more accurate and reliable. The main features of vacuum plug-in valve are fast cut-off, jamming function, good sealing performance, long service life and other advantages. During the use of plug-in valve, the valve plate is driven by pneumatic cylinder to reciprocate up and down, so as to realize the opening and closing of plug-in valve. During the lifting of valve plate, the sealing ring for sealing will be replaced frequently due to continuous wear and tear, and the sealing effect will be affected after the wear of sealing ring, so the plug-in valve needs to be frequently maintained by staff. Based on this, we propose a plug-in valve that can effectively reduce the wear effect of sealing ring and reduce the maintenance frequency. SUMMARY

[0003] The utility model aims at providing a kind of pneumatic cylinder drive plug-in valve suitable for ultra-high vacuum cavity partition, to solve the problems raised in the background art.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of pneumatic cylinder drive plug-in valve suitable for ultra-high vacuum cavity partition, including valve body, valve cover installed on the top of valve body, the top of valve cover is equipped with pressing plate, valve plate assembly is installed in valve body, pneumatic cylinder is installed on the top of pressing plate to drive valve plate assembly lifting, the front and back of valve body are both provided with opening, the surface of valve body is provided with connecting plate at opening, the connecting plate is used to connect with the vacuum cavity that needs to be partitioned or has pressure difference, two insertion slots are provided in valve body, strip slot is provided in the middle of bottom end of valve body, two vacuum electromagnetic valves are installed on the top of one side of pressing plate, two communication holes are provided in the side of valve body, respectively through corresponding opening, two vacuum electromagnetic valves are connected with communication hole through connecting pipe respectively;

[0005] The valve plate assembly comprises two sealing valve plates and a middle push plate, a top plate is installed at the top end of the middle push plate, the telescopic end of the air cylinder is connected with the top end, the sealing valve plates are movably inserted into the insertion slots, the two sealing valve plates are arranged on the two sides of the middle push plate, a through hole is formed in the middle of the middle push plate, a plurality of connecting bolts are arranged on the opposite surfaces of the two sealing valve plates in a staggered manner, connecting plates are arranged at the two ends of the middle push plate and in the through hole, connecting holes are formed in the four corners of the connecting plates, the connecting bolts are inserted into the connecting holes and are screwed with nuts at the end heads, and adjusting balls for moving the two sealing valve plates away from each other are installed on the two sides of the middle push plate.

[0006] As a preferred technical scheme of the utility model, a plurality of ball grooves are installed on the opposite sides of the two sealing valve plates, the adjusting balls are arranged in the ball grooves, the adjusting balls are installed in the ball grooves, and the diameters and depths of the ball grooves gradually decrease from top to bottom.

[0007] As a preferred technical scheme of the utility model, a sealing ring is installed on the side surface of the opening side of the two sealing valve plates, and a first protective strip is formed in the bottom end of the middle push plate.

[0008] As a preferred technical scheme of the utility model, when the adjusting ball is located at the top of the ball groove, the bottom end of the connecting plate in the through hole is attached to the bottom end of the through hole, meanwhile, the sealing ring is opposite to the opening and a gap exists between the sealing valve plate and the through hole, when the adjusting ball is located at the bottom of the ball groove, the top end of the connecting plate in the through hole is attached to the top end of the through hole and the first protective strip is pressed in the strip-shaped groove, and meanwhile, the sealing ring seals the opening.

[0009] As a preferred technical scheme of the utility model, a second protective strip is installed at the bottom end of the sealing valve plate, the size of the sealing ring is greater than the size of the opening, and the size of the first protective strip matches the size of the strip-shaped groove.

[0010] As a preferred technical scheme of the utility model, the air cylinder is installed at the top end of the pressing plate through a stud, the pressing plate is installed at the top end of the valve cover through a stud, and the valve cover is installed at the top of the valve body through a stud.

[0011] Compared with the prior art, the utility model discloses the beneficial effect is: through being provided valve plate subassembly, the first sealing valve plate will drop in the slot and remove to the bottom end of valve body when the air cylinder drive valve plate subassembly drops, there is a gap between sealing ring and through -hole in this process, therefore, sealing valve plate does not cause sealing ring and valve body to produce abrasion in the process of dropping, and the middle pushboard continues to drop and makes in the adjustment ball and the ball groove effect push two sealing valve plates to the back and move to the valve body closely, and then can seal through sealing ring to the opening, has promoted the sealing effect of this plug -in valve, can effectively reduce the abrasion efficiency of sealing ring through this mode, has reduced the overhaul frequency of this plug -in valve, and first protection strip and second protection strip can play the protection effect to sealing valve plate and middle pushboard bottom. BRIEF DESCRIPTION OF DRAWINGS

[0012] The accompanying drawings are included to provide a further understanding of the present application and are incorporated in and constitute a part of this specification, illustrate embodiments of the present application and are used to explain the present application, and do not constitute a limitation on the present application. In the drawings:

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 It is a sectional structure schematic diagram of the utility model;

[0015] Figure 3 It is a structural schematic diagram of the valve body in the utility model;

[0016] Figure 4 It is a structural schematic diagram of the valve plate subassembly in the utility model;

[0017] Figure 5 It is a structural schematic diagram of the pushboard in the utility model;

[0018] Figure 6 It is a partial split structure schematic diagram of the valve plate subassembly in the utility model.

[0019] In the drawing: 1, valve body; 2, pressing plate; 3, valve plate subassembly; 31, sealing valve plate; 32, middle pushboard; 33, top plate; 34, through -hole; 35, connecting bolt; 36, connecting piece; 37, connecting hole; 38, nut; 4, air cylinder; 5, connecting plate; 6, slot; 7, strip groove; 8, vacuum electromagnetic valve; 9, communication hole; 10, connecting pipe; 11, adjustment ball; 12, ball groove; 13, sealing ring; 14, first protection strip; 15, second protection strip; 16, valve cover. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0021] Please refer to Figures 1-6 The utility model provides the following technical scheme: a cylinder drive plug-in valve suitable for ultra-high vacuum cavity partition, including valve body 1, install the valve cover 16 of valve body 1 top, the top of valve cover 16 is equipped with the pressing plate 2, install valve plate assembly 3 in valve body 1, the top of pressing plate 2 is equipped with the cylinder 4 of drive valve plate assembly 3 lift, the front and back of valve body 1 are all provided with opening, the surface of valve body 1 is provided with connecting plate 5 at opening, two insertion slots 6 are provided in valve body 1, the middle part of bottom end of valve body 1 is provided with strip slot 7, the top one side of pressing plate 2 is equipped with two vacuum electromagnetic valves 8, the side of valve body 1 is provided with two respectively through the communicating hole 9 of corresponding opening, two vacuum electromagnetic valves 8 are connected with communicating hole 9 through connecting pipe 10 respectively.

[0022] In the embodiment, valve plate assembly 3 includes two sealing valve plates 31 and middle push plate 32, the top of middle push plate 32 is equipped with top plate 33, the side of two sealing valve plates 31 at opening side is equipped with sealing ring 13, the side of two sealing valve plates 31 at opening side is equipped with sealing ring 13, sealing valve plate 31 is movably inserted in insertion slot 6, the telescopic end of cylinder 4 is connected with top, two sealing valve plates 31 are arranged on the two sides of middle push plate 32 respectively, the middle part of middle push plate 32 is provided with through hole 34, a plurality of connecting bolts 35 are arranged on the opposite surfaces of two sealing valve plates 31 in staggered mode, connecting piece 36 is arranged in the both ends of middle push plate 32 and through hole 34, connecting hole 37 is provided in the four corners of connecting piece 36, connecting bolt 35 is inserted and arranged in connecting hole 37 and the end head is threadedly connected with nut 38, adjusting ball 11 is arranged on the two sides of middle push plate 32 and drives two sealing valve plates 31 to move back.

[0023] Specifically, top plate 33 is driven to lift by cylinder 4, and then middle push plate 32 will lift along with cylinder 4, and two sealing valve plates 31 also lift along with the action of connecting piece 36 in the middle of through hole 34, when two sealing valve plates 31 descend to the bottom in insertion slot 6, cylinder 4 continuously drives middle push plate 32 to descend, and two sealing valve plates 31 move back under the action of adjusting ball 11, connecting bolt 35 and connecting hole 37, and then sealing valve plate 31 drives sealing ring 13 to tightly adhere to the inner wall of valve body 1, so as to seal the opening.

[0024] In the embodiment, the two sealing valve plates 31 are provided with a plurality of ball grooves 12 on the opposite sides, and the adjusting balls 11 are arranged in the ball grooves 12.

[0025] Specifically, since the diameter and depth of the ball groove 12 gradually decrease from top to bottom, when the middle push plate 32 continuously descends, the adjusting balls 11 will move to the bottom of the ball groove 12, and then the adjusting balls 11 will push the sealing valve plate 31 to move outward, so that the sealing valve plate 31 drives the sealing ring 13 to tightly adhere to the inner wall of the valve body 1 and seal the opening.

[0026] In the embodiment, the bottom end of the middle push plate 32 is provided with a first protective strip 14.

[0027] Specifically, the first protective strip 14 can protect the bottom end of the middle push plate 32, so as to avoid hard contact between the bottom end of the middle push plate 32 and the bottom end of the strip-shaped groove 7, thereby preventing damage.

[0028] In the embodiment, when the adjusting balls 11 are located at the top of the ball groove 12, the bottom end of the connecting piece 36 in the through hole 34 is attached to the bottom end of the through hole 34, and at the same time, the sealing ring 13 is opposite to the opening, and there is a gap between the sealing valve plate 31 and the through hole 34. When the adjusting balls 11 are located at the bottom of the ball groove 12, the top end of the connecting piece 36 in the through hole 34 is attached to the top end of the through hole 34, and at the same time, the first protective strip 14 is pressed against the strip-shaped groove 7, and the sealing ring 13 seals the opening.

[0029] Specifically, in this way, before the two sealing valve plates 31 descend to seal the opening, there is a gap between the sealing ring 13 and the inner wall of the valve body 1, so that the sealing ring 13 will not be abraded when the sealing valve plate 31 descends, thereby effectively reducing the abrasion efficiency of the sealing ring 13. When the opening is sealed, the sealing valve plate 31 moves transversely to make the sealing ring 13 tightly press against the inner wall of the valve body 1, thereby further reducing the abrasion efficiency of the sealing ring 13. In this way, not only the abrasion efficiency of the sealing ring 13 can be effectively reduced, but also the frequency of maintenance of the plug valve by the staff can be reduced.

[0030] In the embodiment, the bottom end of the sealing valve plate 31 is provided with a second protective strip 15, the size of the sealing ring 13 is greater than the size of the opening, and the size of the first protective strip 14 matches the size of the strip-shaped groove 7.

[0031] Specifically, the second protective strip 15 is arranged, so that after the sealing valve plate 31 descends to the bottom of the insertion slot 6, the bottom end of the sealing valve plate 31 will not be in hard contact with the valve body 1, thereby prolonging the service life of the sealing valve plate 31.

[0032] In the present embodiment, the cylinder 4 is mounted by studs to the top end of the platen 2, the platen 2 is mounted by studs to the top end of the valve cover 16, and the valve cover 16 is mounted by studs to the top of the valve body 1.

[0033] Specifically, since the plug valve is connected by bolts and studs between the components, it is more convenient for the staff to disassemble and overhaul the plug valve.

[0034] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application has been described in detail, for those skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement for the technical solutions recorded in the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application, shall be included within the scope of the present application.

Claims

1. A cylinder-driven plug valve suitable for ultra-high vacuum chamber partition, comprising a valve body (1), a valve cover (16) installed on the top of the valve body (1), a pressing plate (2) installed on the top end of the valve cover (16), a valve plate assembly (3) installed in the valve body (1), and a cylinder (4) installed on the top end of the pressing plate (2) to drive the valve plate assembly (3) to lift, characterized in that: The front and back of the valve body (1) are provided with openings, the surface of the valve body (1) is provided with a connecting plate (5) at the opening, two insertion grooves (6) are formed in the valve body (1), a strip-shaped groove (7) is formed in the middle of the bottom end of the valve body (1), two vacuum electromagnetic valves (8) are mounted on the top end of the pressing plate (2), two communication holes (9) are formed in the side of the valve body (1) and respectively penetrate the corresponding openings, and the two vacuum electromagnetic valves (8) are connected with the communication holes (9) through connecting pipes (10). The valve plate assembly (3) comprises two sealing valve plates (31) and a middle push plate (32), the top end of the middle push plate (32) is provided with a top plate (33), the side of the two sealing valve plates (31) located at the opening is provided with a sealing ring (13), the sealing valve plate (31) is movably inserted into the insertion groove (6), the telescopic end of the air cylinder (4) is connected with the top end, the two sealing valve plates (31) are respectively arranged on the two sides of the middle push plate (32), a through hole (34) is formed in the middle of the middle push plate (32), a plurality of connecting bolts (35) are arranged on the opposite sides of the two sealing valve plates (31), connecting plates (36) are arranged in the two ends of the middle push plate (32) and the through hole (34), connecting holes (37) are formed in the four corners of the connecting plates (36), the connecting bolts (35) are inserted into the connecting holes (37) and the end heads are threadedly connected with nuts (38), and the two sides of the middle push plate (32) are provided with adjusting balls (11) for moving the two sealing valve plates (31) to the back.

2. A pneumatic cylinder driven plug valve suitable for use in ultra-high vacuum chamber partitions according to claim 1, characterized in that: A plurality of ball grooves (12) are arranged on the opposite sides of the two sealing valve plates (31), the adjusting balls (11) are arranged in the ball grooves (12), the adjusting balls (11) are arranged in the ball grooves (12), and the diameter and depth of the ball grooves (12) gradually decrease from top to bottom.

3. A pneumatic cylinder driven plug valve suitable for use in ultra-high vacuum chamber partitions according to claim 2, characterized in that: The side of the two sealing valve plates (31) located at the opening is provided with a sealing ring (13), and the bottom end of the middle push plate (32) is provided with a first protective strip (14).

4. A pneumatic cylinder driven gate valve suitable for use in ultra-high vacuum chamber partitions according to claim 3, characterized in that: When the adjusting balls (11) are located at the top of the ball grooves (12), the bottom end of the connecting plate (36) in the through hole (34) is attached to the bottom end of the through hole (34), the sealing ring (13) is opposite to the opening, and there is a gap between the sealing valve plate (31) and the through hole (34), when the adjusting balls (11) are located at the bottom of the ball grooves (12), the top end of the connecting plate (36) in the through hole (34) is attached to the top end of the through hole (34) and the first protective strip (14) is pressed in the strip-shaped groove (7), and the sealing ring (13) seals the opening.

5. A pneumatic cylinder driven plug valve suitable for use in ultra-high vacuum chamber partitions according to claim 3, characterized in that: The bottom end of the sealing valve plate (31) is provided with a second protective strip (15), the size of the sealing ring (13) is greater than the size of the opening, and the size of the first protective strip (14) matches the size of the strip-shaped groove (7).

6. A pneumatic cylinder driven plug valve suitable for use in ultra-high vacuum chamber partitions according to claim 1, characterized in that: The air cylinder (4) is mounted on the top end of the pressing plate (2) through a stud, the pressing plate (2) is mounted on the top end of the valve cover (16) through a stud, and the valve cover (16) is mounted on the top of the valve body (1) through a stud.

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