Rotary adjusting mechanism
The automated design of the rotary adjustment mechanism solves the problem of manual needle card alignment, achieving high-precision and rapid needle card alignment and improving the operating efficiency of semiconductor testing equipment.
Patent Information
- Application Number
- CN202520636416.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-03
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2035-04-03
AI Technical Summary
The current method of manually adjusting the needle clips on the needle clip positioning base is difficult to operate, requires a lot of experience, is slow, and cannot fully guarantee the accuracy.
The rotary adjustment mechanism includes a support frame, a horizontal fixing plate, an adjustment drive mechanism, a clamping mechanism, and an observation mechanism. It uses a linear motor and a rotary cylinder to achieve automated and high-precision pin clamp alignment adjustment. The elastic sliding of the clamping block reduces the horizontal force and improves the adjustment accuracy.
It achieves high-precision and rapid needle alignment adjustment, reduces the difficulty of operation, improves adjustment speed and accuracy, and reduces errors.
Smart Images
Figure CN223637588U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor production detection equipment, especially relates to a rotary adjustment mechanism. BACKGROUND
[0002] In the production of semiconductor chips, in order to improve chip product quality and save resources, the performance of the wafer before packaging will be detected. The performance detection equipment of the wafer generally includes a needle card position adjusting fixed seat and a wafer positioning seat. Before batch testing, the wafer to be tested is positioned on the wafer positioning seat, and the needle card for testing the wafer is fixed on the needle card position adjusting fixed seat. Then, the alignment of the probes of the needle card on the needle card position adjusting fixed seat and the pad points of the wafer on the wafer positioning seat is observed by using an electron microscope. According to the actual situation, the needle card on the needle card position adjusting fixed seat is adjusted horizontally and longitudinally and transversely to ensure the accurate alignment of the probes of the needle card on the needle card position adjusting fixed seat and the pad points of the wafer on the wafer positioning seat. After the alignment adjustment is completed, the needle card on the needle card position adjusting fixed seat remains fixed, and then the wafer is loaded and unloaded on the wafer positioning seat through an automatic process for automatic detection. The adjustment and alignment of the needle card on the existing needle card position adjusting fixed seat are generally manually operated. The horizontal longitudinal knob and the horizontal transverse knob of the position adjusting mechanism arranged on the needle card position adjusting fixed seat are rotated to adjust and align the needle card on the needle card position adjusting fixed seat. Since the adjustment and alignment accuracy reaches 0.001 um, the operation and alignment are difficult, the operator needs to have rich operation experience, and the alignment adjustment can be completed only after high-precision multiple adjustments. The alignment adjustment requires high speed, and the accuracy error range cannot be completely guaranteed. SUMMARY
[0003] The utility model provides a kind of rotary adjustment mechanism, solve the technical problem that present manual operation adjustment and alignment needle card on needle card position adjusting fixed seat, operation and alignment are difficult, operator needs to have rich operation experience, and alignment adjustment can be completed only after high-precision multiple adjustments, the requirement of alignment adjustment is high, slow, and the accuracy error range cannot be completely guaranteed.
[0004] The utility model discloses a kind of rotary adjustment mechanism, the technical scheme adopted to solve its technical problem is: a kind of rotary adjustment mechanism, including support frame, horizontal fixed plate being arranged on support frame, position adjusting drive mechanism being arranged on horizontal fixed plate, clamping mechanism being arranged on position adjusting drive mechanism and being driven by position adjusting drive mechanism and moving horizontally transversely, moving horizontally longitudinally and rotating in vertical direction, clamping rotary head being arranged on clamping mechanism and being driven by clamping mechanism to complete clamping action, the clamping rotary head includes the clamping block that can be elastically slid in horizontal direction and is arranged in its interior, observation mechanism is arranged on the horizontal fixed plate and is used to observe the position of clamping rotary head. Structure is simple, and high-precision rotation adjustment alignment of position adjusting knob is completed automatically, with high speed and high efficiency.
[0005] Further, the position adjusting driving mechanism comprises a transverse horizontal driving mechanism fixed on the horizontal fixing plate, a longitudinal horizontal driving mechanism arranged on the transverse horizontal driving mechanism and driven by the transverse horizontal driving mechanism to move longitudinally horizontally, and a rotating driving mechanism arranged on the longitudinal horizontal driving mechanism and driven by the longitudinal horizontal driving mechanism to rotate. The structure is simple, the operation is easy, and the adjusting precision is high.
[0006] Further, the clamping rotating head further comprises two clamping bodies arranged oppositely, a sliding groove in which a clamping block arranged on one side of each of the two clamping bodies slides horizontally, first and second limiting plates arranged on two sides of the sliding groove respectively, and a plurality of elastic components arranged between the two ends of the clamping block in the sliding groove and the first and second limiting plates respectively. The force applied to the position adjusting knob in the horizontal forward or backward direction is reduced, and the adjusting precision is effectively improved.
[0007] Further, the first limiting plate is in an integral structure with the clamping body, and the second limiting plate is fixed on the clamping body by bolts. The operation is simple, and the structure is stable.
[0008] Further, the elastic components are springs, a plurality of columnar limiting cavities are arranged at positions corresponding to the first and second limiting plates at the two ends of the clamping block, and one end of each of the elastic components is located in the columnar limiting cavity. In long-term use, the elastic components are protected by being located in the columnar limiting cavities, have a longer service life, and are more stable during use.
[0009] Further, the two clamping blocks are provided with elastic pads on one side of each of the two clamping blocks. The damage to the position adjusting knob is avoided, the clamping is more stable, and the long-term use precision is improved.
[0010] Further, the support frame comprises two fixing frames arranged correspondingly, a support sliding groove arranged vertically in each of the fixing frames, a vertical sliding frame arranged in each of the support sliding grooves and vertically movable in each of the support sliding grooves, the horizontal fixing plate horizontally fixed on the two corresponding vertical sliding frames, a plurality of waist-shaped holes arranged vertically on the fixing frame and the support sliding groove, and at least one fixing bolt arranged in each of the waist-shaped holes and used for fixing the vertical sliding frame in the support sliding groove. In specific implementation, the height of the horizontal fixing plate can be adjusted, and the practicability of the rotating adjusting mechanism is improved. BRIEF DESCRIPTION OF DRAWINGS
[0011] Figure 1 It is a front view of the utility model;
[0012] Figure 2 It is a front view of the clamping rotating head;
[0013] Figure 3Main view schematic diagram of clamping rotary head part.
[0014] In the figure, the marks are: support frame 110, horizontal fixed plate 120, transverse horizontal driving mechanism 131, longitudinal horizontal driving mechanism 132, rotary driving mechanism 133, clamping mechanism 140, clamping rotary head 150, clamping main body 151, sliding groove 152, first limiting plate 153, second limiting plate 154, clamping block 155, elastic component 156, columnar limiting cavity 157, elastic pad 158, observation mechanism 160. DETAILED DESCRIPTION
[0015] The utility model is further explained below in combination with the drawings and specific embodiments.
[0016] As Figure 1 shown in a kind of rotary adjustment mechanism, including support frame 110, horizontal fixed plate 120 being arranged on support frame 110, setting on horizontal fixed plate 120, clamping mechanism 140 being arranged on the horizontal transverse movement, horizontal longitudinal movement and vertical direction rotation of the position adjusting driving mechanism and by the position adjusting driving mechanism driving, clamping rotary head 150 being arranged on clamping mechanism 140 and by clamping mechanism 140 driving to complete clamping action, the clamping rotary head 150 includes the clamping block 155 that can be elastically slid in horizontal direction and is arranged in its interior, the horizontal fixed plate 120 is provided with observation mechanism 160 for observing the position of clamping rotary head 150 positioning.In this specific embodiment, observation mechanism 160 is industrial camera, for observing the position of clamping rotary head 150 positioning needs to move;Clamping mechanism 140 is the clamping cylinder with two corresponding clamping fingers;In specific implementation, observation mechanism 160 observes the position of the position adjusting knob needing to rotate, and position adjusting driving mechanism drives clamping mechanism 140 to move to the corresponding position of position adjusting knob, and clamping mechanism 140 drives clamping rotary head 150 to clamp position adjusting knob, and position adjusting driving mechanism drives clamping mechanism 140 to rotate, and in the process of driving clamping mechanism 140 to rotate by position adjusting driving mechanism, drives clamping mechanism 140 to move with position adjusting knob in horizontal direction;Position adjusting knob rotates and adjusts the process to advance or retreat in horizontal direction, although in the process of driving clamping mechanism 140 to rotate by position adjusting driving mechanism, it also moves in horizontal direction, but due to the precision relationship, some misalignment can still occur, and the clamping block 155 that can be elastically slid in horizontal direction moves with the force in horizontal advancing or retreating direction, to ensure that the force applied to position adjusting knob is the force driving its rotation as much as possible, to minimize the force applied to position adjusting knob in horizontal advancing or retreating direction, effectively improve the adjustment accuracy;Simple structure, automatically complete high-precision rotary adjustment of position adjusting knob, fast and efficient.
[0017] On the basis of the above, as Figure 1As shown in the figure, the position adjusting driving mechanism comprises a transverse horizontal driving mechanism 131 fixed on the horizontal fixing plate 120, a longitudinal horizontal driving mechanism 132 arranged on the transverse horizontal driving mechanism 131 and driven by the transverse horizontal driving mechanism 131 to move horizontally, and a rotating driving mechanism 133 arranged on the longitudinal horizontal driving mechanism 132 and driven by the longitudinal horizontal driving mechanism 132 to move longitudinally. In this embodiment, the transverse horizontal driving mechanism 131 and the longitudinal horizontal driving mechanism 132 are both high-precision linear motors with slide rail assemblies, and the transverse horizontal driving mechanism 131 and the longitudinal horizontal driving mechanism 132 can also be high-precision stroke-controllable air cylinder assemblies; the rotating driving mechanism 133 is a high-precision rotating air cylinder with controllable rotating angle. The structure is simple, easy to control, and high in control precision.
[0018] On the basis of the above, Figures 1 to 3 As shown in the figure, the clamping rotating head 150 further comprises two clamping bodies 151 arranged oppositely, and a slide groove 152 in which a clamping block 155 is horizontally slidable is arranged on one side of each of the two clamping bodies 151, a first limiting plate 153 and a second limiting plate 154 are arranged on both sides of the slide groove 152 respectively, and a plurality of elastic components 156 are arranged between both ends of the clamping block 155 in the slide groove 152 and the first limiting plate 153 and the second limiting plate 154 respectively. In the specific implementation, the clamping mechanism 140 is a clamping air cylinder with two corresponding clamping fingers, the two clamping bodies 151 are fixed on the two corresponding clamping fingers of the clamping air cylinder by bolts respectively, the clamping block 155 can slide in the slide groove 152, the elastic force of the plurality of elastic components 156 is small, so that the clamping block 155 can be located at the middle position in the slide groove 152 when the clamping block 155 is not subjected to a force in the forward or backward direction, and the clamping block 155 can be elastically moved forward or backward when the clamping block 155 is subjected to a force in the forward or backward direction, thereby reducing the force applied to the position adjusting knob in the horizontal forward or backward direction and effectively improving the adjustment precision.
[0019] On the basis of the above, Figures 1 to 3 As shown in the figure, the first limiting plate 153 is in an integral structure with the clamping body 151, and the second limiting plate 154 is fixed on the clamping body 151 by bolts. In the specific implementation, after the clamping block 155 is slidably installed in the slide groove 152 from one end of the second limiting plate 154, the second limiting plate 154 is fixed on the clamping block 155 by bolts, and the operation is simple and the structure is stable.
[0020] On the basis of the above, Figures 2 to 3As shown, the elastic component 156 is a spring, both ends of the clamping block 155 are provided with a plurality of columnar limiting cavities 157 in the corresponding positions of the first limiting plate 153 and the second limiting plate 154, and one end of the elastic component 156 is located in the columnar limiting cavity 157. In the specific implementation, the spring is first installed into the columnar limiting cavity 157 of the clamping block 155, then the clamping block 155 is slidably installed into the sliding groove 152 from one end of the second limiting plate 154, and finally the second limiting plate 154 is fixed to the clamping block 155 through the bolt, at this time, the springs at both ends of the clamping block 155 are in the compressed state, maintaining the clamping block 155 in the middle position of the sliding groove 152; in the long-term use, the elastic component 156 located in the columnar limiting cavity 157 is limited and protected, has a longer service life, and is more stable during use.
[0021] On the basis of the above, Figures 1 to 3 As shown, both of the clamping blocks 155 are provided with elastic pads 158 on the corresponding sides. Damage to the position adjusting knob is avoided, clamping is more stable, and the long-term use precision is improved.
[0022] On the basis of the above, Figure 1 As shown, the support frame 110 includes two corresponding fixed frames, the fixed frames are provided with vertical support sliding grooves, the support sliding grooves are provided with vertical sliding frames which are vertically movable and are limited by the support sliding grooves, the horizontal fixed plate 120 is horizontally fixed on the two corresponding vertical sliding frames, a column of waist-shaped holes is vertically arranged on the fixed frames and corresponding to the support sliding grooves, at least one of the waist-shaped holes is provided with a fixing bolt for fixing the vertical sliding frame in the support sliding groove. In the specific implementation, the height of the horizontal fixed plate 120 can be adjusted, and the practicability of the rotation adjusting mechanism is improved.
[0023] The above specific embodiments further specifically describe the purpose, technical scheme and advantages of the utility model, and it should be understood that the above description is only for the specific embodiments of the utility model and is not used to limit the utility model, and any modification, equivalent replacement, improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model.
Claims
1. A rotational adjustment mechanism, characterized by: The utility model provides a kind of positioning and clamping mechanism, including support frame (610), the horizontal fixed plate (620) being arranged on support frame (610), the positioning drive mechanism being arranged on horizontal fixed plate (620), the clamping mechanism (640) being arranged on positioning drive mechanism and being driven horizontal transverse movement, horizontal longitudinal movement and vertical direction rotation by positioning drive mechanism, the clamping rotary head (650) being arranged on clamping mechanism (640) and being driven to complete clamping action by clamping mechanism (640), the clamping rotary head (650) includes the clamping block (655) that can be elastically slid in its inside in horizontal direction, observation mechanism (660) is arranged on the horizontal fixed plate (620) and is observed the position of clamping rotary head (650).
2. A rotational adjustment mechanism according to claim 1, wherein: The positioning drive mechanism includes transverse horizontal drive mechanism (631) fixed on horizontal fixed plate (620), longitudinal horizontal drive mechanism (632) arranged on transverse horizontal drive mechanism (631) and driven transverse horizontal movement by transverse horizontal drive mechanism (631), rotary drive mechanism (633) arranged on longitudinal horizontal drive mechanism (632) and driven longitudinal horizontal movement by longitudinal horizontal drive mechanism (632).
3. A rotational adjustment mechanism according to claim 1, wherein: The clamping rotary head (650) further includes two clamping bodies (651) oppositely arranged, the two clamping bodies (651) correspondingly arranged with the slide groove (652) that limit clamping block (655) horizontal direction sliding on one side, the slide groove (652) is provided with first limit plate (653) and second limit plate (654) on both sides respectively, and a plurality of elastic components (656) are arranged between the two ends of clamping block (655) in the slide groove (652) and first limit plate (653) and second limit plate (654) respectively.
4. A rotational adjustment mechanism according to claim 3, wherein: The first limit plate (653) is an integral structure with the clamping body (651), and the second limit plate (654) is fixed on the clamping body (651) by bolts.
5. A rotational adjustment mechanism according to claim 4, wherein: The elastic component (656) is a spring, and the two ends of the clamping block (655) are provided with a plurality of columnar limiting cavities (657) at the corresponding positions of the first limit plate (653) and the second limit plate (654).
6. A rotational adjustment mechanism according to claim 1, wherein: The two clamping blocks (655) are provided with elastic pads (658) on the corresponding sides.
7. A rotational adjustment mechanism as claimed in claim 1, characterized in that: The support frame (610) includes two corresponding fixed frames, the vertical support sliding groove is arranged in the fixed frame, the vertical sliding frame vertically movable is arranged in the support sliding groove, the horizontal fixed plate (620) is horizontally fixed on the two corresponding vertical sliding frames, a column of waist-shaped holes is vertically arranged on the fixed frame and the support sliding groove, and at least one fixing bolt for fixing the vertical sliding frame in the support sliding groove is arranged in the waist-shaped hole.