Gluing developing machine capable of uniformly gluing

Abstract

The utility model discloses a gluing developing machine capable of uniformly gluing, which comprises a developing machine, a mounting cavity is arranged above the developing machine, a spray head is arranged above the developing machine, the spray head and the mounting cavity are correspondingly arranged, a fixed frame is fixedly arranged on the spray head, a scraper blade is arranged on the fixed frame, a brush head is arranged above the fixed frame, and the brush head is connected with the mounting cavity. The brush head and the scraper are correspondingly arranged, the brush head is in sliding connection with the fixing frame through a sliding block, a second sliding rod is fixedly installed in the fixing frame, a second cam is rotatably installed in the fixing frame, and the second cam is attached to the sliding block; the scraper blade is matched with the brush head to clean the outlet below the spray head and close the spray head when the spray head is not used, so that the phenomenon that the uniform gluing effect of the gluing machine is influenced by partial blockage of the spray head caused by dryness of photoresist in the spray head is avoided, and meanwhile, the photoresist adhered to the scraper blade is cleaned through the brush head, so that the cleaning efficiency is improved. And good cleaning and blocking effects of the scraper blade on the spray head are kept.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of gluing developing machine, concretely is a kind of gluing developing machine that can be even glued. BACKGROUND

[0002] Gluing developing machine is the common equipment of manufacturing semiconductor, generally used for photoresist coating and developing process etc.;Gluing developing machine is the main body of implementing photoresist coating and developing, the process of photoresist coating generally includes that silicon chip is placed in gluing developing machine, and photoresist nozzle of gluing developing machine is sprayed on the surface of silicon chip, and the photoresist on silicon chip is evenly coated by the rotation of silicon chip.

[0003] In the prior art, the gap of the gluing developing machine used does not have good cleaning measures for the nozzle, and the glue attached to the nozzle will cause partial blockage of the nozzle after drying, thereby affecting the uniformity of the gluing developing machine, and in the prior art, during the centrifugation of the silicon wafer, the excess photoresist is thrown to the side wall of the gluing cavity by centrifugal force, and the photoresist on the side wall of the gluing cavity accumulates more and more. SUMMARY

[0004] The utility model aims at providing a kind of gluing developing machine that can be even glued to solve the problems raised in the above background.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of gluing developing machine that can be even glued, including developing machine, installation cavity is equipped on the developing machine, nozzle is equipped on the developing machine, the nozzle is correspondingly arranged with installation cavity, fixed mounting is fixedly installed on the nozzle, the fixed mounting is equipped with scraper, the scraper is rotatably connected with the fixed mounting by pivot, the upper surface of the scraper is attached to the nozzle, brush head is equipped above the fixed mounting, the brush head is correspondingly arranged with the scraper, the brush head is slidably connected with the fixed mounting by sliding block, second slide rod is fixedly installed in the fixed mounting, second cam is rotatably installed in the fixed mounting, the second cam is attached to the sliding block, protective film is equipped in the installation cavity, two groups of installation rods are rotatably installed in the installation cavity and are symmetrically distributed, the two ends of the protective film are wound on the two groups of installation rods respectively, two groups of card racks are rotatably installed in the installation cavity and are symmetrically distributed.

[0006] As a further preferred embodiment of the present technical solution, a second gear is provided on the scraper, a second rack is provided in the fixed mounting, the second rack is slidably connected with the fixed mounting, the second rack is connected with the second gear, the brush head is slidably connected with the second slide rod, a second spring is provided on the second slide rod, and the two ends of the second spring are fixedly connected with the brush head and the fixed mounting respectively.

[0007] As a further preferred of the technical solution, the installation cavity is fixedly installed with a limiting rail, the protective film is slidably connected with the installation cavity through the limiting rail, two groups of the installation rods are sleeved with driven wheels, and a driving wheel is rotatably installed in the installation cavity and is meshedly connected with the two groups of driven wheels.

[0008] As a further preferred of the technical solution, the two groups of clamping frames are correspondingly arranged with the two groups of installation rods, two groups of symmetrical cleaning brushes are slidably installed on the clamping frame, the cleaning brushes are attached to the surface of the protective film, a first sliding rod is fixedly installed in the clamping frame, a first spring is sleeved on the first sliding rod, a first cam is rotatably installed in the clamping frame, the cleaning brush is slidably sleeved with the first sliding rod, the two ends of the first spring are fixedly connected with the cleaning brush and the clamping frame respectively, and the first cam is attached to the cleaning brush.

[0009] As a further preferred of the technical solution, a first gear is sleeved on the clamping frame, a first rack is arranged in the installation cavity and is slidably connected with the installation cavity, and the first rack is meshedly connected with the first gear.

[0010] As a further preferred of the technical solution, two groups of symmetrical abrasive belts are arranged on the clamping frame, the two groups of abrasive belts are correspondingly arranged with the two groups of cleaning brushes respectively, the two groups of abrasive belts are attached to the surface of the cleaning brush respectively, two groups of transmission shafts are arranged at the two ends of the two groups of abrasive belts, and the transmission shafts are rotatably connected with the installation cavity.

[0011] As a further preferred of the technical solution, two groups of symmetrical transmission wheels are sleeved on the transmission shafts, two groups of symmetrical transmission belts are sleeved on the transmission shafts, the transmission belts are transmissionally connected with the two groups of transmission wheels respectively, and the two groups of transmission belts are fixedly connected with the two groups of abrasive belts respectively.

[0012] The utility model provides a gluing developing machine of even gluing, has the following beneficial effect:

[0013] (1) the utility model discloses a scraper cooperation brush head realizes the cleaning of the outlet below the spray head and the closure of the spray head when not using, avoids the partial blockage of the spray head caused by the dryness of the photoresist in the spray head, and then the uniform gluing effect of the gluing machine is affected, and the photoresist adhered to the scraper is cleaned through the brush head, and the good cleaning and occlusion effect of the scraper on the spray head are maintained.

[0014] (2) the utility model discloses a protective film realizes the protection of the photoresist accumulation of the inner wall of the installation cavity, avoids the influence caused by the continuous accumulation of the photoresist on the inner wall of the installation cavity on the use of the gluing developing machine, and the conversion and cleaning of the protective film are realized through the clamping frame and the cleaning brush, and the accumulation of the photoresist on the protective film is also effectively avoided. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the overall structure schematic view of the utility model;

[0016] Figure 2 It is the structure schematic view of the protective film of the utility model;

[0017] Figure 3 It is the structure schematic view of the card frame of the utility model;

[0018] Figure 4 It is the structure schematic view of the utility model; Figure 3 The structure enlarged view of A place;

[0019] Figure 5 It is the structure schematic view of the fixed frame of the utility model;

[0020] Figure 6 It is the structure schematic view of the utility model; Figure 5 The structure enlarged view of B place;

[0021] In the drawing: 1, developing machine; 2, installation cavity; 3, protective film; 4, limiting rail; 5, installation rod; 6, driven wheel; 7, driving wheel; 8, card frame; 9, first gear; 10, first rack; 11, cleaning brush; 12, first sliding rod; 13, first spring; 14, first cam; 15, transmission shaft; 16, transmission wheel; 17, transmission belt; 18, abrasive belt; 19, spray head; 20, fixed frame; 21, scraper; 22, second gear; 23, second rack; 24, brush head; 25, second sliding rod; 26, sliding block; 27, second spring; 28, second cam. DETAILED DESCRIPTION

[0022] The technical scheme in the utility model embodiment will be clearly and completely described below with the drawings in the utility model embodiment.

[0023] The utility model provides technical scheme: such as Figure 1 , Figure 5 and Figure 6As shown, in this embodiment, a uniform gluing and developing machine 1, including a developing machine 1, an installation cavity 2 is arranged above the developing machine 1, a spray head 19 is arranged above the developing machine 1, the spray head 19 is arranged corresponding to the installation cavity 2, a fixed frame 20 is fixedly installed on the spray head 19, the fixed frame 20 is provided with a scraper 21, the scraper 21 is rotatably connected with the fixed frame 20 through a rotating shaft, the upper surface of the scraper 21 is attached to the spray head 19, a brush head 24 is arranged above the fixed frame 20, the brush head 24 is arranged corresponding to the scraper 21, the brush head 24 is slidably connected with the fixed frame 20 through a sliding block 26, a second sliding rod 25 is fixedly installed in the fixed frame 20, a second cam 28 is rotatably installed in the fixed frame 20, the second cam 28 is attached to the sliding block 26, a protective film 3 is arranged in the installation cavity 2, two groups of symmetrically distributed installation rods 5 are rotatably installed in the installation cavity 2, the two ends of the protective film 3 are wound around the two groups of installation rods 5, two groups of symmetrically distributed clamping frames 8 are rotatably installed in the installation cavity 2, when the spray head 19 is not used, the sliding of the second rack 23 in the fixed frame 20 is started to drive the deflection of the scraper 21, cooperating with the second gear 22 to make the scraper 21 deflect until the scraper 21 is attached to the spray head 19 directly below, completing the occlusion protection of the spray head 19, avoiding the direct contact of the residual photoresist in the spray head 19 with the air to cause partial dryness, affecting the uniform gluing of the spray head 19, at the same time, when the spray head 19 is used again, the reciprocal swing of the scraper 21 below the spray head 19 can be realized through the repeated sliding of the second rack 23 cooperating with the second gear 22, the residual glue on the spray head 19 is cleaned, reducing the influence of the residual glue on the spray head 19 on the uniform gluing of the spray head 19, the second gear 22 is sleeved on the scraper 21, the second rack 23 is slidably connected with the fixed frame 20, the second rack 23 is meshingly connected with the second gear 22, the brush head 24 is slidably sleeved with the second sliding rod 25, the second sliding rod 25 is sleeved with a second spring 27, the two ends of the second spring 27 are fixedly connected with the brush head 24 and the fixed frame 20 respectively, the glue bonded on the scraper 21 is cleaned after the scraper 21 is aligned with the brush head 24, the rotation of the second cam 28 is started by the motor in the fixed frame 20 to intermittently push the sliding block 26 and the brush head 24, and the brush head 24 is vibrated left and right under the action of the second spring 27 to rub with the scraper 21, and the glue on the scraper 21 is cleaned.

[0024] As Figure 2 , Figure 3 and Figure 4As shown, the mounting cavity 2 is fixedly mounted with a limiting rail 4, the protective film 3 is slidably connected with the mounting cavity 2 through the limiting rail 4, the two groups of mounting rods 5 are sleeved with driven wheels 6, the mounting cavity 2 is rotatably mounted with a driving wheel 7, the driving wheel 7 is meshingly connected with the two groups of driven wheels 6, the silicon wafer located inside in the use process of the mounting cavity 2 will not be directly bonded on the inner wall of the mounting cavity 2 under the action of the protective film 3 in the centrifugal process of the excess photoresist, effectively avoiding the pollution of the photoresist to the mounting cavity 2, the protective film 3 is replaced after a period of use, the motor in the mounting cavity 2 is started to drive the rotation of the driving wheel 7, cooperated with the two groups of driven wheels 6 to realize the rotation of the two groups of mounting rods 5, and then realize the transmission and conversion of a part of the protective film 3 on the limiting rail 4, so that the protective film 3 bonded with the glue after use is replaced, the two groups of clamping frames 8 are correspondingly arranged with the two groups of mounting rods 5, the clamping frame 8 is slidably mounted with two groups of symmetrically distributed cleaning brushes 11, the cleaning brush 11 is attached to the surface of the protective film 3, the clamping frame 8 is fixedly mounted with a first sliding rod 12, the first sliding rod 12 is sleeved with a first spring 13, the clamping frame 8 is rotatably mounted with a first cam 14, the cleaning brush 11 is slidably sleeved with the first sliding rod 12, the two ends of the first spring 13 are fixedly connected with the cleaning brush 11 and the clamping frame 8 respectively, the first cam 14 is attached to the cleaning brush 11, in the transmission process of the protective film 3, the motor in the clamping frame 8 is started to drive the rotation of the first cam 14, cooperated with the first spring 13 to make the cleaning brush 11 vibrate up and down on the first sliding rod 12, and rub with the protective film 3, complete the cleaning of the residual photoresist on the protective film 3, the first gear 9 is sleeved on the clamping frame 8, the first rack 10 is arranged in the mounting cavity 2, the first rack 10 is slidably connected with the mounting cavity 2, the first rack 10 is meshingly connected with the first gear 9, after a period of use of the cleaning brush 11, the cylinder is started to drive the sliding of the first rack 10, cooperated with the first gear 9 to realize the rotation of the clamping frame 8 and the conversion of the two groups of cleaning brushes 11, the cleaning brush 11 bonded with the photoresist is correspondingly converted with the abrasive belt 18, the clamping frame 8 is provided with two groups of symmetrically distributed abrasive belts 18, the two groups of abrasive belts 18 are correspondingly arranged with the two groups of cleaning brushes 11, the two groups of abrasive belts 18 are attached to the surface of the cleaning brush 11 respectively, the two ends of the two groups of abrasive belts 18 are provided with two groups of transmission shafts 15, the transmission shaft 15 is rotatably connected with the mounting cavity 2, the motor is started to drive the rotation of the transmission shaft 15, cooperated with the transmission belt 17 and the transmission wheel 16 to realize the transmission of the two groups of abrasive belts 18, the abrasive belt 18 in the transmission process rubs with the cleaning brush 11, completes the cleaning of the photoresist adhered on the cleaning brush 11, the transmission shaft 15 is sleeved with two groups of symmetrically distributed transmission wheels 16, the transmission shaft 15 is sleeved with two groups of symmetrically distributed transmission belts 17, the transmission belt 17 is meshingly connected with the two groups of transmission wheels 16 respectively, the two groups of transmission belts 17 are fixedly connected with the two groups of abrasive belts 18.

[0025] The utility model provides a kind of even glue spreading's glue spreading developing machine 1, specific working principle is as follows: when not using spray head 19, start the cylinder in fixed frame 20 to drive the sliding of second rack 23, cooperate second gear 22 to make that squeegee 21 deflect, until squeegee 21 and spray head 19 directly below adhere, complete for the occlusion protection of spray head 19, avoid the dryness caused by the direct contact of residual photoresist in spray head 19 with air, influence the even glue spreading of spray head 19, can be through the repeated sliding of second rack 23 cooperate second gear 22 to make that squeegee 21 reciprocating swing below spray head 19 when reusing spray head 19, residual glue on spray head 19 is cleaned, reduce the influence of glue remaining on spray head 19 on the even glue spreading of spray head 19, the glue of bonding on squeegee 21, after squeegee 21 and brush head 24 alignment, start the motor in fixed frame 20 to drive the rotation of second cam 28, intermittently push slider 26 and brush head 24, and make brush head 24 vibrate left and right under the action of second spring 27, and squeegee 21 is rubbed mutually, and the glue on squeegee 21 is cleaned, in the use process of installation cavity 2, the photoresist of the excess of silicon chip in centrifugation in inside is not directly bonded on the inner wall of installation cavity 2 under the action of protective film 3, effectively avoid the pollution of photoresist to installation cavity 2, after protective film 3 is used for a period of time, start the rotation of driving wheel 7 in the motor in installation cavity 2, cooperate two groups of driven wheels 6 to realize the rotation of two groups of mounting rods 5, further realize the transmission and conversion of a part of protective film 3 on limiting rail 4, so that the protective film 3 that has been used and bonded with glue is replaced, during the transmission of protective film 3, start the rotation of first cam 14 in the motor in card holder 8, cooperate first spring 13 to make that cleaning brush 11 vibrates up and down on first slide rod 12, and is rubbed mutually with protective film 3, complete the cleaning of residual photoresist on protective film 3, after a period of time of using one group of cleaning brush 11, start the sliding of first rack 10 by cylinder, cooperate first gear 9 to realize the rotation of card holder 8 and the conversion of two groups of cleaning brush 11, the cleaning brush 11 bonded with photoresist is corresponding with abrasive belt 18 after conversion, start the rotation of transmission shaft 15 by motor, cooperate transmission belt 17 and transmission wheel 16 to realize the transmission of two groups of abrasive belt 18, abrasive belt 18 is rubbed mutually with cleaning brush 11 during transmission process, complete the cleaning of photoresist adhered on cleaning brush 11.

[0026] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A uniform gluing and developing machine (1) comprising a developing machine (1), characterized in that: The developing machine (1) is provided with an installation cavity (2) above it, a spray head (19) is provided above the developing machine (1), the spray head (19) is correspondingly arranged with the installation cavity (2), a fixed frame (20) is fixedly installed on the spray head (19), the fixed frame (20) is provided with a scraper (21), the scraper (21) is rotatably connected with the fixed frame (20) through a rotating shaft, the upper surface of the scraper (21) is attached to the spray head (19), a brush head (24) is provided above the fixed frame (20), the brush head (24) is correspondingly arranged with the scraper (21), the brush head (24) is slidably connected with the fixed frame (20) through a sliding block (26), a second sliding rod (25) is fixedly installed in the fixed frame (20), a second cam (28) is rotatably installed in the fixed frame (20), the second cam (28) is attached to the sliding block (26), a protective film (3) is arranged in the installation cavity (2), two groups of symmetrically distributed installation rods (5) are rotatably installed in the installation cavity (2), the two ends of the protective film (3) are wound on the two groups of installation rods (5) respectively, and two groups of symmetrically distributed clamping frames (8) are rotatably installed in the installation cavity (2).

2. The uniform gluing and developing machine (1) according to claim 1, characterized in that: A second gear (22) is sleeved on the scraper (21), a second rack (23) is arranged in the fixed frame (20), the second rack (23) is slidably connected with the fixed frame (20), the second rack (23) is meshingly connected with the second gear (22), the brush head (24) is slidably sleeved with the second sliding rod (25), a second spring (27) is sleeved on the second sliding rod (25), and the two ends of the second spring (27) are fixedly connected with the brush head (24) and the fixed frame (20) respectively.

3. The uniform gluing and developing machine (1) according to claim 1, characterized in that: A limiting rail (4) is fixedly installed in the installation cavity (2), the protective film (3) is slidably connected with the installation cavity (2) through the limiting rail (4), a driven wheel (6) is sleeved on each of the two groups of installation rods (5), and a driving wheel (7) is rotatably installed in the installation cavity (2), the driving wheel (7) is meshingly connected with the two groups of driven wheels (6) respectively.

4. The uniform gluing and developing machine (1) according to claim 1, characterized in that: The two groups of clamping frames (8) are correspondingly arranged with the two groups of installation rods (5) respectively, two groups of symmetrically distributed cleaning brushes (11) are slidably installed on the clamping frame (8), the cleaning brushes (11) are attached to the surface of the protective film (3), a first sliding rod (12) is fixedly installed in the clamping frame (8), a first spring (13) is sleeved on the first sliding rod (12), a first cam (14) is rotatably installed in the clamping frame (8), the cleaning brushes (11) are slidably sleeved with the first sliding rod (12), the two ends of the first spring (13) are fixedly connected with the cleaning brushes (11) and the clamping frame (8) respectively, and the first cam (14) is attached to the cleaning brushes (11).

5. The uniform gluing and developing machine (1) according to claim 1, characterized in that: A first gear (9) is sleeved on the clamping frame (8), a first rack (10) is arranged in the installation cavity (2), the first rack (10) is slidably connected with the installation cavity (2), and the first rack (10) is meshingly connected with the first gear (9).

6. The uniform gluing and developing machine (1) according to claim 4, characterized in that: Two groups of sand belts (18) are symmetrically arranged on the card frame (8), and two groups of cleaning brushes (11) are arranged correspondingly.

7. A uniform gluing and developing machine (1) according to claim 6, characterized in that: Two groups of transmission shafts (15) are arranged at the two ends of the two groups of sand belts (18). The transmission shaft (15) is rotatably connected with the mounting cavity (2). Two groups of transmission belts (17) are symmetrically arranged on the transmission shaft (15). The transmission belt (17) is rotatably connected with the two groups of transmission wheels (16). The two groups of transmission belts (17) are fixedly connected with the two groups of sand belts (18).

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