Cooling water adjusting device of cutting machine

Abstract

The utility model discloses a cooling water adjusting device of a cutting machine, which belongs to the technical field of semiconductors and comprises a supporting base, an adjusting base and an adjusting seat, the bottom of the adjusting seat is connected with a water spraying pipe, and the adjusting base is connected with the adjusting seat through an adjusting bolt. A distance sensor for detecting the displacement of the adjusting bolt is arranged on the adjusting base and is connected with a controller through an analog-to-digital converter. After different sizes of grinding wheel knives or flanges are replaced, the height (the adjusting displacement of the water spraying pipe) needing to be lifted by the current adjusting seat is obtained through the controller, the adjusting bolt is rotated to drive the adjusting seat to ascend and descend, the adjusting range is large, and the adjusting precision is high; the distance sensor detects and displays the lifting height of the adjusting seat in real time so as to prompt whether the adjusting bolt rotates to a target position or not, tools such as a ruler do not need to be used for auxiliary measurement, and the working efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a cooling water regulating device for a cutting machine. Background Technology

[0002] In the field of semiconductor technology, thousands or even tens of thousands of chips are typically connected together on a single wafer, with gaps between them called dicing kerfs. Dicing or cutting separates each chip with its own independent electrical properties by cutting along these dicing kerfs is called dicing or cutting. Abrasive wheel cutting is a mainstream cutting technology due to its low equipment and consumable costs, mature technology, and high cost-effectiveness, resulting in a relatively high market share.

[0003] In abrasive wheel cutting, the abrasive wheel cutter rotates at 30,000 to 60,000 revolutions per minute to cut the wafer's kerf. Simultaneously, the worktable carrying the wafer moves linearly at a constant speed along the tangential direction of the contact point between the blade and the wafer. This back-and-forth motion separates the chips on the wafer one by one. During the cutting process, the primary purpose of the cutting water is to cool and clean the high-speed abrasive wheel cutter, while also flushing away the debris generated during wafer cutting to prevent debris residue from contaminating the wafer. Therefore, the location of the cutting cooling water (the position of the water spray pipes) is particularly important. Changing the size of the abrasive wheel cutter or flange requires adjusting the water spray position. In actual production, the cutting cooling water device, such as... Figure 1 As shown, the device includes a support base 1', with an adjustment base 2' above it. The cutting cooling water device also includes an adjustment seat 3', which is fixed to the support base 1' by two first locking screws 61' and a second locking screw 62'. A water spray pipe 8' is connected to the bottom of the adjustment seat 3'. The position of the cooling water (the position of the water spray pipe) is fixed and adjusted only by two screws, i.e., by the first locking screw 61' or the second locking screw 62', thereby adjusting the position of the water spray pipe 8'. The adjustment range is only 1.5–5 mm; the adjustment space is small and the adjustment accuracy is low. Improper position adjustment can lead to reduced product cutting quality and decreased grinding wheel life, affecting cutting yield; in severe cases, the water spray pipe may scratch the wafer, causing wafer scrapping, or collide with critical components such as the equipment flange or spindle, resulting in damage to spare parts and equipment downtime, causing significant losses. Furthermore, after changing to different sized grinding wheels or flanges, a ruler is needed to measure and adjust the distance, resulting in low work efficiency. Utility Model Content

[0004] The purpose of this invention is to overcome the problems of the prior art and provide a cooling water regulating device for a cutting machine.

[0005] The purpose of this utility model is achieved through the following technical solution: a cooling water regulating device for a cutting machine, the regulating device includes a support base, an regulating base and an regulating seat, the regulating base is located above the support base, the bottom of the regulating seat is connected to a water spray pipe, the regulating base and the regulating seat are connected by an adjusting bolt, the tail of the adjusting bolt is rotatably connected to the regulating seat, and the adjusting bolt is threadedly connected to the regulating base.

[0006] A distance sensor is installed on the adjustment base, located below the adjustment bolt. The distance sensor is connected to the controller via an analog-to-digital converter. The output of the controller is connected to a display, and the input of the controller is connected to an input module.

[0007] In one example, the surface of the adjusting bolt has an operating groove.

[0008] In one example, the adjustment seat is fixed to the support base via one or more first fixing structures.

[0009] In one example, the first fixing structure is a locking screw, the adjusting seat is provided with a plurality of vertically distributed first threaded holes, and the supporting base is provided with a plurality of corresponding second threaded holes, the first threaded holes and the second threaded holes being matched and connected with the locking screw.

[0010] In one example, the adjusting seat has a stepped U-shaped groove, and the support base has several second threaded holes in the vertical direction. The total height of the multiple second threaded holes is less than the height of the U-shaped groove. The adjusting seat is connected to the second threaded holes through the U-shaped groove by one or more locking screws, and the head of the locking screw is engaged with the step of the U-shaped groove.

[0011] In one example, the adjusting seat has a mounting groove, and the first threaded holes are vertically distributed in the mounting groove.

[0012] In one example, the support base and the adjustment base are fixedly connected via one or more second fixing structures.

[0013] In one example, the second fixing structure is a locking bolt.

[0014] It should be further noted that the technical features corresponding to the above examples can be combined or substituted to form new technical solutions.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. In one example, after changing to a different size grinding wheel or flange, the input module, in conjunction with the controller, obtains the required height of the current adjusting seat (the adjustment displacement of the water spray pipe). Rotating the adjusting bolt drives the adjusting seat to rise or fall, with a large adjustment range and high adjustment accuracy. The distance sensor detects and displays the height of the adjusting seat in real time, thus indicating whether the adjusting bolt has been rotated to the target position. There is no need to use tools such as rulers for measurement, which greatly improves work efficiency.

[0017] 2. In one example, the operation is more convenient by using a screwdriver or other tools in conjunction with the operating slot to rotate the adjusting bolt.

[0018] 3. In one example, the adjustment seat and the support base are fixed by the first fixing structure, which improves the stability of the fixation and prevents the adjustment seat from shifting in space.

[0019] 4. In one example, the adjustment base and the support base are fixed by a second fixing structure, which improves the reliability of the fixing and prevents the adjustment base from swaying or shifting. Attached Figure Description

[0020] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. The accompanying drawings are provided to provide a further understanding of the present application and constitute a part of the present application. The same reference numerals are used in these drawings to denote the same or similar parts. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation of the present application.

[0021] Figure 1 A schematic diagram of an existing regulating device;

[0022] Figure 2 This is a front view of an adjustment device provided as an example of the present invention;

[0023] Figure 3 A side view of the adjustment device provided as an example of this utility model;

[0024] Figure 4 A front view of an adjustment device provided for another example of this utility model;

[0025] Figure 5 A front view of an adjustment device provided for another example of this utility model;

[0026] Figure 6 This is a top view of an adjustment device provided as an example of the present invention.

[0027] In the diagram: 1'-Support base; 2'-Adjusting base; 3'-Adjusting seat; 61'-First locking screw; 62'-Second locking screw; 8'-Water spray pipe; 1-Support base; 2-Adjusting base; 3-Adjusting seat; 4-Adjusting bolt; 5-Locking bolt; 61-First locking screw; 7-U-shaped groove; 8-Water spray pipe; 9-Slotted groove; 10-Distance sensor; 11-Water spray nozzle; 12-Grinding wheel cutter. Detailed Implementation

[0028] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] In the description of this utility model, it should be noted that the directions or positional relationships indicated by terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" are based on the directions or positional relationships shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the use of ordinal numbers (e.g., "first and second," "first to fourth," etc.) is for distinguishing objects and is not limited to this order, and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0032] In one example, a cutting machine cooling water regulating device, such as Figure 2As shown, the adjustment device includes a support base 1, an adjustment base 2, and an adjustment seat 3. The support base 1 can be fixed by a support assembly (such as a support seat). The adjustment base 2 is fixed to the surface of the support base. The bottom of the adjustment seat 3 is connected to a water spray pipe 8, and the water spray nozzles 11 on the water spray pipe 8 are aligned with the cutting edge of the grinding wheel cutter 12. Specifically, the water spray pipe 8 is an L-shaped water spray pipe 8, with multiple water spray nozzles 11 on it and the end of the water spray pipe 8 is closed. The water spray nozzles 11 are directly facing the cutting edge of the grinding wheel cutter 12 for cooling the grinding wheel cutter 12. The adjustment base 2 and the adjustment seat 3 are connected by an adjustment bolt 4, that is, the tail of the adjustment bolt 4 is rotatably connected to the adjustment seat 3, and the adjustment bolt 4 is threadedly connected to the adjustment base 2. Specifically, the tail of the adjusting bolt 4 is equipped with a ball bearing structure, including an outer ring, an inner ring, balls, and a cage. Multiple balls are positioned between the outer and inner rings and are housed on the cage. The outer ring is fixedly connected to the adjusting seat 3 (e.g., with an interference fit), and the inner ring is fixedly connected to the tail of the adjusting bolt 4 (e.g., with an interference fit). The inner ring rotates as the adjusting bolt 4 rotates. The adjusting base 2 has a through threaded hole, and the adjusting bolt 4 has a matching thread. During installation, the adjusting bolt 4 is first screwed into the adjusting base 2. The adjusting seat 3 has a blind hole adapted to the ball bearing structure. The ball bearing structure is fixed into the blind hole (the outer ring and the blind hole have an interference fit). Then, the adjusting bolt 4 is inserted into the inner ring of the ball bearing structure, achieving a rotatable connection between the tail of the adjusting bolt 4 and the ball bearing structure. Rotating the adjusting bolt 4 causes the inner ring to rotate, while the outer ring remains fixed to the adjusting seat 3. Therefore, the adjusting seat 3 will move up and down as the adjusting bolt 4 rotates.

[0033] Furthermore, a distance sensor 10 is installed on the adjustment base 2, located below the adjustment bolt 4, to collect real-time lifting and lowering information of the adjustment bolt 4. The data output interface of the distance sensor 10 is connected to an analog-to-digital converter, the data interface of the analog-to-digital converter is connected to the I / O port of the controller, and the data output port of the controller is connected to a display. The I / O port of the controller is also connected to an input module, which can be a numeric keypad, a touch screen, or a mouse, etc. After replacing the grinding wheel cutter 12 or flange with a different size, the user inputs the size of the currently replaced grinding wheel cutter 12 or flange via the input module. The controller stores the size information of different sizes of grinding wheel cutters 12 or flanges. Based on the current position of the adjusting bolt 4 fed back by the distance sensor 10, the controller calculates and outputs the target displacement range that the adjusting bolt 4 needs to rise or fall (the distance range that the water spray pipe 8 needs to move up or down after replacing the grinding wheel cutter 12 or flange with a different size) and displays it on the display. At this time, the operator only needs to rotate the adjusting bolt 4 clockwise or counterclockwise according to the target displacement range displayed on the display. During this process, the display shows the real-time displacement range of the adjusting bolt 4 until the real-time displacement range meets the target displacement range. This helps the operator to rotate the adjusting bolt 4 more intuitively, achieving high-precision raising and lowering of the adjusting seat 3, with a minimum accuracy of 0.01mm, thereby adjusting the position of the water spray pipe 8 and achieving the purpose of adjusting the water spray position. Optionally, when the real-time displacement range of the adjusting bolt 4 exceeds the target displacement range, the controller can issue an alarm prompt through the display. It should be noted that the process of the controller receiving information from the sensor and performing data processing such as lifting distance in this application is a conventional technical means for those skilled in the art and is not the content for which this utility model is sought to be protected.

[0034] In one example, the adjusting bolt 4 has an operating groove on its surface, such as a slotted slot or a Phillips head slot; in this example, a slotted slot 9 is preferred. Using a screwdriver or other tools in conjunction with the slotted slot 9 to rotate the adjusting bolt 4 makes operation more convenient.

[0035] In one example, such as Figure 3 As shown, the adjusting seat 3 has an installation groove, preferably a U-shaped groove 7.

[0036] Optionally, the adjusting seat 3 is fixed to the supporting base 1 via one or more first fixing structures. Optionally, the first fixing structure is a locking screw. The U-shaped groove 7 of the adjusting seat 3 is provided with several vertically distributed first threaded holes, and the supporting base 1 is provided with several corresponding second threaded holes. That is, both the first threaded holes and the second threaded holes are matched with the locking screw, and the distribution intervals of the first threaded holes and the second threaded holes are equal. Specifically, the distribution interval of the first threaded holes is determined according to the height difference of adjacent size grinding wheel cutters 12 or adjacent size flanges. That is, the distribution interval of the first threaded holes is the height difference (diameter difference) of adjacent size grinding wheel cutters 12 or adjacent size flanges. When changing from one size grinding wheel cutter 12 or flange to another size grinding wheel cutter 12 or flange, the adjusting seat 3 rises or falls accordingly. At this time, the first threaded hole can always be on the same horizontal line as a certain second threaded hole. At this time, the locking screw can be passed through the first threaded hole and the second threaded hole in sequence to achieve a fixed connection between the adjusting seat 3 and the supporting base 1. Preferably, the adjusting seat 3 and the supporting base 1 can be fixedly connected by multiple locking screws passing sequentially through the first threaded hole and the second threaded hole. For example... Figure 4 As shown, in this example, four first threaded holes are preferably provided at the U-shaped groove 7 position of the adjusting seat 3, and four second threaded holes are correspondingly provided on the support base 1. After the height of the adjusting seat 3 is adjusted, it can be fixed to the support base 1 by one or more locking screws. In this example, the adjusting seat 3 is fixed to the support base 1 by the first locking screw 61. Of course, when it is necessary to adjust the height of the adjusting seat 3, the locking screw should be unscrewed first so that the adjusting seat 3 can move up and down under the action of the adjusting bolt 4.

[0037] Optionally, such as Figure 5 As shown, the adjusting seat 3 has a U-shaped groove 7, preferably a stepped U-shaped groove 7. In this case, the adjusting seat 3 is fixed to the support base 1 by one or more first fixing structures. Optionally, the first fixing structure is a locking screw, and the adjusting seat 3 is fixed to the support base 1 by two locking screws. At this time, the support base 1 has multiple second threaded holes in the vertical direction. The total height of the distribution of the multiple second threaded holes is less than the height of the U-shaped groove 7. In this example, four are used as an example. The distribution interval of the second threaded holes is determined according to the height difference of adjacent size grinding wheel cutters 12 or adjacent size flanges. That is, the distribution interval of the second threaded holes is the height difference (diameter difference) of adjacent size grinding wheel cutters 12 or adjacent size flanges. When the grinding wheel cutter 12 or flange is changed from one size to another size, the adjusting seat 3 rises or falls accordingly (the adjusting seat is at the target height). At this time, after the two locking screws 61 are connected to the second threaded holes through the stepped U-shaped groove 7, the adjusting seat can be kept at the target height, and the head of the locking screw (or nut) can be locked on the step of the U-shaped groove 7, thereby further fixing the adjusting seat.

[0038] In one example, the support base and the adjusting base 2 are fixedly connected via one or more second fixing structures. Optionally, as... Figure 6 As shown, the second fixing structure is the locking bolt 5. In this example, the support base and the adjusting base 2 are fixedly connected by two locking bolts 5.

[0039] Combining the above examples yields a preferred embodiment of this utility model. In this embodiment, the adjustment device includes a support base 1, an adjustment base 2, and an adjustment seat 3. The adjustment base 2 is positioned above the support base. A water spray pipe 8 is connected to the bottom of the adjustment seat 3. The adjustment base 2 and the adjustment seat 3 are connected by an adjustment bolt 4. The tail of the adjustment bolt 4 is rotatably connected to the adjustment seat 3, and the adjustment bolt 4 is threadedly connected to the adjustment base 2. A distance sensor 10 is provided on the adjustment base 2, located below the adjustment bolt 4. The distance sensor 10 is connected to a controller via an analog-to-digital converter. The output of the controller is connected to a display, and the input of the controller is connected to an input module. Preferably, a slot 9 is formed on the surface of the adjustment bolt 4. The adjustment seat 3 is fixed to the support base 1 by multiple locking screws. A U-shaped groove 7 is formed on the adjustment seat 3, and multiple first threaded holes are vertically distributed in the mounting groove. The support base and the adjustment base 2 are fixedly connected by two locking bolts 5. If the 2-inch grinding wheel 12 is replaced with a 3-inch grinding wheel 12, the operation is as follows:

[0040] First, input "3-inch grinding wheel cutter 12" through the input module, and then the display will show the water spray position range of the 3-inch grinding wheel cutter 12.

[0041] Next, loosen the two locking screws on the adjusting seat 3;

[0042] Rotate the slot 9 of the adjusting bolt again and observe the display number of the water spray position of the water spray pipe 8 on the monitor. Stop adjusting when it reaches the range corresponding to the 3-inch blade.

[0043] Next, tighten the locking screw of the adjusting seat 3. At this point, the adjustment of the water spray position of the water spray pipe 8 is completed.

[0044] The above detailed embodiments are a description of the present utility model. It should not be considered that the specific embodiments of the present utility model are limited to these descriptions. For those skilled in the art, several simple deductions and substitutions can be made without departing from the concept of the present utility model, and all of these should be considered to fall within the protection scope of the present utility model.

Claims

1. A cooling water regulating device for a cutting machine, the device comprising a support base (1), an regulating base (2), and an regulating seat (3), wherein the regulating base (2) is disposed above the support base, and a water spray pipe (8) is connected to the bottom of the regulating seat (3), characterized in that: The adjusting base (2) and the adjusting seat (3) are connected by adjusting bolts (4). The tail of the adjusting bolt (4) is rotatably connected to the adjusting seat (3), and the adjusting bolt (4) is threadedly connected to the adjusting base (2). A distance sensor (10) is provided on the adjustment base (2). The distance sensor (10) is located below the adjustment bolt (4). The distance sensor (10) is connected to the controller via an analog-to-digital converter. The output end of the controller is connected to a display, and the input end of the controller is connected to an input module.

2. The cooling water regulating device for a cutting machine according to claim 1, characterized in that: The adjusting bolt (4) has an operating groove on its surface.

3. The cooling water regulating device for a cutting machine according to claim 1, characterized in that: The adjusting seat (3) is fixed to the supporting base (1) by one or more first fixing structures.

4. The cooling water regulating device for a cutting machine according to claim 3, characterized in that: The first fixing structure is a locking screw. The adjusting seat (3) is provided with several vertically distributed first threaded holes, and the supporting base (1) is provided with several second threaded holes. The first threaded holes and the second threaded holes are matched and connected with the locking screw.

5. The cooling water regulating device for a cutting machine according to claim 3, characterized in that: The adjusting seat (3) has a stepped U-shaped groove (7), and the supporting base (1) has several second threaded holes in the vertical direction. The total height of the multiple second threaded holes is less than the height of the U-shaped groove (7). The adjusting seat (3) is connected to the second threaded holes through the U-shaped groove (7) by one or more locking screws (61), and the head of the locking screw (61) is engaged on the step of the U-shaped groove (7).

6. The cooling water regulating device for a cutting machine according to claim 1, characterized in that: The adjusting seat (3) has an installation groove, and the first threaded hole is vertically distributed in the installation groove.

7. The cooling water regulating device for a cutting machine according to claim 1, characterized in that: The support base and the adjustment base (2) are fixedly connected by one or more second fixing structures.

8. The cooling water regulating device for a cutting machine according to claim 7, characterized in that: The second fixing structure is a locking bolt (5).

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