Double-sided vacuum coating system
By designing a double-sided vacuum coating system with a linear structure and independent cooling chamber, the problems of large footprint and low efficiency in existing technologies have been solved, enabling efficient processing of cleaning, coating, and cooling of two workpieces.
Patent Information
- Application Number
- CN202423086297.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-12
- Publication Date
- 2025-12-09
- Estimated Expiration
- 2034-12-12
AI Technical Summary
Existing vacuum coating systems occupy a large space, can only process one workpiece per workflow, have a slow processing pace, and are inefficient.
Design a double-sided vacuum coating system, including a first cooling chamber, a first process chamber, a second process chamber, and a second cooling chamber that are sequentially sealed and connected. One of the two process chambers also serves as a cleaning chamber. An independent cooling chamber and a conveying assembly are configured to achieve cleaning, coating, and cooling of two workpieces. A linear structure is adopted to improve efficiency.
It enables efficient processing of cleaning, coating, and cooling of two workpieces, improving coating efficiency and shortening workpiece processing time.
Smart Images
Figure CN223646611U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vacuum coating technology, and in particular to a double-sided vacuum coating system. Background Technology
[0002] Vacuum coating technology refers to the deposition of elements or oxides in vapor form onto a substrate under vacuum conditions using physical vapor deposition (PVD) to form a desired film layer on the substrate surface. It is widely used in photovoltaic, electronics, and semiconductor technologies. During the coating process, the heat generated by the reaction can cause the workpiece temperature to become excessively high, leading to wrinkles, deformation, cracking, or even peeling of the film layer on the substrate, thus affecting the coating quality.
[0003] In the prior art, the coating process includes feeding, cleaning, coating, cooling and discharging. Correspondingly, the coating system includes a feeding chamber, a cleaning chamber, a cooling device or cooling chamber, a coating process chamber and a discharging chamber. The equipment of this coating system occupies a large space, and in terms of the coating process, a single workflow can usually only process one workpiece, resulting in a slow processing pace and low efficiency. Utility Model Content
[0004] In view of the problems of the prior art, this application provides a double-sided vacuum coating system to improve the efficiency of workpiece processing.
[0005] The double-sided vacuum coating system provided in this application includes a first cooling chamber, a first process chamber, a second process chamber, and a second cooling chamber that are sequentially sealed and connected. The second process chamber is used to coat a first workpiece, and the first process chamber is used to coat a second workpiece. The first cooling chamber has an inlet and outlet for workpieces entering and exiting the double-sided vacuum coating system. The first cooling chamber is used to receive and cool a second workpiece from the first process chamber that exceeds a preset temperature during the coating process, and the second cooling chamber is used to receive and cool a first workpiece from the second process chamber that exceeds a preset temperature during the coating process. One of the first process chamber and the second process chamber is provided with an ion source to also serve as a cleaning chamber for cleaning workpieces. The double-sided vacuum coating system is also provided with a conveying assembly for conveying workpieces back and forth between the chambers.
[0006] Several alternative methods are provided below, but they are not intended as additional limitations on the overall solution above. They are merely further additions or optimizations. Provided there are no technical or logical contradictions, each alternative method can be combined individually with respect to the overall solution above, or multiple alternative methods can be combined with each other.
[0007] Optionally, the ion source is located in the first process chamber and is disposed adjacent to the second process chamber.
[0008] Optionally, the ion sources are arranged in pairs and distributed on the left and right sides along the workpiece movement direction.
[0009] Optionally, a first valve is provided at the sealing connection between the first cooling chamber and the first process chamber. A first air extraction port and a second air extraction port are respectively opened on the cavity walls of the first cooling chamber and the first process chamber adjacent to the first valve. The two air extraction ports are located on the same side and are connected to a first air extraction pump.
[0010] Optionally, a second valve is provided at the sealing connection between the second cooling chamber and the second process chamber. A third air extraction port and a fourth air extraction port are respectively opened on the cavity walls of the second cooling chamber and the second process chamber adjacent to the second valve. The two air extraction ports are located on the same side and are connected to the second air extraction pump.
[0011] Optionally, each air extraction port is independently equipped with a valve to control its opening and closing.
[0012] Optionally, both the first and second cooling chambers are provided with air distribution pipes, and the air distribution pipes have air outlets for blowing air towards each workpiece.
[0013] Optionally, each cooling chamber has cooling pipes distributed along the gas flow path.
[0014] Optionally, the air distribution pipe is disposed between the workpiece and the cooling pipe.
[0015] Optionally, each process chamber has a pair of cathode assemblies staggered on both sides of the workpiece travel direction.
[0016] Compared with the prior art, the double-sided vacuum coating system provided in this application is a linear coating system. One of the two process chambers also serves as a cleaning chamber. Each process chamber is independently equipped with a cooling chamber, and the first cooling chamber also serves as a feeding chamber. This system facilitates cleaning, coating and cooling of two workpieces and has high processing efficiency. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of a double-sided vacuum coating system in one embodiment of this application;
[0018] Figure 2 This is a structural cross-sectional view of the first cooling chamber and the first process chamber in one embodiment;
[0019] Figure 3 This is a partial schematic diagram of the connection between the first cooling chamber and the first process chamber in one embodiment;
[0020] Figure 4 This is a partial view of a double-sided vacuum coating system in one embodiment;
[0021] Figure 5 This is a diagram showing the positional relationship between the second workpiece, the air distribution pipe, and the cooling pipe in one embodiment.
[0022] The annotations in the figure are explained as follows:
[0023] 101. Inlet / outlet; 102. First cooling chamber; 103. First process chamber; 104. Second process chamber; 105. Second cooling chamber; 106. Ion source; 107. First valve; 108. First exhaust port; 109. Second exhaust port; 110. First exhaust pump; 111. Second valve; 112. Third exhaust port; 113. Fourth exhaust port; 114. Second exhaust pump; 115. Third valve; 116. Fourth valve; 117. Fifth valve; 118. Sixth valve; 119. First connecting chamber; 120. Second connecting chamber; 121. Gas distribution pipe; 122. Cooling pipe; 123. First cathode assembly; 124. Second cathode assembly; 125. Conveyor wheel; 126. First workpiece; 127. Second workpiece; 128. Seventh valve; 129. Third exhaust pump; 130. Eighth valve; 131. Fourth exhaust pump. Detailed Implementation
[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0025] It should be noted that when a component is said to be "connected" to another component, it can be directly connected to the other component or it can be connected to a component in between. When a component is said to be "set on" another component, it can be directly set on the other component or it may be set to a component in between.
[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0027] See Figures 1-4This application provides a double-sided vacuum coating system, comprising a first cooling chamber 102, a first process chamber 103, a second process chamber 104, and a second cooling chamber 105, which are sequentially sealed and obliquely connected. The second process chamber 104 is used for coating a first workpiece 126, and the first process chamber 103 is used for coating a second workpiece 127. The first cooling chamber 102 has an inlet / outlet 101 for workpieces entering and exiting the double-sided vacuum coating system, serving as the sole channel for each workpiece to enter and exit the entire system. The first cooling chamber 102 receives and cools the second workpiece 127, which exceeds a preset temperature during the coating process in the first process chamber 103. The second cooling chamber 105 receives and cools the first workpiece 126, which exceeds a preset temperature during the coating process in the second process chamber 104. Furthermore, one of the first process chamber 103 and the second process chamber 104 is equipped with an ion source 106, which also serves as a cleaning chamber for cleaning the workpieces. The double-sided vacuum coating system also includes a conveying assembly for conveying workpieces back and forth between the chambers. The double-sided vacuum coating system in this embodiment is a linear coating system with two process chambers and two cooling chambers independently configured for the two process chambers, which facilitates simultaneous coating of two workpieces and timely cooling, resulting in high processing efficiency.
[0028] Furthermore, the ion source 106 is located in the first process chamber 103 and is disposed adjacent to the second process chamber 104. The ion sources 106 are arranged in pairs and distributed on the left and right sides along the workpiece travel direction, which helps to shorten the travel distance of the second workpiece 127.
[0029] See Figures 1-4A first valve 107 is provided at the sealing connection between the first cooling chamber 102 and the first process chamber 103. A first air extraction port 108 is provided on the cavity wall of the first cooling chamber 102 adjacent to the first valve 107. A second air extraction port 109 is provided on the cavity wall of the first process chamber 103 adjacent to the first valve 107. The two air extraction ports are located on the same side and are connected to a first air extraction pump 110. Air can be extracted from the first cooling chamber 102 and the first process chamber 103 respectively by a single air extraction pump. Similarly, a second valve 111 is provided at the sealing connection between the second process chamber 104 and the second cooling chamber 105. A third exhaust port 112 is provided on the wall of the second process chamber 104 adjacent to the second valve 111, and a fourth exhaust port 113 is provided on the wall of the second cooling chamber 105 adjacent to the second valve 111. The two exhaust ports are located on the same side and connected to a second exhaust pump 114. The second cooling chamber 105 and the second process chamber 104 can be evacuated by a single exhaust pump to meet the needs of the coating and cooling processes. The first valve 107 and the second valve 111 are both flap valves, and their opening directions are towards the first cooling chamber 102 and the second cooling chamber 105, respectively. Furthermore, each exhaust port is independently equipped with a valve to control its opening and closing. Specifically, the first exhaust port 108 is equipped with a third valve 115, the second exhaust port 109 is equipped with a fourth valve 116, the third exhaust port 112 is equipped with a fifth valve 117, and the fourth exhaust port 113 is equipped with a sixth valve 118. The valves can be of the type of gate valve, which is inserted radially along each extraction port to achieve closure. The first extraction pump 110 is connected to the third valve 115 and the fourth valve 116 through the first connecting cavity 119, and the second extraction pump 114 is connected to the fifth valve 117 and the sixth valve 118 through the second connecting cavity 120.
[0030] In the coating process, each process chamber needs to be evacuated. To speed up the evacuation, a fifth evacuation port is provided on the wall of the first process chamber 103, and a seventh valve 128 is configured and connected to a third evacuation pump 129. Combined with the first evacuation pump 110, the first process chamber 103 can be quickly evacuated to a low-pressure state. A sixth evacuation port is provided on the wall of the second process chamber 104, and an eighth valve 130 is configured and connected to a fourth evacuation pump 131. Combined with the second evacuation pump 114, the second process chamber 104 can be quickly evacuated to a low-pressure state.
[0031] See Figure 5In the illustrated embodiment, to effectively cool each workpiece, both the first cooling chamber 102 and the second cooling chamber 105 are equipped with air distribution pipe 121 assemblies, each with an outlet for blowing air towards the workpiece. To cool the workpieces, cooling pipes 122 are distributed along the gas flow path. For example, the air distribution pipes 121 are positioned between the workpiece and the cooling pipes 122, enabling convection within each cooling chamber. In a vacuum environment, convection is used to cool the workpieces. The gas used is nitrogen, and the cooling pipes 122 are made of metal, such as copper, and are filled with a cooling liquid.
[0032] To achieve double-sided coating of each workpiece, a pair of cathode assemblies are staggered on both sides of the workpiece travel direction in each process cavity. For example, the first process cavity 103 is provided with a pair of first cathode assemblies 123, and the second process cavity 104 is provided with a pair of second cathode assemblies 124. The staggered direction of each pair of cathode assemblies is consistent, which is beneficial to control the first workpiece 126 and the second workpiece 127 to be coated in the same direction in their respective process cavities according to the coating process requirements.
[0033] In one embodiment, the conveying assembly includes a conveyor wheel 125 and a drive mechanism, wherein the conveyor wheel is used to convey workpieces, and the drive mechanism includes a motor for driving the conveyor wheel to move, for example, changing the rotation direction of the conveyor wheel. Each chamber is independently equipped with a motor, enabling each workpiece to travel back and forth between chambers and to perform double-sided coating within the corresponding process chamber.
[0034] The double-sided vacuum coating system provided in this application is a linear coating system. The first cooling chamber 102 also serves as the feeding chamber. The production method using this double-sided vacuum coating system includes the following steps:
[0035] Cleaning stage: The first workpiece 126 is transferred from the first cooling chamber 102 to the first process chamber 103 for cleaning. The cleaning is completed when the first workpiece 126 is removed from the first process chamber 103. After cleaning, it is transferred to the initial coating position of the second process chamber 104 for standby. The second workpiece 127 is transferred from the first cooling chamber 102 to the first process chamber 103 for cleaning. The cleaning is completed when it is removed from the first process chamber 103. Then the second workpiece 127 is transferred to the initial coating position of the first process chamber 103.
[0036] Coating stage: The first workpiece 126 and the second workpiece 127 are moved in the same direction from their initial coating positions until the second workpiece 127 moves out of the first process cavity 103 and the first workpiece 126 moves out of the second process cavity 104, completing one coating cycle. See [link to documentation]. Figure 1 During the coating process, a pair of cathode components in each process chamber work simultaneously to achieve double-sided coating, resulting in high coating efficiency.
[0037] During the cleaning stage, the first process chamber 103 and the second process chamber 104 are interconnected. During the coating stage, the first cooling chamber 102, the first process chamber 103, the second process chamber 104, and the second cooling chamber 105 are interconnected, allowing the first workpiece 126 and the second workpiece 127 to move back and forth together in the entire equipment to complete multiple coatings until the film layer on both sides of each workpiece reaches the expected thickness, at which point the coating ends, and each workpiece is sequentially conveyed out from the first cooling chamber 102.
[0038] During the coating process, when the temperature of each workpiece reaches a preset temperature, the first workpiece 126 enters the second cooling chamber 105 for cooling and then returns to the second process chamber 104. The second workpiece 127 enters the first cooling chamber 102 for cooling and then returns to the first process chamber 103. Then, each workpiece continues to move in the same direction for coating. During cooling, the first cooling chamber 102 and the first process chamber 103 are isolated from each other, as are the second process chamber 104 and the second cooling chamber 105.
[0039] For each workpiece, the switching between coating and cooling processes is involved. When coating is performed in the process chamber, the process gas needs to be stabilized. For example, when the first process chamber 103 is working, the fourth valve 116 is opened, and the first vacuum pump 110 removes part of the process gas in the first process chamber 103 to maintain stable internal pressure. At this time, the first cooling chamber 102 is in a non-working state, and the third valve 115 is in a closed state. Similarly, when the second process chamber 104 is working, the fifth valve 117 is opened, and the second vacuum pump 114 removes part of the process gas in the second process chamber 104 to maintain stable internal pressure. At this time, the second cooling chamber 105 is in a non-working state, and the sixth valve 118 is in a closed state.
[0040] When each workpiece requires cooling, the first process chamber 103 and the second process chamber 104 are switched to a non-working state, their respective exhaust ports are closed, and the first valve 107 and the second valve 111 are opened. After each workpiece enters its corresponding cooling chamber, the first valve 107 and the second valve 111 are closed, and then the cooling process begins. After each workpiece has finished cooling, the first cooling chamber 102 and the second cooling chamber 105 need to be evacuated to a low pressure before the first valve 107 and the second valve 111 can be opened to connect with the corresponding process chamber.
[0041] The double-sided vacuum coating system of this application can be applied to low-temperature coating of Invar alloy surface. When the temperature is higher than the preset temperature of 80°C, the first workpiece 126 is transferred to the second cooling chamber 105 for cooling, and the second workpiece 127 is transferred to the first cooling chamber 102 for cooling. After cooling, the first workpiece 126 and the second workpiece 127 are returned to their respective process chambers and the two continue to be coated in the same direction.
[0042] This application provides a linear coating system with two process chambers, one of which also serves as a cleaning chamber. Each process chamber has an independently configured cooling chamber, and the first cooling chamber 102 also serves as a feeding chamber, which facilitates cleaning, coating, and cooling of two workpieces. This double-sided vacuum coating system has high processing efficiency.
[0043] The technical features of the embodiments described above can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered to be within the scope of this specification. When technical features of different embodiments are embodied in the same drawing, it can be regarded as the drawing also disclosing examples of combinations of the various embodiments involved.
[0044] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.
Claims
1. A double-sided vacuum coating system, characterized in that, The system includes a first cooling chamber, a first process chamber, a second process chamber, and a second cooling chamber, which are sequentially sealed and connected. The second process chamber is used to coat a first workpiece, and the first process chamber is used to coat a second workpiece. The first cooling chamber has inlet and outlet ports for workpiece entry and exit from the double-sided vacuum coating system. The first cooling chamber is used to receive and cool a second workpiece from the first process chamber that exceeds a preset temperature during the coating process, and the second cooling chamber is used to receive and cool a first workpiece from the second process chamber that exceeds a preset temperature during the coating process. One of the first and second process chambers is provided with an ion source to also serve as a cleaning chamber for cleaning the workpiece. The double-sided vacuum coating system is also provided with a conveying assembly for transporting workpieces back and forth between the chambers.
2. The double-sided vacuum coating system according to claim 1, characterized in that, The ion source is located in the first process chamber and is disposed adjacent to the second process chamber.
3. The double-sided vacuum coating system according to claim 1, characterized in that, The ion sources are arranged in pairs and distributed on the left and right sides along the direction of workpiece travel.
4. The double-sided vacuum coating system according to claim 1, characterized in that, A first valve is provided at the sealing connection between the first cooling chamber and the first process chamber. A first air extraction port and a second air extraction port are respectively opened on the cavity wall of the first cooling chamber and the first process chamber adjacent to the first valve. The two air extraction ports are located on the same side and are connected to a first air extraction pump.
5. The double-sided vacuum coating system according to claim 4, characterized in that, A second valve is provided at the sealing connection between the second cooling chamber and the second process chamber. A third air extraction port and a fourth air extraction port are respectively opened on the cavity wall of the second cooling chamber and the second process chamber adjacent to the second valve. The two air extraction ports are located on the same side and are connected to the second air extraction pump.
6. The double-sided vacuum coating system according to claim 5, characterized in that, Each air extraction port is independently equipped with a valve to control its opening and closing.
7. The double-sided vacuum coating system according to claim 1, characterized in that, Both the first and second cooling chambers are equipped with air distribution pipes, and the air distribution pipes include air outlets that blow air toward each workpiece.
8. The double-sided vacuum coating system according to claim 7, characterized in that, Cooling pipes are distributed in each cooling chamber along the path of gas flow.
9. The double-sided vacuum coating system according to claim 8, characterized in that, The air distribution pipe is disposed between the workpiece and the cooling pipe.
10. The double-sided vacuum coating system according to claim 1, characterized in that, Each process chamber has a pair of cathode assemblies staggered on both sides of the workpiece travel direction.