Vacuum coating equipment rack

Abstract

The utility model discloses a vacuum coating equipment rack, and relates to the technical field of semiconductor equipment, the vacuum coating equipment rack comprises a rack, and a functional module comprises a strong current control system and a weak current control system; the weak current control system comprises an electrical signal transmission and control device and is mounted on the other side of the rack through an independent weak point control cabinet; the pipeline is arranged along the interior of the pipeline cabinet body and is connected with the equipment cavity; functional modules are arranged in a rack, a strong current control system and a weak current control system are arranged on the left side and the right side of the outer portion of the rack respectively and installed through an independent strong current control cabinet and an independent weak current control cabinet, modularized plug-in type connecting pieces are adopted inside, and installation and maintenance are simplified; the pipeline cabinet is arranged above the control cabinet, and the pipeline is arranged in a hidden mode and connected with the equipment cavity, so that the compactness of the whole structure is improved, the problem that the layout design space utilization rate of the rack of the vacuum coating equipment is low is solved, and the layout design space utilization rate of the rack of the vacuum coating equipment can be increased.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to a vacuum coating equipment frame. Background Technology

[0002] Vacuum coating technology has been widely used in the surface treatment of metals and plastics due to its advantages such as thin coating, high speed, and good adhesion. Compared with traditional electroplating, vacuum coating has particularly outstanding advantages in environmental protection, such as no wastewater pollution. In addition, vacuum coating is also widely used in construction, electronics, and machinery manufacturing. At present, the vacuum coating equipment on the market mainly includes vacuum evaporation coating, vacuum sputtering coating, vacuum ion plating, and chemical vapor deposition (CVD) technology. CVD technology is widely used in photovoltaics, optical fiber communication, microelectronics and other fields because it can prepare high-performance coatings. All of these vacuum coating equipment require a reasonable rack layout structure, which not only helps to improve coating quality and production efficiency, but also reduces maintenance costs and extends the service life of the equipment.

[0003] Traditional vacuum coating equipment frame layouts typically consist of multiple components, including columns, beams, and bases. These components are fixed together by welding or bolting to form a stable frame structure. In order to meet the various functional requirements of vacuum coating equipment, the equipment has many parts and complex installation methods, which cannot make full use of space and waste the limited space inside the frame. At the same time, a certain amount of maintenance space needs to be reserved to ensure that operators have enough space to operate and maintain the equipment.

[0004] Therefore, we need a vacuum coating equipment rack to solve the problem of low space utilization in the layout design of vacuum coating equipment racks, which can improve the space utilization of the layout design of vacuum coating equipment racks. Utility Model Content

[0005] The purpose of this application is to solve the problem of low space utilization in the layout design of vacuum coating equipment racks. In order to solve the above problem, this application provides a vacuum coating equipment rack that can improve the space utilization in the layout design of vacuum coating equipment racks.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solution: a rack, the rack structure including multiple columns, beams and a base; functional modules are provided inside the rack, the functional modules including: a high-voltage control system and a low-voltage control system, the high-voltage control system and the low-voltage control system are respectively arranged on the left and right sides of the rack exterior; the high-voltage control system includes main power distribution and electrical switching equipment, which is installed on one side of the rack through an independent high-voltage control cabinet, the high-voltage control cabinet being provided with modular pluggable connectors; the low-voltage control system includes electrical signal transmission and controller, which is installed on the other side of the rack through an independent low-voltage control cabinet, the low-voltage control cabinet being provided with modular pluggable connectors; a pipe cabinet, the pipe cabinet is located above the high-voltage control cabinet and the low-voltage control cabinet, the pipes are arranged along the inside of the pipe cabinet and connected to the equipment cavity.

[0007] In the above technical solution, the embodiment of this application simplifies installation and maintenance by arranging functional modules within the rack, with the high-voltage control system and low-voltage control system respectively located on the left and right sides of the rack exterior and installed through independent high-voltage and low-voltage control cabinets. Modular pluggable connectors are used internally. The pipe cabinet is positioned above the control cabinet, concealing the pipes and connecting them to the equipment cavity, thus improving the overall structural compactness and solving the problem of low space utilization in the rack layout design of vacuum coating equipment.

[0008] Furthermore, according to embodiments of this application, the pipeline includes a gas pipeline and a water pipeline.

[0009] Furthermore, according to an embodiment of this application, the pipe cabinet is shielded by a cover.

[0010] Furthermore, according to an embodiment of this application, the cover is detachable.

[0011] Furthermore, according to an embodiment of this application, the column, beam, and base are connected by bolts or welding.

[0012] Furthermore, according to an embodiment of this application, the lower end of the base is provided with adjustable feet for adjusting the overall height of the frame, and the adjustable feet are connected to the base via threads.

[0013] Furthermore, according to an embodiment of this application, the central region of the rack is used to install the equipment cavity.

[0014] Furthermore, according to an embodiment of this application, the pipes are laid into the base through a pipe cabinet and connected to the equipment cavity through pipes inside the base.

[0015] Furthermore, according to the embodiments of this application, the columns are vertically arranged at the four corners of the frame as the main support structure of the frame, the crossbeams are horizontally arranged and connected between the columns, and fixed by bolts or welding, the base is located at the bottom of the frame and fixedly connected to the lower end of the columns by bolts, and is used to support the entire frame and equipment cavity.

[0016] Furthermore, according to an embodiment of this application, the high-voltage control cabinet and the low-voltage control cabinet are equipped with indicator lights, emergency stop switches and circuit breakers for centralized control of the equipment cavity.

[0017] Compared with the prior art, this application has the following beneficial effects: By arranging functional modules inside the rack, the high-voltage control system and the low-voltage control system are respectively arranged on the left and right sides outside the rack and installed through independent high-voltage control cabinets and low-voltage control cabinets. The internal modular plug-in connectors simplify installation and maintenance; the pipe cabinet is set above the control cabinet, hiding the pipes and connecting them to the equipment cavity, which improves the overall structural compactness and solves the problem of low space utilization in the rack layout design of vacuum coating equipment, thereby improving the space utilization rate of the rack layout design of vacuum coating equipment. Attached Figure Description

[0018] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 Axonometric view of a vacuum coating equipment frame Figure 1 .

[0020] Figure 2 This is a front view of the frame of a vacuum coating equipment.

[0021] Figure 3 This is a left view of the frame of a vacuum coating equipment.

[0022] Figure 4 This is a top view of the frame of a vacuum coating equipment.

[0023] Figure 5 This is a right view of the frame of a vacuum coating equipment.

[0024] Figure 6 This is a bottom view of the frame of a vacuum coating equipment.

[0025] Figure 7 Axonometric view of a vacuum coating equipment frame Figure 2 .

[0026] In the attached diagram

[0027] 1. Frame 11. Column 12. Crossbeam

[0028] 13. Base; 14. Functional Modules; 1411. High-voltage Control System

[0029] 1412, High-voltage control cabinet; 1421, Low-voltage control system; 1422, Low-voltage control cabinet

[0030] 143. Pipe cabinet; 1431. Pipe; 1432. Cover.

[0031] 15. Adjustable support legs; 2. Equipment cavity. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0033] In the description of this utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and apparatus have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0036] Example 1: As Figure 1-7 As shown, a vacuum coating equipment frame 1 includes:

[0037] The frame 1 includes multiple columns 11, crossbeams 12, and a base 13.

[0038] The rack 1 is equipped with a functional module 14, which includes a high-voltage control system 1411 and a low-voltage control system. The high-voltage control system 1411 and the low-voltage control system 1412 are respectively arranged on the left and right sides of the outside of the rack 1.

[0039] The high-voltage control system 1411 includes main power distribution and electrical switchgear, which is installed on one side of the rack 1 via an independent high-voltage control cabinet 1412. The high-voltage control cabinet 1412 is equipped with modular pluggable connectors. The low-voltage control system includes electrical signal transmission and controller, which is installed on the other side of the rack 1 via an independent low-voltage control cabinet 1422. The low-voltage control cabinet 1422 is equipped with modular pluggable connectors.

[0040] The pipe cabinet 143 is located above the power control cabinet 1412 and the low-voltage control cabinet 1422. The pipe 1431 is arranged inside the pipe cabinet 143 and connected to the equipment cavity 2. The pipe 1431 includes a gas pipe 1431 and a water pipe 1431. The pipe cabinet 143 is shielded by a cover 1432, which is removable.

[0041] The columns 11, beams 12 and base 13 are connected by bolts or welding. The columns 11 are arranged vertically at the four corners of the frame 1 as the main support structure of the frame 1. The beams 12 are arranged horizontally and connected between the columns 11 by bolts or welding. The base 13 is located at the bottom of the frame 1 and is fixed to the lower end of the columns 11 by bolts, and is used to support the entire frame 1 and the equipment cavity 2.

[0042] The lower end of the base 13 is provided with an adjustable support foot 15 for adjusting the overall height of the frame 1. The adjustable support foot 15 is connected to the base 13 by a thread.

[0043] The central area of ​​the frame is used to install the equipment cavity 2.

[0044] Pipe 1431 is laid into base 13 through pipe cabinet 143, and is connected to equipment cavity 2 through pipe 1431 inside base 13.

[0045] The control cabinet is equipped with indicator lights, emergency stop switches and circuit breakers for centralized control of equipment cavity 2.

[0046] Example 2: Figure 1-7 As shown, based on Embodiment 1, this embodiment also provides a method for using the vacuum coating equipment frame 1, including:

[0047] Assemble the uprights 11 and crossbeams 12 of the frame 1. The uprights 11 are arranged vertically at the four corners of the frame 1, and the crossbeams 12 are arranged horizontally and fixedly connected by bolts or welding. The base 13 is connected to the lower end of the uprights 11 by bolts to ensure the stability of the frame 1.

[0048] Adjust the height of the adjustable support leg 15 at the lower end of the base 13 by means of the thread.

[0049] The high-voltage control system 1411 and the low-voltage control system are respectively installed on the left and right sides of the outside of the rack 1. The high-voltage control cabinet 1412 is installed on one side of the rack 1 through a plug-in connector; the low-voltage control cabinet is also installed on the other side of the rack 1 through a plug-in connector.

[0050] The pipe cabinet 143 is installed above the power control cabinet 1412 and the low-voltage control cabinet. Gas pipes 1431 and water pipes 1431 are arranged inside the pipe cabinet 143, and the pipes 1431 connect to the equipment cavity 2 through internal routing. The cover 1432 of the pipe cabinet 143 is designed to be removable for easy daily maintenance and inspection.

[0051] By zoning the high-voltage and low-voltage control systems, electromagnetic interference is avoided, and the safety and stability of the equipment are improved. Plug-in connectors simplify the installation and maintenance process. The installation of the pipe cabinet 143 makes the pipe 1431 route more compact and concealed, reducing external exposure and facilitating later maintenance operations.

[0052] The equipment cavity 2 is installed in the middle area of ​​the frame 1, and the equipment cavity 2 is connected to the pipe cabinet 143 and the pipe 1431 in the base 13. The equipment cavity 2 is set in the middle of the frame 1 to facilitate personnel maintenance.

[0053] By arranging functional modules 14 within the rack 1, the high-voltage control system 1411 and the low-voltage control system are respectively arranged on the left and right sides outside the rack 1 and installed through independent high-voltage control cabinets 1412 and low-voltage control cabinets. The internal modular plug-in connectors simplify installation and maintenance. The pipe cabinet 143 is located above the control cabinet, concealing the pipes 1431 and connecting them to the equipment cavity 2, which improves the overall structural compactness and solves the problem of low space utilization in the layout design of the vacuum coating equipment rack 1, thereby improving the utilization rate of the layout design space of the vacuum coating equipment rack 1.

[0054] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A frame for a vacuum coating equipment, comprising: A frame, the frame structure comprising multiple columns, beams and a base; The feature is that a functional module is provided within the rack, and the functional module includes: A high-voltage control system and a low-voltage control system are respectively arranged on the left and right sides of the outside of the frame. The high-voltage control system includes main power distribution and electrical switching equipment, which is installed on one side of the rack via an independent high-voltage control cabinet. The high-voltage control cabinet is equipped with modular pluggable connectors. The low-voltage control system includes an electrical signal transmission and controller, which is installed on the other side of the rack via an independent low-voltage control cabinet. The low-voltage control cabinet is equipped with modular pluggable connectors. A pipe cabinet is installed above the power control cabinet and the low-voltage control cabinet, and pipes are arranged inside the pipe cabinet and connected to the equipment cavity.

2. The frame of a vacuum coating equipment according to claim 1, characterized in that, The pipelines include gas pipelines and water pipelines.

3. The frame of a vacuum coating equipment according to claim 1, characterized in that, The pipe cabinet is covered by a cover.

4. The frame of a vacuum coating equipment according to claim 3, characterized in that, The cover is removable.

5. The frame of a vacuum coating equipment according to claim 1, characterized in that, The column, the beam, and the base are connected by bolts or welding.

6. The frame of a vacuum coating equipment according to claim 1, characterized in that, The lower end of the base is provided with adjustable feet for adjusting the overall height of the frame. The adjustable feet are connected to the base by threads.

7. The frame of a vacuum coating equipment according to claim 1, characterized in that, The central area of ​​the frame is used to mount the equipment cavity.

8. The frame of a vacuum coating equipment according to claim 1, characterized in that, The pipes are laid into the base through the pipe cabinet, and connected to the equipment cavity through the pipes inside the base.

9. The frame of a vacuum coating equipment according to claim 1, characterized in that, The uprights are vertically arranged at the four corners of the frame, serving as the main support structure of the frame. The crossbeams are horizontally arranged and connected between the uprights by bolts or welding. The base is located at the bottom of the frame and is fixedly connected to the lower end of the uprights by bolts, serving to support the entire frame and the equipment cavity.

10. The frame of a vacuum coating equipment according to claim 1, characterized in that, The high-voltage control cabinet and the low-voltage control cabinet are equipped with indicator lights, emergency stop switches and circuit breakers for centralized control of the equipment cavity.

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