Protective evaporation device

Abstract

The utility model provides a protective evaporation device, relates to the technical field of vacuum coating equipment, and solves the technical problem that an evaporation boat is damaged or a base material is poor in the prior art. The device comprises an evaporation boat, a bearing part and a splash-proof part, the bearing part is arranged on the evaporation boat, the splash-proof part is arranged on the bearing part, a material hole for metal liquid to drop is formed in the middle of the splash-proof part, a hole formed in the bottom of the splash-proof part right faces the bearing part, and the bearing part is arranged on the bearing part. And a material flowing hole for the metal liquid to slide down is formed between the bearing part and the splash-proof part. According to the evaporation boat, the bearing part is used for bearing dripping metal liquid, and the splash-proof part is used for preventing the splashed metal liquid from scattering all around, so that the evaporation boat can be prevented from being damaged, and the problem that a base material is poor due to the splashed metal liquid can also be avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a protective evaporation device. Background Technology

[0002] When vacuum coating equipment is in operation, molten liquid metal drips onto an evaporation boat, evaporates to form a metal mist, and thus achieves coating. In existing technologies, the dripping high-temperature molten metal falls directly onto the evaporation boat. During the dripping process, the molten metal splashes, and this splashed metal may land on the substrate or the evaporation boat, causing unevenness on the surface of the substrate and the evaporation boat, forming defects such as metal particles, which affects subsequent process steps. Moreover, long-term dripping can damage the evaporation boat, affecting its performance. Utility Model Content

[0003] The purpose of this invention is to provide a protective evaporation device that solves the technical problems of damage to the evaporation boat or poor substrate quality in existing technologies. The various technical effects of the preferred solutions among the many technical solutions provided by this invention are detailed below.

[0004] To achieve the above objectives, the present invention provides the following technical solution:

[0005] The protective evaporation device provided by this utility model includes an evaporation boat, a support part, and a splash-proof part. The support part is disposed on the evaporation boat, and the splash-proof part is disposed on the support part. The splash-proof part has a material hole in the middle for the dripping of molten metal. The bottom opening of the splash-proof part is directly opposite the support part. There is a flow hole between the support part and the splash-proof part for the molten metal to slide down.

[0006] Preferably, the splash guard has a funnel-shaped structure, and the hole at the top of the splash guard is larger than the hole at the bottom.

[0007] Preferably, the support portion includes a support plate and a guide plate, one end of the guide plate is connected to the support plate, and the other end is inclined toward the evaporation boat, with the support plate facing the material hole.

[0008] Preferably, there are two guide plates, which are disposed on both sides of the support plate.

[0009] Preferably, the material hole is a circular hole, the length of the support plate is greater than or equal to the diameter of the material hole, the width of the support plate is less than the diameter of the material hole, and the material hole is formed between the material hole and the guide plate.

[0010] Preferably, the bottom of the evaporation boat is provided with grooves, which are arranged in a mesh pattern, and protruding pillars are formed between the grooves.

[0011] Preferably, the width of the trench is in the range of 3 micrometers to 5 micrometers, the depth of the trench is in the range of 2 micrometers to 3 micrometers, and the interval between adjacent trenches is in the range of 2 micrometers to 3 micrometers.

[0012] Preferably, the trench includes a first trench and a second trench, wherein there are multiple first trenches arranged in parallel to each other, and there are multiple second trenches arranged in parallel to each other, and the first trench and the second trench are arranged perpendicular to each other.

[0013] The application employs the above technical solution and has at least the following beneficial effects:

[0014] The protective evaporation device includes an evaporation boat, a support unit, and a splash guard. The support unit is disposed on the evaporation boat, and the splash guard is disposed on the support unit. The splash guard has a material hole in the middle for molten metal to drip into, and the bottom opening of the splash guard faces the support unit. There is a flow hole between the support unit and the splash guard for the molten metal to slide down. In this way, the molten metal can enter from the splash guard and drip onto the support unit, where it can catch the dripping molten metal, thus preventing the molten metal from dripping for a long time and damaging the evaporation boat. Moreover, the splash guard can prevent the splashed molten metal from scattering, thus preventing the molten metal from splashing onto other parts of the evaporation boat or the substrate, which could cause damage to the evaporation boat or defects in the substrate.

[0015] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the protective evaporation device provided in this embodiment of the utility model;

[0018] Figure 2 This is a top view schematic diagram of the protective evaporation device provided in this embodiment of the utility model;

[0019] Figure 3 yes Figure 2 Schematic diagram of the mid-section AA structure;

[0020] Figure 4 This is a three-dimensional structural diagram of the splash-proof component provided in this embodiment of the utility model, viewed from below.

[0021] Figure 5 This is a top-view three-dimensional structural diagram of the splash-proof component provided in this embodiment of the utility model.

[0022] In the diagram: 1. Evaporation boat; 2. Supporting part; 3. Splash-proof part; 4. Material hole; 5. Flow hole; 6. Supporting plate; 7. Guide plate; 8. Groove; 9. Protruding column. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] A specific embodiment of this utility model provides a protective evaporation device, combined with an appendix. Figure 1 - Appendix Figure 5 As shown, it mainly includes an evaporation boat 1, a support part 2, and a splash guard 3. The support part 2 is disposed on the evaporation boat 1 and is used to receive dripping molten metal, thereby protecting the evaporation boat 1 from damage caused by long-term dripping. The splash guard 3 is disposed on the support part 2 and has a material hole 4 in the middle for molten metal to drip. Molten metal can pass through the splash guard 3 and drip onto the support part 2. In this way, the splash guard 3 is used to receive dripping and splashing molten metal, preventing the splashing molten metal from splashing onto other parts of the evaporation boat 1 or onto the substrate, which would cause damage to the evaporation boat 1 or the substrate. The bottom opening of the splash guard 3 is directly opposite the support part 2. There is a flow hole 5 between the support part 2 and the splash guard 3 for molten metal to slide down. The dripping molten metal can flow onto the evaporation boat 1 through the flow hole 5.

[0025] In a specific embodiment of this application, the splash guard 3 has a bucket-shaped structure. The hole at the top of the splash guard 3 is larger than the hole at the bottom. This structure, which is larger at the top and smaller at the bottom, can form an inclined inner wall inside the splash guard 3. In this way, after the molten metal splashes onto the splash guard 3, it can flow down the inclined inner wall.

[0026] In some embodiments, the support portion 2 includes a support plate 6 and a guide plate 7. One end of the guide plate 7 is connected to the support plate 6, and the other end is inclined toward the evaporation boat 1. The support plate 6 is directly opposite the material hole 4. The molten metal drips onto the support plate 6 and flows along the guide plate 7 onto the evaporation boat 1.

[0027] In some embodiments, there are two guide plates 7, which are disposed on both sides of the support plate 6 to provide stable support from both sides.

[0028] In some embodiments, the material hole 4 is a circular hole, the length of the support plate 6 is greater than or equal to the diameter of the material hole 4, and the width of the support plate 6 is less than the diameter of the material hole 4, so that a flow hole 5 is formed between the material hole 4 and the guide plate 7, and the liquid metal can flow down from both sides of the support plate 6.

[0029] In some embodiments, grooves 8 are provided on the bottom of the evaporation boat 1. The grooves 8 are arranged in a mesh pattern, and protrusions 9 are formed between the grooves 8. Specifically, in this application, the width of the grooves 8 ranges from 3 micrometers to 5 micrometers, the depth of the grooves 8 ranges from 2 micrometers to 3 micrometers, and the spacing between adjacent grooves 8 ranges from 2 micrometers to 3 micrometers. This makes the evaporation boat 1 form a hydrophobic structure, thereby ensuring that the liquid metal will not enter the grooves 8 on the evaporation boat 1 due to surface tension, and the adhesion between the liquid metal and the evaporation boat 1 is reduced, so that the liquid metal can spread more quickly to the entire evaporation boat 1, ensuring the evaporation effect.

[0030] In some embodiments, the groove 8 includes a first groove and a second groove. The number of first grooves is multiple and they are arranged in parallel with each other. The number of second grooves is multiple and they are arranged in parallel with each other. The first groove and the second groove are arranged perpendicular to each other.

[0031] The width of both the first and second trenches ranges from 3 to 5 micrometers. The depth of both the first and second trenches ranges from 2 to 3 micrometers. The spacing between adjacent first trenches ranges from 2 to 3 micrometers; the spacing between adjacent second trenches also ranges from 2 to 3 micrometers.

[0032] In this utility model, the terms "one embodiment," "some embodiments," "example," "specific example," and "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0033] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A protective evaporation device, characterized in that, The device includes an evaporation boat, a support unit, and a splash guard. The support unit is disposed on the evaporation boat, and the splash guard is disposed on the support unit. The splash guard has a material hole in the middle for molten metal to drip down, and the bottom opening of the splash guard faces the support unit. There is a flow hole between the support unit and the splash guard for the molten metal to slide down.

2. The protective evaporation device according to claim 1, characterized in that, The splash guard has a funnel-shaped structure, and the hole at the top of the splash guard is larger than the hole at the bottom.

3. The protective evaporation device according to claim 1, characterized in that, The support unit includes a support plate and a guide plate. One end of the guide plate is connected to the support plate, and the other end is inclined toward the evaporation boat. The support plate is directly opposite the material hole.

4. The protective evaporation apparatus according to claim 3, characterized in that, There are two guide plates, which are arranged on both sides of the support plate.

5. The protective evaporation apparatus according to claim 3, characterized in that, The material hole is circular, the length of the support plate is greater than or equal to the diameter of the material hole, the width of the support plate is less than the diameter of the material hole, and the material hole is formed between the material hole and the guide plate.

6. The protective evaporation apparatus according to claim 1, characterized in that, The bottom of the evaporation boat is provided with grooves, which are arranged in a mesh pattern, and protruding columns are formed between the grooves.

7. The protective evaporation apparatus according to claim 6, characterized in that, The width of the trench ranges from 3 micrometers to 5 micrometers, the depth of the trench ranges from 2 micrometers to 3 micrometers, and the interval between adjacent trenches ranges from 2 micrometers to 3 micrometers.

8. The protective evaporation apparatus according to claim 6, characterized in that, The trench includes a first trench and a second trench. There are multiple first trenches arranged in parallel to each other, and there are multiple second trenches arranged in parallel to each other. The first trench and the second trench are arranged perpendicular to each other.

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