Seed crystal lifting device of crystal growth furnace and crystal growth furnace

Abstract

The utility model belongs to the technical field of single crystal growth equipment, and particularly relates to a seed crystal lifting device of a crystal growth furnace and the crystal growth furnace, the seed crystal lifting device of the crystal growth furnace comprises an upper computer, a lifting mechanism, a connecting mechanism, a weighing mechanism and a lifting mechanism, wherein the connecting mechanism is connected with the lifting mechanism, the weighing mechanism is connected with the connecting mechanism, and the lifting mechanism is connected with the weighing mechanism; the lifting mechanism and the weighing mechanism are electrically connected with the upper computer; the upper computer is configured to drive the lifting mechanism to drive the connecting mechanism to ascend and descend, and then the lifting mechanism is driven to ascend and descend. The upper computer is further configured to collect weight data of the lifting mechanism through the weighing mechanism. The upper computer is matched with the lifting mechanism to drive the lifting mechanism to lift, the lifting speed and height parameters can be accurately regulated and controlled, meanwhile, the upper computer is matched with the weighing mechanism to monitor the pulling force of the seed crystal in real time, the crystal growth defects can be effectively reduced, and the crystal quality and the yield are improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of devices used for single crystal growth, specifically relating to single crystal growth equipment, and particularly to a seed crystal pulling device and a crystal growth furnace. Background Technology

[0002] During crystal growth, traditional seed crystal pulling mechanisms have difficulty accurately measuring and controlling the changes in tension and weight during the pulling process, which cannot meet the requirements of high-precision crystal growth.

[0003] In addition, traditional seed crystal pulling mechanisms often require frequent manual intervention and adjustments during operation, which is not only labor-intensive but also makes it difficult to guarantee the consistency and accuracy of each operation.

[0004] Therefore, there is an urgent need to develop a new crystal growth furnace seed crystal pulling device and crystal growth furnace to solve the technical problem of how to controllably adjust the pulling parameters during crystal growth.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one crystal growth furnace seed crystal pulling device and a crystal growth furnace.

[0007] In a first aspect, embodiments of this disclosure provide a seed crystal pulling device for a crystal growth furnace, comprising: a host computer, a lifting mechanism, a connecting mechanism, a weighing mechanism, and a pulling mechanism; wherein the connecting mechanism is connected to the lifting mechanism, the weighing mechanism is connected to the connecting mechanism, and the pulling mechanism is connected to the weighing mechanism; the lifting mechanism and the weighing mechanism are electrically connected to the host computer; the host computer is configured to drive the lifting mechanism to move the connecting mechanism up and down, thereby moving the pulling mechanism up and down; the host computer is also configured to collect weight data of the pulling mechanism through the weighing mechanism.

[0008] In one optional embodiment, the lifting mechanism includes: a linear motion unit and a connecting arm; the linear motion unit is arranged longitudinally, the connecting arm is movably connected to the linear motion unit, and the connecting arm is connected to a connecting mechanism; the linear motion unit is electrically connected to a host computer; the host computer is configured to drive the linear motion unit to lift the connecting arm.

[0009] In one optional embodiment, the linear motion unit includes: a first servo motor, a first reducer, and a linear module; the first servo motor, the first reducer, and the linear module are sequentially connected by transmission, and the connecting arm is movably connected to the linear module; the first servo motor drives the linear module to rotate through the first reducer, thereby driving the connecting arm to move along the length direction of the linear module.

[0010] In one optional embodiment, the connecting mechanism includes: a connecting seat; the connecting seat is connected to a connecting arm, and the weighing mechanism is limited and installed in the connecting seat; the connecting seat is adapted to be raised and lowered under the drive of the connecting arm, thereby driving the weighing mechanism and the lifting mechanism to be raised and lowered.

[0011] In one optional embodiment, the weighing mechanism includes: a weighing sensor; the weighing sensor is limited and installed in a connecting seat, and the weighing sensor is electrically connected to a host computer; the host computer is further configured to collect weight data of the lifting mechanism through the weighing sensor.

[0012] In one optional embodiment, the lifting mechanism includes: a rotating unit, a rotating shaft unit, and a bellows; the rotating unit is connected to a weighing sensor, the rotating shaft unit is movably connected to the rotating unit, and the bellows is fitted onto the rotating shaft unit; the rotating unit is electrically connected to a host computer; the host computer is further configured to drive the rotating unit to rotate the rotating shaft unit.

[0013] In one optional embodiment, the rotation unit includes: a second servo motor; the second servo motor is connected to a weighing sensor and movably connected to a rotating shaft unit; the second servo motor is electrically connected to a host computer; the host computer is configured to drive the second servo motor to rotate the rotating shaft unit.

[0014] In one optional embodiment, the rotating shaft unit includes: at least one rotating shaft; one of the rotating shafts is movably connected to a second servo motor, and each of the rotating shafts is connected in sequence; the second servo motor is adapted to drive each rotating shaft to rotate.

[0015] In one optional embodiment, the rotating shaft unit further includes: a graphite rod chuck; the graphite rod chuck is connected to the rotating shaft; the graphite rod chuck is adapted to rotate with the rotating shaft.

[0016] Secondly, this disclosure also provides a crystal growth furnace, which includes: a main furnace body and a crystal growth furnace seed crystal pulling device as described above; the crystal growth furnace seed crystal pulling device is connected to the main furnace body.

[0017] The beneficial effects of this utility model are that, through the cooperation of the host computer and the lifting mechanism, the lifting mechanism can be driven to rise and fall, and the lifting parameters, namely the lifting speed and height parameters, can be precisely controlled. At the same time, the host computer and the weighing mechanism can monitor the seed crystal pulling force in real time, which can effectively reduce crystal growth defects and improve crystal quality and yield.

[0018] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 A structural diagram of a crystal growth furnace seed crystal pulling device provided in an embodiment of this disclosure;

[0022] Figure 2 This is a schematic diagram of a seed crystal pulling device for a crystal growth furnace provided in an embodiment of the present disclosure.

[0023] In the picture:

[0024] 1. Lifting mechanism; 11. Linear movement unit; 111. First servo motor; 112. First reducer; 113. Linear module; 12. Connecting arm;

[0025] 2. Connecting mechanism; 21. Connecting seat;

[0026] 3. Weighing mechanism; 31. Weighing sensor;

[0027] 4. Lifting mechanism; 41. Rotating unit; 411. Second servo motor; 42. Rotating shaft unit; 421. Rotating shaft; 422. Graphite rod chuck; 43. Bellows. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0032] like Figures 1 to 2 As shown, at least one embodiment provides a seed crystal pulling device for a crystal growth furnace, comprising: a host computer, a lifting mechanism 1, a connecting mechanism 2, a weighing mechanism 3, and a pulling mechanism 4; wherein the connecting mechanism 2 is connected to the lifting mechanism 1, the weighing mechanism 3 is connected to the connecting mechanism 2, and the pulling mechanism 4 is connected to the weighing mechanism 3; the lifting mechanism 1 and the weighing mechanism 3 are electrically connected to the host computer; the host computer is configured to drive the lifting mechanism 1 to move the connecting mechanism 2 up and down, thereby moving the pulling mechanism 4 up and down; the host computer is also configured to collect weight data of the pulling mechanism 4 through the weighing mechanism 3.

[0033] In at least one embodiment, the lifting mechanism 4 is driven to rise and fall by the upper computer in conjunction with the lifting mechanism 1, which can accurately control the lifting speed and height parameters. At the same time, the upper computer in conjunction with the weighing mechanism 3 can monitor the seed crystal pulling force in real time, which can effectively reduce crystal growth defects and improve crystal quality and yield.

[0034] In at least one embodiment, please refer to Figure 1 The lifting mechanism 1 includes: a linear motion unit 11 and a connecting arm 12; the linear motion unit 11 is arranged longitudinally, the connecting arm 12 is movably connected to the linear motion unit 11, and the connecting arm 12 is connected to the connecting mechanism 2; the linear motion unit 11 is electrically connected to a host computer; the host computer is configured to drive the linear motion unit 11 to lift the connecting arm 12.

[0035] Specifically, the linear motion unit 11, in conjunction with the connecting arm 12, can drive the lifting mechanism 4 to move linearly.

[0036] Specifically, the connecting arm 12 is arranged in a Z-shape, which can make full use of space and also ensure its own support strength.

[0037] Specifically, the connecting arm 12 is mounted on the linear motion unit 11 by means of a screw fastener.

[0038] In at least one embodiment, please refer to Figure 1 The linear motion unit 11 includes a first servo motor 111, a first reducer 112, and a linear module 113; the first servo motor 111, the first reducer 112, and the linear module 113 are sequentially connected in a transmission manner, and the connecting arm 12 is movably connected to the linear module 113; the first servo motor 111 drives the linear module 113 to rotate through the first reducer 112, thereby driving the connecting arm 12 to move along the length direction of the linear module 113.

[0039] Specifically, the linear module 113 is mounted on the base using screw fasteners.

[0040] Specifically, the base is mounted on the frame using screw fasteners.

[0041] Specifically, the first servo motor 111 and the first reducer 112 are mounted on the linear module 113 by screw fasteners.

[0042] Specifically, the first servo motor 111, in conjunction with the first reducer 112, drives the linear module 113 to run, thereby causing the connecting arm 12 to move along the length of the linear module 113.

[0043] In at least one embodiment, please refer to Figure 1 The connecting mechanism 2 includes a connecting seat 21; the connecting seat 21 is connected to the connecting arm 12, and the weighing mechanism 3 is limited and installed in the connecting seat 21; the connecting seat 21 is adapted to be raised and lowered under the drive of the connecting arm 12, thereby driving the weighing mechanism 3 and the lifting mechanism 4 to be raised and lowered.

[0044] Specifically, the connecting seat 21 has an installation cavity, and the weighing mechanism 3 is limited and installed in the installation cavity by a screw lock pair.

[0045] In at least one embodiment, please refer to Figure 1 The weighing mechanism 3 includes a weighing sensor 31; the weighing sensor 31 is limited and installed in the connecting seat 21, and the weighing sensor 31 is electrically connected to the host computer; the host computer is also configured to collect the weight data of the lifting mechanism 4 through the weighing sensor 31.

[0046] Specifically, the weighing sensor 31 supports the lifting mechanism 4, thus enabling the weighing sensor 31 to collect weight data of the lifting mechanism 4.

[0047] In at least one embodiment, please refer to Figure 1 The lifting mechanism 4 includes: a rotating unit 41, a rotating shaft unit 42, and a bellows 43; the rotating unit 41 is connected to the weighing sensor 31, the rotating shaft unit 42 is movably connected to the rotating unit 41, and the bellows 43 is fitted onto the rotating shaft unit 42; the rotating unit 41 is electrically connected to a host computer; the host computer is also configured to drive the rotating unit 41 to rotate the rotating shaft unit 42.

[0048] Specifically, the rotating unit 41 can drive the rotating shaft unit 42 to rotate.

[0049] Specifically, the corrugated pipe 43 is connected to the main furnace body.

[0050] In at least one embodiment, please refer to Figure 1 The rotating unit 41 includes: a second servo motor 411; the second servo motor 411 is connected to the weighing sensor 31 and is movably connected to the rotating shaft unit 42; the second servo motor 411 is electrically connected to the host computer; the host computer is configured to drive the second servo motor 411 to drive the rotating shaft unit 42 to rotate.

[0051] Specifically, the second servo motor 411 is fixed on the motor mounting plate.

[0052] Specifically, the second servo motor 411 is connected to the rotating shaft unit 42 via a bearing, and the bearing is fixed on the bearing mounting base, which is fixed on the connecting column, which is fixed on the connecting plate, and the connecting plate is connected to the weighing sensor 31 via a connecting block.

[0053] In at least one embodiment, please refer to Figure 1 The rotating shaft unit 42 includes: at least one rotating shaft 421; one of the rotating shafts 421 is movably connected to a second servo motor 411, and each of the rotating shafts 421 is connected in sequence; the second servo motor 411 is adapted to drive each rotating shaft 421 to rotate.

[0054] Specifically, two rotating shafts 421 are provided. Rotating shaft 421-1 is connected to the bearing through a step limit and a locking nut, and rotating shaft 421-2 is connected to rotating shaft 421-1 through a screw lock pair.

[0055] In at least one embodiment, please refer to Figure 1The rotating shaft unit 42 further includes: a graphite rod chuck 422; the graphite rod chuck 422 is connected to the rotating shaft 421; the graphite rod chuck 422 is adapted to rotate with the rotating shaft 421.

[0056] Specifically, the graphite rod chuck 422 is a component tool used in polycrystalline silicon reduction furnaces to hold silicon cores and connecting electrodes.

[0057] Based on the same inventive concept, at least one embodiment also provides a crystal growth furnace, which includes: a main furnace body and a crystal growth furnace seed crystal pulling device as described above; the crystal growth furnace seed crystal pulling device is connected to the main furnace body.

[0058] In summary, this invention, through a host computer and a lifting mechanism, drives the lifting mechanism to move up and down, enabling precise control of lifting parameters, namely lifting speed and height. Simultaneously, the host computer, in conjunction with a weighing mechanism, can monitor the seed crystal tension in real time, effectively reducing crystal growth defects and improving crystal quality and yield. It can automatically adjust lifting speed and height based on preset growth parameters and real-time monitored tension data, reducing manual intervention, improving production efficiency and product quality stability, lowering the skill requirements for operators, and adapting to the needs of large-scale industrial production. It is widely applicable to crystal growth in numerous fields such as semiconductors, optical crystals, and superconducting materials, meeting the different precision requirements of various materials.

[0059] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0060] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0061] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0062] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0063] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A seed crystal pulling device for a crystal growth furnace, characterized in that, include: The host computer, lifting mechanism (1), connecting mechanism (2), weighing mechanism (3), and lifting mechanism (4); among which The connecting mechanism (2) is connected to the lifting mechanism (1), the weighing mechanism (3) is connected to the connecting mechanism (2), and the lifting mechanism (4) is connected to the weighing mechanism (3). The lifting mechanism (1) and the weighing mechanism (3) are electrically connected to the upper electromechanical unit; The host computer is configured to drive the lifting mechanism (1) to lift the connecting mechanism (2), and in turn drive the lifting mechanism (4) to lift. The host computer is also configured to collect the weight data of the lifting mechanism (4) through the weighing mechanism (3).

2. The crystal growth furnace seed crystal pulling device as described in claim 1, characterized in that, The lifting mechanism (1) includes: a linear movement unit (11) and a connecting arm (12); The linear motion unit (11) is arranged longitudinally, the connecting arm (12) is movably connected to the linear motion unit (11), and the connecting arm (12) is connected to the connecting mechanism (2); The linear motion unit (11) is electrically connected to the host computer. The host computer is configured to drive the linear motion unit (11) to lift and lower the connecting arm (12).

3. The crystal growth furnace seed crystal pulling device as described in claim 2, characterized in that, The linear motion unit (11) includes: a first servo motor (111), a first reducer (112), and a linear module (113). The first servo motor (111), the first reducer (112), and the linear module (113) are sequentially connected in a transmission manner, and the connecting arm (12) is movably connected to the linear module (113); The first servo motor (111) drives the linear module (113) to rotate through the first reducer (112), thereby driving the connecting arm (12) to move along the length direction of the linear module (113).

4. The crystal growth furnace seed crystal pulling device as described in claim 2, characterized in that, The connecting mechanism (2) includes: a connecting seat (21); The connecting seat (21) is connected to the connecting arm (12), and the weighing mechanism (3) is limited and installed inside the connecting seat (21); The connecting seat (21) is adapted to be raised and lowered under the drive of the connecting arm (12), thereby driving the weighing mechanism (3) and the lifting mechanism (4) to be raised and lowered.

5. The crystal growth furnace seed crystal pulling device as described in claim 4, characterized in that, The weighing mechanism (3) includes: a weighing sensor (31); The weighing sensor (31) is limited and installed in the connecting seat (21), and the weighing sensor (31) is electrically connected to the upper electromechanical unit; The host computer is also configured to collect weight data of the lifting mechanism (4) via a weighing sensor (31).

6. The crystal growth furnace seed crystal pulling device as described in claim 5, characterized in that, The lifting mechanism (4) includes: a rotating unit (41), a rotating shaft unit (42), and a bellows (43). The rotating unit (41) is connected to the weighing sensor (31), the rotating shaft unit (42) is movably connected to the rotating unit (41), and the bellows (43) is fitted onto the rotating shaft unit (42); The rotating unit (41) is electrically connected to the host computer. The host computer is also configured to drive the rotating unit (41) to drive the rotating shaft unit (42) to rotate.

7. The crystal growth furnace seed crystal pulling device as described in claim 6, characterized in that, The rotating unit (41) includes: a second servo motor (411); The second servo motor (411) is connected to the weighing sensor (31), and the second servo motor (411) is movably connected to the rotating shaft unit (42); The second servo motor (411) is electrically connected to the host computer; The host computer is configured to drive the second servo motor (411) to rotate the shaft unit (42).

8. The crystal growth furnace seed crystal pulling device as described in claim 7, characterized in that, The rotating shaft unit (42) includes: at least one rotating shaft (421); One of the rotating shafts (421) is movably connected to the second servo motor (411), and each of the rotating shafts (421) is connected in sequence; The second servo motor (411) is adapted to drive each rotating shaft (421) to rotate.

9. The crystal growth furnace seed crystal pulling device as described in claim 8, characterized in that, The rotating shaft unit (42) also includes: a graphite rod chuck (422); The graphite rod chuck (422) is connected to the rotating shaft (421); The graphite rod chuck (422) is adapted to rotate following the rotating shaft (421).

10. A crystal growth furnace, characterized in that, include: The main furnace body and the crystal growth furnace seed crystal pulling device as described in any one of claims 1-9; The seed crystal pulling device of the crystal growth furnace is connected to the main furnace body.

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