Movable volatile organic compound runner anti-slip chain tool

Abstract

A movable volatile organic compound runner anti-slip chain tool includes a concentrator wheel. The rotating wheel is used for rotating the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the runner. The chain adjustment tool is coupled to the traction chain and includes a gear engaged with the traction chain, wherein the gear is movable in a horizontal direction and a vertical direction.

Description

Technical Field

[0001] This disclosure relates to a movable volatile organic compound wheel anti-slip chain tool. Background Technology

[0002] The manufacture of integrated circuits involves a variety of semiconductor processes. These processes can include thin-film deposition, etching, annealing, lithography, and many other types of processes. Semiconductor processes typically generate waste liquids. These waste liquids sometimes contain high concentrations of volatile organic compounds (VOCs). If released into the atmosphere, VOCs can cause hazards. Utility Model Content

[0003] In some embodiments of this disclosure, a movable volatile organic compound (VOC) spool anti-slip chain tool includes a concentrator wheel. The spool is used to rotate the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the spool. A chain adjustment tool is coupled to the traction chain and includes gears meshing with the traction chain, wherein the gears are movable in both horizontal and vertical directions.

[0004] In some embodiments of this disclosure, a movable volatile organic compound (VOC) spool anti-slip chain tool includes a concentrator wheel. The spool is used to rotate the concentrator wheel. A traction chain is mechanically coupled to the concentrator wheel and the spool. A chain adjustment tool is coupled to the traction chain, wherein the chain adjustment tool is used to move the traction chain up or down.

[0005] In some embodiments of this disclosure, a movable volatile organic compound (VOC) spool anti-slip chain tool includes a concentrator wheel. The spool is used to rotate the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the spool. A chain adjustment tool is coupled to the traction chain and includes a gear that meshes with the traction chain, wherein the gear is movable in both horizontal and vertical directions and meshes with the traction chain from its underside. Attached Figure Description

[0006] The various aspects of this disclosure can be best understood in conjunction with the accompanying drawings and the following detailed description. Note that, in accordance with industry standard practice, the features are not drawn to scale. In fact, for clarity of discussion, the dimensions of the features may be arbitrarily increased or decreased.

[0007] Figure 1 A block diagram of a VOC exhaust system according to some embodiments of this disclosure;

[0008] Figure 2 This is a schematic diagram of a VOC exhaust system according to some embodiments of the present disclosure;

[0009] Figure 3A , Figure 3B and Figure 3C This is a schematic diagram of a chain adjustment tool for a VOC exhaust system according to some embodiments of the present disclosure;

[0010] Figure 4 A method for operating a VOC exhaust system according to some embodiments;

[0011] Figures 5 to 9 This is a schematic diagram of a VOC exhaust system according to some embodiments, showing the various stages of operating the VOC exhaust system.

[0012] Figure 10 This is a schematic diagram of a VOC exhaust system according to some embodiments of the present disclosure.

[0013] [Symbol Explanation]

[0014] 100: VOC exhaust system

[0015] 102: Semiconductor Process

[0016] 104: VOC Concentrator Wheel

[0017] 106: Adsorption region

[0018] 108: Cooling Area

[0019] 110: Desorption area

[0020] 112, 118: Heat exchangers

[0021] 114: Exhaust chimney

[0022] 116: Desorption Fan

[0023] 120: Burner

[0024] 122, 124: Temperature sensor

[0025] 126: Control System

[0026] 128: Waste liquid

[0027] 130: Part One

[0028] 132: Part Two

[0029] 134, 136: VOC sensors

[0030] 150: Support Platform

[0031] 160: Rotary Wheel

[0032] 170: Traction chain

[0033] 200: Chain Adjustment Tool

[0034] 210: Base

[0035] 220, 240: Slide rails

[0036] 230, 260: Slider

[0037] 250, 270: Handwheel

[0038] 280: Gear

[0039] 300: Image Sensor

[0040] 1000: Method

[0041] 1700: Part

[0042] 1700A: First paragraph

[0043] 1700B: Second paragraph

[0044] D1, D2: Vertical distance

[0045] H1: Height

[0046] L1: Length

[0047] W1, W2: Width

[0048] S101, S102, S103, S104, S105: Operation Detailed Implementation

[0049] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided object. Specific examples of components and arrangements described below are used to simplify this disclosure. Of course, these are merely examples and are not intended to be limiting. For example, the following description of forming a first feature above or on a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which an additional feature is formed between the first and second features such that the first and second features do not need to be in direct contact. Furthermore, element symbols or letters may be repeated in various instances of this disclosure. This repetition is for simplicity and clarity and does not in itself specify a relationship between the various embodiments or configurations discussed.

[0050] Furthermore, for ease of description, spatial relative terms such as “below,” “under,” “below,” “above,” and “above” are used herein to describe the relationship between one element or feature and another illustrated in the figures. In addition to the orientations depicted in the figures, spatial relative terms are intended to cover different orientations of the device during use or operation. The device may be oriented in other ways (rotated 90 degrees or otherwise), and the spatial relative descriptive terms used herein may be interpreted accordingly. As used herein, “left or right,” “about,” “approximately,” or “substantially” can generally mean within 20%, 10%, or 5% of a given value or range. The values ​​given herein are approximate, meaning that the terms “left or right,” “about,” “approximately,” or “substantially” can be inferred unless explicitly stated otherwise. However, those skilled in the art will recognize that the values ​​or ranges listed throughout the description are merely examples and may decrease as integrated circuits shrink.

[0051] Figure 1 This is a block diagram of a VOC exhaust system 100 according to one embodiment. The VOC exhaust system 100 includes a concentrator wheel 104. The VOC concentrator wheel 104 includes an adsorption region 106, a cooling region 108, and a desorption region 110. The VOC exhaust system 100 further includes a heat exchanger 112, an exhaust chimney 114, a desorption fan 116, a heat exchanger 118, a burner 120, temperature sensors 122 and 124, and a control system 126.

[0052] Semiconductor process 102 generates waste liquid 128. Examples of semiconductor process 102 may include thin film deposition processes, etching processes, doping processes, annealing processes, or other thin film deposition processes. Furthermore, the scope of this disclosure is not limited to waste liquid generated by semiconductor processes. Other processes (such as thin-film transistor processes) or other processes used to form thin-film electronic devices (such as LCD screen devices and other types of devices) may result in waste liquid 128 containing VOCs. Waste liquid 128 may contain high concentrations of VOCs. It is beneficial to remove VOCs from waste liquid 128 before releasing the waste liquid into the atmosphere. VOC exhaust system 100 removes VOCs from waste liquid 128.

[0053] Waste liquid 128 is transferred to VOC concentrator wheel 104. In one embodiment, VOC concentrator wheel 104 has the shape of a large wheel with a diameter between 3m and 5m, but other diameters may be used without departing from the scope of this disclosure.

[0054] The VOC concentrator wheel 104 includes an adsorption region 106, a cooling region 108, and a desorption region 110. More precisely, the VOC concentrator wheel 104 rotates through the adsorption region 106, the cooling region 108, and the desorption region 110. This is because the VOC concentrator wheel 104 rotates slowly. The adsorption region 106, the cooling region 108, and the desorption region 110 remain stationary. The VOC concentrator wheel 104 rotates through each region. Specifically, the VOC concentrator wheel 104 rotates from the adsorption region 106 to the desorption region 110, from the desorption region 110 to the cooling region 108, and from the cooling region 108 back to the adsorption region 106.

[0055] In one embodiment, the VOC concentrator wheel 104 comprises a calcined ceramic honeycomb substrate. The honeycomb substrate may include an inorganic binder. Aluminosilicate hydrates, also known as zeolites, are embedded within the ceramic honeycomb substrate. The VOC concentrator wheel 104, having this structure and material, is capable of adsorbing VOCs from exhaust gas at low temperatures and desorbing VOCs into the exhaust gas at high temperatures. Other materials and structures may be used for the VOC concentrator wheel 104 without departing from the scope of this disclosure.

[0056] When waste liquid 128 enters VOC concentrator wheel 104 from semiconductor process 102, the first portion 130 of waste liquid 128 enters adsorption region 106. The second portion 132 of waste liquid 128 enters cooling region 108 of VOC concentrator wheel 104.

[0057] When the first portion 130 of waste liquid 128 passes through adsorption zone 106, VOCs are adsorbed onto the VOC concentrator wheel 104. Before passing through adsorption zone 106 of the VOC concentrator wheel 104, the first portion 130 of waste liquid 128 contains a high concentration of VOCs. After the first portion 130 of waste liquid 128 passes through adsorption zone 106 of the VOC concentrator wheel 104, the VOCs have been removed from the first portion 130 of waste liquid 128. Specifically, the VOCs from the first portion 130 of waste liquid 128 are adsorbed onto that portion of the VOC concentrator wheel 104 passing through adsorption zone 106.

[0058] The first portion 130 of waste liquid 128 enters the exhaust chimney 114 from the VOC concentrator wheel 104. The exhaust chimney 114 discharges the first portion 130 of waste liquid 128 into the atmosphere. Since the VOC concentrator wheel 104 has adsorbed VOCs from the first portion 130 of waste liquid 128, the first portion of waste liquid 128 is purified when it enters the atmosphere through the exhaust chimney 114.

[0059] When the second portion 132 of waste liquid 128 passes through cooling zone 108, only a very small amount of VOCs are adsorbed from the second portion 132 of waste liquid 128 onto VOC concentrator wheel 104. This is because this portion of VOC concentrator wheel 104 is relatively hot, the reason for which will be further described below. Because VOC concentrator wheel 104 is at a high temperature, a portion of VOC concentrator wheel 104 does not adsorb much VOC from the second portion 132 of waste liquid 128. As it passes through cooling zone 108, the temperature of the portion of VOC concentrator wheel 104 passing through cooling zone 108 gradually cools. The portion of VOC concentrator wheel 104 that passes through adsorption zone 106 from cooling zone 108 is sufficiently cold to adsorb VOCs from the first portion of waste liquid 128 in adsorption zone 106.

[0060] A second portion 132 of waste liquid 128 is transferred from cooling zone 108 to heat exchanger 112. Heat exchanger 112 heats the second portion 132 of waste liquid 128 to a temperature between 190°C and 230°C. As will be described in more detail below, the heated second portion 132 of waste liquid 128 enables VOC concentrator wheel 104 to desorb VOCs into the heated second portion 132 of waste liquid 128. Without departing from the scope of this disclosure, heat exchanger 112 may heat the second portion 132 of waste liquid 128 to temperatures other than those described above.

[0061] In one embodiment, heat exchanger 112 is replaced by a different type of heater. Any suitable heater can be used to heat the second portion 132 of waste liquid 128 to a temperature at which the VOC concentrator wheel 104 can desorb VOCs into the second portion 132 of waste liquid 128.

[0062] The second portion 132 of waste liquid 128 is transferred from the heat exchanger 112 to the desorption zone 110 of the VOC concentrator wheel 104. Because the second portion 132 of waste liquid 128 is at the high temperature described above, the VOC concentrator wheel 104 desorbs VOCs from itself into the second portion 132 of waste liquid 128. Therefore, VOCs adsorbed from the first portion 130 of waste liquid 128 are desorbed onto the second portion 132 of waste liquid 128.

[0063] The rotation of the VOC concentrator wheel 104 enables continuous removal of VOCs from the waste liquid 128 without the need to replace the VOC concentrator wheel 104. After VOCs are adsorbed from the first portion 130 of the waste liquid 128 at the adsorption zone 106, the rotation of the VOC concentrator wheel 104 causes the VOC-loaded portion of the VOC concentrator wheel 104 to rotate to the desorption zone 110. At the desorption zone 110, the VOC-loaded portion of the VOC concentrator wheel 104 desorbs VOCs into the second portion 132 of the waste liquid 128. The VOC concentrator wheel 104 at the desorption zone 110 is heated by the second portion 132 of the waste liquid 128. The portion of the VOC concentrator wheel 104 exiting the desorption zone 110 no longer carries VOCs because the VOCs have been desorbed onto the second portion 132 of the waste liquid 128. The heated portion of the VOC concentrator wheel 104 is cooled in the cooling zone 108 and returned to the adsorption zone 106, ready to adsorb more VOCs from the first portion 130 of the waste liquid 128. In this way, the VOC concentrator wheel 104 can operate continuously.

[0064] In one example, the VOC concentrator wheel 104 rotates at a speed between 2 revolutions per hour (rph) and 8 rph. Without departing from the scope of this disclosure, the VOC concentrator wheel 104 may rotate at speeds other than these.

[0065] Desorption fan 116 participates in the desorption process. Specifically, desorption fan 116 draws a heated second portion 132 of waste liquid 128 into the desorption zone 110 of VOC concentrator wheel 104. Therefore, the rotational speed of desorption fan 116 affects the flow rate of the second portion 132 of waste liquid 128 through VOC concentrator wheel 104 in desorption zone 110. Thus, the rotational speed of desorption fan 116 can affect the overall efficiency of VOC exhaust system 100, as will be described in further detail below. Desorption fan 116 includes control circuitry that enables control system 126 to automatically adjust the speed of desorption fan 116, as will be described in further detail below.

[0066] The second portion 132 of waste liquid 128 enters the heat exchanger 118 from the desorption fan 116. The heat exchanger 118 heats the second portion 132 of waste liquid 128.

[0067] The second portion 132 of waste liquid 128 enters the burner 120 via the heat exchanger 118. The burner 120 removes VOCs from the second portion 132 of waste liquid 128. Specifically, the burner 120 generates a high-temperature flame. This high-temperature flame causes the VOCs to oxidize. The oxidation of VOCs leads to their conversion into H2O and CO2. Therefore, at the burner 120, hazardous VOCs are converted into harmless compounds. In this way, the burner 120 completes the removal of VOCs from the waste liquid 128. In the adsorption zone 106 of the VOC concentrator wheel 104, VOCs in the first portion 130 of waste liquid 128 are removed. At the burner 120, VOCs in the second portion 132 of waste liquid 128 are removed.

[0068] In one embodiment, burner 120 operates at a temperature between 690°C and 750°C. Burner 120 may operate at other temperatures without departing from the scope of this disclosure. The temperature of burner 120 affects the overall VOC exhaust efficiency of the VOC exhaust system 100.

[0069] The purified second portion 132 of waste liquid 128 enters the heat exchanger 118 from the burner 120. The heat exchanger 118 transfers heat from the purified second portion 132 to the waste liquid 128 and heats the second portion 132 of waste liquid 128 from the desorption fan 116. This cools the purified second portion 132 of waste liquid 128, although the purified second portion 132 of waste liquid 128 remains hot after being transferred by the heat exchanger 118.

[0070] The purified second portion 132 of waste liquid 128 enters heat exchanger 112 from heat exchanger 118. Heat exchanger 112 absorbs heat from the purified second portion 132 of waste liquid 128 and heats the second portion 132 of waste liquid 128 from cooling zone 108. Therefore, the temperature transmitted to the second portion 132 of waste liquid 128 at burner 120 is used to heat the second portion 132 of waste liquid 128 in preparation for entry into desorption zone 110. As previously described, heat exchanger 112 can heat the second portion 132 of waste liquid 128 to a temperature suitable for desorbing VOCs onto VOC concentrator wheel 104.

[0071] The purified second portion 132 of waste liquid 128 enters the exhaust chimney 114 via the heat exchanger 112. The exhaust chimney 114 discharges the purified second portion 132 of waste liquid 128 into the atmosphere. In this way, the VOC exhaust system 100 removes VOCs from the waste liquid 128 of the semiconductor process 102.

[0072] VOC exhaust system 100 includes VOC sensors 134 and 136. VOC sensor 134 monitors the VOC concentration in waste liquid 128 before the VOC exhaust system 100 removes any VOCs. VOC sensor 136 monitors the VOC concentration in waste liquid 128 after VOCs are removed from a first portion 130 and a second portion 132 of waste liquid 128. VOC sensor 136 can be placed in, outside, or at another location convenient for measuring the VOC concentration in the purified waste liquid 128 of the exhaust chimney 114. VOC sensors 134 and 136 provide VOC concentration signals or data to control system 126. Control system 126 can calculate the overall VOC exhaust efficiency based on the VOC concentration signals or data from VOC sensors 134 and 136.

[0073] In one embodiment, VOC sensors 134 and 136 are compound analyzers. The compound analyzer can detect the presence and concentration of selected compounds in a fluid. Therefore, the compound analyzer can detect the presence and concentration of VOCs in waste liquid 128. In one embodiment, only a single compound analyzer is present. The single compound analyzer can analyze fluid samples of waste liquid 128 from the inlet and outlet of the VOC exhaust system 100.

[0074] Temperature sensors 122 and 124 work together to measure the temperature of the VOC concentrator wheel 104. The temperature of the VOC concentrator wheel 104 can affect the overall VOC exhaust efficiency of the VOC exhaust system 100. Each temperature sensor 122 generates a sensor signal indicating the temperature of the VOC concentrator wheel 104. The temperature signals from temperature sensors 122 and 124 can be used to determine the temperature of the VOC concentrator wheel 104.

[0075] In one embodiment, temperature sensor 122 is positioned on the input side of adsorption region 106. Temperature sensor 124 is positioned on the output side of adsorption region 106. A temperature gradient may exist on VOC concentrator wheel 104. Therefore, temperature signals from temperature sensors 122 and 124 can be used to determine the temperature gradient or average temperature of VOC concentrator wheel 104. VOC exhaust system 100 may include additional temperature sensors positioned to sense the temperature of VOC concentrator wheel at various locations. All temperature signals can be provided to control system 126. In one embodiment, temperature sensors can be positioned to measure the temperature of a second portion of waste liquid 128 between heat exchanger 112 and desorption region 110.

[0076] In some cases, components of the VOC exhaust system 100 may be located in areas susceptible to fluctuations in temperature, air pressure, or humidity. For example, in some cases, the VOC concentrator wheel 104 may be located on top of a semiconductor manufacturing facility. In this case, the time of day, current weather, and other factors can affect the temperature of the VOC concentrator wheel 104, thereby affecting the overall VOC exhaust efficiency of the VOC exhaust system 100.

[0077] The control system 126 receives data related to various parameters of the VOC exhaust system 100. The control system 126 receives temperature signals from temperature sensors 122 and 124. The control system 126 receives VOC concentration signals from VOC sensors 134 and 136. The control system 126 receives data indicating the rotational speed of the VOC concentrator wheel 104, the rotational speed of the desorption fan 116, the temperature of the burner 120, and the heat transfer parameters of the heat exchangers 112 or 118. Therefore, the control system 126 knows various current operating parameters of the VOC exhaust system 100.

[0078] In some embodiments, the control system 126 may be a controller and a computer-readable storage medium encoded, i.e., storing, computer program code, i.e., a set of executable instructions. The controller is electrically coupled to the computer-readable storage medium. The controller is used to execute the computer program code encoded in the computer-readable storage medium to enable the control system 126 to perform the operations described above. Figure 9 The discussion focused on the operation.

[0079] In some embodiments, the controller is a central processing unit (CPU), a multiprocessor, a distributed processing system, an application-specific integrated circuit (ASIC), and / or a suitable processing unit. In some embodiments, computer-readable storage media include semiconductor or solid-state memory, magnetic tape, removable computer disk, random access memory (RAM), read-only memory (ROM), hard disk, and / or optical disk. In some embodiments using optical disk, the computer-readable storage media includes compact disk-read-only memory (CD-ROM), compact disk-read / write (CD-R / W), and / or digital video disc (DVD).

[0080] Figure 2This is a schematic diagram of a VOC exhaust system according to some embodiments of the present disclosure. More specifically, Figure 2 Explanation as follows Figure 1 The diagram shows a VOC concentrator wheel 104 of the VOC exhaust system 100 discussed herein. The VOC exhaust system 100 includes a support platform 150 on which the VOC concentrator wheel 104 is disposed. In some embodiments, the support platform 150 may comprise a suitable rigid material, such as steel, or other suitable material.

[0081] The VOC exhaust system 100 further includes a pulley 160 disposed on a support platform 150. In some embodiments, the pulley 160 may include a motor actuable to rotate the pulley 160. The VOC exhaust system 100 further includes a traction chain 170 that mechanically connects the VOC concentrator wheel 104 and the pulley 160 to each other. For example, the teeth of the pulley 160 and the teeth of the VOC concentrator wheel 104 mechanically engage the traction chain 170. Therefore, in situations such as Figure 1 In the VOC exhaust process, the VOC concentrator wheel 104 can be rotated by actuating the wheel 160, and the traction chain 170 coupled to the wheel 160 can make the VOC concentrator wheel 104 rotate.

[0082] The VOC exhaust system 100 further includes a chain adjustment tool 200 disposed on a support platform 150. In some embodiments, the chain adjustment tool 200 may include a gear 280 that engages with a portion 1700 of the traction chain 170. Thus, the portion 1700 may refer to a portion of the traction chain 170 that extends from the bottom side of the pulley 160 to the bottom side of the VOC concentrator wheel 104. In some embodiments, the gear 280 of the chain adjustment tool 200 supports the portion 1700 of the traction chain 170 from the bottom side of the portion 1700 and is capable of adjusting the position of the portion 1700 of the traction chain 170, which will be discussed in more detail later.

[0083] Figure 3A , Figure 3B and Figure 3C This is a schematic diagram of a chain adjustment tool for a VOC exhaust system according to some embodiments of this disclosure. More specifically, Figure 3A , Figure 3B and Figure 3C for Figure 2 A schematic diagram of the chain adjustment tool 200 discussed in the paper, wherein... Figure 3A This is the front view of the chain adjustment tool 200. Figure 3B This is a side view of the chain adjustment tool 200, and Figure 3CThis is a top view of the chain adjusting tool 200. The chain adjusting tool 200 includes: a base 210; a slide rail 220 located on the base 210; a slider 230 coupled to the slide rail 220; a slide rail 240 located on the slider 230; a slider 260 coupled to the slide rail 240; and a gear 280 coupled to the slider 260. In some embodiments, the base 210 may be made of a rigid material, such as steel. The base 210 may be secured to the support platform 150 using a suitable method (see...). Figure 2 On, for example, screws are used in some embodiments.

[0084] Slider 230 is movable along slide rail 220. In some embodiments, slider 230 can be moved using a handwheel 250 that mechanically connects slider 230 and slide rail 220. For example, by rotating handwheel 250, slider 230 can move back and forth horizontally along slide rail 220. Similarly, slider 260 is movable along slide rail 240 on slider 230. In some embodiments, slider 260 can be moved using a handwheel 270 that mechanically connects slider 260 and slide rail 240. For example, by rotating handwheel 270, slider 260 can move up and down vertically along slide rail 240. In some embodiments, slide rail 220 and slide rail 240 can be rack and pinion or other suitable type of slide rail. In some embodiments, handwheels 250 and 270 can be manually rotated by a user or via a control system (e.g., Figure 1 The control system 126 in the middle rotates automatically.

[0085] Gear 280 is fixed to slider 260, and during the movement of traction chain 170, gear 280 can rotate to support traction chain 170 (see...). Figure 2 Furthermore, based on the above discussion, the position of gear 280 is adjustable. For example, gear 280 can move horizontally by moving slider 230 along slide rail 220. On the other hand, gear 280 can move vertically by moving slider 260 along slide rail 240 on slider 230. This configuration allows gear 280 to move in at least two directions and may be advantageous for adjusting the position of traction chain 170 of VOC exhaust system 100, which will be discussed in more detail later.

[0086] The base 210 may include a length L1 and a width W1. In some embodiments, the length L1 is in the range of about 280 mm to about 320 mm, such as 300 mm. The width W1 is in the range of about 60 mm to about 100 mm, such as 80 mm. The slider 230 may include a width W2, and the slide rail 240 on the slider 230 may include a height H1. In some embodiments, the height H1 is in the range of about 280 mm to about 320 mm, such as 300 mm. The width W2 is in the range of about 60 mm to about 100 mm, such as 80 mm.

[0087] Figure 4 A method for operating a VOC exhaust system according to some embodiments. Figures 5 to 9 This is a schematic diagram of various stages of operating a VOC exhaust system according to some embodiments. A method 1000 is provided, and will be combined with... Figures 5 to 9 discuss Figure 4 Method 1000. Although method 1000 is described as a series of actions, it should be understood that these actions are not limiting, as the order of the actions may be changed in other embodiments. In other embodiments, some actions described and / or illustrated may be omitted, in whole or in part.

[0088] See Figure 4 and Figure 5 Method 1000 begins with operation S101: The first VOC exhaust process is performed using the VOC exhaust system. For example, as... Figure 5 As shown, a first VOC exhaust process is performed using a VOC exhaust system 100. In this first VOC exhaust process, the VOC concentrator wheel 104 is rotated by activating the rotating wheel 160, and the traction chain 170 coupled to the rotating wheel 160 and the VOC concentrator wheel 104 also rotates the VOC concentrator wheel 104. During the rotation of the VOC concentrator wheel 104, the gear 280 of the chain adjusting tool 200 also rotates along a portion 1700 of the traction chain 170. In some embodiments, the rotation direction of the gear 280 of the chain adjusting tool 200 may be opposite to the rotation direction of the VOC concentrator wheel 104 and the rotating wheel 160. For example, when the VOC concentrator wheel 104 and the rotating wheel 160 rotate counterclockwise, the gear 280 of the chain adjusting tool 200 may rotate clockwise, and vice versa.

[0089] See Figure 4 and Figure 6 Method 1000 proceeds to operation S102: performing a cleaning process on the VOC exhaust system. After a prolonged VOC exhaust process, the VOC concentrator wheel 104 of the VOC exhaust system 100 needs to be cleaned, for example, every six months, to ensure the absorption capacity of the VOC concentrator wheel 104. In some embodiments, the cleaning process may be high-pressure water jet cleaning. For example, contaminants, such as particles, dust, etc., can be removed from the VOC concentrator wheel 104 via high-pressure water jet. In some embodiments, the cleaning process may be performed during the VOC exhaust process of operation S101.

[0090] However, during the cleaning process, water may fall onto the VOC concentrator wheel 104 and / or the traction chain 170, potentially increasing their weight. In some embodiments, due to the increased weight of the VOC concentrator wheel 104 and / or the traction chain 170, the traction chain 170 may experience greater stress when the VOC concentrator wheel 104 is pulled, which could lead to irreversible or temporary deformation of the traction chain 170. For example, after the cleaning process is completed, the traction chain 170 may loosen due to the increased weight of the traction chain 170 and / or the re-performing of the VOC exhaust process.

[0091] like Figure 6 As shown, a portion 1700 of the traction chain 170 may include a first segment 1700A and a second segment 1700B. The first segment 1700A is the section of the traction chain 1700 between the pulley 160 and the gear 280 of the chain adjusting tool 200, and the second segment 1700B is the section of the traction chain 1700 between the VOC concentrator wheel 104 and the gear 280 of the chain adjusting tool 200. As previously mentioned, due to deformation of the traction chain 170, the bottom ends of the first segment 1700A and the second segment 1700B of the traction chain 170 may fall downwards. A slack traction chain 170 is prone to slipping on the VOC concentrator wheel 104, affecting the exhaust efficiency of VOC organic waste gas and the service life of the VOC exhaust system 100.

[0092] See Figure 4 , Figure 7 and Figure 8 Method 1000 proceeds to operation S103: Adjust the position of the chain adjusting tool. For example... Figure 7 As shown, the gear 280 of the chain adjusting tool 200 moves upward in the vertical direction, thereby pushing upward a portion 1700 of the traction chain 170 and tightening the traction chain 170. It can be seen that the bottom ends of the first segment 1700A and the second segment 1700B of the traction chain 170 are pushed upward. The vertical movement of the gear 280 has been described above. Figures 3A to 3C To avoid confusion, the relevant details will not be repeated for the sake of brevity.

[0093] However, despite Figure 7 The bottom ends of the first segment 1700A and the second segment 1700B of the traction chain 170 are pushed upwards, but the bottom ends of the first segment 1700A and the second segment 1700B are at different heights. For example, the bottom end of the first segment 1700A is higher than the bottom end of the second segment 1700B. That is, the vertical distance D1 between the bottom end of the first segment 1700A and the support platform 150 is greater than the vertical distance D2 between the bottom end of the second segment 1700B and the support platform 150.

[0094] Therefore, as Figure 8 As shown, the gear 280 of the chain adjusting tool 200 can move further in the horizontal direction toward the bottom end of the second segment 1700B of the traction chain 170, so that the bottom end of the second segment 1700B of the traction chain 170 is pushed upward, thereby making the bottom end of the first segment 1700A and the bottom end of the second segment 1700B basically at the same level.

[0095] See Figure 4 and Figure 9 Method 1000 proceeds to operation S104: A second VOC exhaust process is performed using the VOC exhaust system. After the traction chain 170 is tightened, it can be used... Figure 1 The VOC exhaust system 100 discussed herein undergoes another VOC exhaust process. As the traction chain 170 is tightened, the traction chain 170 will not easily slip on the VOC concentrator wheel 104 and / or the pulley 160, thus maintaining the VOC exhaust efficiency of the VOC exhaust system 100 and extending the service life of the VOC exhaust system 100.

[0096] See Figure 4 Method 1000 proceeds to operation S105: adjusting the position of the chain adjusting tool. As described above regarding operation S102, since the cleaning process has been completed, the traction chain 170 can be loosened. In operation S103, the loosened traction chain 170 is tightened using the chain adjusting tool 200. However, the deformation of the traction chain 170 may be temporary. For example, if the water dripped onto the traction chain 170 evaporates after a period of time (e.g., during operation S104), the weight of the dry traction chain 170 may decrease, and the traction chain 170 may tighten slightly. Therefore, the chain adjusting tool 200 can be adjusted again to loosen the traction chain 170.

[0097] The traction chain 170 can be released again by moving the gear 280 of the chain adjusting tool 200. In some embodiments, the gear 280 can move in a direction opposite to the direction in which the gear 280 was moved in operation S103. For example, in the vertical direction, when the gear 280 moves in a first direction (e.g., upward) in operation S103, the gear 280 can move in a second direction (e.g., downward) opposite to the first direction in operation S105. Similarly, in the horizontal direction, when the gear 280 moves in a first direction (e.g., toward the second segment 1700B of the traction chain 170) in operation S103, the gear 280 can move in a second direction (e.g., toward the first segment 1700A of the traction chain 170) opposite to the first direction in operation S105.

[0098] Figure 10 This is a schematic diagram of a VOC exhaust system according to some embodiments of the present disclosure. It should be noted that... Figure 10Some components of the VOC exhaust system may be similar to those described above. These components are marked as the same, and for the sake of brevity, the relevant details will not be repeated.

[0099] The VOC exhaust system further includes an image sensor 300, which communicates with the control system 126 via wired or wireless means. The image sensor 300 can capture images of a portion 1700 of the traction chain 170 and transmit the captured images to the control system 126. The control system 126 can calculate the positions of the bottom ends of the first segment 1700A and the second segment 1700B of the traction chain 170 based on the captured images. In some embodiments, the image sensor 300 can be used during cleaning processes (e.g., Figure 4 After the operation S103 is completed, capture an image of the traction chain 170.

[0100] The control system 126 can also determine whether the condition of the traction chain 170 is acceptable. In some embodiments, determining whether the condition of the traction chain 170 is acceptable may include a first determination process and a second determination process.

[0101] In the first determination process, if the bottom end of the first segment 1700A and / or the bottom end of the second segment 1700B of the traction chain 170 are below a predetermined level, the condition of the traction chain 170 is determined to be unacceptable. That is, if the vertical distance D1 between the bottom end of the first segment 1700A and the support platform 150 and / or the vertical distance D2 between the bottom end of the second segment 1700B and the support platform 150 are below a predetermined value, the condition of the traction chain 170 is determined to be unacceptable. In this case, the traction chain 170 may be too slack, which could affect the VOC exhaust efficiency of the VOC exhaust system 100.

[0102] On the other hand, when the bottom end of the first segment 1700A and the bottom end of the second segment 1700B of the traction chain 170 are both above a predetermined level, the state of the traction chain 170 is determined to be acceptable. That is, if both the vertical distance D1 and the vertical distance D2 exceed the predetermined value, the state of the traction chain 170 is determined to be acceptable.

[0103] In the second judgment process, if the bottom end of the first segment 1700A of the traction chain 170 and the bottom end of the second segment 1700B of the traction chain 170 are not on the same level plane, the state of the traction chain 170 is judged to be unacceptable. In other embodiments, if the level difference between the bottom end of the first segment 1700A and the bottom end of the second segment 1700B of the traction chain 170 exceeds a predetermined value, the state of the traction chain 170 is judged to be unacceptable. That is, if the difference between the vertical distance D1 and the vertical distance D2 exceeds a predetermined value, the state of the traction chain 170 is judged to be unacceptable.

[0104] On the other hand, when the bottom end of the first segment 1700A of the traction chain 170 is at the same position as the bottom end of the second segment 1700B of the traction chain 170, the state of the traction chain 170 is deemed acceptable. That is, if the vertical distance D1 and the vertical distance D2 are substantially the same, the state of the traction chain 170 is deemed acceptable.

[0105] The first and second judgment processes can be performed at... Figure 4 The decision process is performed before operation S103 discussed earlier. In some embodiments, the decision process may be performed before or after the second decision process. If the traction chain 170 passes through both the first and second decision processes, it may be skipped. Figure 4 Operation S103 discussed herein. That is, the state of the traction chain 170 is acceptable.

[0106] If the traction chain 170 fails to pass the first and second judgment processes, then it can be handled as follows: Figure 4 During operation S103, the traction chain 170 is adjusted. That is, when the condition of the traction chain 170 is unacceptable, the traction chain 170 will be adjusted.

[0107] If, relative to the first judgment process, the bottom end of the first segment 1700A and / or the bottom end of the second segment 1700B of the traction chain 170 are below a predetermined level, the traction chain 170 can be adjusted by moving the gear 280 vertically, such as moving it upwards, to tighten the traction chain 170.

[0108] Compared to the second judgment process, if the bottom end of the first segment 1700A of the traction chain 170 is not at the same level as the bottom end of the second segment 1700B of the traction chain 170, the traction chain 170 can be adjusted by moving the gear 280 in the horizontal direction to bring the bottom ends of the first segment 1700A and the second segment 1700B to the same level. In some embodiments, if the bottom end of the first segment 1700A is lower than the bottom end of the second segment 1700B, the traction chain 170 can be adjusted by moving the gear 280 towards the first segment 1700A until the bottom ends of the first segment 1700A and the second segment 1700B are at the same level. Similarly, if the bottom of the second segment 1700B is lower than the bottom of the first segment 1700A, the traction chain 170 can be adjusted by moving the gear 280 towards the second segment 1700B until the bottom of the first segment 1700A and the bottom of the second segment 1700B are at the same level.

[0109] In some embodiments, the chain adjusting tool 200 can communicate with the control system 126. The control system 126 can perform calculations for the first and second determination processes as described above, and can also control the chain adjusting tool 200 to adjust the traction chain 170. More specifically, the control system 126 can control all components of the chain adjusting tool 200, such as... Figures 3A to 3C As described above, this is to obtain automatic control over the position of the gear 280 of the chain adjustment tool 200.

[0110] Based on the above embodiments, it can be seen that the present disclosure provides advantages in the manufacture of integrated circuits. However, it should be understood that other embodiments may provide additional advantages, not all advantages must be disclosed herein, and no specific advantage is necessary for all embodiments. Embodiments of the present disclosure utilize a chain adjustment tool to adjust the traction chain of a VOC exhaust system to maintain high VOC exhaust efficiency. In particular, the chain adjustment tool includes a gear that can move up and down or back and forth to adjust the traction chain and has double protection against slippage. This provides advantages for the VOC exhaust system. For example, the chain adjustment tool can be used to tighten the traction chain to prevent it from slipping on or off the VOC concentrator wheel. Furthermore, the chain adjustment tool can be easily installed in the VOC exhaust system without stopping the machine. This configuration extends the service life of the VOC exhaust system and also reduces the replacement cost of the VOC exhaust system.

[0111] In some embodiments of this disclosure, a method includes the following steps: performing a volatile organic compound (VOC) exhaust process by rotating a concentrator wheel via a rotary wheel, the concentrator wheel being mechanically coupled to the rotary wheel via a traction chain; performing a cleaning process on the concentrator wheel and the traction chain; and after performing the cleaning process, tightening the traction chain by pushing it upward via a chain adjustment tool coupled to the bottom side of the traction chain.

[0112] In some embodiments, the chain adjustment tool includes a gear that engages with the traction chain.

[0113] In some embodiments, the method further includes the step of moving the gear of the chain adjustment tool horizontally.

[0114] In some embodiments, before moving the gear of the chain adjusting tool, the traction chain includes: a first segment located on one side of the gear; and a second segment located on the other side of the gear, the bottom end of the first segment being lower than the bottom end of the second segment, and wherein the step of moving the gear of the chain adjusting tool includes the step of moving the gear of the chain adjusting tool toward the first segment of the traction chain.

[0115] In some embodiments, the gear of the moving chain adjustment tool is moved until the bottom of the first segment and the bottom of the second segment are substantially at the same level.

[0116] In some embodiments, the method further includes the step of performing another VOC exhaust process after tightening the traction chain.

[0117] In some embodiments, after another VOC exhaust process is performed, the chain adjustment tool is moved downward to loosen the traction chain.

[0118] In some embodiments, the traction chain loosens due to the cleaning process.

[0119] In some embodiments of this disclosure, a method includes the following steps: performing a volatile organic compound (VOC) exhaust process using a VOC exhaust system, the VOC exhaust system comprising: a concentrator wheel; a sprocket; a traction chain, mechanically coupling the concentrator wheel and the sprocket; and a chain adjustment tool having a gear coupled to the bottom side of the traction chain, wherein the traction chain comprises: a first segment located on one side of the gear; and a second segment located on the other side of the gear; performing a cleaning process on the VOC exhaust system; and moving the gear of the chain adjustment tool horizontally until the bottom end of the first segment and the bottom end of the second segment are substantially at the same level.

[0120] In some embodiments, before moving the gear of the chain adjusting tool, the bottom end of the first segment is lower than the bottom end of the second segment, and the step of moving the gear of the chain adjusting tool includes the step of moving the gear of the chain adjusting tool toward the first segment of the traction chain.

[0121] In some embodiments, the chain adjustment tool includes: a slide rail extending horizontally; and a slider coupled to the slide rail, with a gear connected to the slider, wherein the step of moving the gear of the chain adjustment tool includes the step of moving the slider along the slide rail.

[0122] In some embodiments, the method further includes the step of moving the gear of the chain adjusting tool in a vertical direction to push the traction chain upward.

[0123] In some embodiments, the chain adjustment tool includes: a slide rail extending in a vertical direction; and a slider coupled to the slide rail, with a gear connected to the slider, wherein the step of moving the gear of the chain adjustment tool includes the step of moving the slider along the slide rail.

[0124] In some embodiments, the gear is moved vertically before the gear of the chain adjusting tool is moved horizontally.

[0125] In some embodiments, after moving the gear of the chain adjusting tool horizontally, the gear is moved vertically.

[0126] In some embodiments of this disclosure, a system includes a concentrator wheel. A sprocket is used to rotate the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the sprocket. A chain adjustment tool is coupled to the traction chain and includes gears that mesh with the traction chain, wherein the gears are movable in both horizontal and vertical directions.

[0127] In some embodiments, the chain adjustment tool includes: a first slide rail extending horizontally; a first slider coupled to the first slide rail and movable along the first slide rail; a second slide rail located on the first slider and extending vertically; and a second slider coupled to the second slide rail and movable along the second slide rail, wherein a gear is connected to the second slider.

[0128] In some embodiments, the chain adjustment tool further includes: a first handwheel coupled to a first slider and used to adjust the position of the first slider along a first slide rail; and a second handwheel coupled to a second slider and used to adjust the position of the second slider along a second slide rail.

[0129] In some embodiments, the gear engages with the traction chain from the bottom side of the traction chain.

[0130] In some embodiments, the gear meshes with a portion of the traction chain that extends from the bottom side of the rotating wheel to the bottom side of the concentrator wheel.

[0131] In some embodiments, the concentrator wheel, the sprocket, and the chain adjustment tool are mounted on the platform.

[0132] In some embodiments of this disclosure, a system includes a concentrator wheel. A sprocket is used to rotate the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the sprocket. A chain adjustment tool is coupled to the traction chain, wherein the chain adjustment tool is used to move the traction chain up or down.

[0133] In some embodiments, the chain adjustment tool includes a gear that engages with the traction chain.

[0134] In some embodiments, the chain adjustment tool includes: a first slide rail extending horizontally; a first slider coupled to the first slide rail and movable along the first slide rail; a second slide rail located on the first slider and extending vertically; and a second slider coupled to the second slide rail and movable along the second slide rail, wherein a gear is connected to the second slider.

[0135] In some embodiments, the chain adjustment tool further includes: a first handwheel coupled to a first slider and used to adjust the position of the first slider along a first slide rail; and a second handwheel coupled to a second slider and used to adjust the position of the second slider along a second slide rail.

[0136] In some embodiments, the chain adjustment tool is coupled to the bottom side of the traction chain.

[0137] In some embodiments, the chain adjustment tool is coupled to a portion of the traction chain that extends from the bottom side of the spindle to the bottom side of the concentrator wheel.

[0138] In some embodiments of this disclosure, a system includes a concentrator wheel. A sprocket is used to rotate the concentrator wheel. A traction chain mechanically couples the concentrator wheel and the sprocket. A chain adjustment tool is coupled to the traction chain and includes a gear that meshes with the traction chain, wherein the gear is movable in both horizontal and vertical directions and meshes with the traction chain from its underside.

[0139] The foregoing outlines features of several embodiments to enable those skilled in the art to better understand the various aspects of this disclosure. Those skilled in the art should understand that this disclosure can be readily used as a basis for designing or modifying other processes and structures to achieve the same objectives and / or advantages as the embodiments described herein. Those skilled in the art should also recognize that these equivalent constructions do not depart from the spirit and scope of this disclosure, and that various changes, substitutions, and modifications can be made to these equivalent constructions without departing from the spirit and scope of this disclosure.

Claims

1. A movable volatile organic compound wheel anti-slip chain tool, characterized in that, Include: One concentrator wheel; A rotating wheel is used to rotate the concentrator wheel; A traction chain mechanically couples the concentrator wheel and the impeller; and A chain adjustment tool is coupled to the traction chain and includes a gear that meshes with the traction chain, wherein the gear is movable in a horizontal direction and a vertical direction.

2. The movable volatile organic compound wheel anti-slip chain tool as described in claim 1, characterized in that, The chain adjustment tool includes: A first slide rail extends along this horizontal direction; A first slider is coupled to the first slide rail, and the first slider is capable of moving along the first slide rail; A second slide rail is located on the first slider and extends along the vertical direction; and A second slider is coupled to the second slide rail, the second slider being movable along the second slide rail, wherein the gear is connected to the second slider.

3. The movable volatile organic compound wheel anti-slip chain tool as described in claim 2, characterized in that, The chain adjustment tool further includes: A first handwheel, coupled to the first slider and used to adjust the position of the first slider along the first slide rail; and A second handwheel is coupled to the second slider and used to adjust the position of the second slider along the second slide rail.

4. The movable volatile organic compound wheel anti-slip chain tool as described in claim 1, characterized in that, The gear engages with the traction chain from one bottom side.

5. The movable volatile organic compound wheel anti-slip chain tool as described in claim 1, characterized in that, The gear meshes with a portion of the traction chain, which extends from one bottom side of the wheel to one bottom side of the concentrator wheel.

6. The movable volatile organic compound wheel anti-slip chain tool as described in claim 1, characterized in that, The concentrator wheel, the rotating wheel, and the chain adjustment tool are mounted on a platform.

7. A movable volatile organic compound wheel anti-slip chain tool, characterized in that, Include: One concentrator wheel; A rotating wheel is used to rotate the concentrator wheel; A traction chain mechanically couples the concentrator wheel and the impeller; and A chain adjustment tool is coupled to the traction chain, wherein the chain adjustment tool is used to move the traction chain up or down.

8. The movable volatile organic compound wheel anti-slip chain tool as described in claim 7, characterized in that, The chain adjustment tool includes a gear that meshes with the traction chain.

9. The movable volatile organic compound wheel anti-slip chain tool as described in claim 8, characterized in that, The chain adjustment tool includes: A first slide rail extends in a horizontal direction; A first slider is coupled to the first slide rail, and the first slider is capable of moving along the first slide rail; A second slide rail, located on the first slider and extending in a vertical direction; and A second slider is coupled to the second slide rail, the second slider being movable along the second slide rail, wherein the gear is connected to the second slider.

10. A movable volatile organic compound wheel anti-slip chain tool, characterized in that, Include: One concentrator wheel; A rotating wheel is used to rotate the concentrator wheel; A traction chain mechanically couples the concentrator wheel and the impeller; and A chain adjustment tool coupled to the traction chain and including a gear meshing with the traction chain, wherein the gear is movable in a horizontal direction and a vertical direction, wherein the gear meshes with the traction chain from a bottom side.

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