Cooling device for pumped gas in vacuum baffle valve

Abstract

Compared with the prior art, the device for cooling the pumped gas in the vacuum baffle valve has the advantages that when a vacuum pump works, high-temperature airflow flows out of a cavity and flows through a valve channel, the high-temperature airflow firstly flows through one spoiler, is scattered through the spoilers and then flows through the heat exchange tube set between the two spoilers, and the pumped gas is cooled through the heat exchange tube set. Cooling liquid circulates in the heat exchange pipe set, so that high-temperature gas exchanges heat with the cooling liquid, the cooling effect is achieved, the temperature of the gas flowing into the vacuum pump can be greatly reduced, and the problem that a sealing ring in the vacuum pump is damaged due to the high temperature can be effectively solved. The cooling assembly comprises a heat exchange tube set and two spoilers arranged at intervals, and the heat exchange tube set is arranged between the two spoilers.

Description

Technical Field

[0001] This utility model relates to the field of vacuum baffle valve technology, and in particular to a cooling device for the gas being pumped inside a vacuum baffle valve. Background Technology

[0002] Vacuum baffle valves are mostly used to isolate the medium between a vacuum pump and a chamber. If high-temperature gas is generated inside the chamber, when the vacuum pump draws gas from the chamber, the high-temperature gas in the chamber will flow through the vacuum baffle valve. Since the vacuum pump uses O-rings made of fluororubber, which cannot withstand high temperatures, the sealing effect of the O-rings is easily reduced or even lost when high-temperature gas flows through the vacuum pump, affecting the operation of the vacuum pump. Utility Model Content

[0003] The purpose of this invention is to solve the above-mentioned problems by providing a cooling device for the gas being pumped inside a vacuum baffle valve.

[0004] To achieve the above objectives, the technical solution of this utility model is as follows: a cooling device for the gas being pumped inside a vacuum baffle valve, comprising a valve body and a valve channel disposed within the valve body, and further comprising a cooling assembly, wherein the cooling assembly comprises a heat exchange tube assembly and two spaced-apart baffles, the heat exchange tube assembly being disposed between the two baffles.

[0005] Furthermore, the baffle plate includes a plate body and a plurality of flow holes evenly distributed on the plate body, the side of the plate body is sealed to the inner side of the valve channel, and the two baffle plates are spaced apart along the extension direction of the valve channel.

[0006] Furthermore, an annular protrusion is provided on the inner wall of the valve channel, and two baffles abut against the two ends of the annular protrusion respectively.

[0007] Furthermore, the heat exchange tube assembly includes a heat-conducting tube disposed inside the valve passage and two connectors disposed on the side wall of the valve passage, with the two ends of the heat-conducting tube respectively connected to the two connectors in a one-to-one correspondence.

[0008] Furthermore, two channels are provided on the side wall of the valve channel, the end of the heat-conducting pipe is connected to the channel, and the connector is connected to the other end of the channel.

[0009] Furthermore, the heat pipe includes a U-shaped tube body and reduced diameter sections disposed at both ends of the U-shaped tube body. A first blind hole is coaxially disposed at one end of the channel, and the reduced diameter section is inserted into the first blind hole.

[0010] Furthermore, a second blind hole is coaxially provided at the other end of the channel, and the connector is inserted into the second blind hole.

[0011] The vacuum baffle valve cooling device disclosed in this utility model has the following advantages compared with the prior art: When the vacuum pump is working, the high-temperature gas flow from the chamber and through the valve channel will first flow through a baffle plate. The baffle plate disperses the gas flow and then passes through the heat exchange tube assembly between the two baffle plates. Cooling liquid flows in the heat exchange tube assembly, so that the high-temperature gas exchanges heat with the cooling liquid, which greatly achieves the cooling effect. This can greatly reduce the temperature of the gas flowing into the vacuum pump, thereby effectively reducing the problem of damage to the sealing ring inside the vacuum pump caused by high temperature. The device includes a valve body and a valve channel set in the valve body, and also includes a cooling assembly. The cooling assembly includes a heat exchange tube assembly and two baffle plates set at intervals. The heat exchange tube assembly is set between the two baffle plates. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a vacuum baffle valve internal gas cooling device according to the present invention.

[0013] Figure 2 This is a cross-sectional structural diagram of a gas cooling device inside a vacuum baffle valve according to the present invention.

[0014] Figure 3 This is a partial structural diagram of a vacuum baffle valve internal gas cooling device according to the present invention.

[0015] Figure 4 This is a partial cross-sectional view of the cooling device for the extracted gas inside a vacuum baffle valve according to the present invention.

[0016] Figure 5 This is a cross-sectional structural diagram showing the location of the heat exchange tube assembly in the internal cooling device for the extracted gas of a vacuum baffle valve according to this utility model.

[0017] Figure 6 This is a schematic diagram of the baffle plate in the gas cooling device inside a vacuum baffle valve according to this utility model.

[0018] Figure 7 for Figure 6 The diagram shown is a partially enlarged structural schematic of point A in the gas cooling device inside the vacuum baffle valve of this utility model.

[0019] In the diagram: 1. Valve body; 10. First end; 11. Second end; 2. Pipe body; 20. Channel; 200. Second blind hole; 201. First blind hole; 21. Connecting flange; 22. Annular protrusion; 220. Mating bevel; 3. Heat exchanger tube assembly; 31. Heat conduction tube; 310. Reduced diameter section; 311. U-shaped tube body; 32. Joint; 4. Baffle plate; 41. Flow hole. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0021] Please refer to Figure 1-2 The technical solution of this utility model is as follows: a cooling device for the gas being pumped inside a vacuum baffle valve, including a valve body 1 and a valve channel disposed in the valve body 1, and a cooling assembly, wherein the cooling assembly includes a heat exchange tube group 3 and two baffles 4 disposed at intervals, and the heat exchange tube group 3 is disposed between the two baffles 4.

[0022] Specifically, the gas cooling device inside the vacuum baffle valve provided in this application is designed for the vacuum baffle valve. The specific structure of the vacuum baffle valve can be found by referring to... Figure 1 , Figure 2 The system includes a valve body 1, a pipe body 2 mounted on the valve body 1, and an internal channel of the pipe body 2 forming a section of the valve passage. The vacuum baffle valve is a commonly used valve body in this field, and its specific components will not be described in detail. Specifically, a cooling assembly is located inside the pipe body 2, including two baffles 4 spaced apart axially along the pipe body 2, and a heat exchange tube assembly 3 positioned between the two baffles 4. The heat exchange tube assembly 3 is connected to a coolant source. When the vacuum baffle valve is applied to a chamber capable of generating high temperatures, the first end 10 and the second end 10 of the internal valve passage of the vacuum baffle valve... The two ends 11 are connected to the vacuum pump (not shown in the figure) and the chamber (not shown in the figure) respectively. When the vacuum pump is working, the high-temperature gas flow out of the chamber and flows through the valve channel. It will first flow through a baffle 4. The baffle disperses the gas flow and then passes through the heat exchange tube group 3 between the two baffles. Coolant flows in the heat exchange tube group, so that the high-temperature gas exchanges heat with the coolant, which greatly achieves the cooling effect. This can greatly reduce the temperature of the gas flowing into the vacuum pump, thus effectively reducing the problem of damage to the sealing ring inside the vacuum pump caused by high temperature.

[0023] Furthermore, as a specific implementation method, refer to Figure 6 The baffle 4 includes a plate body and a plurality of flow holes 41 evenly distributed on the plate body. The side of the plate body is sealed to the inner side of the valve channel. Two baffles 4 are spaced apart along the extension direction of the valve channel. Specifically, the baffle 4 is a circular plate structure with a plurality of flow holes 41 evenly drilled on the plate body. The baffle is made of materials with good thermal conductivity such as copper, aluminum, and iron. The flow holes 41 can evenly distribute the airflow passing through the baffle, thereby improving the heat exchange efficiency and achieving a better cooling effect on the airflow.

[0024] Furthermore, an annular protrusion 22 is provided on the inner wall of the valve channel, and two baffles 4 respectively abut against the two ends of the annular protrusion 22. Specifically, as a specific embodiment, refer to... Figure 4By setting an annular protrusion 22, the two baffles can be positioned by their end faces, ensuring the spacing between them. The heat exchange tube assembly 3 includes a heat-conducting tube 31. By axially limiting the two baffles, the distance between the two baffles on their closest side is equal to the diameter of the outer wall of the heat-conducting tube. By symmetrically setting the two end faces of the annular protrusion 22 about the axis of the heat-conducting tube 31, it is ensured that when the two baffles are installed by abutting the end faces of the annular protrusion, both baffles can contact the outer wall of the heat-conducting tube 31, thus enabling heat exchange between the baffles and the heat-conducting tube 31. This allows for better heat exchange between the baffles and the airflow flowing through the valve channel.

[0025] Further, refer to Figure 4 A mating inclined surface 220 is provided on the end face of the annular protrusion 22. With this arrangement, the plate surface and side surface of the spoiler 4 can be mated with a conical surface on the mating inclined surface 220, thereby enabling radial positioning of the spoiler. In a specific implementation, the spoiler is welded to the side wall of the pipe body 2.

[0026] Furthermore, as a specific implementation method, refer to Figure 5 , Figure 7 The heat exchange tube assembly 3 includes a heat-conducting tube 31 disposed inside the valve passage and two connectors 32 disposed on the side wall of the valve passage. The two ends of the heat-conducting tube 31 are respectively connected to the two connectors 32. Specifically, by setting the heat exchange tube assembly 3 as a separate heat-conducting tube and connectors 32, it is easier to assemble and connect with the valve passage.

[0027] Furthermore, as a specific implementation method, refer to Figure 5 The valve channel has two channels 20 on its side wall. One end of the heat pipe 31 communicates with one channel 20, and the connector 32 communicates with the other end of the channel 20. For details, refer to... Figure 5 Two channels 20 are drilled on the side wall of the tube body. The axes of the two channels 20 pass through the virtual plane. The two ends of the annular protrusion are symmetrically arranged about the virtual plane. The two ends of the heat pipe 31 are connected to the two channels 20 one by one, and the axis of the heat pipe is also on the virtual plane. The heat pipe 31 can be any type of straight pipe or bent pipe.

[0028] Further, refer to Figure 5 , Figure 7 In a preferred embodiment, the heat pipe 31 includes a U-shaped tube body 311 and a reduced diameter section 310 disposed at both ends of the U-shaped tube body 311. A first blind hole 201 is coaxially disposed at one end of the channel, and the reduced diameter section 310 is inserted into the first blind hole 201.

[0029] Specifically, the heat pipe includes a U-shaped tube body 311, with two channels arranged parallel to each other on the same side of the tube body 2. This arrangement allows coolant to enter and exit the heat pipe 31 from the same side, resulting in a smaller footprint and a more rational overall layout. By setting reduced diameter sections 310 at both ends of the U-shaped tube body 311 and a first blind hole 201 at the end of the channel 20 for insertion into the reduced diameter sections, the U-shaped tube body 311 can be positioned by the insertion and guiding fit between the reduced diameter sections 310 and the first blind hole when assembled onto the tube body 2. The bottom of the first blind hole 201 can also be used to abut and position the end face of the reduced diameter sections 310, making the installation of the U-shaped tube body 311 easier. During installation, solder paste can be applied between the outer circumferential surface of the reduced diameter section and the inner circumferential surface of the first blind hole. After inserting the U-shaped tube body 311 into the first blind hole, the tube body 2 can be heated to braze the U-shaped tube body 311 to the first blind hole, achieving a fixing effect.

[0030] Furthermore, as a specific implementation method, refer to Figure 7 The other end of the channel 20 is coaxially provided with a second blind hole 200, and the connector 32 is inserted into the second blind hole. Specifically, by providing the second blind hole, the connector can be inserted into the second blind hole, thereby positioning the connector 32 and making assembly easier. The connector 32 can be welded to the pipe body 2, or it can be connected by an internal thread on the inner circumferential surface of the second blind hole and an external thread on the outer circumferential surface of the connector 32, with the connector 32 and the second blind hole connected by threads.

[0031] Specifically, it should be noted that in this application, cooling water can be introduced into the heat exchange tube assembly 3 by a liquid pump for cooling. The liquid pump outlet is connected to a connector 32, and the other connector 32 is connected to a water outlet pipe (not shown in the figure). The liquid pump draws cooling water into the heat exchange tube assembly 3 through a connector 32 and then out through the other connector 32, thereby achieving the heat exchange effect.

[0032] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A device for cooling the gas being pumped inside a vacuum baffle valve, comprising a valve body (1) and a valve passage disposed within the valve body (1), characterized in that, It also includes a cooling assembly, which includes a heat exchange tube assembly (3) and two spaced-apart baffles (4), with the heat exchange tube assembly (3) positioned between the two baffles (4).

2. The vacuum baffle valve internal gas cooling device according to claim 1, characterized in that, The baffle (4) includes a plate body and a plurality of flow holes (41) evenly distributed on the plate body. The side of the plate body is sealed to the inner side of the valve channel. Two baffles (4) are spaced apart along the extension direction of the valve channel.

3. The vacuum baffle valve internal gas cooling device according to claim 1, characterized in that, An annular protrusion (22) is provided on the inner wall of the valve channel, and two baffles (4) abut against the two ends of the annular protrusion (22) respectively.

4. The vacuum baffle valve internal gas cooling device according to claim 2, characterized in that, The heat exchange tube assembly (3) includes a heat-conducting tube (31) disposed inside the valve passage and two connectors (32) disposed on the side wall of the valve passage. The two ends of the heat-conducting tube (31) are respectively connected to the two connectors (32).

5. A device for cooling the gas being pumped inside a vacuum baffle valve according to claim 4, characterized in that, The valve channel has two channels (20) on its side wall. The end of the heat pipe (31) is connected to the channel (20), and the connector (32) is connected to the other end of the channel (20).

6. The vacuum baffle valve internal gas cooling device according to claim 5, characterized in that, The heat pipe (31) includes a U-shaped tube body (311) and a reduced diameter section (310) disposed at both ends of the U-shaped tube body (311). A first blind hole (201) is coaxially disposed at one end of the channel, and the reduced diameter section (310) is inserted into the first blind hole (201).

7. A device for cooling the gas being pumped inside a vacuum baffle valve according to claim 6, characterized in that, The other end of the channel (20) is coaxially provided with a second blind hole (200), and the connector (32) is inserted into the second blind hole.

Images