Detection device for vacuum cavity of etching machine

Abstract

The utility model belongs to the technical field of vacuum cavity detectors, and particularly relates to an etching machine vacuum cavity detection device, which comprises a bottom plate and a clamp plate arranged on one side of the bottom plate, an air bag pipe is arranged in the clamp plate, one side of the top end of the air bag pipe is connected with a pressure gauge, the other side of the pressure gauge is connected with a hose valve, and the hose valve is connected with the air bag pipe. The other end of the hose valve is connected with a hose, and the other end of the hose is connected with a detection valve; the flexible pipe is bent and placed between the positioning block and the clamping plate, then the threaded rod is rotated, the telescopic plate is driven to move inwards along an opening in one side of the telescopic sleeve plate, then the clamping plate is driven to get close to the stored flexible pipe, and the flexible pipe is clamped in the clamping plate. And then the hose is stably extruded, so that the scattered hose can be conveniently stored and stabilized, the detection valve end is prevented from being damaged due to random placement, and the later use accuracy of the vacuum cavity detection instrument is ensured.

Description

Technical Field

[0001] This utility model belongs to the technical field of vacuum cavity testing instruments, specifically relating to a vacuum cavity testing device for etching machines. Background Technology

[0002] The etching machine vacuum chamber detection device mainly relates to the technical field of etching machine detection. The working principle of this device is primarily based on the detection and control of vacuum levels. During maintenance of the etching machine, it is necessary to detect the vacuum level of the vacuum chamber, i.e., to check for leaks. By connecting to external equipment (such as a vacuum pump) through a connecting pipe, the air inside the vacuum chamber is extracted to create a vacuum environment. Then, the sensor inside the detection device monitors the vacuum level in real time and transmits the data to the control system. The control system judges based on a preset vacuum level threshold. If the vacuum level is lower than the threshold, an alarm is issued and corresponding measures are taken (such as closing the exhaust valve, starting the backup vacuum pump, etc.) to restore the vacuum level.

[0003] The application of vacuum chamber testing devices for etching machines is of great significance for improving the performance and stability of etching machines. By monitoring and controlling the vacuum level in real time, it is possible to ensure that the etching process is carried out under optimal conditions, thereby improving etching accuracy and efficiency. However, due to the excessive length of the flexible tubing in commercially available vacuum chamber testing instruments, operators are extremely prone to damaging the testing valve at the end of the tubing when handling the instrument, which in turn affects the testing accuracy of the vacuum chamber testing instrument. Utility Model Content

[0004] The purpose of this utility model is to provide a vacuum chamber testing device for etching machines, aiming to solve the problem that in the use of the above-mentioned equipment, the vacuum chamber testing instruments on the market are prone to damage to the testing valve at the end of the hose when the operator holds the vacuum chamber testing instrument due to the excessive length of the hose, which in turn affects the testing accuracy of the vacuum chamber testing instrument.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum chamber detection device for an etching machine, comprising a base plate and a clamping plate installed on one side of the base plate, wherein an air bladder tube is installed inside the clamping plate, a pressure gauge is connected to one end of the air bladder tube, a hose valve is connected to the other end of the pressure gauge, a hose is connected to the other end of the hose valve, and a detection valve is connected to the other end of the hose.

[0006] The surface of the hose is connected to a sleeve, the outer wall of the sleeve is connected to a connecting plate, the other end of the connecting plate is connected to a positioning block, the other end of the positioning block is connected to a telescopic sleeve plate, the opening of the telescopic sleeve plate is connected to a telescopic plate, the other end of the telescopic plate is connected to a clamping plate, one side of the telescopic plate is connected to a fixing block, one side of the fixing block is connected to a bearing, the outer side of the bearing is connected to a threaded rod, and the outer wall of the telescopic sleeve plate is connected to a threaded plate.

[0007] As a preferred embodiment of the etching machine vacuum chamber detection device of this utility model, the sleeve is made of PVC material, and the clamping plate forms a sliding connection structure with the opening on one side of the telescopic sleeve plate through the telescopic plate.

[0008] As a preferred embodiment of the etching machine vacuum chamber detection device of this utility model, the inner wall curvature of the positioning block and the clamping plate is adapted to the surface curvature of the hose, and both the positioning block and the clamping plate are made of plastic.

[0009] As a preferred embodiment of the etching machine vacuum chamber detection device of this utility model, the fixing block passes through the telescopic sleeve plate and extends to the outside of the telescopic sleeve plate, and the fixing block is slidably connected to the opening on one side of the telescopic sleeve plate.

[0010] In a preferred embodiment of the etching machine vacuum chamber detection device of this utility model, the threaded rod is connected to the inner liner of the bearing, and the threaded rod is threadedly connected to the threaded plate.

[0011] As a preferred embodiment of the etching machine vacuum chamber detection device of this utility model, the end of the flexible tube valve near the steel pipe is connected to a docking valve cylinder, the docking valve cylinder is threadedly connected to the steel pipe, and a sealing ring is installed on the surface of the docking valve cylinder.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention involves bending a flexible tube and placing it between a positioning block and a clamping plate. Then, rotating the threaded rod causes the telescopic plate to move inward along the opening on one side of the telescopic sleeve plate. This causes the clamping plate to move closer to the stored flexible tube and then press and stabilize it. This facilitates the storage and stabilization of scattered flexible tubes, preventing damage to the detection valve end due to random placement and ensuring the accuracy of the vacuum chamber detection instrument in later use. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0015] Figure 1 This is a schematic diagram of the overall front structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the overall rear view structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the clamping plate connection structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the sealing ring installation structure of this utility model.

[0019] In the diagram: 1. Base plate; 2. Clamp plate; 3. Airbag tube; 4. Pressure gauge; 5. Steel pipe; 6. Hose valve; 7. Hose; 8. Detection valve; 9. Pipe sleeve; 10. Connecting plate; 11. Positioning block; 12. Telescopic sleeve plate; 13. Telescopic plate; 14. Clamping plate; 15. Fixing block; 16. Bearing; 17. Threaded rod; 18. Threaded plate; 19. Connecting valve cylinder; 20. Sealing ring. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-4 The present invention provides the following technical solution: a vacuum chamber detection device for an etching machine, including a base plate 1 and a clamping plate 2 installed on one side of the base plate 1. An air bladder tube 3 is installed inside the clamping plate 2. A pressure gauge 4 is connected to one side of the top end of the air bladder tube 3. A hose valve 6 is connected to the other side of the pressure gauge 4. A hose 7 is connected to the other end of the hose valve 6. A detection valve 8 is connected to the other end of the hose 7.

[0022] The surface of the hose 7 is connected to the sleeve 9, the outer wall of the sleeve 9 is connected to the connecting plate 10, the other end of the connecting plate 10 is connected to the positioning block 11, the other end of the positioning block 11 is connected to the telescopic sleeve 12, the opening of the telescopic sleeve 12 is connected to the telescopic plate 13, the other end of the telescopic plate 13 is connected to the clamping plate 14, one side of the telescopic plate 13 is connected to the fixing block 15, one side of the fixing block 15 is connected to the bearing 16, the outer side of the bearing 16 is connected to the threaded rod 17, and the outer wall of the telescopic sleeve 12 is connected to the threaded plate 18.

[0023] Preferably, the sleeve 9 is made of PVC material, and the clamping plate 14 forms a sliding connection structure with the telescopic plate 13 and the opening on one side of the telescopic sleeve plate 12.

[0024] In practical use, the sleeve 9 allows for easy adjustment of its position on the surface of the hose 7, making it convenient to adjust to the appropriate position as needed.

[0025] Preferably, the inner wall curvature of the positioning block 11 and the clamping plate 14 is adapted to the surface curvature of the hose 7, and both the positioning block 11 and the clamping plate 14 are made of plastic.

[0026] In practical use, the positioning block 11 and the clamping plate 14 facilitate the storage of scattered hoses 7, improving the practicality of the etching machine vacuum chamber detection device.

[0027] Preferably, the fixing block 15 passes through the telescopic sleeve 12 and extends to the outside of the telescopic sleeve 12, and the fixing block 15 is slidably connected to the opening on one side of the telescopic sleeve 12.

[0028] In practical use, the fixed block 15 moves along the opening on one side of the telescopic sleeve 12, which facilitates the directional movement of the telescopic plate 13.

[0029] Preferably, the threaded rod 17 is connected to the inner liner of the bearing 16, and the threaded rod 17 is threadedly connected to the threaded plate 18.

[0030] In practical use, the threaded rod 17 is rotated along the threaded plate 18 to facilitate the movement of the telescopic plate 13.

[0031] Preferably, the end of the flexible hose valve 6 near the steel pipe 5 is connected to a docking valve cylinder 19, the docking valve cylinder 19 is threaded to the steel pipe 5, and a sealing ring 20 is installed on the surface of the docking valve cylinder 19.

[0032] In practical use, the sealing ring 20 is fitted onto the surface of the docking valve cylinder 19 to ensure the accuracy of the vacuum chamber detection device.

[0033] The working principle of this utility model is as follows: By bending the hose 7 and placing it between the positioning block 11 and the clamping plate 14, the threaded rod 17 is rotated, causing it to rotate along the inner lining of the bearing 16. At the same time, the threaded rod 17 is threaded with the threaded plate 18, which drives the telescopic plate 13 to move inward along one side opening of the telescopic sleeve plate 12. This causes the clamping plate 14 to move closer to the collected hose 7 and then press and stabilize it with the hose 7. This facilitates the collection and stabilization of the scattered hose 7, preventing damage to the detection valve 8 due to random placement and ensuring the accuracy of the vacuum chamber detection instrument in later use. First, the detection valve 8 is connected to the vacuum chamber of the etching machine. Then, the sealing ring 20 is fitted onto the surface of the docking valve cylinder 19, and then the docking valve cylinder 19 is sealed and connected to the steel pipe 5. This ensures the sealing of the connection of the etching machine vacuum chamber detection device, improves the accuracy of the etching machine vacuum chamber detection, and enhances the practicality of the etching machine vacuum chamber detection device.

[0034] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An etching machine vacuum chamber detection device, comprising a base plate (1) and a clamping plate (2) mounted on one side of the base plate (1), characterized in that: An airbag tube (3) is installed inside the clamp plate (2). A pressure gauge (4) is connected to one side of the top of the airbag tube (3). A hose valve (6) is connected to the other side of the pressure gauge (4). A hose (7) is connected to the other end of the hose valve (6). A detection valve (8) is connected to the other end of the hose (7). The surface of the hose (7) is connected to a sleeve (9), the outer wall of the sleeve (9) is connected to a connecting plate (10), the other end of the connecting plate (10) is connected to a positioning block (11), the other end of the positioning block (11) is connected to a telescopic sleeve (12), the opening of the telescopic sleeve (12) is connected to a telescopic plate (13), the other end of the telescopic plate (13) is connected to a clamping plate (14), one side of the telescopic plate (13) is connected to a fixing block (15), one side of the fixing block (15) is connected to a bearing (16), the outer side of the bearing (16) is connected to a threaded rod (17), and the outer wall of the telescopic sleeve (12) is connected to a threaded plate (18).

2. The etching machine vacuum chamber detection device according to claim 1, characterized in that: The sleeve (9) is made of PVC material, and the clamping plate (14) forms a sliding connection structure with the opening on one side of the telescopic sleeve plate (12) through the telescopic plate (13).

3. The etching machine vacuum chamber detection device according to claim 1, characterized in that: The inner wall curvature of the positioning block (11) and the clamping plate (14) is adapted to the surface curvature of the hose (7), and both the positioning block (11) and the clamping plate (14) are made of plastic.

4. The etching machine vacuum chamber detection device according to claim 1, characterized in that: The fixing block (15) passes through the telescopic sleeve (12) and extends to the outside of the telescopic sleeve (12), and the fixing block (15) is slidably connected to the telescopic sleeve (12) with an opening on one side.

5. The etching machine vacuum chamber detection device according to claim 1, characterized in that: The threaded rod (17) is connected to the inner liner of the bearing (16), and the threaded rod (17) is threadedly connected to the threaded plate (18).

6. The etching machine vacuum chamber detection device according to claim 1, characterized in that: The flexible hose valve (6) is connected to a docking valve cylinder (19) at one end near the steel pipe (5). The docking valve cylinder (19) is threadedly connected to the steel pipe (5), and a sealing ring (20) is installed on the surface of the docking valve cylinder (19).

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