Automatic alignment adjustment equipment for needle card for wafer test

Abstract

The utility model relates to the field of wafer production testing equipment, and discloses wafer testing needle card automatic alignment adjusting equipment, which comprises a needle card position adjusting fixing seat, and a longitudinal position adjusting knob and a transverse position adjusting knob which are arranged on the needle card position adjusting fixing seat in the horizontal direction and used for adjusting horizontal longitudinal and transverse movement positioning of a needle card fixed on the needle card position adjusting fixing seat. The device further comprises an equipment rack, a wafer positioning seat is arranged in the equipment rack, and one side of the wafer positioning seat is correspondingly provided with a base limiting structure of the positioning pin clamp position adjusting fixing seat. And a first observation mechanism for observing the alignment condition of the needle card positioned on the needle card positioning fixing seat and the wafer positioned on the wafer positioning seat and two alignment adjusting mechanisms for automatically adjusting a longitudinal positioning knob and a transverse positioning knob on the needle card positioning fixing seat respectively are arranged on the side of the base limiting structure. Alignment adjustment of the needle cards on the needle card position adjusting fixing base is automatically completed, the operation difficulty is low, the adjusting speed is high, efficiency is high, and accuracy is high.

Description

Technical Field

[0001] This utility model relates to the field of wafer production testing equipment, and in particular to an automatic alignment and adjustment device for a pin card used in wafer testing. Background Technology

[0002] In semiconductor chip manufacturing, performance testing is performed on wafers before packaging to improve chip quality and conserve resources. Wafer performance testing equipment typically includes a probe card positioning and fixing bracket and a wafer positioning bracket. Before batch testing, the wafers to be tested are positioned on the wafer positioning bracket, and the probe cards for the test wafers are fixed to the probe card positioning and fixing bracket. An electron microscope is then used to observe the alignment of the probe cards' probes on the positioning bracket with the wafer's pads on the wafer positioning bracket. Based on the actual situation, the probe cards on the positioning bracket are adjusted horizontally, longitudinally, and laterally to ensure precise alignment between the probe cards' probes and the wafer's pads on the wafer positioning bracket. After alignment and adjustment, the probe cards remain fixed on the positioning bracket, and then automated processes load and unload the wafers onto the wafer positioning bracket for automated testing. The adjustment and alignment of needle clips on existing needle clip adjustment and fixing bases are generally performed manually. This is done by rotating the horizontal longitudinal knob and the horizontal transverse knob of the adjustment mechanism on the needle clip adjustment and fixing base. Since the adjustment and alignment accuracy reaches 0.001um, the operation is quite difficult and requires the operator to have rich operating experience. It is necessary to make multiple high-precision adjustments before the alignment can be completed. The alignment adjustment has high requirements, is slow, and the accuracy error range cannot be completely guaranteed. Utility Model Content

[0003] This utility model provides an automatic alignment and adjustment device for wafer testing needle cards, which solves the technical problems of existing manual operation for adjusting the needle cards on the alignment needle card fixing seat. The operation is difficult, requires the operator to have rich operating experience, and requires multiple high-precision adjustments to complete the alignment adjustment. The alignment adjustment is demanding, slow, and the accuracy error range cannot be fully guaranteed.

[0004] The technical solution adopted by this utility model to solve its technical problem is: an automatic alignment and adjustment device for wafer testing pins, including a pin adjustment fixing base. The pin adjustment fixing base is horizontally provided with a longitudinal adjustment knob and a lateral adjustment knob for adjusting the horizontal longitudinal and lateral movement and positioning of the pins fixed thereon. It also includes a machine frame, within which a wafer positioning base is provided. A base limiting structure for positioning the pin adjustment fixing base is provided on one side of the wafer positioning base. A first observation mechanism for observing the alignment of the pins positioned on the pin adjustment fixing base with the wafer positioned on the wafer positioning base is provided on the side of the base limiting structure. Two alignment adjustment mechanisms are also provided for automatically adjusting the longitudinal and lateral adjustment knobs on the pin adjustment fixing base. This device automates the alignment and adjustment of the pins on the pin adjustment fixing base, with low operation difficulty, fast adjustment speed, high efficiency, and high accuracy. It is not directly installed on the wafer testing equipment, thus having minimal impact on the original testing equipment.

[0005] Furthermore, the base limiting structure includes a positioning plate located on one side of the wafer positioning base, and a fixing plate is provided at the bottom of the pin-card adjusting fixing base. The fixing plate has multiple through-holes and multiple positioning posts that correspond to and match the positioning holes. The upper end of each positioning post has a frustum-shaped guide structure, and the length of the cylindrical portion below the guide structure on the positioning post is greater than the thickness of the fixing plate. The structure is simple and stable, and the pin-card adjusting fixing base is quick and easy to install and move.

[0006] Furthermore, the alignment adjustment mechanism includes a support frame, a horizontal fixed plate mounted on the support frame, an adjustment drive mechanism mounted on the horizontal fixed plate, a clamping mechanism mounted on the adjustment drive mechanism and driven by the adjustment drive mechanism to move horizontally, move horizontally, and rotate vertically, and a clamping rotating head mounted on the clamping mechanism and driven by the clamping mechanism to complete the clamping action. A second observation mechanism is provided on the horizontal fixed plate to observe the position of the clamping rotating head. The structure is simple, automatically completing the alignment adjustment of the needle cards on the needle card adjustment fixing seat, with high speed and efficiency.

[0007] Furthermore, the positioning drive mechanism includes a transverse horizontal drive mechanism fixed to a horizontal fixed plate, a longitudinal horizontal drive mechanism disposed on the transverse horizontal drive mechanism and driven by the transverse horizontal drive mechanism to move horizontally, and a rotary drive mechanism disposed on the longitudinal horizontal drive mechanism and driven by the longitudinal horizontal drive mechanism to move vertically. It features a simple structure, high precision, and easy operation.

[0008] Furthermore, the clamping rotating head includes a clamping block disposed therein that can elastically slide horizontally. This ensures that the force applied to the longitudinal and lateral adjustment knobs is as much as possible to drive their rotation, and minimizes the force applied to the longitudinal and lateral adjustment knobs in the horizontal forward or backward direction, effectively improving adjustment accuracy.

[0009] Furthermore, the clamping rotating head also includes two clamping bodies arranged opposite each other. One side of each clamping body is provided with a sliding groove for the horizontal sliding of a limiting clamping block. A first limiting plate and a second limiting plate are respectively provided on both sides of the sliding groove. Multiple elastic components are provided between the two ends of the clamping block within the sliding groove and the first and second limiting plates. This reduces the force required to move the longitudinal and lateral adjustment knobs in the horizontal forward or backward direction, effectively improving adjustment accuracy.

[0010] Furthermore, the first limiting plate and the clamping body are an integral structure, and the second limiting plate is fixed to the clamping body by bolts. Operation is simple and the structure is stable.

[0011] Furthermore, the elastic component is a spring, and multiple cylindrical limiting cavities are provided at both ends of the clamping block corresponding to the positions of the first and second limiting plates. One end of the elastic component is located within a cylindrical limiting cavity. During long-term use, the elastic component is protected and limited within the cylindrical limiting cavity, resulting in a longer service life and greater stability during operation.

[0012] Furthermore, elastic pads are provided on one side of each of the two clamping blocks. This avoids damage to the longitudinal and transverse adjustment knobs on the pin card adjustment base, and makes the clamping more stable, improving the accuracy for long-term use.

[0013] Furthermore, the support frame includes two corresponding fixed frames. Each fixed frame has a vertical support groove, within which a vertically movable sliding frame is positioned and limited. A horizontal fixed plate is horizontally fixed to the two corresponding vertical sliding frames. Each fixed frame has a row of oblong holes vertically aligned with the support groove, and at least one of these oblong holes contains a fixing bolt for securing the vertical sliding frame within the support groove. In practical implementation, the height of the horizontal fixed plate can be adjusted, improving the practicality of the equipment. Attached Figure Description

[0014] Figure 1 This is a front view schematic diagram of the present invention after the cover has been removed;

[0015] Figure 2 This is a front view schematic diagram of the alignment adjustment mechanism;

[0016] Figure 3This is a front view schematic diagram of the clamping rotating head;

[0017] Figure 4 This is a front view schematic diagram of a portion of the clamping rotating head.

[0018] The components are labeled as follows: needle card positioning fixing seat 100, fixing plate 110, equipment frame 200, wafer positioning seat 300, base limiting structure 400, positioning post 410, first observation mechanism 500, alignment adjustment mechanism 600, support frame 610, horizontal fixing plate 620, transverse horizontal drive mechanism 631, longitudinal horizontal drive mechanism 632, rotation drive mechanism 633, clamping mechanism 640, clamping rotating head 650, clamping body 651, slide groove 652, first limiting plate 653, second limiting plate 654, clamping block 655, elastic component 656, columnar limiting cavity 657, elastic pad 658, and second observation mechanism 660. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0020] like Figure 1The device shown is an automatic alignment and adjustment device for wafer testing pins, including a pin adjustment fixing base 100. The pin adjustment fixing base 100 is horizontally provided with a longitudinal adjustment knob and a lateral adjustment knob for adjusting the horizontal longitudinal and lateral movement and positioning of the pins fixed thereon. It also includes a device frame 200, in which a wafer positioning base 300 is provided. A base limiting structure 400 for positioning the pin adjustment fixing base 100 is provided on one side of the wafer positioning base 300. A first observation mechanism 500 for observing the alignment of the pins positioned on the pin adjustment fixing base 100 with the wafer positioned on the wafer positioning base 300 is provided on the side of the base limiting structure 400. There are also two alignment adjustment mechanisms 600 for automatically adjusting the longitudinal adjustment knob and the lateral adjustment knob on the pin adjustment fixing base 100, respectively. In this specific embodiment, the first observation mechanism 500 is an electron microscope; the wafer positioning base 300 is the same as the wafer positioning base on the wafer testing equipment, ensuring consistent alignment adjustment. In specific implementation, the pin card adjustment fixing base 100 with the pin card installed is placed on the base limiting structure 400, and then the standard good wafer to be tested is placed on the wafer positioning base 300. The first observation mechanism 500 observes the alignment of the pin card probe on the pin card adjustment fixing base 100 with the wafer on the wafer positioning base 300. Based on the settings, the required longitudinal and lateral adjustment distances of the pin card positioned on the pin card adjustment fixing base 100 are determined. The two alignment adjustment mechanisms 600 automatically complete the alignment work by rotating the longitudinal adjustment knob and the lateral adjustment knob on the pin card adjustment fixing base 100, respectively. The system automates the alignment and adjustment of the pins on the pin positioning and fixing base 100. It is easy to operate, fast, efficient, and accurate. It is not directly installed on the wafer inspection equipment, so it has little impact on the original inspection equipment.

[0021] Based on the above, such as Figure 1 As shown, the base limiting structure 400 includes a positioning plate located on one side of the wafer positioning base 300. A fixing plate 110 is provided at the bottom of the pin clip adjusting fixing base 100. The fixing plate 110 has multiple through-holes, and multiple positioning posts 410 corresponding to the positioning holes are provided on the positioning plate. A frustum-shaped guide structure is provided at the upper end of each positioning post 410. The length of the cylindrical portion below the guide structure on the positioning post 410 is greater than the thickness of the fixing plate 110. In high-precision positioning, the guide structure reduces the difficulty of aligning and installing the pin clip adjusting fixing base 100. The greater length of the cylindrical portion of the positioning post 410 than the thickness of the fixing plate 110 ensures positioning accuracy and prevents the installed pin clip adjusting fixing base 100 from moving or shaking during alignment adjustment. The structure is simple, and the pin clip adjusting fixing base 100 is quick and easy to install and move.

[0022] Based on the above, such as Figures 1 to 2As shown, the alignment adjustment mechanism 600 includes a support frame 610, a horizontal fixed plate 620 disposed on the support frame 610, an adjustment drive mechanism disposed on the horizontal fixed plate 620, a clamping mechanism 640 disposed on the adjustment drive mechanism and driven by the adjustment drive mechanism to move horizontally, move horizontally, and rotate vertically, and a clamping rotating head 650 disposed on the clamping mechanism 640 and driven by the clamping mechanism 640 to complete the clamping action. A second observation mechanism 660 is provided on the horizontal fixed plate 620 to observe the position of the clamping rotating head 650. In this specific embodiment, the second observation mechanism 660 is an industrial camera used to observe the positions of the longitudinal and lateral adjustment knobs on the positioning pin card adjustment fixing seat 100; the clamping mechanism 140 is a clamping cylinder with two corresponding clamping fingers; in specific implementation, the second observation mechanism 660 observes the positions of the longitudinal and lateral adjustment knobs on the positioning pin card adjustment fixing seat 100, the adjustment drive mechanism drives the clamping mechanism 640 to move to the position corresponding to the longitudinal or lateral adjustment knob, the clamping mechanism 640 drives the clamping rotating head 650 to clamp the longitudinal or lateral adjustment knob, the adjustment drive mechanism drives the clamping mechanism 640 to rotate, and during the rotation of the clamping mechanism 640, the clamping mechanism 640 is driven to move horizontally with the longitudinal or lateral adjustment knob. The structure is simple, and the alignment adjustment of the pin card on the pin card adjustment fixing seat 100 is completed automatically, with high speed and high efficiency.

[0023] Based on the above, such as Figures 1 to 2 As shown, the positioning drive mechanism includes a transverse horizontal drive mechanism 631 fixed on a horizontal fixed plate 620, a longitudinal horizontal drive mechanism 632 mounted on the transverse horizontal drive mechanism 631 and driven by the transverse horizontal drive mechanism 631 to move horizontally, and a rotary drive mechanism 633 mounted on the longitudinal horizontal drive mechanism 632 and driven by the longitudinal horizontal drive mechanism 632 to move vertically. In this specific embodiment, both the transverse horizontal drive mechanism 631 and the longitudinal horizontal drive mechanism 632 are high-precision linear motors with slide rail assemblies, or they can be high-precision cylinder assemblies with controllable stroke; the rotary drive mechanism 633 is a high-precision rotary cylinder with controllable rotation angle. The structure is simple and easy to operate.

[0024] Based on the above, such as Figures 1 to 4As shown, the clamping rotating head 650 includes a clamping block 655 that can slide elastically in the horizontal direction inside it. In a specific implementation, the longitudinal and transverse adjustment knobs of the pin card adjustment fixing seat 100 will move forward or backward horizontally during rotation adjustment. Although the adjustment drive mechanism will also move horizontally during the rotation of the clamping mechanism 640, some misalignment may still occur due to accuracy requirements. The clamping block 655, which can slide elastically in the horizontal direction, will move accordingly when subjected to a force in the horizontal forward or backward direction, ensuring that the force applied to the longitudinal and transverse adjustment knobs is as much as possible as the force that drives their rotation, minimizing the force applied to the longitudinal and transverse adjustment knobs in the horizontal forward or backward direction, and effectively improving adjustment accuracy.

[0025] Based on the above, such as Figures 1 to 4 As shown, the clamping rotating head 650 also includes two clamping bodies 651 arranged opposite to each other. A sliding groove 652 for the horizontal sliding of the limiting clamping block 655 is provided on one side of the two clamping bodies 651. A first limiting plate 653 and a second limiting plate 654 are respectively provided on both sides of the sliding groove 652. Multiple elastic components 656 are provided between the two ends of the clamping block 655 in the sliding groove 652 and the first limiting plate 653 and the second limiting plate 654. In specific implementation, the clamping mechanism 140 is a clamping cylinder with two corresponding clamping fingers. The two clamping bodies 651 arranged opposite to each other are fixed to the two corresponding clamping fingers of the clamping cylinder by bolts. The clamping block 655 can slide in the slide groove 652. The elastic force of the multiple elastic components 656 is small enough to be located in the middle position in the slide groove 652 when the clamping block 655 is not subjected to forward or backward force. When the clamping block 655 is subjected to forward or backward force, it will elastically move forward or backward, reducing the force applied to the longitudinal adjustment knob and the transverse adjustment knob in the horizontal forward or backward direction, and effectively improving the adjustment accuracy.

[0026] Based on the above, such as Figures 2 to 4 As shown, the first limiting plate 653 and the clamping body 651 are an integral structure, and the second limiting plate 654 is fixed to the clamping body 651 by bolts. In specific implementation, after the clamping block 655 is slidably installed into the slide groove 652 from one end of the second limiting plate 654, the second limiting plate 654 is fixed to the clamping block 655 by bolts. The operation is simple and the structure is stable.

[0027] Based on the above, such as Figures 2 to 4As shown, the elastic component 656 is a spring. Multiple cylindrical limiting cavities 657 are provided at both ends of the clamping block 655 corresponding to the positions of the first limiting plate 653 and the second limiting plate 654. One end of the elastic component 656 is located within a cylindrical limiting cavity 657. In a specific implementation, the spring is first installed into the cylindrical limiting cavity 657 of the clamping block 655. Then, the clamping block 655 is slidably installed from one end of the second limiting plate 654 into the slide groove 652. Finally, the second limiting plate 654 is fixed to the clamping block 655 with bolts. At this time, the springs at both ends of the clamping block 655 are in a compressed state, maintaining the clamping block 655 in the middle of the slide groove 652. In long-term use, the elastic component 656 is protected by being located within the cylindrical limiting cavity 657, resulting in a longer service life and greater stability during use.

[0028] Based on the above, such as Figures 2 to 4 As shown, elastic pads 658 are provided on one side of each of the two clamping blocks 655. This avoids damage to the longitudinal and transverse adjustment knobs on the needle card adjustment fixing seat 100, and makes the clamping more stable, improving the accuracy for long-term use.

[0029] Based on the above, such as Figure 1 and Figure 2 As shown, the support frame 610 includes two corresponding fixed frames. Each fixed frame has a vertical support groove, and within each groove is a vertically movable sliding frame that is limited by the groove. A horizontal fixed plate 620 is horizontally fixed to the two corresponding vertical sliding frames. Each fixed frame has a row of oblong holes vertically aligned with the support groove, and at least one of these oblong holes contains a fixing bolt for securing the vertical sliding frame within the support groove. In practical implementation, the height of the horizontal fixed plate 620 can be adjusted, improving the practicality of the equipment.

[0030] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An automatic alignment and adjustment device for wafer testing pin chucks, comprising a pin chuck adjustment fixing base (100), wherein the pin chuck adjustment fixing base (100) is horizontally provided with a longitudinal adjustment knob and a lateral adjustment knob for adjusting the horizontal longitudinal and lateral movement and positioning of the pin chucks fixed thereon, characterized in that: The device includes a frame (200), in which a wafer positioning base (300) is provided. A base limiting structure (400) for a positioning pin card adjustment fixing base (100) is provided on one side of the wafer positioning base (300). A first observation mechanism (500) for observing the alignment of the pin card positioned on the pin card adjustment fixing base (100) with the wafer positioned on the wafer positioning base (300) is provided on the side of the base limiting structure (400). Two alignment adjustment mechanisms (600) are also provided for automatically adjusting the longitudinal adjustment knob and the transverse adjustment knob on the pin card adjustment fixing base (100).

2. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 1, characterized in that: The base limiting structure (400) includes a positioning plate located on one side of the wafer positioning base (300). The bottom of the pin card adjusting fixing base (100) is provided with a fixing plate (110). The fixing plate (110) is provided with a plurality of vertically penetrating positioning holes. The positioning plate is provided with a plurality of positioning posts (410) that correspond to and match the positioning holes respectively. The upper end of the positioning post (410) is provided with a frustum-shaped guide structure. The length of the cylindrical part on the lower side of the guide structure on the positioning post (410) is greater than the thickness of the fixing plate (110).

3. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 1, characterized in that: The alignment adjustment mechanism (600) includes a support frame (610), a horizontal fixed plate (620) mounted on the support frame (610), an adjustment drive mechanism mounted on the horizontal fixed plate (620), a clamping mechanism (640) mounted on the adjustment drive mechanism and driven by the adjustment drive mechanism to move horizontally, move horizontally, and rotate vertically, and a clamping rotating head (650) mounted on the clamping mechanism (640) and driven by the clamping mechanism (640) to complete the clamping action. A second observation mechanism (660) is provided on the horizontal fixed plate (620) to observe the position of the clamping rotating head (650).

4. The automatic alignment and adjustment device for wafer testing pins according to claim 3, characterized in that: The adjustment drive mechanism includes a transverse horizontal drive mechanism (631) fixed on a horizontal fixed plate (620), a longitudinal horizontal drive mechanism (632) disposed on the transverse horizontal drive mechanism (631) and driven by the transverse horizontal drive mechanism (631) to move horizontally, and a rotary drive mechanism (633) disposed on the longitudinal horizontal drive mechanism (632) and driven by the longitudinal horizontal drive mechanism (632) to move vertically.

5. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 3, characterized in that: The clamping rotating head (650) includes a clamping block (655) disposed therein that can slide elastically in the horizontal direction.

6. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 5, characterized in that: The clamping rotating head (650) also includes two clamping bodies (651) arranged opposite to each other. A sliding groove (652) for the horizontal sliding of a limiting clamping block (655) is provided on one side of the two clamping bodies (651). A first limiting plate (653) and a second limiting plate (654) are respectively provided on both sides of the sliding groove (652). Multiple elastic components (656) are provided between the two ends of the clamping block (655) in the sliding groove (652) and the first limiting plate (653) and the second limiting plate (654).

7. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 6, characterized in that: The first limiting plate (653) and the clamping body (651) are an integral structure, and the second limiting plate (654) is fixed to the clamping body (651) by bolts.

8. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 6, characterized in that: The elastic component (656) is a spring. Both ends of the clamping block (655) are provided with multiple columnar limiting cavities (657) corresponding to the positions of the first limiting plate (653) and the second limiting plate (654). One end of the elastic component (656) is located in the columnar limiting cavity (657).

9. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 5, characterized in that: An elastic pad (658) is provided on one side of each of the two clamping blocks (655).

10. The automatic alignment and adjustment device for wafer testing pin chucks according to claim 3, characterized in that: The support frame (610) includes two corresponding fixed frames. Each fixed frame has a vertical support groove. Each support groove has a vertical sliding frame that can move vertically by being limited by the support groove. The horizontal fixed plate (620) is horizontally fixed on the two corresponding vertical sliding frames. Each fixed frame has a row of oblong holes in the vertical direction opposite to the support groove. At least one of the oblong holes has a fixing bolt for fixing the vertical sliding frame in the support groove.

Images