Supporting device and process equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a supporting device and process equipment, and aims to solve the problems that when a boat structure is supported by two parallel round rods, anti-rotation structures need to be arranged at the ends of the round rods to prevent the round rods from rotating, and the production cost is high due to the fact that the anti-rotation structures are complex. According to the supporting device, at least one end of each supporting rod is provided with a first connecting plane in the circumferential direction, at least two supporting pieces are provided with second connecting planes, the second connecting planes are attached to the first connecting planes, namely, the two planes are attached, so that the supporting pieces support the ends of the supporting rods, and the supporting rods can be prevented from rotating relative to the supporting pieces in the circumferential direction; therefore, an anti-rotation structure does not need to be additionally arranged at the end of the supporting rod, the supporting device is simple in structure and convenient to assemble, and the production cost is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a support device and process equipment. Background Technology

[0002] In the semiconductor and photovoltaic industries, boat structures are commonly used to support sheet materials during processing in manufacturing equipment. The process chamber of the equipment is equipped with a support structure. The boat structure carrying the sheet material is fed into the process chamber and then placed on the support structure for processing. After processing, the boat structure is removed from the support structure and transported out of the process chamber. Therefore, the support structure needs to be able to stably support the boat structure.

[0003] However, the existing support structure supports the boat structure with two parallel round rods. In order to ensure the stability of the support structure, an anti-rotation structure is required at the end of the round rods to prevent the round rods from rotating. The anti-rotation structure is relatively complex, resulting in high production costs. Utility Model Content

[0004] In view of this, embodiments of this application provide a support device and process equipment to solve the problem that supporting a boat structure with two parallel round rods requires an anti-rotation structure at the end of the round rods to prevent the round rods from rotating, and that the anti-rotation structure is relatively complex, resulting in high production costs.

[0005] In a first aspect, one embodiment of this application provides a support device applied to process equipment. The process equipment includes a process cavity having a process chamber configured to accommodate at least one boat structure. The support device can be disposed in the process cavity. The support device includes: two support rods, at least one end of which has a first connecting plane in the circumferential direction, the two support rods being used to support at least one boat structure; and at least two support members, which can be connected to the process cavity and have a second connecting plane, the second connecting plane being abutted against the first connecting plane so that the support members support the ends of the support rods.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the cross-sectional shape of the outer surface of the support rod includes a polygon.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the support device further includes: at least one first insulating seat disposed on at least one support rod for supporting at least one part of the boat structure and insulating the boat structure from the support rod; wherein the length direction of the support rod is parallel to the horizontal direction, and the side of the first insulating seat facing the support rod has a first groove, the shape of the first groove being adapted to the shape of the upper part of the support rod.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the support rod has at least one limiting portion in the circumferential direction, and the first insulating seat has at least one limiting mating portion, the limiting portion and the limiting mating portion being adapted to limit the first insulating seat.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the process equipment has a first power supply component, and the support device further includes: at least two second insulating seats, respectively disposed on two support rods, each second insulating seat having a second groove on the side facing the support rod, the shape of the second groove being adapted to the shape of the upper part of the support rod; at least two electrode assemblies, respectively disposed on at least two second insulating seats, the electrode assemblies being configured to be electrically connected to the first power supply component, each electrode assembly having a second boat structure contact surface; wherein, the first insulating seat has a first boat structure contact surface, the first boat structure contact surface and the second boat structure contact surface being located on the same surface to jointly support the boat structure.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the electrode assembly includes: an electrode base disposed on a second insulating base and configured to be electrically connected to a first power supply assembly; and an electrode block disposed on the electrode base, detachably connected to the electrode base, and having a second boat-shaped contact surface.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the electrode holder has a positioning part, and the electrode block has a positioning mating part, wherein the positioning part and the positioning mating part are adapted to position the electrode block.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the electrode holder has a hollow portion on the side facing the electrode block; the electrode block has a boat-structure contact portion, the boat-structure contact portion is disposed in the hollow portion, and the boat-structure contact portion has a second boat-structure contact surface.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the first side of the electrode holder has a first through hole, the second side of the electrode holder has a threaded portion, the first side and the second side of the electrode holder are disposed opposite to each other, the second insulating seat has a second through hole, the support rod has a third through hole, and the support device further includes: a first insulating sleeve, which passes through at least the third through hole; and a fixing member, the first end of which is located on the first side of the electrode holder, the second end of which passes through the first through hole, the second through hole and the first insulating sleeve, and is screwed to the threaded portion.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the support member has at least one limiting groove, the bottom of the limiting groove forming a second connecting plane, and the sidewall of the limiting groove being configured to restrict the movement of the support rod in a horizontal direction perpendicular to the length direction of the support rod.

[0015] Secondly, one embodiment of this application provides a process apparatus, including: a process cavity having a process chamber configured to accommodate at least one boat structure; and a support device mentioned in any of the first aspects, disposed in the process cavity and configured to support at least one boat structure.

[0016] In conjunction with the second aspect, in some implementations of the second aspect, the process cavity includes a furnace tube, and at least one support member of the support device is disposed at the end of the furnace tube.

[0017] In the support device provided in this embodiment, at least one end of each support rod has a first connecting plane in the circumferential direction, and at least two support members have a second connecting plane. The second connecting plane is attached to the first connecting plane, that is, the two planes are attached, so that the support member supports the end of the support rod and can prevent the support rod from rotating relative to the support member in the circumferential direction. Thus, it is not necessary to install an anti-rotation structure at the end of the support rod. In addition, the structure of the support device is simple, easy to assemble, and reduces manufacturing and maintenance costs. Attached Figure Description

[0018] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 The diagram shown is a structural schematic of a process equipment provided in an embodiment of this application.

[0020] Figure 2 The diagram shown is a structural schematic of an application scenario for a support device provided in an embodiment of this application.

[0021] Figure 3 The image shown is an embodiment provided by this application. Figure 2 A schematic diagram of the left-side view of the application scenario applicable to the support device.

[0022] Figure 4 The diagram shown is a structural schematic of an application scenario for a support device provided by another embodiment of this application.

[0023] Figure 5 The image shown is an embodiment provided by this application. Figure 4 Enlarged diagram of point A in the middle.

[0024] Figure 6 The image shown is an embodiment provided by this application. Figure 4 Enlarged diagram of point B in the middle.

[0025] Figure 7 The diagram shown is a structural schematic of a support rod provided in an embodiment of this application.

[0026] Figure 8 The image shown is an embodiment provided by this application. Figure 7 Enlarged diagram of point C in the middle.

[0027] Figure 9 The image shown is an exploded view of the end of the support rod, the pin, and the support member provided in an embodiment of this application.

[0028] Figure 10 The diagram shown is a structural schematic of an electrode holder provided in an embodiment of this application.

[0029] Figure 11 The diagram shown is a schematic left-side view of an electrode holder provided in an embodiment of this application.

[0030] Figure 12 The diagram shown is a structural schematic of an electrode block provided in an embodiment of this application.

[0031] Figure 13 The diagram shown is a schematic left-side view of an electrode block provided in an embodiment of this application.

[0032] Figure 14 The image shown is an embodiment provided by this application. Figure 8 The diagram shows a cross-sectional view of the support rod along line DD.

[0033] Figure 15 The diagram shown is a structural schematic of an electrode block provided in another embodiment of this application.

[0034] Figure 16 The diagram shown is a schematic left-view view of an electrode block provided in another embodiment of this application.

[0035] Figure 17 The diagram shown is a structural schematic of an application scenario for a support device provided in another embodiment of this application.

[0036] Figure 18 The image shown is an embodiment provided by this application. Figure 17 Enlarged diagram of point E in the middle.

[0037] Figure 19 The diagram shown is a structural schematic of an electrode support provided in an embodiment of this application.

[0038] Figure 20 The diagram shown is a structural schematic of an electrode connection block provided in an embodiment of this application.

[0039] Figure label:

[0040] 1. Process equipment; 10. Support device; 11. Support rod; 110. First connecting plane; 111. First pin hole; 112. Hollow structure; 113. First limiting protrusion; 114. Third through hole; 115. Limiting part; 12. Support member; 120. Second connecting plane; 121. Second pin hole; 122. Limiting groove; 13. Pin; 14. First insulating seat; 140. First clearance part; 141. First limiting groove; 142. First boat structure contact surface; 143. First groove; 144. Limiting mating part; 15. Second insulating seat; 150. Second groove; 151. Second through hole; 152. Second clearance part; 16. Electrode assembly; 160. Second boat structure contact surface; 161. Electrode seat; 1610. First positioning groove; 1611. Hollowed-out part; 1612. Third groove; 161 3. First side of electrode holder; 1614. First through hole; 1615. Second side of electrode holder; 1616. Threaded part; 1617. Hollowed-out clearance part; 1618. Positioning part; 162. Electrode block; 1620. First positioning protrusion; 1621. Boat structure contact part; 1622. Electrode block body; 1623. Lifting ring; 1624. Guide hole; 1625. Positioning mating part; 163. Electrode support seat; 1630. Fourth groove; 1631. Side part; 1632. Connecting part; 164. Electrode connecting block; 17. First insulating sleeve; 18. Fixing member; 20. Process cavity; 21. Process chamber; 30. Boat structure; 31. First boat foot; 32. Second boat foot; 40. First power supply assembly; 41. Power supply rod; 410. Second insulating sleeve; 42. Connecting member; X. Length direction of support rod. Detailed Implementation

[0041] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0042] Figure 1 The diagram shown is a structural schematic of a process equipment provided in an embodiment of this application. Figure 2 The diagram shown is a structural schematic of an application scenario for a support device provided in an embodiment of this application. Figure 3 The image shown is an embodiment provided by this application. Figure 2 A schematic diagram of the left-side view of the application scenario applicable to the support device. Figure 4 The diagram shown is a structural schematic of an application scenario for a support device provided by another embodiment of this application. Figure 5 The image shown is an embodiment provided by this application. Figure 4 Enlarged diagram of point A in the middle. Figure 6 The image shown is an embodiment provided by this application. Figure 4 Enlarged diagram of point B in the middle. Figure 7 The diagram shown is a structural schematic of a support rod provided in an embodiment of this application. Figure 8 The image shown is an embodiment provided by this application. Figure 7 Enlarged diagram of point C in the middle. Figure 9 The image shown is an exploded view of the end of the support rod, the pin, and the support member provided in an embodiment of this application.

[0043] like Figures 1 to 9 As shown, the support device 10 is applied to process equipment 1. Process equipment 1 includes a process cavity 20. The process cavity 20 has a process chamber 21. The process chamber 21 is configured to accommodate at least one boat structure 30.

[0044] Exemplarily, the boat structure 30 can be any structure capable of supporting sheet material. Exemplarily, the material of the boat structure 30 may include graphite. The boat structure 30 may be assembled from multiple boat sheets. The boat sheets may be graphite sheets. The sheet material may include silicon wafers, solar cells, wafers, etc.

[0045] Exemplarily, the process apparatus 1 can be any apparatus capable of processing sheet materials. Exemplarily, the process apparatus 1 can include a vapor deposition apparatus. For example, the process apparatus 1 can include a chemical vapor deposition apparatus. Further, the process apparatus 1 can be a plasma-enhanced chemical vapor deposition (PECVD) apparatus.

[0046] The support device 10 can be disposed in the process cavity 20. The support device 10 includes: two support rods 11 and at least two support members 12.

[0047] At least one end of the support rod 11 has a first connecting plane 110 in the circumferential direction. Two support rods 11 are used to support at least one boat structure 30. A support member 12 is connectable to a process cavity 20 and has a second connecting plane 120. The second connecting plane 120 fits against the first connecting plane 110 so that the support member 12 supports the end of the support rod 11.

[0048] Exemplarily, the bottom of the boat structure 30 has two protruding first boat feet 31 and two second boat feet 32. Exemplarily, the first boat feet 31 can be electrically connected to an odd-numbered sequence of boat segments, and the second boat feet 32 ​​can be electrically connected to an even-numbered sequence of boat segments. Exemplarily, the first boat feet 31 can be electrically connected to an even-numbered sequence of boat segments, and the second boat feet 32 ​​can be electrically connected to an odd-numbered sequence of boat segments.

[0049] In some embodiments, the boat structure 30 may be a vertical boat structure. Multiple boat segments are arranged vertically. A support rod 11 may be used to support a first boat foot 31 and a second boat foot 32. Another support rod 11 may be used to support another first boat foot 31 and another second boat foot 32.

[0050] In other embodiments, the boat structure 30 may be a horizontal boat structure. Multiple boat segments are arranged horizontally. One support rod 11 may be used to support two first boat feet 31. Another support rod 11 may be used to support two second boat feet 32.

[0051] The material of the support rod 11 can be set according to actual needs. For example, the material of the support rod 11 may include at least one of ceramic, silicon carbide, and metal.

[0052] Specifically, by fitting the first connecting plane 110 and the second connecting plane 120 together, the end of the support rod 11 is supported by the support member 12, which prevents the support rod 11 from rotating relative to the support member 12 in the circumferential direction.

[0053] For example, the end of the support rod 11 may have multiple planes in the circumferential direction, each plane serving as a first connecting plane 110 that fits against a second connecting plane 120. This can shorten the time for identifying the first connecting plane 110 during the assembly of the support device 10, thereby accelerating the assembly efficiency.

[0054] For example, such as Figure 5 and Figure 9 As shown, the two ends of the support rod 11 are provided with a first connecting plane 110 in the circumferential direction, which can further prevent the support rod 11 from rotating relative to the support member 12 in the circumferential direction, and further enhance the stability of the support device 10.

[0055] Specifically, the support member 12 has at least one second connecting plane 120. The number of support members 12, and the number of second connecting planes 120 in each support member 12, can be set according to the number of ends of the support rod 11 having first connecting planes 110. For example, as Figure 5 and Figure 9 As shown, the support member 12 can be a support block. Each support member 12 has a second connecting plane 120. Each end of the two support rods 11 has a first connecting plane 110. Four support members 12 can be provided to support the two support rods.

[0056] In another embodiment, the support member 12 can be a flange. The flange has two bosses, each boss having a second connecting plane 120. One support member 12 can simultaneously support one end of two support rods 11. Exemplarily, the bosses and the flange can be integrally formed or fixedly connected.

[0057] For example, such as Figure 9 As shown, the end of the support rod 11 with the first connecting plane 110 also has a first pin hole 111. The support member 12 has a second pin hole 121. The support device 10 also includes at least one pin 13. The pin 13 is inserted into the first pin hole 111 and the second pin hole 121. This fixes the support rod 11 to the support member 12, reducing the displacement of the support rod 11 due to thermal expansion and contraction when the ambient temperature changes, and helping to maintain the position of the support rod 11. Exemplarily, the orthographic projection of the first pin hole 111 at the end of the support rod 11 is surrounded by the orthographic projection of the first connecting plane 110 at the end of the support rod 11. Exemplarily, the second pin hole 121 can be a through hole or a countersunk hole.

[0058] In the support device 10 provided in this embodiment, at least one end of each support rod 11 has a first connecting plane 110 in the circumferential direction, and at least two support members 12 have a second connecting plane 120. The second connecting plane 120 is attached to the first connecting plane 110, that is, the two planes are attached, so that the support member 12 supports the end of the support rod 11, which can prevent the support rod 11 from rotating relative to the support member 12 in the circumferential direction. Therefore, it is not necessary to install an anti-rotation structure at the end of the support rod 11. Furthermore, the support device 10 has a simple structure, is easy to assemble, and reduces manufacturing and maintenance costs.

[0059] In some embodiments, such as Figure 9 As shown, the support member 12 has at least one limiting groove 122. The bottom of the limiting groove 122 forms a second connecting plane 120. The sidewall of the limiting groove 122 is configured to restrict the movement of the support rod 11 in the horizontal direction perpendicular to the length direction X of the support rod.

[0060] By setting the limiting groove 122, the support rod 11 can be quickly placed into the limiting groove 122 when assembling the support device 10, thus completing the installation of the support rod 11 on the support member 12. Furthermore, during the process, the side wall of the limiting groove 122 can also restrict the movement of the support rod 11 in the horizontal direction perpendicular to the length direction X of the support rod, thereby improving the stability of the support device 10.

[0061] For example, the opening of the limiting groove 122 faces the end of the support rod 12.

[0062] As market demand continues to increase, the requirements for the capacity of process equipment are also constantly rising. Boat structures are becoming increasingly larger to support more sheet materials during processing, leading to increased weight. Furthermore, in some applications, a pair of support rods in the support system needs to support at least two boat structures. This places higher demands on the bending resistance of the support rods. When the deformation of the support rods is significant, the support system cannot stably support the boat structure, which may shift or sink during the process, affecting the flow and uniformity of process gases within the process chamber, thus impacting the process performance.

[0063] To address the aforementioned issues, in some embodiments, the cross-sectional shape of the outer surface of the support rod 11 includes a polygon. Under the same stress conditions and with equal support rod lengths, when the diameter of the inscribed circle of the cross-section of the outer surface of the polygonal support rod 11 is equal to the diameter of the cross-section of the outer surface of the circular support rod, the support rod 11 with a polygonal cross-sectional shape has higher bending resistance.

[0064] Furthermore, since the inscribed circle diameters of the two types of support rods are equal, the volume of the support rod 11 with a polygonal cross-sectional shape on its outer surface is more similar to that of the support rod with a circular cross-sectional shape on its outer surface, thus occupying less installation space.

[0065] For example, the cross-sectional shape of the outer surface of the support rod 11 is rectangular. The planes of the outer surface of the support rod 11 can be connected by inclined planes or curved surfaces to form chamfers or rounded edges.

[0066] For example, the cross-sectional shape of the outer surface of the support rod 11 includes a regular polygon. This helps to further reduce the installation space occupied by the support rod 11. For example, the cross-sectional shape of the outer surface of the support rod 11 is a single polygon. This facilitates the manufacturing of the support rod 11.

[0067] For example, the support rod 11 is a hollow rod. This arrangement can reduce the weight of the support rod 11 and reduce the burden on the support member 12. For example, the support rod 11 has a hollow structure 112 that passes through the support rod 11 along its length direction X.

[0068] For example, the cross-sectional shape of the inner surface of the support rod 11 includes a polygon. For example, the cross-sectional shape of the inner surface of the support rod 11 is the same as the cross-sectional shape of the outer surface of the support rod 11. Under the same stress conditions, with equal support rod lengths and wall thicknesses, when the diameter of the inscribed circle of the cross-section of the inner surface of the polygonal hollow support rod 11 is equal to the diameter of the cross-section of the inner surface of the circular hollow support rod, the hollow support rod 11 with a polygonal inner surface cross-sectional shape has higher bending resistance. This configuration improves the bending resistance of the support rod 11.

[0069] In some applications, during the manufacturing process, the process equipment 1 provides radio frequency signals to the boat structure 30. To prevent the boat structure 30 from being electrically connected to the support rod 11 during the manufacturing process, in some embodiments, the support device 10 further includes at least one first insulating seat 14. The first insulating seat 14 is disposed on at least one support rod 11 to support at least one part of the boat structure 30 and to insulate the boat structure 30 from the support rod 11.

[0070] Exemplarily, the material of the first insulating base 14 may include a high-temperature resistant insulating material. For example, the material of the first insulating base 14 may include ceramic. Exemplarily, one first insulating base 14 may support one or both boat feet of the boat structure 30. Exemplarily, as... Figure 2 As shown, a first insulating seat 14 can support the boat feet of two adjacent boat structures 30. Exemplarily, boat feet that are farther apart can each be supported by a first insulating seat 14 to reduce the length of the first insulating seat 14, reduce the total weight of the first insulating seat 14, and reduce the pressure on the support rod 11.

[0071] For example, such as Figure 3 and Figure 6 As shown, the first insulating base 14 has a first clearance portion 140. The first clearance portion 140 is used to prevent the first insulating base 14 from interfering with the boat structure 30. Exemplarily, the first clearance portion 140 can be beveled or arc-shaped. The shape of the first clearance portion 140 can be set according to the shape of the boat foot.

[0072] In some embodiments, such as Figure 3 and Figure 6 As shown, the length direction X of the support rod is parallel to the horizontal direction. The first insulating seat 14 has a first groove 143 on the side facing the support rod 11. The shape of the first groove 143 is adapted to the shape of the upper part of the support rod 11. Since the cross-sectional shape of the outer surface of the support rod 11 includes polygons, the first groove 143 can be formed by splicing multiple planar groove walls, so that the first insulating seat 14 can be stably set on the first insulating seat 14 and is not easily rotated around the circumference of the support rod 11.

[0073] Exemplarily, the cross-sectional shape of the first insulating base 14 includes an "n" shape. Exemplarily, the first insulating base 14 may partially surround the support rod 11. This arrangement simplifies the structure of the first insulating base 14 and facilitates assembly and disassembly. For example, the first insulating base 14 surrounds the upper part of the support rod 11.

[0074] In some embodiments, the support rod 11 has at least one limiting portion 115 in the circumferential direction. The first insulating seat 14 has at least one limiting mating portion 144. The limiting portion 115 is adapted to the limiting mating portion 144 to limit the first insulating seat 14. Specifically, the limiting portion 115 and the limiting mating portion 144 cooperate to limit the first insulating seat 14. Exemplarily, the limiting portion 115 and the limiting mating portion 144 are adapted one-to-one. Exemplarily, one limiting portion 115 is adapted to multiple limiting mating portions 144. In some embodiments, such as Figure 6 As shown, the support rod 11 has at least one first limiting protrusion 113 in its circumferential direction. The first insulating seat 14 has at least one first limiting groove 141. The first limiting protrusion 113 extends into the first limiting groove 141 to limit the first insulating seat 14. That is, the limiting part 115 may include the first limiting protrusion 113. The limiting mating part 144 may include the first limiting groove 141. By providing the first limiting protrusion 113 and the first limiting groove 141, the position of the first insulating seat 14 in the length direction X of the support rod can be limited, preventing the first insulating seat 14 from moving along the support rod 11.

[0075] Exemplarily, the first limiting groove 141 may be disposed on the top and / or side wall of the first insulating base 14. Exemplarily, the first limiting groove 141 may be a recessed groove or a through groove. Figure 6 As shown, the first insulating base 14 has two first limiting grooves 141 on both side walls.

[0076] For example, the first limiting protrusion 113 can be provided on the support rod 11 by welding or integral molding.

[0077] In some embodiments, the support rod 11 has at least one second limiting groove in its circumferential direction. The first insulating seat 14 has at least one second limiting protrusion. The second limiting protrusion extends into the second limiting groove to limit the first insulating seat 14. That is, the limiting portion 115 may include the second limiting groove. The limiting mating portion 144 may include the second limiting protrusion. By providing the second limiting groove and the second limiting protrusion, the position of the first insulating seat 14 in the length direction X of the support rod can be limited, preventing the first insulating seat 14 from moving along the support rod 11.

[0078] For example, the second limiting protrusion may be provided on the top and / or side wall of the first insulating seat 14. For example, the second limiting groove may be a recessed groove or a through groove.

[0079] In some application scenarios, the process equipment 1 needs to provide radio frequency signals to the boat structure 30 through the support device 10. Therefore, in some embodiments, such as Figures 3 to 8As shown, the process equipment 1 has a first power supply assembly 40. The support device 10 also includes at least two second insulating seats 15 and at least two electrode assemblies 16.

[0080] At least two second insulating seats 15 are respectively disposed on two support rods 11. Each second insulating seat 15 has a second groove 150 on the side facing the support rod 11, the shape of which is adapted to the shape of the upper part of the support rod 11. At least two electrode assemblies 16 are respectively disposed on the at least two second insulating seats 15. The electrode assemblies 16 are configured to be electrically connected to the first power supply assembly 40. Each electrode assembly 16 has a second boat-shaped contact surface 160.

[0081] The first insulating base 14 has a first boat structure contact surface 142. The first boat structure contact surface 142 and the second boat structure contact surface 160 are located on the same surface to jointly support the boat structure 30.

[0082] Specifically, the first power supply component 40 is used to provide radio frequency signals to the boat structure 30 through the electrode assembly 16. The second insulating base 15 can be used to insulate and separate the electrode assembly 16 from the support rod 11, preventing the support rod 11 from being energized during the process and causing safety hazards. Exemplarily, the second insulating base 15 can be set one-to-one with the electrode assembly 16. Exemplarily, when the support rod 11 is an insulator, the second insulating base 15 can be omitted, and the electrode assembly 16 can be directly set on the support rod 11.

[0083] For example, one boat structure 30 may have two corresponding electrode assemblies 16. For instance, one electrode assembly 16 may be configured to be electrically connected to a first boat foot 31, and the other electrode assembly 16 may be configured to be electrically connected to a second boat foot 32. For example, one electrode assembly 16 may be mounted on one support rod 11, and the other electrode assembly 16 may be mounted on another support rod 11. For example, when radio frequency signals need to be provided to both boat structures 30 via the support device 10, four electrode assemblies 16 may be provided.

[0084] For example, such as Figures 3 to 5 As shown, the first power supply assembly 40 includes at least two power supply rods 41 and at least two connectors 42. The power supply rods 41 are electrically connected to the electrode assembly 16. Each connector 42 is capable of electrically connecting the power supply rod 41 to one electrode of the power supply. Each electrode assembly 16 can be electrically connected to one power supply rod 41. Exemplarily, a boat structure 30 can correspond to two power supply rods 41, one power supply rod 41 being connected to the positive electrode of the power supply, and the other power supply rod 41 being connected to the negative electrode of the power supply.

[0085] For example, the power supply rod 41 is disposed on the side of one support rod 11 away from the other support rod 11. For example, at least one second insulating sleeve 410 may be fitted onto the power supply rod 41. The second insulating sleeve 410 insulates and separates the power supply rod 41 from the support rod 11, preventing the support rod 11 from being energized.

[0086] The second insulating seat 15 has a similar structure to the first insulating seat 14. Since the cross-sectional shape of the outer surface of the support rod 11 is polygonal, the second groove 150 can be formed by splicing together multiple planar groove walls, allowing the first insulating seat 14 to be stably mounted on it and preventing it from easily rotating around the support rod 11. Exemplarily, the cross-sectional shape of the second insulating seat 15 is "n"-shaped. Exemplarily, the second insulating seat 15 can partially surround the support rod 11. This arrangement simplifies the structure of the second insulating seat 15 and facilitates assembly and disassembly. For example, the second insulating seat 15 can surround the upper part of the support rod 11.

[0087] The first boat structure contact surface 142 is the plane on which the first insulating seat 14 contacts the boat structure 30. The second boat structure contact surface 160 is the plane on which the electrode assembly 16 contacts the boat structure 30. The first boat structure contact surface 142 and the second boat structure contact surface 160 are located on the same plane, which enables the boat structure 30 to be stably supported.

[0088] Furthermore, since the second insulating seat 15 is also provided with an electrode assembly 16, the dimension of the second insulating seat 15 along the direction of the support rod 11 toward the second insulating seat 15 (also referred to as the thickness of the second insulating seat 15) can be smaller than the dimension of the first insulating seat 14 along the direction of the support rod 11 toward the first insulating seat 14 (also referred to as the thickness of the first insulating seat 14), so that the first boat structure contact surface 142 and the second boat structure contact surface 160 are located on the same surface.

[0089] The support device 10 provided in this embodiment also includes at least two second insulating seats 15 and at least two electrode assemblies 16. The electrode assemblies 16 and the support rod 11 are insulated and separated by the second insulating seats 15. At least two electrode assemblies 16 are electrically connected to the first power supply assembly 40, so that the support device 10 can provide radio frequency signals to at least one boat structure 30, making the support device 10 suitable for more application scenarios.

[0090] In some embodiments, the process apparatus 1 further includes a second power supply component. The boat structure 30 has two electrode holes. The second power supply component is configured to provide radio frequency signals to at least one boat structure by being inserted into the two electrode holes of at least one boat structure 30. This power supply method eliminates the need for the aforementioned electrode component 16 to be provided for the boat structure.

[0091] In some embodiments, the support rod 11 has at least one third limiting protrusion in its circumferential direction. The second insulating seat 15 has at least one third limiting groove. The third limiting protrusion extends into the third limiting groove to limit the second insulating seat 15. By providing the third limiting protrusion and the third limiting protrusion, the position of the second insulating seat 15 in the length direction X of the support rod can be limited, preventing the second insulating seat 15 from moving along the support rod 11.

[0092] In some embodiments, the support rod 11 has at least one fourth limiting groove in its circumferential direction. The second insulating seat 15 has at least one fourth limiting protrusion. The fourth limiting protrusion extends into the fourth limiting groove to limit the second insulating seat 15. By providing the fourth limiting groove and the fourth limiting protrusion, the position of the second insulating seat 15 in the length direction X of the support rod can be defined, preventing the second insulating seat 15 from moving along the support rod 11.

[0093] In some embodiments, the second insulating base 15 has a second clearance portion 152. The second clearance portion 152 is used to prevent the second insulating base 15 from interfering with the boat structure 30. Exemplarily, the second clearance portion 152 may be beveled or arc-shaped. The shape of the second clearance portion 152 may be set according to the shape of the boat foot.

[0094] Figure 10 The diagram shown is a structural schematic of an electrode holder provided in an embodiment of this application. Figure 11 The diagram shown is a schematic left-side view of an electrode holder provided in an embodiment of this application. Figure 12 The diagram shown is a structural schematic of an electrode block provided in an embodiment of this application. Figure 13 The diagram shown is a schematic left-side view of an electrode block provided in an embodiment of this application.

[0095] In some embodiments, such as Figures 3 to 13 As shown, the electrode assembly 16 includes an electrode base 161 and an electrode block 162. The electrode base 161 is disposed on a second insulating base 15 and configured to be electrically connected to a first power supply assembly 40. The electrode block 162 is disposed on the electrode base 161, detachably connected to the electrode base 161, and has a second boat-shaped contact surface 160.

[0096] Specifically, both the electrode holder 161 and the electrode block 162 are made of conductive materials. The electrode holder 161 is electrically connected to the electrode block 162. The first power supply component 40 provides radio frequency signals to the electrode block 162 through the electrode holder 161.

[0097] In the support device 10 provided in this embodiment, the electrode block 162 and the electrode seat 161 are detachably connected. Since frequent process treatments may affect the conductivity of the electrode block 162, such as frequent coating processes that will cause the surface of the electrode block 162 to be coated, resulting in the conductivity of the electrode block 162 easily deteriorating. This arrangement facilitates the replacement of new electrode seats 162, so that the electrode assembly 16 can continuously maintain good conductivity.

[0098] Furthermore, since the electrode assembly 16 has an electrode base 161 that is electrically connected to the first power supply assembly 40, when replacing the electrode block 162, it is only necessary to remove the electrode block 162 from the electrode base 161. The electrode base 161 and the first power supply assembly 40 can remain in their original state, which improves the device maintenance efficiency.

[0099] In some embodiments, such as Figure 5 , Figure 10 and Figure 13 As shown, the electrode holder 161 has a positioning part 1618, and the electrode block 162 has a positioning mating part 1625. The positioning part 1618 and the positioning mating part 1625 are adapted to position the electrode block 162. The number of positioning parts 1618 and the number of positioning mating parts 1625 can both be greater than or equal to one. Specifically, the positioning part 1618 and the positioning mating part 1625 cooperate to position the electrode block 162. Exemplarily, the positioning part 1618 and the positioning mating part 1625 are adapted one-to-one. Exemplarily, one positioning part 1618 is adapted to multiple positioning mating parts 1625.

[0100] In some embodiments, such as Figure 5 , Figure 10 and Figure 13 As shown, the electrode holder 161 has a first positioning groove 1610, and the electrode block 162 has a first positioning protrusion 1620, which extends into the first positioning groove 1610. That is, the positioning part 1618 may include the first positioning groove 1610. The positioning mating part 1625 may include the first positioning protrusion 1620. This arrangement facilitates the positioning of the electrode block 162 on the electrode holder 161, allowing the second boat structure contact surface 160 on the electrode block 162 to accurately contact the boat structure 30.

[0101] For example, the number of first positioning slots 1610 and the number of first positioning protrusions 1620 can both be greater than or equal to one. For example, the first positioning slots 1610 and the first positioning protrusions 1620 are configured in a one-to-one correspondence.

[0102] For example, the cross-sectional shape of the first positioning groove 1610 and the first positioning protrusion 1620 can both be polygonal. This arrangement can prevent the electrode block 162 from rotating relative to the electrode base 161, simplifying the structure and allowing the electrode block 162 to be placed directly on the electrode base 161, facilitating the replacement of the electrode block 162.

[0103] In some embodiments, the electrode holder 161 has a second positioning protrusion, and the electrode block 162 has a second positioning groove, with the second positioning protrusion extending into the second positioning groove. That is, the positioning portion 1618 may include the second positioning protrusion. The positioning mating portion 1625 may include the second positioning groove. This embodiment provides another method for positioning the electrode block 162 on the electrode holder 161. The specific method for positioning the electrode block 162 on the electrode holder 161 can be set according to actual needs.

[0104] In some embodiments, such as Figure 5 , Figure 10 and Figure 12 As shown, the electrode holder 161 has a hollow portion 1611 on the side facing the electrode block 162. The electrode block 162 has a boat-structure contact portion 1621, which is disposed in the hollow portion 1611. The boat-structure contact portion 1621 has a second boat-structure contact surface 160.

[0105] By providing a hollow portion 1611 on the electrode holder 161, the boat structure contact portion 1621 can be brought closer to the second insulating seat 15, thereby reducing the dimension of the electrode assembly 16 in the direction from the second insulating seat 15 toward the boat structure contact portion 1621. Since the first boat structure contact surface 142 and the second boat structure contact surface 160 are located on the same plane, the dimension of the first insulating seat 14 in the direction from the support rod 11 toward the first insulating seat 14 (also referred to as the thickness of the first insulating seat 14) can be set smaller, reducing the burden on the support rod 11.

[0106] In some embodiments, such as Figure 5 and Figure 10 As shown, the electrode holder 161 has a hollowed-out clearance portion 1617 on the side facing the electrode block 162. The hollowed-out clearance portion 1617 is located on the electrode holder 161 near the boat structure 30. This arrangement can prevent the electrode holder 161 from being electrically connected to the boat structure 30 at positions other than the position that contacts the second boat structure contact surface 160.

[0107] In some embodiments, such as Figure 10 and Figure 11 As shown, the electrode holder 161 has a third groove 1612 on the side facing the second insulating seat 15, and the shape of the third groove 1612 is adapted to the shape of the upper part of the second insulating seat 15.

[0108] For example, the second insulating base 15 has multiple planes on the side facing the electrode base 161. The normals of these multiple planes are all perpendicular to the length direction X of the support rod. This arrangement makes it difficult for the electrode base 161 to rotate circumferentially around the second insulating base 15.

[0109] Exemplarily, the cross-sectional shape of the electrode holder 161 includes an "n" shape. Exemplarily, the electrode holder 161 can be a semi-enclosed structure. This arrangement simplifies the structure of the electrode holder 161 and facilitates assembly and disassembly.

[0110] Figure 14 The image shown is an embodiment provided by this application. Figure 8 The diagram shows a cross-sectional view of the support rod along line DD. In some embodiments, such as... Figure 14 As shown, the first side 1613 of the electrode holder has a first through hole 1614, and the second side 1615 of the electrode holder has a threaded portion 1616. The first side 1613 and the second side 1615 of the electrode holder are disposed opposite to each other. The second insulating seat 15 has a second through hole 151. The support rod 11 has a third through hole 114.

[0111] The support device 10 further includes a first insulating sleeve 17 and a fixing member 18. The first insulating sleeve 17 passes through at least the third through hole 114. The first end 180 of the fixing member is located on the first side 1613 of the electrode holder, and the second end 181 of the fixing member passes through the first through hole 1614, the second through hole 151 and the first insulating sleeve 17, and is screwed to the threaded portion 1616. This arrangement allows the fixing member 18 to fix the electrode holder 161 to the support rod 11, preventing the electrode holder 161 from tipping over, and also insulates and separates the support rod 11 and the fixing member 18 through the first insulating sleeve 17, preventing the fixing member 18 from being electrically connected to the support rod 11.

[0112] Exemplarily, the first side 1613 and the second side 1615 of the electrode holder are arranged opposite each other in a horizontal direction perpendicular to the length direction X of the support rod. Exemplarily, the first insulating sleeve 17 may also pass through the second through hole 151 and the third through hole 114. Exemplarily, the threaded portion 1616 may be a threaded hole.

[0113] Specifically, the material of the first insulating sleeve 17 includes an insulating material. For example, the material of the first insulating sleeve 17 may be a ceramic material. Exemplarily, the fastener 18 may include at least one of screws and bolts.

[0114] In one embodiment, such as Figure 12 and Figure 13 As shown, the electrode block 162 has at least one guide hole 1624. This arrangement allows the electrode block 162 to be lifted using the guide hole 1624, facilitating quick disassembly of the electrode block 162. Exemplarily, the guide hole 1624 is located on the upper part of the electrode block 162.

[0115] Figure 15 The diagram shown is a structural schematic of an electrode block provided in another embodiment of this application. Figure 16 The diagram shown is a schematic left-view view of an electrode block provided in another embodiment of this application.

[0116] One embodiment of this application also provides another electrode block 162. For example... Figure 15 and Figure 16 As shown, the electrode block 162 includes an electrode block body 1622 and at least one lifting ring 1623. The lifting ring 1623 is disposed on the electrode block body 1622. By providing the lifting ring 1623, the electrode block 162 can be quickly disassembled.

[0117] Exemplarily, the lifting ring 1623 is disposed above the electrode block body 1622. Exemplarily, the lifting ring 1623 is disposed on the side of the electrode block body 1622 away from the electrode seat 161. Exemplarily, the first positioning protrusion 1620 may be disposed on the electrode block body 1622. The electrode block body 1622 has a boat-structured contact portion 1621. Exemplarily, the electrode block body 1622 may be formed by bending sheet metal, reducing the material cost of the electrode block 162. Exemplarily, the lifting ring 1623 may be connected to the electrode block body 1622 by welding.

[0118] Figure 17 The diagram shown is a structural schematic of an application scenario for a support device provided in another embodiment of this application. Figure 18 The image shown is an embodiment provided by this application. Figure 17 Enlarged diagram of point E in the middle. Figure 19 The diagram shown is a structural schematic of an electrode support provided in an embodiment of this application. Figure 20 The diagram shown is a structural schematic of an electrode connection block provided in an embodiment of this application.

[0119] One embodiment of this application also provides another electrode assembly 16. For example... Figures 17 to 18 As shown, the electrode assembly 16 includes an electrode support 163 and an electrode connecting block 164. The electrode support 163 is disposed on the second insulating base 15 and has a second boat-shaped contact surface 160. The electrode connecting block 164 is disposed on the electrode support 163, detachably connected to the electrode support 163, and configured to be electrically connected to the first power supply assembly 40.

[0120] Specifically, both the electrode support 163 and the electrode connecting block 164 are made of conductive materials. The electrode support 163 is electrically connected to the electrode connecting block 164. The first power supply component 40 provides radio frequency signals to the electrode support 163 through the electrode connecting block 164.

[0121] Since the electrode support 163 is disposed on the second insulating seat 15 and has a second boat structure contact surface 160, the part of the electrode support 163 located between the support rod 11 and the boat structure 30 can be directly used as the part in contact with the boat structure 30, which simplifies the structure of the electrode assembly 16.

[0122] For example, the electrode connecting block 164 is electrically connected to the power supply rod 41. This configuration allows the position of the electrode assembly 16 to be determined using the power supply rod 41. For example, the electrode support 163 can be placed directly on the second insulating base 15. The electrode assembly 16 can be removed by taking the power supply rod 41 out of the process chamber 21, facilitating the replacement of the electrode support 163.

[0123] For example, the electrode connecting block 164 is connected to the electrode support 163 via a connector. That is, the electrode connecting block 164 is not placed on the electrode support 163. This arrangement allows the electrode connecting block 164 to be in close contact with the electrode support 163, improving the conductivity of the electrode assembly 16. For example, the electrode connecting block 164 is screwed to the electrode support 163.

[0124] For example, the electrode support 163 has a fourth groove 1630 on the side facing the second insulating base 15, and the shape of the fourth groove 1630 is adapted to the shape of the upper part of the second insulating base 15. For example, the side of the second insulating base 15 facing the electrode support 163 has multiple planes. The normals of these multiple planes are all perpendicular to the length direction X of the support rod. This arrangement makes it difficult for the electrode support 163 to rotate around the circumference of the second insulating base 15.

[0125] For example, the cross-sectional shape of the electrode support 163 includes an "n" shape. For example, the electrode support 163 can be a semi-enclosed structure. This arrangement makes the structure of the electrode support 163 simple and easy to assemble and disassemble.

[0126] Exemplarily, the electrode support 163 includes two sides 1631 and a connecting portion 1632 connecting the two sides 1631. The two sides 1631 are arranged opposite each other in a horizontal direction perpendicular to the length direction X of the support rod. The connecting portion 1632 has a second boat-shaped contact surface 160. Exemplarily, an electrode connecting block 164 is disposed on the side of one side 1631 away from the other side 1631.

[0127] The support device 10 embodiment of this application has been described in detail above. The process equipment 1 embodiment of this application is described in detail below. It should be understood that the description of the support device 10 embodiment corresponds to the description of the process equipment 1 embodiment. Therefore, any parts not described in detail can be referred to the previous support device 10 embodiment.

[0128] like Figures 1 to 3As shown, the process equipment 1 includes a process chamber 20 and a support device 10 as mentioned in any of the above embodiments. The process chamber 21 is configured to accommodate at least one boat structure 30. The support device 10 is disposed in the process chamber 20 and is configured to support at least one boat structure 30.

[0129] Exemplarily, the process chamber 20 includes a furnace tube 22, and at least one support member 12 of the support device 10 is disposed at the end of the furnace tube 22. Since the support member 12 supports the end of the support rod 11, this arrangement allows the support rod 11 to be designed to be longer, maximizing the utilization of the space in the process chamber 21 and increasing production capacity. Exemplarily, as... Figure 1 and Figure 2 As shown, the support device 10 includes four support members 12. Two support members 12 support one support rod 11. Two support members 12 are provided at each of the two ends of the furnace tube 22.

[0130] For example, the furnace tube 22 has at least one port located at the end of the furnace tube 22, and the process chamber 20 further includes at least one port flange 23 located at the port of the furnace tube 22.

[0131] Exemplarily, the process equipment 1 also includes at least one furnace door. A port flange 23 is used to mate with the furnace door to seal the port of the furnace tube 22. Exemplarily, as... Figure 3 and Figure 5 As shown, the support member 12 can be disposed on the pipe flange 23. The support member 12 and the pipe flange 23 can be detachably connected. For example, the connector 42 can be disposed on the pipe flange 23.

[0132] refer to Figure 1 The furnace tube 22 has two ports. There are two port flanges 23. The process equipment 1 may include two furnace doors. These two furnace doors can be a front furnace door and a rear furnace door. The flange corresponding to the front furnace door can be called the front furnace tube flange, and the flange corresponding to the rear furnace door can be called the rear furnace tube flange.

[0133] In the process equipment 1 provided in this embodiment, at least one end of each support rod 11 has a first connecting plane 110 in the circumferential direction, and at least two support members 12 have a second connecting plane 120. The second connecting plane 120 is attached to the first connecting plane 110, that is, the two planes are attached, so that the support member 12 supports the end of the support rod 11, which can prevent the support rod 11 from rotating relative to the support member 12 in the circumferential direction. Therefore, it is not necessary to install an anti-rotation structure at the end of the support rod 11, and the structure of the process equipment 1 is simplified, which facilitates assembly and reduces manufacturing and maintenance costs.

[0134] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0135] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0136] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0137] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0138] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A support device, characterized in that, Applied to process equipment, the process equipment including a process cavity having a process chamber configured to accommodate at least one boat structure, a support device capable of being disposed in the process cavity, the support device comprising: Two support rods, at least one end of which has a first connecting plane in the circumferential direction, the two support rods being used to support at least one of the boat structures; At least two support members are available for connection to the process cavity and have a second connecting plane that fits against the first connecting plane so that the support members support the end of the support rod.

2. The support device according to claim 1, characterized in that, The cross-sectional shape of the outer surface of the support rod includes a polygon.

3. The support device according to claim 2, characterized in that, Also includes: At least one first insulating seat is disposed on at least one of the support rods for supporting at least one part of the boat structure and insulating the boat structure from the support rods; The length direction of the support rod is parallel to the horizontal direction, and the first insulating seat has a first groove on the side facing the support rod, the shape of the first groove being adapted to the shape of the upper part of the support rod.

4. The support device according to claim 3, characterized in that, The support rod has at least one limiting portion in its circumferential direction, and the first insulating seat has at least one limiting mating portion. The limiting portion is adapted to the limiting mating portion to limit the first insulating seat.

5. The support device according to claim 3, characterized in that, The process equipment has a first power supply component, and the support device further includes: At least two second insulating seats are respectively disposed on the two support rods, and the side of the second insulating seat facing the support rod has a second groove, the shape of the second groove being adapted to the shape of the upper part of the support rod; At least two electrode assemblies are respectively disposed on at least two second insulating bases, the electrode assemblies are configured to be electrically connected to the first power supply assembly, and each electrode assembly has a second boat structure contact surface; The first insulating base has a first boat structure contact surface, and the first boat structure contact surface and the second boat structure contact surface are located on the same surface to jointly support the boat structure.

6. The support device according to claim 5, characterized in that, The electrode assembly includes: An electrode holder, disposed on the second insulating base, is configured to be electrically connected to the first power supply component; An electrode block is disposed on the electrode base, is detachably connected to the electrode base, and has the second boat structure contact surface.

7. The support device according to claim 6, characterized in that, The electrode holder has a positioning part, and the electrode block has a positioning mating part. The positioning part and the positioning mating part are adapted to position the electrode block.

8. The support device according to claim 6, characterized in that, The electrode holder has a hollowed-out portion on the side facing the electrode block; The electrode block has a boat-shaped contact portion, which is disposed in the hollow portion, and the boat-shaped contact portion has a second boat-shaped contact surface.

9. The support device according to claim 6, characterized in that, The electrode holder has a first through hole on its first side and a threaded portion on its second side. The first and second sides of the electrode holder are disposed opposite to each other. The second insulating seat has a second through hole. The support rod has a third through hole. The support device further includes: The first insulating sleeve is at least inserted through the third through hole; The fastener has a first end located on the first side of the electrode base, and a second end passing through the first through hole, the second through hole and the first insulating sleeve, and is screwed to the threaded portion.

10. The support device according to any one of claims 1 to 9, characterized in that, The support member has at least one limiting groove, the bottom of the limiting groove forms the second connecting plane, and the sidewall of the limiting groove is configured to restrict the movement of the support rod in the horizontal direction perpendicular to the length direction of the support rod.

11. A process equipment, characterized in that, include: A process cavity having a process chamber configured to accommodate at least one boat structure; The support device according to any one of claims 1-10 is disposed in the process cavity and configured to support at least one of the boat structures.

12. The process equipment according to claim 11, characterized in that, The process chamber includes a furnace tube, and at least one support member of the support device is disposed at the end of the furnace tube.

Images