Passivation layer preparation device, perovskite solar cell and production line thereof

Abstract

The utility model provides a passivation layer preparation device, a perovskite solar cell and a production line thereof, and belongs to the technical field of cells. The passivation layer preparation device comprises a process tank, a drying tank located at the rear end of the process tank, a liquid storage tank, a spraying assembly, a conveying device and a drying device arranged in the drying tank. The liquid storage tank contains a mixed solution, and the mixed solution is formed by mixing water and a surfactant; the transmission device is used for transmitting the perovskite solar cell semi-finished product into the process tank or transmitting the perovskite solar cell semi-finished product from the process tank to the drying tank; the spraying assembly is used for spraying the mixed solution to the surface of the perovskite solar cell semi-finished product in the process tank; and the drying device is used for drying the perovskite solar cell semi-finished product conveyed into the drying tank, so that the mixed solution on the surface of the first functional layer is dried to form a film to form a passivation layer. Therefore, the cleaning process of the perovskite solar cell semi-finished product and the passivation layer preparation process can be realized only by the passivation layer preparation device, and the complexity of the preparation process can be reduced.

Description

Technical Field

[0001] This application relates to the field of battery technology, and in particular to a passivation layer preparation apparatus, a perovskite solar cell and its production line. Background Technology

[0002] With the rapid development of the new energy field, solar cells have been widely used in military, aerospace, industrial, commercial, agricultural, and communications fields. Perovskite solar cells, with their advantages of high photoelectric conversion efficiency, simple manufacturing process, and low production and material costs, have gradually become a hot topic in next-generation solar cell research.

[0003] To reduce nonradiative recombination losses in perovskite solar cells, some existing perovskite solar cells introduce a passivation layer between the perovskite light-absorbing layer and the hole transport layer to passivate interface defects between them. Currently, the fabrication process for this type of perovskite solar cell is complex. Utility Model Content

[0004] This application aims to at least address one of the technical problems existing in the background art. Therefore, one objective of this application is to provide a passivation layer fabrication apparatus, a perovskite solar cell, and a production line thereof, to reduce the complexity of the fabrication process for perovskite solar cells with passivation layers.

[0005] An embodiment of the first aspect of this application provides a passivation layer preparation apparatus for preparing a passivation layer on a perovskite solar cell semi-finished product. The perovskite solar cell semi-finished product includes a transparent conductive substrate and a first functional layer stacked sequentially from bottom to top. The first functional layer is one of a hole transport layer and an electron transport layer. The passivation layer preparation apparatus includes: a process tank, a drying tank, a liquid storage tank, a spraying assembly, a transport device, and a drying device.

[0006] The process tank can hold perovskite solar cell semi-finished products; the drying tank is located at the rear end of the process tank; the storage tank is used to hold the mixed solution, which is formed by mixing water and surfactant; the spray assembly has an outlet facing the inside of the process tank, which is connected to the storage tank, and the spray assembly is used to spray the mixed solution onto the surface of the first functional layer facing away from the transparent conductive substrate.

[0007] The conveying device is used to transfer the perovskite solar cell semi-finished product to the process tank, or to transfer the sprayed perovskite solar cell semi-finished product from the process tank to the drying tank; the drying device is located in the drying tank and is used to dry the perovskite solar cell semi-finished product introduced into the drying tank, so that the mixed solution on the surface of the first functional layer is dried into a film.

[0008] The passivation layer preparation apparatus of this application benefits from the fact that the mixed solution sprayed by the spraying component onto the perovskite solar cell semi-finished product contains a surfactant. During the process in the process tank, the perovskite solar cell semi-finished product can be cleaned, and the mixed solution used for cleaning can be used as a passivation layer material for passivation layer preparation. Furthermore, a drying device is provided in the drying tank located at the rear of the process tank to dry the perovskite solar cell semi-finished product. This allows both the cleaning process and the passivation layer preparation process to be performed solely by this passivation layer preparation apparatus, thereby reducing the complexity of the perovskite solar cell manufacturing process.

[0009] In some embodiments, the process tank and the drying tank are arranged side by side, and the conveying device is configured to drive the perovskite solar cell semi-finished product to move linearly along the direction in which the process tank and the drying tank are arranged side by side, so as to horizontally transfer the unsprayed perovskite solar cell semi-finished product into the process tank, or to horizontally transfer the sprayed perovskite solar cell semi-finished product from the process tank to the drying tank.

[0010] This embodiment designs a transmission device that provides linear power to the perovskite solar cell semi-finished product, allowing the semi-finished product to be horizontally transferred into the process tank or drying tank. This shortens the transmission path from the process tank to the drying tank, saving transmission time and thus helping to accelerate the production cycle.

[0011] In some embodiments, the conveying device includes a plurality of rotatable conveying rollers, the rotation axis of which is perpendicular to the direction in which the process tank and the drying tank are arranged side by side, and the plurality of conveying rollers are distributed sequentially at intervals along the direction in which the process tank and the drying tank are arranged side by side; a flexible pad is provided around the outer periphery of the conveying rollers, and the flexible pad is used to contact the surface of the transparent conductive substrate facing away from the first functional layer.

[0012] In this embodiment, a flexible pad is provided around the outer periphery of the conveyor roller, which allows the perovskite solar cell semi-finished product to make flexible contact with the conveyor roller, reducing the risk of the bottom surface of the perovskite solar cell semi-finished product being scratched.

[0013] In some embodiments, an inlet is provided on the first side wall of the process tank, and an outlet is provided on the second side wall of the drying tank; the process tank and the drying tank are arranged adjacent to each other, and the process tank and the drying tank share a partition wall, on which a communication port is provided; the inlet, the communication port and the outlet can all be used for perovskite solar cell semi-finished products to pass through, and the inlet, the communication port and the outlet are arranged in sequence opposite to each other along the conveying direction of the conveying device.

[0014] Without changing the dimensions and other parameters of the process tank and the drying tank, this embodiment allows for a shorter transport path for the perovskite solar cell semi-finished product from the process tank to the drying tank compared to the process tank and the drying tank being spaced apart along a side-by-side arrangement. This can further save transport time and help speed up the production cycle.

[0015] In some embodiments, the passivation layer preparation apparatus further includes a first sealing plate, a second sealing plate, a third sealing plate, and a cover plate that are movable relative to the process tank and the drying tank; the first sealing plate is used to open and close the inlet, the second sealing plate is used to open and close the connecting port, the third sealing plate is used to open and close the outlet, and the cover plate is used to open and close the top opening of the process tank and the top opening of the drying tank.

[0016] This embodiment allows for selective opening and closing of the inlet, connecting port, and top opening of the process tank. When the inlet, connecting port, and top opening of the process tank are closed, the process tank is sealed to isolate it from the external environment. This allows the perovskite solar cell semi-finished product to undergo the spraying process in a sealed environment, which helps reduce the possibility of impurities and dust from the external environment entering the process tank and contaminating the mixed solution on the surface of the perovskite solar cell semi-finished product. This has a positive effect on the quality of the passivation layer subsequently obtained.

[0017] In some embodiments, the passivation layer preparation apparatus further includes a frame, the spraying assembly includes a pipe fixedly connected to the frame, and the pipe has a liquid supply channel inside; or, the spraying assembly includes a frame, and a liquid supply channel is formed inside the frame; the liquid outlet is connected to the liquid storage tank through the liquid supply channel, and the frame is disposed in the process tank and located at the top opening of the process tank.

[0018] In this embodiment, the frame is designed to be located at the top opening of the process tank. The spray assembly connected to the frame or the spray assembly containing the frame can spray the mixed solution from top to bottom, so that the mixed solution can be accurately sprayed onto the surface of the first functional layer facing away from the transparent conductive substrate.

[0019] In some embodiments, the spray assembly further includes a spray head having a liquid inlet and a liquid outlet connected together, the liquid inlet being connected to the outlet end of the liquid supply channel.

[0020] By designing the spray head, the spray head has good spray uniformity, which helps to ensure that the mixed solution can be sprayed evenly onto the surface of the first functional layer.

[0021] In some embodiments, the frame includes a plurality of mounting beams extending along a first direction, the plurality of mounting beams being distributed sequentially at intervals along a second direction, each mounting beam corresponding to a plurality of spray heads distributed at intervals along the first direction; wherein, one of the first direction and the second direction is the width direction of the perovskite solar cell semi-finished product, and the other is the length direction of the perovskite solar cell semi-finished product.

[0022] In this embodiment, each mounting beam corresponds to multiple spray heads. The large number of spray heads helps to ensure that the mixed solution can cover the entire surface of the first functional layer facing away from the transparent conductive substrate. This allows the subsequently fabricated passivation layer to reliably passivate the interface defects between the first functional layer and the perovskite light-absorbing layer.

[0023] In some embodiments, the passivation layer preparation apparatus further includes a mixer for applying an operation to the mixed solution in the reservoir to move the mixed solution.

[0024] By designing a mixer, it is beneficial to promote the movement of the mixed solution in the storage tank to achieve uniform mixing, which can have a positive impact on improving the quality of the passivation layer.

[0025] In some embodiments, the mixer includes an ultrasonic generator and a transducer disposed in a storage tank. The transducer is electrically connected to the ultrasonic generator and is used to generate ultrasonic waves, which are used to induce vibration of the mixed solution. Alternatively, the mixer is a rotatable agitator disposed in the storage tank.

[0026] In some embodiments, the passivation layer preparation apparatus further includes a concentration detection device and a replenishment bottle. The replenishment bottle is used to hold surfactants, and the concentration detection device is used to detect the concentration value of surfactants in the mixed solution in the storage tank. When the concentration value is lower than a preset threshold, the replenishment bottle is used to deliver surfactants to the storage tank.

[0027] The passivation layer preparation device in this embodiment can automatically monitor the concentration of surfactant in the mixed solution in the storage tank during operation, and can replenish surfactant to the storage tank in a timely manner, with a high degree of automation.

[0028] In some embodiments, multiple replenishment bottles are provided, and the multiple replenishment bottles contain different surfactants.

[0029] In this embodiment, different types of surfactants are contained in different replenishment bottles. This allows for the adjustment of the composition and concentration of the mixed solution in the storage tank by controlling the replenishment volume of each replenishment bottle, thereby enabling the preparation of passivation layers with different compositions.

[0030] In some embodiments, the passivation layer preparation apparatus further includes a recovery pipe; at least one recovery pipe has its two ends connected to a process tank and a storage tank respectively, for conveying the mixed solution in the process tank to the storage tank, and / or, at least one recovery pipe has its two ends connected to a drying tank and a storage tank respectively, for conveying the mixed solution in the drying tank to the storage tank.

[0031] By designing a recovery pipe, the mixed solution in the process tank and / or the mixed solution in the drying tank can be guided back to the storage tank, so that the mixed solution that did not participate in the formation of the passivation layer can be reused.

[0032] In some embodiments, the recovery pipe and the storage tank are disposed below the process tank and the drying tank, with the inflow end of the recovery pipe located above the outflow end of the recovery pipe.

[0033] This embodiment allows the mixed solution in the process tank and the mixed solution in the drying tank to easily flow into the storage tank along the recovery pipe under their own gravity.

[0034] An embodiment of the second aspect of this application provides a perovskite solar cell production line, which includes the passivation layer preparation apparatus described in the above embodiments.

[0035] An embodiment of the third aspect of this application provides a perovskite solar cell, which is manufactured according to the perovskite solar cell production line in the above embodiment. The perovskite solar cell includes: a transparent conductive substrate, a first functional layer, a passivation layer, a perovskite light-absorbing layer, a second functional layer, and a back electrode layer stacked sequentially from bottom to top; wherein, one of the first functional layer and the second functional layer is a hole transport layer and the other is an electron transport layer, and the passivation layer is a film layer formed by drying a mixed solution.

[0036] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0037] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0038] Figure 1 This is a three-dimensional structural diagram of the passivation layer preparation apparatus of some embodiments of this application when no perovskite solar cell semi-finished product is fed in;

[0039] Figure 2 for Figure 1 A three-dimensional structural diagram of the passivation layer preparation device shown in the diagram when a perovskite solar cell semi-finished product is introduced;

[0040] Figure 3 for Figure 1 Front view of the passivation layer fabrication apparatus shown;

[0041] Figure 4 for Figure 1 Left view of the passivation layer preparation apparatus shown;

[0042] Figure 5for Figure 1 A top view of the passivation layer fabrication apparatus shown;

[0043] Figure 6 for Figure 1 The passivation layer preparation apparatus shown is a cross-sectional view omitting the liquid storage tank in the rear view direction.

[0044] Figure 7 This is a schematic diagram illustrating the fabrication process of perovskite solar cells according to some embodiments of this application;

[0045] Figure 8 According to Figure 7 A schematic diagram of the structure of the perovskite solar cell prepared by the shown process;

[0046] Figure 9 This is a schematic diagram of the structure of a perovskite solar cell according to other embodiments of this application;

[0047] Figure 10 This is a perspective structural schematic diagram of the liquid storage tank of the passivation layer preparation apparatus in some embodiments of this application;

[0048] Figure 11 A water droplet angle test diagram of the surface of a perovskite solar cell semi-finished product that has not been treated by the passivation layer preparation apparatus of this application;

[0049] Figure 12 This is a test image of the water droplet angle on the surface of the device after it has been processed by the passivation layer preparation apparatus of this application.

[0050] Explanation of reference numerals in the attached figures:

[0051] The passivation layer preparation apparatus 100 includes a process tank 10, a first sidewall 11, an inlet 110, a partition wall 12, a connecting port 120, a first sealing plate 13, a second sealing plate 14, a drying tank 20, a second sidewall 21, an outlet 210, a third sealing plate 22, a drying device 23, a liquid storage tank 30, a transducer 31, a spray assembly 40, a frame 41, a mounting beam 410, a support beam 411, a spray head 42, a conveying roller 51, a flexible pad 511, a protective shell 60, a cover plate 70, a replenishment bottle 80, and a recovery pipe 90.

[0052] Perovskite solar cell 200, perovskite solar cell semi-finished product 200A, transparent conductive substrate 201, glass substrate 2011, transparent electrode layer 2012, first functional layer 202, passivation layer 203, perovskite light-absorbing layer 204, second functional layer 205, back electrode layer 206. Detailed Implementation

[0053] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0054] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0055] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0056] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0057] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0058] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).

[0059] In the description of the embodiments of this application, the technical terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0060] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0061] Currently, perovskite solar cells are generally classified into two main categories: formal structure and inverted structure.

[0062] A typical perovskite solar cell structure comprises, from bottom to top, a transparent conductive substrate, an electron transport layer, a perovskite light-absorbing layer, a hole transport layer, and a back electrode layer, stacked sequentially. The perovskite light-absorbing layer is the core component of the perovskite solar cell. It absorbs photon energy from sunlight and generates electron-hole pairs. Under a built-in electric field, these electron-hole pairs separate into free electrons and holes. Holes are transported to the back electrode layer through the hole transport layer, while electrons are transported to the transparent conductive substrate through the electron transport layer. The back electrode layer and the transparent conductive substrate are connected to form a circuit, thereby generating photocurrent.

[0063] The difference between inverted perovskite solar cells and conventional perovskite solar cells lies in the order of the layers. Inverted perovskite solar cells consist of a transparent conductive substrate, a hole transport layer, a perovskite light-absorbing layer, an electron transport layer, and a back electrode layer, which are stacked sequentially from bottom to top. Electrons reach the back electrode layer through the electron transport layer, and holes pass through the hole transport layer and the transparent conductive substrate.

[0064] Regardless of whether it is a conventional or inverted perovskite solar cell, defects are prone to exist on the surface of the perovskite light-absorbing layer due to factors such as fabrication precision. These defects affect the extraction efficiency of photogenerated carriers, which in turn affects the photoelectric conversion efficiency and stability of the perovskite solar cell.

[0065] To reduce nonradiative recombination losses in perovskite solar cells, a passivation layer is introduced on the side of the perovskite absorbing layer facing the transparent conductive substrate. Specifically, for the conventional structure, the passivation layer is located between the electron transport layer and the perovskite absorbing layer; for the inverted structure, the passivation layer is located between the hole transport layer and the perovskite absorbing layer. During the fabrication of this type of perovskite solar cell, cleaning is often required before the passivation layer is prepared.

[0066] Taking the inverted structure as an example, the fabrication process of some perovskite solar cells is roughly as follows: cleaning the transparent conductive substrate - fabricating the hole transport layer - using a laser scribing mechanism to create grooves on the surface of the hole transport layer - cleaning - fabricating the passivation layer - fabricating the perovskite light-absorbing layer - fabricating the electron transport layer - fabricating the back electrode layer. The specific process for fabricating the passivation layer involves forming a passivation material on the surface of the hole transport layer followed by drying. Using this method, the fabrication process of perovskite solar cells is relatively complex.

[0067] Based on the above considerations, this application designs a passivation layer preparation device. By setting up a process tank and a spraying assembly, the spraying assembly can spray a mixed solution into the process tank. The mixed solution is composed of water and surfactant. A drying tank is designed at the rear end of the process tank for drying treatment. The cleaning process before passivation layer preparation and the passivation layer preparation process are both implemented by the passivation layer preparation device of this application. This eliminates the need to use two separate devices, which can help reduce the complexity of the perovskite solar cell preparation process.

[0068] The perovskite solar cells described in this application can be used, but are not limited to, in electrical devices such as vehicles, ships, or aircraft. A power system for such an electrical device can be constructed using perovskite solar cells as described in this application.

[0069] The electrical devices using perovskite solar cells as a power source in this application embodiment can be, but are not limited to, mobile phones, tablets, laptops, electric toys, power tools, electric vehicles, electric cars, ships, spacecraft, display elements, lighting elements, etc. Among them, electric toys can include stationary or mobile electric toys, such as game consoles, electric car toys, electric ship toys, and electric airplane toys, etc., and spacecraft can include airplanes, rockets, space shuttles, and spacecraft, etc.

[0070] Please see Figures 1 to 7This application provides a passivation layer preparation apparatus 100, suitable for preparing a passivation layer on a perovskite solar cell semi-finished product 200A (hereinafter referred to as semi-finished product 200A). In this application embodiment, "semi-finished product 200A" refers to an intermediate product that has undergone a certain production process but has not yet been manufactured into a perovskite solar cell. Semi-finished product 200A includes a transparent conductive substrate and a first functional layer stacked sequentially from bottom to top. The first functional layer is one of a hole transport layer and an electron transport layer.

[0071] The passivation layer preparation apparatus 100 includes a process tank 10, a drying tank 20, a storage tank 30, a spray assembly 40, a transfer device, and a drying device 23 disposed within the drying tank 20. The drying tank 20 is located at the rear end of the process tank 10 and can accommodate a semi-finished product 200A. The storage tank 30 is used to hold a mixed solution, which is formed by mixing water and a surfactant. The spray assembly 40 has an outlet facing the interior of the process tank 10 and communicates with the storage tank 30. The spray assembly 40 is used to spray the mixed solution onto the surface of the first functional layer 202 facing away from the transparent conductive substrate 201. The transfer device is used to transfer the semi-finished product 200A into the process tank 10, or to transfer the sprayed semi-finished product 200A from the process tank 10 to the drying tank 20. The drying device 23 is used to dry the semi-finished product 200A entering the drying tank 20, so that the mixed solution on the surface of the first functional layer 202 dries to form a film.

[0072] In this embodiment, "transparent conductive substrate 201" refers to an electrode with high conductivity and high visible light transmittance. The transparent conductive substrate 201 may include at least one of FTO, ITO, AZO, BZO, and IZO. FTO refers to fluorine-doped tin dioxide (SnO2) film. ITO refers to indium tin oxide film. AZO refers to aluminum-doped zinc oxide (ZnO) film. BZO refers to boron-doped zinc oxide (ZnO) film. IZO refers to indium-doped zinc oxide (ZnO) film. Taking ITO as an example, it can be fabricated by depositing an ITO film on the surface of a glass substrate 2011 using magnetron sputtering technology. Specifically, the transparent conductive substrate 201 includes a glass substrate 2011 and a transparent electrode layer 2012 stacked together.

[0073] like Figure 2 As shown, the shape of the process tank 10 can be basically similar to the shape of the semi-finished product 200A. This allows the process tank 10 to accommodate the semi-finished product 200A while maximizing the utilization of the internal space. Of course, the shape of the process tank 10 can also be, but is not limited to, a cylindrical shape or other shapes. Similarly, the shape of the drying tank 20 can be, but is not limited to, a cuboid shape, a cylinder, etc.

[0074] The process tank 10, drying tank 20, and storage tank 30 are all made of materials that are insoluble in surfactants. This ensures good stability for all three, and the storage tank 30 can reliably store the mixed solution. Optionally, the process tank 10, drying tank 20, and storage tank 30 can be made of corrosion-resistant materials such as stainless steel, aluminum, or titanium.

[0075] As an example, such as Figure 7 As shown, the first functional layer 202 can be a hole transport layer. The material of the hole transport layer can be, for example, NiOx, which can represent at least one of nickel oxide, nickel trioxide, etc. It is understood that the semi-finished product 200A in this example can eventually be made into an inverted perovskite solar cell 200, and an exemplary preparation process includes the following steps S10 to S90.

[0076] S10, a transparent conductive substrate 201 is provided and the transparent conductive substrate 201 is cleaned.

[0077] S20, hole transport layer preparation, to obtain the above-mentioned semi-finished product 200A. Specifically, the transparent conductive substrate 201 obtained in S10 can be transferred to the process chamber of a physical vapor deposition equipment, oxygen and argon are injected into the process chamber, pure nickel or magnesium-doped nickel is selected to make a target material, and the target material is sputtered using magnetron sputtering technology. The target material particles escape and are deposited on the top surface of the transparent conductive substrate 201 to form a hole transport layer.

[0078] In step S30, a laser is used to cut a first groove on the top surface of the semi-finished product 200A obtained in step S20 along the laser cutting line P1. The first groove extends from the hole transport layer to the transparent electrode layer 2012 of the transparent conductive substrate 201. This process facilitates the subsequent division of the large-sized inverse perovskite solar cell 200 into smaller sub-cells.

[0079] S40, passivation layer 203 preparation. This step is specifically implemented by the passivation layer preparation apparatus 100 of this embodiment. The preparation principle is as follows: the transfer device transfers the semi-finished product 200A obtained in S30 into the process tank 10 until the semi-finished product 200A is completely contained inside the process tank 10; the spray assembly 40 sprays a mixed solution onto the surface of the first functional layer 202 facing away from the transparent conductive substrate 201; after a certain period of time, the spray assembly 40 stops working, and the transfer device transfers the sprayed semi-finished product 200A in the process tank 10 to the drying tank 20; the drying device 23 works to dry the semi-finished product 200A, so that the mixed solution on the surface of the semi-finished product 200A dries into a film, which is the passivation layer 203; the drying device 23 transfers the dried semi-finished product 200A out of the drying tank 20 for transfer to the next process.

[0080] S50, perovskite light-absorbing layer 204 is prepared. Specifically, the device obtained in S40 can be transferred to a coating machine, and a perovskite light-absorbing material can be coated on the surface of the passivation layer 203 facing away from the hole transport layer. Then, the perovskite light-absorbing material is dried using techniques such as vacuum drying, heat treatment, and natural drying, so that the perovskite light-absorbing material is dried to form a thin film, which is the perovskite light-absorbing layer 204.

[0081] S60, Electron transport layer fabrication. Specifically, the device obtained in S50 can be transferred to a coating machine. An electron transport material is coated onto the surface of the perovskite light-absorbing layer 204 facing away from the passivation layer 203 using the coating machine. Then, vacuum drying, heat treatment, and natural drying techniques are used to dry the electron transport material, forming a thin film, which is the electron transport layer. Electron transport materials include, but are not limited to, tin dioxide (SnO2), zinc oxide (ZnO), and titanium dioxide (TiO2).

[0082] In step S70, the top surface of the device obtained by the laser in step S60 is cut along the laser cutting line P2 to form a second groove. The second groove extends from the electron transport layer to the transparent electrode layer 2012 of the transparent conductive substrate 201. In other embodiments, this step may be omitted.

[0083] S80, Back electrode layer 206 is prepared. The back electrode layer 206 can be prepared by metal deposition method (e.g., evaporation, sputtering), and the material of the back electrode layer 206 can be selected from at least one of copper (Cu), silver (Ag), and gold (Au).

[0084] In step S90, the top surface of the device obtained in step S80 is cut along the laser cutting line P3 to form a third groove. The third groove extends from the back electrode layer 206 to the transparent electrode layer 2012 of the transparent conductive substrate 201, resulting in... Figure 8 The inverted perovskite solar cell 200 is shown. In other embodiments, this step may be omitted.

[0085] As an example, the first functional layer 202 can also be an electron transport layer; correspondingly, the semi-finished product 200A in this example can eventually be manufactured into... Figure 9 The fabrication process of each layer of the formal perovskite solar cell 200 shown can be generally referred to the inverse perovskite solar cell 200 described above.

[0086] In this embodiment, the surfactant is selected from at least one of sodium lauryl sulfonate (SLS), sodium aminosulfonate (SAS), sulfobetaine, etc. The concentration of the surfactant in the mixed solution is positively correlated with its weight percentage. It can be understood that by adjusting the weight percentage of the surfactant, the concentration of the surfactant in the mixed solution can be rationally designed so that the passivation layer 203 obtained by drying the mixed solution can passivate the interface defects between the perovskite light-absorbing layer 204 and the first functional layer 202.

[0087] The passivation layer preparation apparatus 100 of this embodiment includes a process tank 10 and a drying tank 20 located at the rear end of the process tank 10. A spraying assembly 40 is designed to spray a mixed solution containing a surfactant onto the semi-finished product 200A in the process tank 10. A drying device 23 is located in the drying tank 20 for drying the semi-finished product 200A. A transfer device is also designed to transfer the sprayed semi-finished product 200A from the process tank 10 to the drying tank 20 for drying, allowing the mixed solution on the surface of the semi-finished product 200A to dry and form a film, thus forming the passivation layer 203. In this passivation layer preparation apparatus 100, thanks to the surfactant-containing mixed solution sprayed onto the semi-finished product 200A by the spraying assembly 40, the semi-finished product 200A can be cleaned during the process in the process tank 10. Furthermore, the mixed solution used for cleaning the semi-finished product 200A can be used as a passivation layer material for the preparation of the passivation layer 203. Therefore, the passivation layer preparation apparatus 100 of this embodiment can realize both the cleaning process and the passivation layer 203 preparation process. Compared with the cleaning process and the passivation layer 203 preparation process being performed by two separate devices, the process of transferring the cleaned semi-finished product 200A can be saved, thereby reducing the complexity of the perovskite solar cell 200 preparation process, optimizing the production cycle of the perovskite solar cell 200, and thus improving the production efficiency and capacity of the perovskite solar cell 200. Specifically, the semi-finished product 200A is processed using the passivation layer preparation apparatus 100 of this embodiment, and the cleaning process and the process of coating the passivation layer material onto the surface of the semi-finished product 200A are performed simultaneously.

[0088] Furthermore, it should be noted that, compared with immersing the semi-finished product 200A in the mixed solution using a dip-coating method, the passivation layer preparation apparatus 100 of this embodiment, by designing the spray assembly 40, sprays the mixed solution onto the surface of the first functional layer 202 facing away from the transparent conductive substrate. This allows for a smaller area of ​​the transparent conductive substrate 201 facing away from the first functional layer 202 coated with the mixed solution, making it less likely that a thin film will form on the side of the transparent conductive substrate 201 facing away from the first functional layer 202, thus maintaining high conductivity and high light transmittance.

[0089] In the passivation layer preparation apparatus 100 disclosed herein, the drying device 23 can achieve drying by methods such as air drying or baking. For example, the drying device 23 can be an infrared heater. As another example... Figure 6 As shown, the drying device 23 may include a fan and an air knife. The fan drives air into the air knife, which then blows it out at high speed to form an airflow. When the semi-finished product 200A enters the drying tank 20, the airflow sweeps across the surface of the semi-finished product 200A, causing the mixed solution on the surface of the semi-finished product 200A to dry into a film. In addition to the air knife, the drying device 23 may also be equipped with a heating wire located inside the air knife or use a hot air blower to provide hot air to the air knife. In such an example, the air knife blows out hot air to facilitate rapid drying of the mixed solution. Optionally, the drying device 23 may also be configured such that the flow rate and temperature of the hot air blown out by the air knife are controllable, thus allowing for the adjustment of the film quality of the passivation layer 203 by regulating the flow rate and temperature.

[0090] The implementation of the transfer device is diverse. As an example, the transfer device may include a lifting mechanism and a translation mechanism. The lifting mechanism can drive the semi-finished product 200A to move vertically, and the translation mechanism can drive the semi-finished product 200A to move horizontally. In this embodiment, when the passivation layer preparation device 100 prepares the passivation layer 203 on the semi-finished product 200A, the transfer path of the semi-finished product 200A is as follows: the semi-finished product 200A moves down from above the process tank 10 under the drive of the lifting mechanism, enters the process tank 10 through the top opening of the process tank 10; after spraying, the semi-finished product 200A moves up to above the process tank 10; then moves horizontally to above the drying tank 20 under the drive of the translation mechanism; then moves down under the drive of the lifting mechanism, enters the drying tank 20 through the top opening of the drying tank 20; after drying, the semi-finished product 200A moves up to above the drying tank 20, and then flows to the next process.

[0091] Based on some embodiments of this application, please continue to refer to Figures 1 to 6 The process tank 10 and the drying tank 20 can be arranged side by side. The conveying device can be configured to drive the semi-finished product 200A to move linearly along the direction in which the process tank 10 and the drying tank 20 are arranged side by side, so as to horizontally transfer the unsprayed semi-finished product 200A into the process tank 10, or to horizontally transfer the sprayed semi-finished product 200A from the process tank 10 to the drying tank 20.

[0092] In this embodiment, when the passivation layer preparation apparatus 100 is working, the conveying device horizontally moves the unsprayed semi-finished product 200A into the process tank 10. After the spraying is completed, the conveying device then transports the semi-finished product 200A along the parallel arrangement of the process tank 10 and the drying tank 20, so that the semi-finished product 200A moves out of the process tank 10 and into the drying tank 20.

[0093] Compared with the technical solution where the conveying device can drive the semi-finished product 200A to rise, fall, and move horizontally, this embodiment designs the conveying device to provide linear power to the semi-finished product 200A, so that the semi-finished product 200A is horizontally moved into the process tank 10 for spraying, horizontally moved out of the process tank 10 after spraying, and horizontally moved into the drying tank 20. The vertical conveying path of the semi-finished product 200A is eliminated, which can shorten the conveying path of the semi-finished product 200A from the process tank 10 to the drying tank 20, save conveying time, and thus help to speed up the production cycle.

[0094] It is understood that the process tank 10 and the drying tank 20 can be spaced apart from each other along the side-by-side direction, or the process tank 10 and the drying tank 20 can be arranged adjacent to each other. The two methods will be explained below.

[0095] According to some embodiments of this application, such as Figures 1 to 6 As shown, the process tank 10 and the storage tank 30 are arranged adjacent to each other, and the process tank 10 and the drying tank 20 share a partition wall 12. In this example, in order to enable the semi-finished product 200A to be transferred into the process tank 10 and the drying tank 20, a transfer inlet 110 is provided on the first side wall 11 of the process tank 10, a transfer outlet 210 is provided on the second side wall 21 of the drying tank 20, and a connecting port 120 is provided on the partition wall 12. The transfer inlet 110, the connecting port 120, and the transfer outlet 210 can all be used for the semi-finished product 200A to pass through, and the transfer inlet 110, the connecting port 120, and the transfer outlet 210 are arranged sequentially opposite to each other along the conveying direction of the conveying device.

[0096] The interior of the process tank 10 and the interior of the drying tank 20 are connected by a connecting port 120. In this embodiment, when the passivation layer preparation apparatus 100 prepares the passivation layer 203 for the semi-finished product 200A, the semi-finished product 200A enters the process tank 10 through the inlet 110, completes spraying, and then exits the process tank 10 through the connecting port 120 while simultaneously being transferred into the drying tank 20. That is, the connecting port 120 serves both as the outlet for the semi-finished product 200A from the process tank 10 and as the inlet for the semi-finished product 200A to enter the drying tank 20.

[0097] As an example, the process tank 10 and the drying tank 20 can be spaced apart from each other along the side-by-side direction, that is, the process tank 10 and the drying tank 20 are not adjacent. In this example, in order to enable the semi-finished product 200A to be transferred into the process tank 10 and the drying tank 20, the sidewall of the process tank 10 is provided with a first opening and a second opening arranged opposite to each other, and the sidewall of the drying tank 20 is provided with a third opening and a fourth opening arranged opposite to each other. When the passivation layer preparation apparatus 100 of this embodiment prepares the passivation layer 203 for the semi-finished product 200A, the semi-finished product 200A is transferred into the process tank 10 through the first opening, after spraying, it is transferred out of the process tank 10 through the second opening, then transferred into the drying tank 20 through the third opening, and finally transferred out of the drying tank 20 through the fourth opening.

[0098] Without changing the dimensions and other parameters of the process tank 10 and the drying tank 20, in the technical solution where the process tank 10 and the liquid storage tank 30 are arranged adjacent to each other, the transmission path of the semi-finished product 200A from the process tank 10 to the drying tank 20 is shorter than that where the process tank 10 and the drying tank 20 are spaced apart in a parallel direction. This can further save transmission time and help speed up the production cycle.

[0099] According to some embodiments of this application, further, please refer to... Figure 1 , Figure 2 , Figure 4 and Figure 6 The passivation layer preparation apparatus 100 may further include a first sealing plate 13, a second sealing plate 14, a third sealing plate 22, and a cover plate 70 that are movable relative to the process tank 10 and the drying tank 20. The first sealing plate 13 is used to open and close the inlet 110, the second sealing plate 14 is used to open and close the connecting port 120, the third sealing plate 22 is used to open and close the outlet 210, and the cover plate 70 is used to open and close the top opening of the process tank 10 and the top opening of the drying tank 20.

[0100] The first sealing plate 13, the second sealing plate 14, the third sealing plate 22, and the cover plate 70 can be implemented in any of the following ways: rotation or translation relative to the process tank 10 and the drying tank 20. For example, the first sealing plate 13 is rotatably connected to the process tank 10 via a rotating shaft that can rotate about a horizontal axis to drive the first sealing plate 13 to open and close the transmission inlet 110.

[0101] In this embodiment, during the operation of the passivation layer preparation apparatus 100, after the semi-finished product 200A is transferred into the process tank 10, the first sealing plate 13 covers the inlet 110, the second sealing plate 14 covers the connecting port 120, and the cover plate 70 covers the top opening of the process tank 10 and the top opening of the drying tank 20, so that the interior of the process tank 10 is created as a sealed environment to isolate it from the external environment. After the semi-finished product 200A has been sprayed in the process tank 10, the second sealing plate 14 opens the connecting port 120 again, and the semi-finished product 200A is then transferred to the drying tank 20.

[0102] This embodiment allows the inlet 110, the connecting port 120, and the top opening of the process tank 10 to be selectively opened and closed. When the inlet 110, the connecting port 120, and the top opening of the process tank 10 are closed, the process tank 10 is sealed to isolate it from the external environment. This allows the semi-finished product 200A to undergo the spraying process in a sealed environment, which helps reduce the possibility of impurities and dust from the external environment entering the process tank 10 and contaminating the mixed solution on the surface of the semi-finished product 200A. This, in turn, helps to ensure that the film layer formed by the subsequent drying of the mixed solution is of high quality.

[0103] Furthermore, during the spraying process of semi-finished product 200A, the process tank 10 is sealed, which makes it difficult for the mixed solution to splash outside the process tank 10 and cause pollution to the external environment.

[0104] Taking the drying tank 20 as an example, if it is a cuboid shape, such as Figures 1 to 3 , Figure 5 and Figure 6 As shown, the internal space of the drying tank 20 can be smaller than the length of the semi-finished product 200A along its own length. In other words, the vertical distance between the connecting port 120 and the conveying port 210 is smaller than the length of the semi-finished product 200A. In this example of the passivation layer preparation apparatus 100, after the semi-finished product 200A is sprayed in the process tank 10, the connecting port 120 and the conveying port 210 are opened simultaneously. The connecting port 120, the interior of the drying tank 20, and the conveying port 210 are sequentially connected to form a conveying channel. The semi-finished product 200A is gradually dried during the process of being conveyed along this conveying channel until it is conveyed out of the drying tank 20.

[0105] As an alternative example, the internal space of the drying tank 20 can also be larger than the length of the semi-finished product 200A, so that the semi-finished product 200A can be completely contained in the drying tank 20. In this example of the passivation layer preparation apparatus 100, after the semi-finished product 200A is sprayed in the process tank 10, the inlet 110, the connecting port 120, the top opening of the process tank 10 and the drying tank 20 remain closed. The third sealing plate 22 switches to cover the outlet 210, and the second sealing plate 14 opens the connecting port 120 again. The conveying device transports the semi-finished product 200A to the drying tank 20. After the semi-finished product 200A is completely moved into the drying tank 20, the second sealing plate 14 returns to closing the connecting port 120, and the drying device 23 operates until the mixed solution on the surface of the semi-finished product 200A dries and forms a film.

[0106] In this embodiment, the top openings of the inlet 110, the connecting port 120, and the process tank 10 can be selectively opened and closed. Furthermore, the top openings of the outlet 210 and the drying tank 20 can also be selectively opened and closed. Additionally, the semi-finished product 200A is designed to be entirely contained within the drying tank 20, creating a sealed environment that isolates it from the external environment. This allows the semi-finished product 200A to be dried in a sealed environment, reducing the possibility of impurities and dust from the external environment entering the drying tank 20 and contaminating the passivation layer 203, resulting in a high-quality passivation layer 203. Moreover, during the drying process, the sealed drying tank 20 prevents water vapor generated from the evaporation of the mixed solution from flowing into the external environment, further reducing the possibility of water vapor contaminating the external environment.

[0107] Furthermore, it is worth noting that in this example, the semi-finished product 200A, after spraying, can remain in a sealed environment during the transfer from the process tank 10 to the drying tank 20. That is, the entire process of preparing the passivation layer 203 using the passivation layer preparation apparatus 100 of this embodiment can be carried out in a sealed environment, which can have a beneficial effect on improving the quality of the passivation layer 203.

[0108] Optionally, flexible sealing rings can be provided between the first sealing plate 13 and the inlet 110 when the cover is closed, between the second sealing plate 14 and the connecting port 120 when the cover is closed, between the third sealing plate 22 and the outlet 210 when the cover is closed, and between the cover plate 70 and the top opening of the process tank 10 and the drying tank 20 when the cover is closed. By providing flexible sealing rings, the sealing performance of the process tank 10 and the drying tank 20 when closed can be further improved. Moreover, the possibility of the mixed solution sprayed by the spray assembly 40 splashing outside the process tank 10 and causing pollution to the external environment can be further reduced.

[0109] To enable the conveying device to transport the semi-finished product 200A along the parallel orientation of the process tank 10 and the drying tank 20, the conveying device can be specifically designed to include a drive motor and a linear motion mechanism. The linear motion mechanism converts the rotational power provided by the drive motor into linear power for the semi-finished product 200A. The linear motion mechanism can be implemented using a belt drive mechanism, a chain drive mechanism, a screw and nut mechanism, etc. When using a belt drive mechanism to drive the semi-finished product 200A, the conveyor belt of the belt drive mechanism can also serve to support the semi-finished product 200A. When using a screw and nut mechanism to drive the semi-finished product 200A, a platform can be designed to connect to the nut; this platform is used to support the semi-finished product 200A.

[0110] According to some embodiments of this application, the linear motion mechanism described above can also be replaced by multiple rotatable conveyor rollers 51. The rotation axis of the conveyor rollers 51 is perpendicular to the direction in which the process tank 10 and the drying tank 20 are arranged side by side, and the multiple conveyor rollers 51 are distributed sequentially at intervals along the direction in which the process tank 10 and the drying tank 20 are arranged side by side. Furthermore, a flexible pad 511 can be provided around the outer periphery of the conveyor rollers 51, and the flexible pad 511 is used to contact the surface of the transparent conductive substrate 201 facing away from the first functional layer 202.

[0111] In order for the conveying device to transfer the semi-finished product 200A to the process tank 10 and the drying tank 20, at least one conveying roller 51 can be provided in both the process tank 10 and the drying tank 20. During the operation of the passivation layer preparation apparatus 100 in this example, the rotation of the conveying roller 51 will continuously push the semi-finished product 200A placed on it forward in the side-by-side arrangement direction.

[0112] The multiple conveyor rollers 51 may include driving rollers and driven rollers. The driving rollers are connected to a drive motor, and the driving rollers provide rotational power to the driven rollers through a linkage mechanism (e.g., a conveyor belt or a gear mechanism). This embodiment does not impose a specific limitation on the number of driving rollers and driven rollers.

[0113] Optional, such as Figure 1 As shown, each conveying roller 51 may be provided with a plurality of flexible pads 511 arranged sequentially at intervals along the extension direction of its rotation axis.

[0114] This embodiment utilizes multiple rotatable conveyor rollers 51 to drive the semi-finished product 200A in a linear motion. The conveyor rollers 51 also serve to support the semi-finished product 200A, eliminating the need for a separate platform. Furthermore, the flexible pads 511 around the outer periphery of the conveyor rollers 51 allow for flexible contact between the semi-finished product 200A and the rollers, reducing the risk of scratches on the surface of the transparent conductive substrate 201 facing away from the first functional layer 202 and improving the quality of the resulting perovskite solar cell 200.

[0115] Optionally, the passivation layer preparation apparatus 100 may further include a protective shell 60 disposed outside the process tank 10 and the drying tank 20. The protective shell 60 is fixedly connected to the process tank 10 and the drying tank 20, and the motor and linkage mechanism of the transmission device are housed within the protective shell 60. In this embodiment, by designing the protective shell 60 to house the motor and linkage mechanism of the transmission device, the risk of the motor and linkage mechanism being subjected to collisions and impacts can be reduced.

[0116] Based on some embodiments of this application, please continue to refer to Figure 1 , Figure 2 , Figure 5 and Figure 6 The spray assembly 40 may include a frame 41 disposed within the process tank 10 and located at the top opening of the process tank 10, with a liquid supply channel formed within the frame 41. The spraying can be implemented in various ways in this example. The frame 41 may be a hollow structure, with the internal hollow cavity serving as the liquid supply channel. As one possible implementation, the liquid supply channel may have multiple outlet end groups, each including multiple outlet ends arranged in an array, with the outlet ends penetrating the side of the frame 41 facing the process tank 10. In this example, a pump pressurizes the mixed solution within the storage tank 30, causing the mixed solution to flow rapidly along the liquid supply channel and then spray out from each outlet end group.

[0117] As another possible approach, such as Figure 1 , Figure 2 and Figure 6As shown, the spray assembly 40 may also include a spray head 42, which has a liquid inlet and a liquid outlet connected together, and the liquid inlet is connected to the outlet end of the liquid supply channel.

[0118] In this example, the mixed solution in the storage tank 30 flows along the supply channel to the outlet end, then enters the spray head 42 through the inlet, and is then sprayed out from the outlet.

[0119] Compared with the technical solution where the mixed solution is sprayed directly from the outlet end of the supply channel, this embodiment designs a spray head 42, which has good spray uniformity, so that the mixed solution can be sprayed evenly onto the surface of the first functional layer 202.

[0120] According to some embodiments not shown in the figures of this application, the technical solution of the spray assembly 40 including a frame 41 with an internal liquid supply channel can also be replaced by: the spray assembly 40 including a pipe, the pipe being fixedly connected to the frame 41, the pipe having a liquid supply channel inside, and the outlet communicating with the liquid storage tank 30 through the liquid supply channel. In this example, the frame 41 serves to provide support and installation for the pipe.

[0121] There can be multiple pipes, with frame 41 as the example. Figure 1 Taking the structure shown as an example, multiple pipes can correspond one-to-one with multiple mounting beams 410, with each pipe fixedly connected to a mounting beam 410 and extending along the corresponding mounting beam 410. In this embodiment, the pipes can be tied and fixed to the frame 41 using cable ties, or they can be fixedly connected to the frame 41 using adhesive.

[0122] The pipe can be a spray pipe known to those skilled in the art, in which the pipe serves to guide and spray. Alternatively, the spray assembly 40 can also include the spray head 42 described above. In this example, the spray head 42 is connected to the pipe to connect the liquid inlet and the liquid supply channel, in which case the pipe serves to guide the flow.

[0123] Based on the foregoing description, the passivation layer preparation apparatus 100 may include a frame 41, and the spray assembly 40 may include a pipe fixedly connected to the frame 41, with a liquid supply channel within the pipe. Alternatively, the spray assembly 40 may include a frame 41, with a liquid supply channel formed within the frame 41. Furthermore, the liquid outlet is connected to the storage tank 30 via the liquid supply channel, and the frame 41 is disposed within the process tank 10 and located at the top opening of the process tank 10.

[0124] In this embodiment, the frame 41 is designed to be located at the top opening of the process tank 10. The spray assembly 40 connected to the frame 41 or the spray assembly 40 containing the frame 41 can spray the mixed solution from top to bottom, so that the mixed solution can be accurately sprayed onto the surface of the first functional layer 202 facing away from the transparent conductive substrate 201.

[0125] Moreover, compared with the passivation layer preparation apparatus 100 which also includes the above-mentioned cover plate 70 and spray assembly 40 disposed on the cover plate 70, the position of the spray assembly 40 in this embodiment is fixed and will not move with the cover plate 70, which can help make the spray assembly 40 have good structural reliability.

[0126] According to some embodiments of this application, such as Figure 1 and Figure 2 As shown, the frame 41 can be specifically constructed to include multiple mounting beams 410 extending along a first direction, with the multiple mounting beams 410 distributed sequentially at intervals along a second direction, and each mounting beam 410 corresponding to multiple spray heads 42 distributed at intervals along the first direction. The first direction and the second direction are respectively the width direction of the semi-finished product 200A and the length direction of the semi-finished product 200A.

[0127] It should be noted that in the various figures of the embodiments of this application, the X-axis and Y-axis represent the width and length directions of the semi-finished product 200A, respectively. To achieve a fixed installation of the mounting beam 410, both ends of the mounting beam 410 can be fixedly connected to the process groove 10. Alternatively, as an alternative example, the frame 41 may also include an outer frame, which is adapted to the top opening of the process groove 10 and connected to the process groove 10. Both ends of each mounting beam 410 are connected to the outer frame, that is, the outer frame provides support for the mounting beam 410. Specifically, when the process groove 10 is cylindrical, the outer frame is correspondingly implemented as an annular shape; such as... Figure 1 and Figure 2 As shown, the process tank 10 is rectangular, and the outer frame can be specifically implemented as including two support beams 411, both of which extend along the second direction, and the two ends of each mounting beam 410 are respectively connected to the two support beams 411.

[0128] The outer frame and the process groove 10 can be fixedly connected by means of snap-fit, bonding, welding, screwing, or a combination of these methods. Alternatively, as... Figure 1 As shown, the top of the process tank 10 can be constructed with steps, which include a first horizontal plane, a vertical plane, and a second horizontal plane connected in sequence. The second horizontal plane is located below the first horizontal plane, and the outer frame can be placed on the second horizontal plane. In this way, the frame 41 can be installed flexibly and conveniently. Furthermore, the outer frame placed on the second horizontal plane does not extend beyond the first horizontal plane in the vertical direction, so that when the passivation layer preparation apparatus 100 also includes the aforementioned cover plate 70, the outer frame and the cover plate 70 do not interfere with each other.

[0129] In this embodiment, each mounting beam 410 is designed to correspond to multiple spray heads 42. The large number of spray heads 42 helps to ensure that the mixed solution can cover the entire surface of the first functional layer 202 facing away from the transparent conductive substrate 201. This allows the subsequently fabricated passivation layer 203 to reliably passivate the interface defects between the first functional layer 202 and the perovskite light-absorbing layer 204.

[0130] Please refer to some embodiments of this application. Figure 10 The passivation layer preparation apparatus 100 may also include a mixer for applying an operation to the mixed solution in the storage tank 30 to move the mixed solution.

[0131] The passivation layer preparation device 100 is designed to also have a mixer, and the mixer can move the mixed solution in the storage tank 30, which is beneficial to promote the uniform mixing of the mixed solution in the storage tank 30 through movement, thus having a positive impact on the quality improvement of the passivation layer 203.

[0132] Understandably, there are various ways to implement a mixer. As an example, the mixer can be a rotatable agitator located inside the liquid storage tank 30.

[0133] As an example, the mixer can also be designed to include an ultrasonic generator and a transducer 31, which is disposed in the liquid storage tank 30 and electrically connected to the ultrasonic generator. The transducer 31 is used to generate ultrasonic waves, which are used to induce vibration of the mixed solution.

[0134] Transducer 31 can be adopted Figure 10 The structure shown is as follows. The installation location of the ultrasonic generator is not limited; it can be installed inside or outside the liquid storage tank 30.

[0135] Based on some embodiments of this application, please continue to refer to Figures 1 to 4 ,as well as Figure 10 The passivation layer preparation apparatus 100 may also include a concentration detection device and a replenishment bottle 80. The replenishment bottle 80 is used to hold surfactants, and the concentration detection device is used to detect the concentration value of surfactants in the mixed solution. When the concentration value is lower than a preset threshold, the replenishment bottle 80 is used to deliver surfactants to the storage tank 30.

[0136] The preset threshold is the concentration of surfactant required to improve the photoelectric conversion efficiency of the perovskite solar cell 200 when the passivation layer 203 formed by the drying of the mixed solution can passivate the interface defects between the first functional layer 202 and the perovskite light-absorbing layer 204. The preset threshold can be designed based on actual operating conditions and experience. The concentration detection device can specifically be a concentration sensor.

[0137] The replenishment bottle 80 and the storage tank 30 can be connected by a conduit. The conduit can be equipped with an on / off valve to control the opening and closing of the conduit. When the concentration value detected by the concentration detection device is less than a preset threshold, the conduit is opened to deliver surfactant to the storage tank 30. When the concentration value detected by the concentration detection device is greater than or equal to the preset threshold, the conduit is closed to stop delivering surfactant to the storage tank 30.

[0138] In this embodiment, the concentration detection device monitors the concentration of surfactant in the mixed solution in the storage tank 30. When the concentration is lower than a preset threshold, surfactant can be added to the storage tank 30 in a timely manner. This ensures that the concentration of surfactant in the mixed solution during the passivation layer 203 preparation process is maintained at or above the preset threshold. Consequently, the passivation layer 203 subsequently prepared can reliably passivate the interface defects between the first functional layer 202 and the perovskite light-absorbing layer 204, thereby effectively improving the photoelectric conversion efficiency of the perovskite solar cell 200.

[0139] Compared with manually periodically checking the concentration of surfactant in the mixed solution and replenishing the solution, the passivation layer preparation apparatus 100 in this embodiment has a high degree of automation. This not only saves labor costs, but also has a positive impact on improving the product yield of perovskite solar cells 200 by replenishing the solution in a timely manner.

[0140] Based on some embodiments of this application, please continue to refer to Figures 1 to 4 ,as well as Figure 10 The replenishment bottle 80 can be further configured as multiple bottles, and the surfactants contained in the multiple replenishment bottles 80 are different.

[0141] For example, each replenishment bottle 80 is used to hold sodium lauryl sulfonate (SLS), sodium aminosulfonate (SAS), and sulfobetaine, respectively.

[0142] To monitor the concentration of various surfactants, multiple concentration sensors can be installed to correspond one-to-one with different surfactants, with each sensor used to detect the concentration of different surfactants.

[0143] In this embodiment, different types of surfactants are contained in different replenishment bottles 80. By controlling the replenishment volume of each replenishment bottle 80, the composition and concentration of the mixed solution in the storage tank 30 can be adjusted, thereby obtaining passivation layers 203 with different compositions. Therefore, the passivation layer preparation apparatus 100 of this embodiment has good process compatibility and can be applied to the preparation of different perovskite solar cells 200.

[0144] Of course, in other embodiments, the surfactants contained in the multiple replenishment bottles 80 can also be the same, so that multiple replenishment bottles 80 can be kept in reserve. This way, when the surfactant in one replenishment bottle 80 is used up, the other replenishment bottles 80 can be used to replenish the surfactant to the reservoir 30 in a timely manner.

[0145] Based on some embodiments of this application, please continue to refer to Figures 1 to 4 The passivation layer preparation apparatus 100 may also be configured to include a recovery pipe 90. At least one recovery pipe 90 has its two ends connected to the process tank 10 and the storage tank 30, respectively, for conveying the mixed solution in the process tank 10 to the storage tank 30, and / or, at least one recovery pipe 90 has its two ends connected to the drying tank 20 and the storage tank 30, respectively, for conveying the mixed solution in the drying tank 20 to the storage tank 30.

[0146] As an example, multiple recovery pipes 90 can be provided, with some recovery pipes 90 used to connect the process tank 10 and the storage tank 30, and the remaining recovery pipes 90 used to connect the drying tank 20 and the storage tank 30. According to... Figure 3 In the specific example shown, the recycling tube 90 can be provided in three parts.

[0147] In this embodiment, when the passivation layer preparation apparatus 100 is in operation, the mixed solution sprayed by the spraying component 40 is sprayed onto the surface of the first functional layer 202 facing away from the transparent conductive substrate 201, and then slides into the process tank 10 and is collected. The mixed solution in the process tank 10 is transported to the storage tank 30 via the recovery pipe 90. After the semi-finished product 200A is sprayed, the mixed solution on the surface of the semi-finished product 200A may drip before it dries, and the water vapor formed by the evaporation and drying of the mixed solution cools into water droplets and falls. These mixed solutions that drip into the drying tank 20 are transported to the storage tank 30 via the recovery pipe 90.

[0148] Thanks to the design of the recovery pipe 90, the mixed solution in the process tank 10 and / or the mixed solution in the drying tank 20 can be returned to the storage tank 30. In this way, on the one hand, the mixed solution that did not participate in the formation of the passivation layer 203 can be reused, thereby saving the material cost of the mixed solution; on the other hand, the mixed solution can be collected to reduce its potential pollution to the environment.

[0149] According to some embodiments of this application, such as Figures 1 to 3 As shown, the recovery pipe 90 and the storage tank 30 can be specifically set below the process tank 10 and the drying tank 20, and the inflow end of the recovery pipe 90 is located above the outflow end of the recovery pipe 90.

[0150] The inflow end of the recovery pipe 90 is connected to the bottom of the process tank 10 or the bottom of the drying tank 20. The recovery pipe 90 is not limited to being in the shape of... Figure 3 The L-shape shown can also take other shapes.

[0151] In this embodiment, the mixed solution in the process tank 10 and the mixed solution in the drying tank 20 can easily flow into the storage tank 30 along the recovery pipe 90 under their own gravity. This eliminates the need for a water pump to drive the mixed solution in the process tank 10 and the drying tank 20 into the recovery pipe 90, thus simplifying the structure of the passivation layer preparation device 100 and avoiding the cost increase caused by adding a water pump.

[0152] This application provides a perovskite solar cell production line, which includes a passivation layer preparation apparatus 100 as described above.

[0153] When using the perovskite solar cell production line of this embodiment to prepare perovskite solar cells 200, in the passivation layer 203 preparation process stage, since the spray component 40 of the passivation layer preparation device 100 can spray a mixed solution containing surfactants onto the semi-finished product 200A in the process tank 10, the cleaning process and the passivation layer 203 preparation process can be completed only in the passivation layer preparation device 100, saving the process of transferring the cleaned semi-finished product 200A. This reduces the complexity of the perovskite solar cell 200 preparation process, optimizes the production cycle of the perovskite solar cell 200, and thus helps to improve the production efficiency and capacity of the perovskite solar cell 200.

[0154] This application provides a perovskite solar cell 200, such as... Figure 8 or Figure 9 As shown, it is manufactured using the perovskite solar cell production line described above. The perovskite solar cell 200 includes, from bottom to top, a transparent conductive substrate 201, a first functional layer 202, a passivation layer 203, a perovskite light-absorbing layer 204, a second functional layer 205, and a back electrode layer 206, which are stacked sequentially. Among them, one of the first functional layer 202 and the second functional layer 205 is a hole transport layer and the other is an electron transport layer, and the passivation layer 203 is a film layer formed by drying a mixed solution.

[0155] The perovskite solar cell 200 prepared using the above-mentioned perovskite solar cell production line has a passivation layer 203 between the first functional layer 202 and the perovskite light-absorbing layer 204. This passivation layer 203 is a film formed by drying a mixed solution, and it can passivate interface defects between the first functional layer 202 and the perovskite light-absorbing layer 204.

[0156] To verify the passivation effect of the passivation layer 203 prepared using the passivation layer preparation apparatus 100 of this application, an inverted perovskite solar cell 200 was prepared according to steps S10 to S90 described above. The water droplet angle of the film surface was tested on the devices obtained in step S30 and step S40, respectively. The water droplet angle test results of the device obtained in step S30 are as follows: Figure 11 As shown, the water droplet angle test results of the device obtained in step S40 are as follows: Figure 12 As shown. By Figure 11 and Figure 12 As can be seen, before the passivation layer 203 was prepared using the passivation layer preparation apparatus 100 of this application, the water droplet angle on the film surface was 7.7°. After the passivation layer 203 was prepared using the passivation layer preparation apparatus 100 of this application, the water droplet angle on the film surface increased to 61.9°. This indicates that the passivation layer 203 can be successfully introduced onto the hole transport layer surface of the semi-finished product 200A using the passivation layer preparation apparatus 100 of this application.

[0157] As used in this article, the term "water droplet angle" refers to the contact angle on the device film surface, that is, the tangent line drawn on the device film surface at the gas-liquid interface at the junction of the gas, liquid, and solid phases, and the angle between this tangent line on the liquid side and the solid-liquid interface line.

[0158] Furthermore, in order to verify that the passivation layer 203 can effectively passivate the interface defects between the first functional layer 202 and the perovskite light-absorbing layer 204, performance tests were conducted on the inverted perovskite solar cell 200 of Example 1 and the inverted perovskite solar cell 200 of the comparative example. The test results are shown in Table 1.

[0159] The inverted perovskite solar cell 200 of Example 1 was prepared according to steps S10 to S90 described above. The comparative example is prepared in the same steps as the inverted perovskite solar cell 200 of the Example, except that step S40 is omitted in the preparation process of the comparative example's inverted perovskite solar cell 200; that is, the comparative example's inverted perovskite solar cell 200 did not use the passivation layer preparation apparatus 100 of this application to prepare the passivation layer 203.

[0160] As shown in Table 1, compared to the comparative example, the photoelectric conversion efficiency (PCE), open-circuit voltage (Voc), and fill factor (FF) of the product in Example 1 are all improved, especially the photoelectric conversion efficiency, which increased from 14.05% to 14.75%. The photoelectric conversion efficiency (PCE) is equal to the product of the open-circuit voltage (Voc), fill factor (FF), and short-circuit current density (Jsc), i.e., PCE = Voc × Jsc × FF. This indicates that after processing by the passivation layer preparation apparatus 100 of this application, a passivation layer 203 is introduced between the first functional layer 202 and the perovskite light-absorbing layer 204. Because the droplet angle on the surface of the passivation layer 203 is relatively large, this is beneficial to the growth of perovskite grain boundaries, thereby reducing defects between the first functional layer 202 and the perovskite light-absorbing layer 204, facilitating electron and hole transport, and thus having a positive effect on improving the photoelectric conversion efficiency.

[0161] Table 1

[0162] Devices PCE (%) Voc(V) <![CDATA[Jsc(mA.cm -2 )]]> FF (%) Comparative Example 14.05 0.95 20.31 72.85 Example 1 14.75 0.99 20.25 73.60

[0163] The description of the various embodiments above tends to emphasize the differences between the various embodiments. The similarities or similarities can be referred to each other. For the sake of brevity, they will not be described again here. In order to make the technical means of this application clearer and to implement it according to the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, specific embodiments of this application are described below.

[0164] In a specific example of this application, a passivation layer fabrication apparatus 100 is proposed, suitable for fabricating a passivation layer 203 on a semi-finished product 200A. The semi-finished product 200A includes a transparent conductive substrate 201 and a hole transport layer stacked sequentially from bottom to top, and the semi-finished product 200A can ultimately be fabricated into an inverted perovskite solar cell 200.

[0165] like Figures 1 to 6 As shown, the passivation layer preparation apparatus 100 includes a process tank 10, a drying tank 20, a liquid storage tank 30, a spray assembly 40, a transfer device, and a drying device 23.

[0166] Process tank 10 and drying tank 20 are arranged side by side and adjacent to each other, sharing a partition wall 12. A transfer inlet 110 is provided on the first side wall 11 of process tank 10, a transfer outlet 210 is provided on the second side wall 21 of drying tank 20, and a connecting port 120 is provided on partition wall 12. The transfer inlet 110, connecting port 120, and transfer outlet 210 can all allow the semi-finished product 200A to pass through. The transfer inlet 110, connecting port 120, and transfer outlet 210 are arranged sequentially and opposite to each other along the side-by-side arrangement of process tank 10 and drying tank 20.

[0167] The process tank 10 is rectangular in shape, and the semi-finished product 200A can be accommodated inside the process tank 10. The top of the process tank 10 is constructed with steps, which include a first horizontal plane, a vertical plane and a second horizontal plane connected in sequence, with the second horizontal plane located below the first horizontal plane.

[0168] The drying tank 20 is rectangular in shape. A drying device 23 is installed inside the drying tank 20. The drying device 23 includes an air knife that blows out hot air; the airflow rate and temperature of the hot air blown out by the air knife are adjustable. This allows for the adjustment of the passivation layer 203's film quality through drying process parameters.

[0169] A storage tank 30 is located below the process tank 10 and the drying tank 20. The storage tank 30 is used to hold a mixed solution, which is formed by mixing water and a surfactant. The surfactant is selected from at least one of sodium lauryl sulfonate (SLS), sodium aminosulfonate (SAS), and sulfobetaine. The bottoms of both the process tank 10 and the drying tank 20 are connected to the storage tank 30 via a recovery pipe 90 located below them. A transducer 31 is installed inside the storage tank 30 and is electrically connected to an ultrasonic generator. The transducer 31 generates ultrasonic waves, which induce vibrations in the mixed solution. Multiple replenishment bottles 80 are also installed outside the storage tank 30. These replenishment bottles contain different surfactants. Multiple concentration sensors are installed inside the storage tank 30 to detect the concentration of different surfactants in the mixed solution. When the detected surfactant concentration is below a preset threshold, the corresponding replenishment bottle 80 adds surfactant to the storage tank 30.

[0170] The conveying device includes multiple rotatable conveyor rollers 51 arranged within the process tank 10 and the drying tank 20. The rotation axis of the conveyor rollers 51 is perpendicular to the parallel arrangement direction of the process tank 10 and the drying tank 20. By rotating, the conveyor rollers 51 advance the semi-finished products 200A placed on them along the parallel arrangement direction, thereby horizontally transferring unsprayed semi-finished products 200A into the process tank 10, or horizontally transferring sprayed semi-finished products 200A from the process tank 10 to the drying tank 20. A flexible pad 511 may also be provided around the outer periphery of the conveyor rollers 51, which is used to contact the surface of the transparent conductive substrate facing away from the hole transport layer. At least one conveyor roller 51 is driven by a drive motor and acts as the active roller, receiving rotational power from the drive motor to rotate. The active roller is driven by the other conveyor rollers 51 (i.e., driven rollers) through a linkage mechanism. Among them, the process tank 10 and the drying tank 20 are also provided with a protective shell 60. The protective shell 60 extends along the conveying direction of the conveying device, and the drive motor and linkage mechanism are housed in the protective shell 60.

[0171] The spray assembly 40 includes a frame 41 and spray heads 42. The frame 41 is a hollow structure with a liquid supply channel inside, through which the spray heads 42 are connected to the storage tank 30. The frame 41 includes two support beams 411 and six mounting beams 410. The support beams 411 extend along the length of the process tank 10, and the mounting beams 410 extend along the width of the process tank 10. Each mounting beam 410 is connected at both ends to the two support beams 411. The two support beams 411 rest on the second horizontal plane of the process tank 10 and do not extend beyond the first horizontal plane. Multiple spray heads 42 are installed on each mounting beam 410, spaced apart sequentially along the width of the process tank 10. The inlet of each spray head 42 is connected to the outlet of a liquid supply channel. The mixed solution in the storage tank 30 flows through the liquid supply channel to the inlet of the spray head 42, and is then sprayed into the process tank 10 from the outlet of the spray head 42.

[0172] The passivation layer preparation apparatus 100 also includes a first sealing plate 13, a second sealing plate 14, a third sealing plate 22, and a cover plate 70. The first sealing plate 13 rotates to open and close the inlet 110, the second sealing plate 14 rotates to open and close the connecting port 120, the third sealing plate 22 rotates to open and close the outlet 210, and the cover plate 70 rotates to open and close the top opening of the process tank 10 and the top opening of the drying tank 20.

[0173] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and they should all be covered within the scope of the claims and specification of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A passivation layer preparation apparatus for preparing a passivation layer on a perovskite solar cell semi-finished product, the perovskite solar cell semi-finished product comprising a transparent conductive substrate and a first functional layer stacked sequentially from bottom to top, wherein the first functional layer is one of a hole transport layer and an electron transport layer, characterized in that, The passivation layer preparation apparatus includes: A process tank, the interior of which can hold the perovskite solar cell semi-finished product; The drying tank is located at the rear end of the process tank; A storage tank for holding a mixed solution, which is formed by mixing water and a surfactant; A spray assembly has a liquid outlet facing the inside of the process tank, the liquid outlet being connected to the liquid storage tank, and the spray assembly being used to spray the mixed solution onto the surface of the first functional layer facing away from the transparent conductive substrate. A conveying device is used to transfer the perovskite solar cell semi-finished product into the process tank, or to transfer the sprayed perovskite solar cell semi-finished product from the process tank to the drying tank; and A drying device is provided in the drying tank. The drying device is used to dry the perovskite solar cell semi-finished product introduced into the drying tank, so that the mixed solution on the surface of the first functional layer is dried into a film.

2. The passivation layer preparation apparatus according to claim 1, characterized in that, The process tank and the drying tank are arranged side by side. The transmission device is configured to drive the perovskite solar cell semi-finished product to move linearly along the direction in which the process tank and the drying tank are arranged side by side, so as to horizontally transfer the unsprayed perovskite solar cell semi-finished product into the process tank, or to horizontally transfer the sprayed perovskite solar cell semi-finished product from the process tank to the drying tank.

3. The passivation layer preparation apparatus according to claim 2, characterized in that, The transmission device includes multiple rotatable conveyor rollers, the rotation axis of which is perpendicular to the direction in which the process tank and the drying tank are arranged side by side, and the multiple conveyor rollers are distributed at intervals along the direction in which the process tank and the drying tank are arranged side by side. The outer circumference of the conveyor roller is provided with a flexible pad, which is used to contact the surface of the transparent conductive substrate facing away from the first functional layer.

4. The passivation layer preparation apparatus according to claim 2, characterized in that, The process tank has an inlet on its first side wall and the drying tank has an outlet on its second side wall; the process tank and the drying tank are arranged adjacent to each other and share a partition wall, which has a communication opening. The inlet, the connecting port, and the outlet can all allow the perovskite solar cell semi-finished product to pass through, and the inlet, the connecting port, and the outlet are arranged in sequence opposite to each other along the conveying direction of the transmission device.

5. The passivation layer preparation apparatus according to claim 4, characterized in that, It also includes a first sealing plate, a second sealing plate, a third sealing plate, and a cover plate that are movable relative to the process tank and the drying tank; the first sealing plate is used to open and close the inlet, the second sealing plate is used to open and close the connecting port, the third sealing plate is used to open and close the outlet, and the cover plate is used to open and close the top opening of the process tank and the top opening of the drying tank.

6. The passivation layer preparation apparatus according to claim 1, characterized in that, The passivation layer preparation device further includes a frame, and the spraying assembly includes a pipe, which is fixedly connected to the frame and has a liquid supply channel inside the pipe; or, the spraying assembly includes a frame and a liquid supply channel is formed inside the frame. The outlet is connected to the storage tank through the supply channel, and the frame is set inside the process tank and located at the top opening of the process tank.

7. The passivation layer preparation apparatus according to claim 6, characterized in that, The spray assembly also includes a spray head, which has a liquid inlet and a liquid outlet connected together, and the liquid inlet is connected to the outlet end of the liquid supply channel.

8. The passivation layer preparation apparatus according to claim 7, characterized in that, The frame includes a plurality of mounting beams extending along a first direction, the plurality of mounting beams being distributed at intervals along a second direction, and each mounting beam corresponding to a plurality of spray heads distributed at intervals along the first direction; Wherein, one of the first direction and the second direction is the width direction of the perovskite solar cell semi-finished product, and the other is the length direction of the perovskite solar cell semi-finished product.

9. The passivation layer preparation apparatus according to any one of claims 1 to 8, characterized in that, It also includes a mixer for applying an operation to the mixed solution in the reservoir to move the mixed solution.

10. The passivation layer preparation apparatus according to claim 9, characterized in that, The mixer includes an ultrasonic generator and a transducer disposed in the liquid storage tank. The transducer is electrically connected to the ultrasonic generator and is used to generate ultrasonic waves, which are used to induce vibration of the mixed solution. Alternatively, the mixer is a rotatable stirrer disposed in the liquid storage tank.

11. The passivation layer preparation apparatus according to any one of claims 1 to 8, characterized in that, It also includes a concentration detection device and a replenishment bottle. The replenishment bottle is used to hold the surfactant, and the concentration detection device is used to detect the concentration value of the surfactant in the mixed solution in the storage tank. When the concentration value is lower than a preset threshold, the replenishment bottle is used to deliver the surfactant to the storage tank.

12. The passivation layer preparation apparatus according to claim 11, characterized in that, The replenishment bottle is provided in multiple ways, and the surfactant contained in each of the multiple replenishment bottles is different.

13. The passivation layer preparation apparatus according to any one of claims 1 to 8, characterized in that, It also includes recycling pipes; At least one of the recovery pipes is connected at both ends to the process tank and the storage tank, respectively, for conveying the mixed solution in the process tank to the storage tank, and / or, at least one of the recovery pipes is connected at both ends to the drying tank and the storage tank, respectively, for conveying the mixed solution in the drying tank to the storage tank.

14. The passivation layer preparation apparatus according to claim 13, characterized in that, The recovery pipe and the storage tank are located below the process tank and the drying tank, with the inflow end of the recovery pipe located above the outflow end of the recovery pipe.

15. A perovskite solar cell production line, characterized in that, The apparatus includes the passivation layer preparation apparatus as described in any one of claims 1 to 14.

16. A perovskite solar cell manufactured using the perovskite solar cell production line according to claim 15, characterized in that, include: The transparent conductive substrate, the first functional layer, the passivation layer, the perovskite light-absorbing layer, the second functional layer, and the back electrode layer are stacked sequentially from bottom to top. In this design, one of the first functional layer and the second functional layer is a hole transport layer and the other is an electron transport layer, and the passivation layer is a film formed by drying the mixed solution.

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