Clamp

Abstract

The utility model belongs to the field of diamond film processing and preparation, and discloses a clamp. The clamp comprises a base, a suction cup column and a suction cup, the top of the suction cup is arranged to be a spherical adsorption face, the bottom of the suction cup is fixed to the base through the suction cup column, an air exhaust hole is formed in the base, a first air channel is formed in the base, a second air channel is formed in the suction cup column, and an air cavity is formed in the suction cup. An adsorption hole is formed in the spherical adsorption surface, and the air exhaust hole is communicated with the adsorption hole through the first air channel, the second air channel and the air cavity. The clamp is simple in structure and easy and convenient to operate, the diamond vibrating diaphragm is adsorbed on the suction cup in a negative pressure adsorption mode, and the problem that the vibrating diaphragm is broken in the machining process can be effectively solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to diamond film processing and preparation field relates to a clamp, more specifically, it relates to a clamp for cutting diamond diaphragm. BACKGROUND

[0002] Chemical vapor deposition (CVD) is an effective method for preparing high-quality diamond film, especially microwave chemical vapor deposition (MPCVD) with its large plasma density, no electrode pollution and other advantages, become the preferred scheme for preparing high-quality diamond film, with the development of MPCVD technology and equipment, at present, several tens of microns even thinner diamond diaphragm can be prepared. However, as the diaphragm becomes thinner, the rupture phenomenon increases significantly during subsequent cutting and processing, especially during clamping.

[0003] The prior art mostly relies on mechanical extrusion locking and then gluing to clamp, although this method can be processed, but it is time-consuming and laborious during clamping, and it is difficult to control the force during mechanical locking, and the force is slightly too large, which is easy to cause the diaphragm to break, and the force is too small, which is easy to cause the diaphragm position to deviate during cutting; and the use of glue leads to difficult cleaning of the glue later, which is easy to cause pollution of the diaphragm. UTILITY MODEL CONTENT

[0004] In view of the above problems existing in the prior art, the purpose of the utility model is to provide a clamp, which is simple in structure, easy to operate during clamping, and can reduce the rupture probability of the diaphragm during clamping and processing.

[0005] To achieve the above purpose, the technical scheme adopted by the utility model is:

[0006] A clamp, the clamp comprises a base, a suction cup column and a suction cup, the top of the suction cup is provided with a spherical adsorption surface, the bottom of the suction cup is fixed on the base through the suction cup column, the base is provided with a suction hole, the base is provided with a first air duct, the suction cup column is provided with a second air duct, the suction cup is provided with a gas cavity, the spherical adsorption surface is provided with an adsorption hole, and the suction hole is communicated with the adsorption hole through the first air duct, the second air duct and the gas cavity.

[0007] Further, the spherical adsorption surface is a convex spherical surface or a concave spherical surface.

[0008] Further preferably, the curvature radius of the convex spherical surface or the concave spherical surface is consistent with the curvature radius of the inner spherical surface or the outer spherical surface of the diamond diaphragm to be adsorbed.

[0009] Further, a plurality of adsorption holes are uniformly distributed on the spherical adsorption surface.

[0010] Further preferably, the plurality of adsorption holes form an adsorption area on the spherical adsorption surface; the adsorption area is of a spherical type, and a central axis of the adsorption area coincides with a central axis in the spherical adsorption surface.

[0011] Further, the air suction hole is arranged on the side surface of the base.

[0012] Further, a sealing ring is further included, a first sealing groove is arranged at the top of the chuck column, a second sealing groove is arranged at the bottom of the chuck, and the first sealing groove, the sealing ring and the second sealing groove are matched.

[0013] Further, the chuck column and the chuck are fixed by bolts.

[0014] Further, a plurality of chuck columns are arranged, and the plurality of chuck columns are uniformly distributed on the base.

[0015] Further, a plug for plugging the air suction hole is further included.

[0016] Compared with the prior art, the clamp has the beneficial effects that:

[0017] (1) The clamp has simple structure and is easy to operate, the diamond vibrating diaphragm is adsorbed on the chuck by the negative pressure adsorption mode, and the breakage problem of the vibrating diaphragm in the machining process can be effectively avoided.

[0018] (2) The clamp can clamp a plurality of vibrating diaphragms at the same time, the assembly method is simple, the working efficiency is greatly improved, and the clamp is suitable for industrial production.

[0019] (3) The clamp is provided with a spherical adsorption surface curvature radius matched with the diamond vibrating diaphragm, the diamond vibrating diaphragm is adsorbed on the spherical adsorption surface, and the breakage probability of the diamond vibrating diaphragm in the clamping process is further reduced. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are used to provide a further understanding of the present application, and constitute a part of the specification, and are used to explain the present application together with embodiments of the present application, and do not constitute a limitation on the present application. In the drawings:

[0021] Figure 1 is a schematic view of a three-dimensional structure of the clamp in embodiment 1;

[0022] Figure 2 is a schematic view of a top view structure of the clamp in embodiment 1;

[0023] Figure 3 is a schematic view of a sectional structure of the clamp in embodiment 1; Figure 1

[0024] Figure 4 is a schematic view of a sectional structure of the clamp in embodiment 1;​Figure 2 ;

[0025] Wherein:

[0026] 1-base, 2-suction cup column, 3-suction cup, 4-spherical adsorption surface, 5-adsorption hole, 6-pumping hole, 7-plug, 8-first airway, 9-second airway, 10-air cavity, 11-first sealing groove, 12-second sealing groove, 13-sealing ring. DETAILED DESCRIPTION

[0027] In order to facilitate the understanding of the present application, the following will be combined with the description of the drawings and the preferred embodiments to make a more comprehensive and detailed description of the present application, but the protection scope of the present application is not limited to the following specific embodiments.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The technical terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present application.

[0029] Unless otherwise specified, various raw materials, reagents, instruments and equipment used in the present application can be purchased from the market or can be prepared by existing methods.

[0030] Example 1

[0031] As shown in Figures 1-4 The present embodiment provides a clamp for cutting diamond diaphragm, which comprises a base 1, a suction cup column 2 and a suction cup 3, the top of the suction cup 3 is provided as a spherical adsorption surface 4, the bottom of the suction cup 3 is fixed on the base 1 through the suction cup column 2, the base 1 is provided with a pumping hole 6, the base 1 is provided with a first airway 8, the suction cup column is provided with a second airway 9, the suction cup 3 is provided with an air cavity 10, the spherical adsorption surface 4 is provided with an adsorption hole 5, and the pumping hole 6 is communicated with the adsorption hole 5 through the first airway 8, the second airway 9 and the air cavity 10.

[0032] In the present embodiment, the base 1 is a regular cuboid structure.

[0033] In the present embodiment, the spherical adsorption surface 4 is a convex spherical surface. As one of the preferred schemes of the present embodiment, the radius of curvature of the convex spherical surface is consistent with the tolerance of the inner spherical surface radius of the diamond diaphragm to be adsorbed.

[0034] Specifically, this structure can as much as possible adhere the diamond diaphragm and the spherical adsorption surface 4 when adsorbing the diamond diaphragm, further reducing the probability of breakage of the diamond diaphragm during clamping.

[0035] In the embodiment, the plurality of adsorption holes 5 are uniformly distributed on the spherical adsorption surface 4. As one of the preferred schemes of the embodiment, the plurality of adsorption holes form an adsorption area on the spherical adsorption surface 4; the adsorption area is of a spherical type, and a central axis of the adsorption area coincides with a central axis in the spherical adsorption surface 4.

[0036] Specifically, the structure can make the adsorption force as uniform as possible when the diamond is adsorbed, and improve the adsorption effect.

[0037] In the embodiment, the air extraction hole 6 is arranged on the side of the base 1.

[0038] In the embodiment, the sealing ring 13 is further included, the first sealing groove 11 is arranged at the top of the chuck column 2, the second sealing groove 12 is arranged at the bottom of the chuck 3, and the first sealing groove 11, the sealing ring 13 and the second sealing groove 12 are matched.

[0039] In the embodiment, the chuck column 2 and the chuck 3 are fixed by bolts.

[0040] In the embodiment, the four chuck columns 2 are uniformly distributed on the base 1.

[0041] In the embodiment, the plug 7 for plugging the air extraction hole 6 is further included.

[0042] The above is only the preferred embodiment of the utility model, and is not used for limiting the utility model. For the person skilled in the art, the utility model can have various changes and changes. Any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model should be included in the containing range of the utility model.

Claims

1. A clamp characterized in that, The clamp comprises a base, a suction disc column and a suction disc, the top of the suction disc is provided with a spherical adsorption surface, the bottom of the suction disc is fixed on the base through the suction disc column, the base is provided with a suction hole, the base is provided with a first air duct, the suction disc column is provided with a second air duct, the suction disc is provided with a gas cavity, the spherical adsorption surface is provided with an adsorption hole, and the suction hole is communicated with the adsorption hole through the first air duct, the second air duct and the gas cavity.

2. The clamp of claim 1, wherein The spherical adsorption surface is a convex spherical surface or a concave spherical surface.

3. The clamp of claim 2, wherein The curvature radius of the convex spherical surface or the concave spherical surface is consistent with the curvature radius of the inner spherical surface or the outer spherical surface of the diamond vibrating diaphragm to be adsorbed.

4. The clamp of claim 1, wherein A plurality of adsorption holes are uniformly distributed on the spherical adsorption surface.

5. The clamp of claim 4, wherein A plurality of adsorption holes form an adsorption area on the spherical adsorption surface; the adsorption area is a spherical type, and the central axis of the adsorption area coincides with the central axis in the spherical adsorption surface.

6. The clamp of claim 1, wherein The suction hole is arranged on the side surface of the base.

7. The clamp of claim 1, wherein Further comprising a sealing ring, the top of the suction disc column is provided with a first sealing groove, the bottom of the suction disc is provided with a second sealing groove, and the first sealing groove, the sealing ring and the second sealing groove are matched.

8. The clamp of claim 1, wherein The suction disc column and the suction disc are fixed by bolts.

9. The clamp of claim 1, wherein A plurality of suction disc columns are uniformly distributed on the base.

10. The clamp of claim 1, wherein Further comprising a plug for plugging the suction hole.

Images