Floating supporting device for cutting off silicon single crystal rod

Abstract

The utility model discloses a floating support device for cutting off a silicon single crystal rod, which comprises a plurality of cylinders symmetrically arranged on a cutting-off equipment workbench, each cylinder comprises a cylinder main body and a shell shield connected with the outside of the cylinder main body, and the shell shield is fixed on the cutting-off equipment workbench through a nut; a double-acting cylinder design is adopted in the cylinder main body, the cylinder main body is provided with a piston rod, a piston assembly, two air inlet valves and two pressure release valves, compressed air enters the cylinder main body through the air inlet valves to push the piston rod to move, and when the pressure exceeds a certain degree, the pressure is reduced through the pressure release valves; the piston assembly is fixed on the piston rod through two hexagon nuts, and the piston assembly is provided with three layers of sealing rings; and a PVC buffer layer covers the contact position of the piston rod and the silicon single crystal. According to the silicon single crystal cutting device, the possible displacement of the silicon single crystal in the cutting process can be obviously reduced, the edge breakage is inhibited, the generation of cut surface line marks is reduced, and the dependence on the proficiency of operators is reduced.

Description

Technical Field

[0001] This utility model relates to a floating support device for cutting silicon single crystal rods, belonging to the field of semiconductor silicon material processing technology. Background Technology

[0002] Semiconductor silicon is a primary raw material for chip manufacturing. A series of processing steps transform silicon single crystal rods into the raw materials required for chip production. However, because the parameters of silicon single crystal rods differ at different lengths during the pulling process, each length is suitable for different chip manufacturing grades and chip types. Therefore, the pulled silicon single crystals need to be segmented.

[0003] The shaving process is one of the steps in single crystal processing. After evaluation in the crystal pulling process, the single crystal is segmented (marked). The shaving process segments and samples the single crystal through marking on the crystal. Due to the shape of the silicon single crystal rod, gaps often appear between the silicon single crystal rod and the shaving equipment table. During the shaving process, the single crystal is prone to displacement in the diameter direction, resulting in the final shaving effect not meeting expectations, thus causing loss of the silicon single crystal rod in the shaving process. Therefore, in the past, to prevent this phenomenon in the silicon single crystal rod shaving process, operators often needed to add filler material to the gap between the silicon single crystal rod and the shaving equipment table.

[0004] Due to differences in operator skill, it is difficult to guarantee the cutting quality of monocrystalline silicon rods, which also reduces production efficiency. Summary of the Invention

[0005] In view of the stability support problem that occurs when silicon single crystals are cut, the purpose of this utility model is to provide a floating support device for cutting silicon single crystal rods, which can suppress displacement along the diameter direction during single crystal cutting to a certain extent, improve cutting quality, and reduce loss.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A floating support device for severing silicon single crystal rods includes several cylinders symmetrically arranged on the worktable of a severing device. Each cylinder includes a cylinder body and an outer casing connected to the outside of the cylinder body. The outer casing is fixed to the worktable of the severing device by nuts. The cylinder body is designed as a double-acting cylinder, with a piston rod, a piston assembly, two inlet valves, and two pressure relief valves. Compressed air enters the cylinder body through the inlet valves, pushing the piston rod to move. When the pressure exceeds a certain level, the pressure is reduced through the pressure relief valves. The piston assembly is fixed to the piston rod by two hexagonal nuts and has three layers of sealing rings. The contact area between the piston rod and the silicon single crystal is covered with a PVC buffer layer.

[0008] Furthermore, the air intake valve of the cylinder located on the same side of the cutting device's workbench is connected to the same gas pipeline of the equipment and is uniformly controlled by the equipment's industrial control system.

[0009] Furthermore, an L-shaped fulcrum extends from the cylinder housing cover. When the cylinders are symmetrically arranged on both sides of the cutting device's worktable, the L-shaped fulcrum on the housing cover connects to the worktable. Preferably, hexagonal screws are used to connect the L-shaped fulcrum to the worktable. Alternatively, the L-shaped fulcrum can be fixed to the worktable using U-shaped pins.

[0010] Furthermore, buffer pads are provided at the contact positions between the piston rod and the cylinder at both ends. Preferably, buffer pads are also provided at the contact positions between the piston rod and the cylinder body at both ends to provide a buffering effect when the cylinder state is switched.

[0011] Furthermore, the piston rod is covered with a waterproof bellows cover at the part extending out of the cylinder guard to protect the piston rod from contact with water.

[0012] Alternatively, the piston rod may have a metal protective cover on the portion extending out of the cylinder cover.

[0013] The advantages of this utility model are:

[0014] This invention improves the automation level of the cutting process, reduces reliance on manual labor, enhances cutting quality, reduces edge chipping and line marks, and minimizes potential uneven sample thickness. Furthermore, this invention is easily expandable; multiple cylinders can be installed and supported using only one equipment interface. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the cylinder structure in the floating support device of this utility model. The diagram shows the assembly state of the cylinder body and the outer casing (the upper part is a sectional view).

[0016] Figure 2 This is a schematic diagram of the working state of this utility model on a silicon single crystal rod cutting machine. Detailed Implementation

[0017] The present invention will now be described in detail with reference to the accompanying drawings. The embodiments described are for illustrative purposes only and are not intended to limit the scope of the present invention.

[0018] This invention discloses a floating support device for cutting silicon single crystal rods, comprising multiple cylinders symmetrically mounted on both sides of the cutting equipment's worktable to support multiple parts of the silicon single crystal rod. Each cylinder includes a cylinder body and a protective outer casing 1 connecting to the outside of the cylinder body. Figure 1 The diagram shows the assembly of the cylinder body and the outer casing.Figure 2 The diagram shows the operation of the cylinder on the cutting machine.

[0019] The cylinder body and the outer casing 1 are connected by a connecting part 2. The outer casing is fixedly installed on the cutting equipment workbench by a fixing nut 9. The cylinder body is designed as a double-acting cylinder, including a piston rod, a piston rod assembly, two intake valves 3, and two pressure relief valves 4. Compressed air enters the cylinder body through the intake valves, pushing the piston rod to move. When the pressure exceeds a certain level, the pressure is reduced through the pressure relief valves, improving the cylinder's service life and safety. Compared to traditional double-acting cylinders, in this invention, the piston assembly is fixed to the piston rod by two hexagonal nuts 6. Within the piston assembly, three layers of sealing rings 5 ​​and counterweight metal blocks 13 are alternately arranged. These sealing rings 5 ​​and counterweight metal blocks 13 are connected to the piston rod by threads, rather than by an interference fit. Using three layers of sealing rings 5 ​​improves the sealing performance on both sides of the cylinder. Piston buffer pads 7 are provided at the contact points between the piston rod and the cylinder, and cylinder buffer pads 8 are provided at the contact points between the piston rod and the cylinder inside the cylinder body, providing a buffering effect during cylinder state switching. The piston rod extending beyond the cylinder cover is covered with a waterproof bellows-like protective cover to prevent it from contacting water. The contact area between the piston rod and the silicon monocrystalline silicon is covered with a PVC buffer layer 10. An L-shaped support 12 extends from the cylinder body to secure the cylinder to the cutting equipment's workbench (similar to...). Figure 2 (As shown). Alternatively, the L-shaped fulcrum can be fixed to the worktable of the cutting device using a U-shaped pin.

[0020] The air intake valves of the cylinders on the same side of the workbench are connected to the same gas pipeline of the equipment and are controlled uniformly by the equipment's industrial control system, or they can be controlled separately. In the same cylinder, two air intake valves are connected to the equipment through air pipes. When one air intake valve is in operation, the other air intake valve stops supplying compressed air and releases pressure through the pressure relief valve, controlling the cylinder to rise or fall.

[0021] In practical use, such as Figure 2 As shown, the silicon single crystal rod 2-1 is placed on the worktable of the cutting equipment. After the cylinder is raised, the PVC material at the end of the cylinder piston rod will fully contact the silicon single crystal rod to provide support for the single crystal.

[0022] This invention's floating support device utilizes symmetrically arranged cylinders mounted on the cutting equipment's worktable. These cylinders provide lateral support to the silicon single crystal during cutting, significantly reducing lateral (diameteral) displacement of the single crystal during the cutting process. This suppresses edge chipping to some extent, reduces surface marks, and lessens reliance on operator skill. Unlike traditional support methods, this floating support device uses equipment control to regulate the cylinders' movement, reducing manual intervention, ensuring consistent support force, and adapting to silicon single crystals of different sizes, thus improving the cutting quality. The internal cylinder body employs a double-acting cylinder design, significantly extending service life and cylinder stability, while also simplifying the structure and facilitating maintenance. This floating support device is easy to install, disassemble, replace, and expand.

Claims

1. A floating support device for cutting silicon single crystal rods, characterized in that, The device includes several cylinders symmetrically arranged on the workbench of the cutting equipment. Each cylinder comprises a cylinder body and an outer casing connected to the outside of the cylinder body. The outer casing is fixed to the workbench of the cutting equipment by nuts. The cylinder body is designed as a double-acting cylinder, with a piston rod, a piston assembly, two intake valves, and two pressure relief valves. Compressed air enters the cylinder body through the intake valves, pushing the piston rod to move. When the pressure exceeds a certain level, the pressure is reduced through the pressure relief valves. The piston assembly is fixed to the piston rod by two hexagonal nuts and has three layers of sealing rings. The contact area between the piston rod and the silicon single crystal is covered with a PVC buffer layer.

2. The floating support device for cutting silicon single crystal rods according to claim 1, characterized in that, The air intake valve of the cylinder located on the same side of the cutting device's workbench is connected to the same gas pipeline of the equipment and is uniformly controlled by the equipment's industrial control system.

3. The floating support device for cutting silicon single crystal rods according to claim 1, characterized in that, An L-shaped fulcrum extends from the cylinder housing cover. When the cylinders are symmetrically arranged on both sides of the cutting equipment workbench, the L-shaped fulcrum on the housing cover is connected to the cutting equipment workbench.

4. The floating support device for cutting silicon single crystal rods according to claim 3, characterized in that, The L-shaped fulcrum is fixed to the workbench of the cutting device using a U-shaped pin.

5. The floating support device for cutting silicon single crystal rods according to claim 1, characterized in that, The piston rod is provided with buffer pads at the contact points between its two ends and the cylinder.

6. The floating support device for cutting silicon single crystal rods according to claim 5, characterized in that, Buffer pads are also provided at both ends of the cylinder body where they contact the piston rod.

7. The floating support device for cutting silicon single crystal rods according to claim 1, characterized in that, The piston rod is covered with a waterproof accordion cover at the part that extends out of the cylinder guard.

8. The floating support device for cutting silicon single crystal rods according to claim 7, characterized in that, The piston rod has a metal protective cover on the part that extends out of the cylinder cover.

Images