Material conveying device

By designing a material conveying device with a feeding mechanism, protective cover, and quantitative unloading head, the problems of inflexible wafer loading and inconvenient transfer were solved, realizing automatic quantitative unloading and stable conveying, and improving the flexibility and efficiency of wafer conveying.

CN223659008UActive Publication Date: 2025-12-12江苏恒业半导体技术有限公司
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Patent Information

Application Number
CN202520110908.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-17
Publication Date
2025-12-12
Estimated Expiration
2035-01-17

AI Technical Summary

Technical Problem

Existing material conveying devices are not flexible enough for wafer loading, are inconvenient to transfer, have unstable control, and are difficult to achieve automatic quantitative feeding, resulting in wasted time.

Method used

A material conveying device was designed, comprising a feeding mechanism, a protective cover, a hydraulic rod, support legs, and a quantitative feeding head. Stable conveying is achieved through a conveyor belt and a wafer trough, and angle adjustment and quantitative control are performed using an electric actuator and a hydraulic rod.

Benefits of technology

It enables flexible angle adjustment and stable transport of wafers, automatic quantitative feeding, improves transport efficiency and flexibility, and reduces manual intervention.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a material conveying device which comprises a feeding mechanism wafer tank, a hydraulic rod, supporting legs and a quantitative discharging head, a protective cover is arranged on the outer side of the feeding mechanism, a limiting plate is arranged on the top of the protective cover through the supporting rod, the wafer tank is arranged in the middle of the top end of the limiting plate, and the hydraulic rod is arranged on the lower portion of the wafer tank. A quantitative discharging head is arranged in the middle of the bottom end of the wafer tank, the bottom of the protective cover is connected with supporting legs in a hinged mode, and wheels are arranged at the bottoms of the supporting legs. The wafer feeding device is provided with the feeding mechanism, the conveying belt is arranged on the feeding mechanism, the wafer groove is formed in the middle of the conveying belt, stable placement and conveying of wafers are facilitated through the wafer groove, feeding of the wafers is stable, the protective cover is arranged on the outer side of the feeding mechanism, feeding protection can be carried out on the wafers, the protective cover is connected with the supporting legs in a hinged mode, and the protective cover is convenient to use. And a hydraulic rod is arranged on the inner side of the hinged position, so that the angle of the feeding mechanism can be adjusted, and the feeding mechanism can feed materials in insufficient directions and at insufficient angles.
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Description

Technical Field

[0001] This utility model relates to the field of material conveying devices, specifically a material conveying device. Background Technology

[0002] Material conveying devices are used to automatically transport wafers. The raw material for wafers is silicon. Silica ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to produce high-purity polycrystalline silicon. Wafer manufacturers then melt this polycrystalline silicon, plant seed crystals in the melt, and slowly pull them out to form cylindrical single-crystal silicon rods. The silicon rods then undergo processes such as cutting, grinding, and slicing, and after packaging, they become the basic raw material for making integrated circuits - silicon wafers.

[0003] For example, the authorized patent with publication number CN101849285B (Online Wafer Transport Device) includes: a loading chamber (51) for inputting wafers from the outside; an unloading chamber (53) for outputting wafers to the outside; and a plurality of transport chambers (54a, 54b, 54c) and a plurality of processing modules (52a, 52b), the transport chambers and the processing modules being connected in series between the loading chamber and the unloading chamber. The transport chambers and processing modules are connected alternately, and the plurality of transport chambers includes a first end transport chamber (54a) connected to the loading chamber, a second end transport chamber (54c) connected to the unloading chamber, and one or more other intermediate transport chambers (54b).

[0004] The material conveying process of the aforementioned prior art is inconvenient for angle adjustment, making it less flexible for wafer loading, less convenient for transfer, less stable for loading control, and inconvenient for automatic quantitative loading of wafers, requiring frequent manual feeding and wasting a lot of conveying time. Utility Model Content

[0005] The purpose of this utility model is to provide a material conveying device to solve the problems mentioned in the background art, such as the inconvenience of angle adjustment in the material conveying process, which makes it inflexible for wafer feeding, inconvenient for transfer, unstable feeding control, and inconvenience for automatic quantitative feeding of wafers, requiring frequent manual feeding and wasting a lot of conveying time.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a material conveying device, including a feeding mechanism wafer tank, a hydraulic rod, a support leg, and a quantitative feeding head. The feeding mechanism is provided with a protective cover on its outer side. A limiting plate is provided on the top of the protective cover via the support rod. The wafer tank is provided at the center of the top of the limiting plate. The quantitative feeding head is provided at the center of the bottom of the wafer tank. The bottom of the protective cover is connected to the support leg by a hinge. The bottom of the support leg is provided with wheels.

[0007] In a further embodiment, the feeding mechanism includes a conveyor roller, a side guard plate, and a conveyor belt;

[0008] The conveyor belt is located between two conveyor rollers, and the side guards are located on both sides of the conveyor belt, with the ends of the side guards connected to the ends of the protective cover.

[0009] In a further embodiment, a wafer groove is provided in the middle of the conveyor belt, and a motor is provided on one side of the side guard plate, with the output shaft of the motor connected to the end of the conveyor roller.

[0010] In a further embodiment, the top of the protective cover is provided with a receiving port and a mounting hole, the quantitative feeding head is positioned directly opposite the receiving port, and the mounting hole is threaded to the bottom end of the support rod.

[0011] In a further embodiment, a hydraulic rod is provided on one side of the support leg, and the telescopic end of the hydraulic rod is hinged to the bottom of the protective cover.

[0012] In a further embodiment, electric push rods are provided on both sides of the quantitative feeding head, the telescopic end of the electric push rod is provided with a top head, and a wafer is provided inside the quantitative feeding head.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model is equipped with a feeding mechanism, and the feeding mechanism is equipped with a conveyor belt. A wafer groove is provided in the middle of the conveyor belt. The wafer groove facilitates the stable placement and transportation of wafers, making the feeding more stable. A protective cover is provided on the outside of the feeding mechanism to protect the feeding. The protective cover is connected to the support leg by a hinge. A hydraulic rod is provided on the inside of the hinge to adjust the angle of the feeding mechanism, so that it can feed in different directions and angles, making it more flexible to use.

[0015] 2. The protective cover of this utility model is provided with a receiving port on the top, and a quantitative feeding head is provided directly above the receiving port. Inside the quantitative feeding head is a top head controlled by an electric push rod. The top head can be used to clamp and fix the wafer, so that the wafer can be automatically quantitatively fed. The quantitative feeding head is located in the middle of the bottom of the wafer container, which facilitates the storage of wafers and the continuous and stable feeding of wafers, thereby improving the wafer conveying efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a material conveying device according to the present invention;

[0017] Figure 2 This is a top view of the feeding mechanism of this utility model;

[0018] Figure 3This is a front view of the wafer jar of this utility model;

[0019] Figure 4 This is a bottom view of the quantitative feeding head of this utility model.

[0020] In the diagram: 1. Side guard plate; 2. Conveyor roller; 3. Conveyor belt; 4. Protective cover; 5. Wafer tank; 6. Hydraulic rod; 7. Support leg; 8. Wheel; 9. Wafer tank; 10. Mounting hole; 11. Material inlet; 12. Motor; 13. Limiting plate; 14. Electric push rod; 15. Top head; 16. Wafer; 17. Quantitative feeding head. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figures 1-4 This utility model provides an embodiment of a material conveying device, including a feeding mechanism, a wafer tank 5, a hydraulic rod 6, a support leg 7, and a quantitative feeding head. A protective cover 4 is provided on the outside of the feeding mechanism. A limiting plate 13 is provided on the top of the protective cover 4 via a support rod. The wafer tank 5 is located at the center of the top of the limiting plate 13, and the quantitative feeding head 17 is located at the center of the bottom of the wafer tank 5. The bottom of the protective cover 4 is connected to the support leg 7 via a hinge, and wheels 8 are provided at the bottom of the support leg 7. The support rod provides elevated support for the protective cover 4. The wafer tank 5 is used to store wafers 16. The quantitative feeding head 17 is used to control the feeding of wafers 16. The support leg 7 supports the feeding mechanism, and the wheels 8 facilitate the control of equipment transfer.

[0023] The feeding mechanism includes a conveyor roller 2, a side guard plate 1, and a conveyor belt 3. The conveyor belt 3 is located between two conveyor rollers 2, and the side guard plate 1 is located on both sides of the conveyor belt 3. The end of the side guard plate 1 is connected to the end of the protective cover 4. The conveyor roller 2 controls the conveyor belt 3 to convey, and the side guard plate 1 provides side protection for the conveyor belt 3. A wafer groove 9 is provided in the middle of the conveyor belt 3, and a motor 12 is provided on one side of the side guard plate 1. The output shaft of the motor 12 is connected to the end of the conveyor roller 2. The wafer groove 9 is used to place the wafer 16.

[0024] The top of the protective cover 4 is provided with a receiving port 11 and a mounting hole 10. The quantitative feeding head 17 is set directly opposite to the receiving port 11. The mounting hole 10 is threaded to the bottom end of the support rod. The receiving port 11 is used to feed the wafer 16.

[0025] A hydraulic rod 6 is provided on one side of the support leg 7. The telescopic end of the hydraulic rod 6 is hinged to the bottom of the protective cover 4. The angle of the feeding mechanism is adjusted by the hydraulic rod 6.

[0026] Electric push rods 14 are provided on both sides of the quantitative feeding head 17. The telescopic end of the electric push rod 14 is provided with a top head 15. The wafer 16 is provided inside the quantitative feeding head 17. The top head 15 is controlled by the electric push rod 14 to clamp and fix the wafer 16.

[0027] Working principle: During use, wafers are stored in wafer tank 5 and fed through quantitative feeding head 17. During the feeding process, the extension and retraction of top head 15 is controlled by electric push rod 14, so that top head 15 controls wafer 16 to be automatically fed. Wafer 16 is fed through receiving port 11 onto wafer slot 9. Motor 12 drives conveyor roller 2 to rotate, so that conveyor roller 2 automatically conveys conveyor belt 3. Wafer 16 is automatically fed through conveyor belt 3. Protective cover 4 protects the feeding mechanism. Hydraulic rod 6 can adjust the angle of the feeding mechanism. Support leg 7 supports the feeding mechanism. Wheels 8 facilitate the movement of the equipment. Side guard plate 1 provides side protection for conveyor belt 3.

[0028] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A material conveying device comprising a feeding mechanism wafer tank (5), a hydraulic rod (6), a supporting leg (7) and a quantitative discharging head, characterized in that: The outer side of the feeding mechanism is provided with a protective cover (4), the top of the protective cover (4) is provided with a limiting plate (13) through a supporting rod, the middle of the top end of the limiting plate (13) is provided with a wafer tank (5), the middle of the bottom end of the wafer tank (5) is provided with a quantitative feeding head (17), the bottom of the protective cover (4) is connected with a supporting leg (7) in a hinged manner, and the bottom of the supporting leg (7) is provided with a wheel (8).

2. A material delivery apparatus according to claim 1, wherein: The feeding mechanism comprises conveying rollers (2), side guards (1) and a conveying belt (3). The conveying belt (3) is arranged between the two conveying rollers (2), the side guards (1) are arranged on the two sides of the conveying belt (3), and the end portions of the side guards (1) are connected with the end portions of the protective cover (4).

3. A material delivery apparatus as claimed in claim 2, wherein: The middle portion of the conveying belt (3) is provided with a wafer groove (9), one side of the side guard (1) is provided with a motor (12), and the output shaft of the motor (12) is connected with the end portion of the conveying roller (2).

4. A material delivery apparatus as claimed in claim 1, wherein: The top of the protective cover (4) is provided with a material receiving port (11) and a mounting hole (10), the quantitative feeding head (17) is arranged opposite to the material receiving port (11), and the mounting hole (10) is threadedly fixed with the bottom end of the supporting rod.

5. A material delivery apparatus as claimed in claim 1, wherein: One side of the supporting leg (7) is provided with a hydraulic rod (6), and the telescopic end of the hydraulic rod (6) is hinged with the bottom of the protective cover (4).

6. A material delivery apparatus as defined in claim 1, wherein: Both sides of the quantitative feeding head (17) are provided with electric push rods (14), the telescopic end of the electric push rod (14) is provided with a top head (15), and the inside of the quantitative feeding head (17) is provided with a wafer (16).

Citation Information

Patent Citations

  • Inline-type wafer conveyance device

    CN101849285B