Detection mechanism and transportation device

Abstract

The utility model provides a detection mechanism and a transportation device, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems that when a boat support is transported, a plurality of sensors need to be arranged to detect the position of the boat support so as to control the boat support to slow down and confirm that the boat support is in place and stops. The detection mechanism comprises a fixing assembly; the sensor is connected with the fixing assembly, the sensor is provided with a sensing part, and the sensor can generate a detection signal after the sensing part is contacted; the sliding assembly is movably connected with the fixing assembly; the triggering piece is connected with the boat support, the triggering piece is provided with at least two first protruding parts arranged in the second direction, and when the boat support moves in the second direction, the at least two first protruding parts can sequentially extrude the first end of the sliding assembly; the first end of the elastic piece is connected with the sliding assembly, and the second end of the elastic piece is connected with the fixing assembly. Through the structure, only one sensor is needed to detect whether the boat supports exist in at least two positions, and the cost is saved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and particularly to a detection mechanism and a conveying device. BACKGROUND

[0002] In the production process of a photovoltaic cell, a graphite boat is a main carrier for coating a silicon wafer with an anti-reflective film. The motion control and positioning accuracy of the graphite boat are crucial to improving the coating quality and production efficiency of the silicon wafer.

[0003] In the related art, when controlling the motion of a boat holder carrying a graphite boat, a plurality of sensors are usually installed at different positions of a conveying device to detect the position of the graphite boat, so as to control the speed of the conveying device conveying the boat holder. Specifically, when controlling the boat holder to decelerate and stop, a deceleration sensor is usually arranged at a preset deceleration position of the conveying device, a limiting structure and a to-position sensor are arranged at the end of the conveying device, when the deceleration sensor detects the graphite boat, the conveying device is controlled to reduce the conveying speed, when the boat holder reaches the end of the conveying device, the boat holder will hit the limiting structure to stop, at this time, the to-position sensor detects the graphite boat, so as to control a grabbing mechanism to grab the graphite boat.

[0004] In this way, at least two sensors are required to control the boat holder to decelerate and stop, which is complex in structure, high in cost and difficult to maintain. Moreover, the boat holder is stopped by the limiting structure, and the boat holder will rebound when hitting the limiting structure, so that the boat structure cannot be accurately stopped at the position grabbed by the grabbing structure, which reduces the to-position detection accuracy of the to-position sensor on the boat structure, affects the grabbing of the subsequent grabbing mechanism, and reduces the production efficiency. CONTENT OF THE UTILITY MODEL

[0005] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a detection mechanism and a conveying device.

[0006] In a first aspect, an embodiment of the present application provides a detection mechanism, comprising: a fixed component; a sensor connected with the fixed component, the sensor having a sensing portion, the sensor being capable of generating a detection signal after the sensing portion is contacted; a sliding component movably connected with the fixed component, the sliding component being capable of sliding relative to the fixed component along a first direction, the sliding component having oppositely arranged first and second ends, the second end of the sliding component being close to the sensing portion; a trigger connected with the boat support, the trigger having at least two first protrusions arranged along a second direction, the second direction intersecting the first direction, wherein, when the boat support moves along the second direction, the at least two first protrusions are capable of sequentially pressing the first end of the sliding component, and the sliding component is capable of moving along the first direction towards the sensing portion at each time when the first protrusion presses the first end of the sliding component, so that the second end of the sliding component touches the sensing portion; and an elastic component extending along the first direction, the elastic component having first and second ends in the first direction, the first end of the elastic component being connected with the sliding component, the second end of the elastic component being connected with the fixed component, the elastic component being capable of applying a pushing force to the sliding component, so that the sliding component is capable of moving along the first direction away from the sensing portion after the first protrusion is separated from the first end of the sliding component.

[0007] In some embodiments, the fixed component comprises: a support seat having a first through hole extending along the first direction, the sliding component being arranged in the first through hole and being capable of sliding along the extension direction of the first through hole.

[0008] In some embodiments, the sliding component has a second protrusion connected with the first end of the elastic component, and the fixed component further comprises: a limiting component connected with the support seat and located on a side of the second protrusion away from the elastic component, the limiting component having a second through hole extending along the first direction, the sliding component being arranged in the second through hole, and the limiting component being capable of abutting against a surface of the second protrusion away from the elastic component.

[0009] In some embodiments, the sliding component comprises: a spring rod extending along the first direction, the spring rod having oppositely arranged first and second ends in the first direction, the second end of the spring rod being close to the sensing portion; and a rolling component located on a side of the first end of the spring rod away from the second end of the spring rod and rotatably connected with the spring rod, wherein, when the boat support moves along the second direction, the at least two first protrusions are capable of sequentially pressing the rolling component, and the sliding component is capable of moving along the first direction towards the sensing portion at each time when the first protrusion presses the rolling component, so that the second end of the spring rod touches the sensing portion.

[0010] In some embodiments, the first end of the spring rod has a third through hole; the sliding assembly further comprises: a first side plate extending along the first direction, the first side plate having a first threaded portion; a second side plate extending along the first direction and oppositely arranged with the first side plate, the second side plate having a second threaded portion, the first end of the spring rod being located between the first side plate and the second side plate; a first screwing piece screwing with the first threaded portion and the second threaded portion and penetrating the third through hole; and a mandrel connected with the first side plate and the second side plate, the rolling member being sleeved on the mandrel.

[0011] In some embodiments, the fixing assembly comprises: a heat insulation plate connected with the bottom of the support base and located between the sensor and the furnace tube, the heat insulation plate having a fourth through hole extending along the first direction, the fourth through hole being in communication with the first through hole, the sliding assembly penetrating the fourth through hole, the heat insulation plate being configured to block the heat generated by the furnace tube from being transmitted to the sensor.

[0012] In some embodiments, the detection mechanism further comprises: a guide piece connected with the heat insulation plate, the guide piece having a guide portion located between the heat insulation plate and the sensor, the guide portion having a fifth through hole extending along the first direction, the fifth through hole being in communication with the fourth through hole, the second end of the sliding assembly penetrating the fifth through hole, the guide piece being configured to guide the sliding assembly.

[0013] In the second aspect, an embodiment of the present application provides a transportation device, comprising: a base; a transportation assembly arranged on the base and configured to carry and transport a boat support; and the detection mechanism of any one of the first aspect, the fixing assembly of the detection mechanism being connected with the base, and the trigger piece of the detection mechanism being connected with the boat support.

[0014] In some embodiments, the trigger piece has two first protruding portions capable of sequentially pressing the first end of the sliding assembly, and the sliding assembly is capable of moving along the first direction towards the induction portion at each time when the first protruding portion presses the first end of the sliding assembly, so that the second end of the sliding assembly touches the induction portion; the transportation device further comprises: a controller in communication connection with the transportation assembly and the sensor in the detection mechanism, the sensor in the detection mechanism being configured to generate a detection signal after the induction portion is touched and send the detection signal to the controller, the controller being configured to control the transportation assembly to reduce the transportation speed after receiving a first detection signal sent by the sensor, and control the transportation assembly to stop transportation after receiving a second detection signal sent by the sensor.

[0015] In some embodiments, the base has at least one third threaded portion, and the heat insulation plate of the fixing assembly has at least one waist-shaped hole extending along the first direction; the transportation device further comprises: at least one second screwing piece, each second screwing piece screwing with one third threaded portion and one waist-shaped hole.

[0016] The detection mechanism and the conveying device provided by the embodiment of the present application can make the second end of the sliding assembly touch the sensing part at least twice because the at least two first protrusions can press the first end of the sliding assembly in turn, and further make the sensor send at least two signals to the controller in sequence. Therefore, through the detection mechanism, only one sensor can be used to detect whether the boat support exists in at least two positions. In actual application, the controller can be set to control the conveying assembly to slow down or stop according to the received signals. If the number of the first protrusions is two, the controller can be set to control the conveying assembly to reduce the conveying speed when the first signal is received, and to control the conveying assembly to stop conveying when the second signal is received. Therefore, only one sensor can be used to control the slowing down and stopping of the boat support, thereby reducing the production cost and facilitating maintenance. Moreover, through the structure, the conveying assembly can be accurately controlled to stop conveying, and a limiting structure does not need to be set, so that the boat support will not bounce, thereby making the boat support accurately stop at the grabbing position, improving the grabbing accuracy, preventing the collision between the grabbing mechanism and the boat structure from causing the silicon wafer to break, and thereby improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1 Fig. 1 shows a structure schematic view of a fixing assembly, a sensor and a sliding assembly provided by an exemplary embodiment of the present application.

[0019] Figure 2 Fig. 2 shows a structure schematic view of a boat support, a boat structure and a detection mechanism provided by an exemplary embodiment of the present application. Figure 1 Fig. 3 shows a sectional view of the fixing assembly, the sensor and the sliding assembly along the AA direction.

[0020] Figure 3 Fig. 4 shows a structure schematic view of a conveying device provided by an exemplary embodiment of the present application.

[0021] Figure 4 Fig. 5 shows a structure schematic view of the conveying device provided by an exemplary embodiment of the present application. Figure 3 Fig. 6 shows a partial enlarged view of the boat support, the boat structure and the detection mechanism in the B area.

[0022] Figure 5 Fig. 7 shows a structure schematic view of the conveying device provided by an exemplary embodiment of the present application.

[0023] LIST OF REFERENCE NUMERALS:

[0024] 100, detecting mechanism; 110, fixing assembly; 111, supporting seat; 1111, first through hole; 112, limiting piece; 1121, second through hole; 1122, supporting part; 1123, limiting part; 113, heat insulation plate; 1131, fourth through hole; 1132, waist hole; 114, fixing plate; 120, sensor; 121, sensing part; 130, sliding assembly; 131, first end of sliding assembly; 132, second end of sliding assembly; 133, second protruding part; 134, spring rod; 1341, first end of spring rod; 1342, second end of spring rod; 1343, vertical part; 1344, third through hole; 135, rolling piece; 136, first side plate; 137, second side plate; 138, first screwing piece; 139, mandrel; 140, triggering piece; 141, first protruding part; 142, horizontal part; 143, sixth through hole; 144, counterbore; 150, elastic piece; 151, first end of elastic piece; 152, second end of elastic piece; 160, guiding piece; 161, guiding part; 1611, fifth through hole; 200, boat support; 300, transportation device; 310, base; 320, transportation assembly; 330, controller; 400, boat structure. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the present application.

[0026] Figure 1 Fig. 1 shows a structural schematic diagram of a fixing assembly, a sensor and a sliding assembly provided by an exemplary embodiment of the present application, Figure 2 Fig. 2 shows a structural schematic diagram of a boat support, a boat structure and a detecting mechanism provided by an exemplary embodiment of the present application, Figure 1 Fig. 3 shows a sectional view of the fixing assembly, the sensor and the sliding assembly along the AA direction, Figure 3 Fig. 1 shows a structural schematic diagram of a fixing assembly, a sensor and a sliding assembly provided by an exemplary embodiment of the present application, Figure 4 Fig. 2 shows a structural schematic diagram of a boat support, a boat structure and a detecting mechanism provided by an exemplary embodiment of the present application, Figure 3 Fig. 3 shows a sectional view of the fixing assembly, the sensor and the sliding assembly along the AA direction,

[0027] As shown in Fig. 1, Figures 1 to 4As shown in the embodiments of the present application, a detection mechanism 100 is provided, which comprises a fixing assembly 110, a sensor 120, a sliding assembly 130, a trigger 140 and an elastic member 150. The sensor 120 is connected with the fixing assembly 110, and the sensor 120 has a sensing portion 121, and the sensor 120 can generate a detection signal after the sensing portion 121 is contacted. The sliding assembly 130 is movably connected with the fixing assembly 110, and the sliding assembly 130 can slide relative to the fixing assembly 110 along a first direction (e.g. the X direction as shown in the drawings), and the sliding assembly 130 has a first end 131 and a second end 132 oppositely arranged, and the second end 132 of the sliding assembly 130 is close to the sensing portion 121. The trigger 140 is connected with the boat support 200, and the trigger 140 has at least two first protrusions 141 arranged along a second direction (e.g. the Y direction as shown in the drawings), and the second direction is perpendicular to the first direction, and when the boat support 200 moves along the second direction, the at least two first protrusions 141 can press the first end 131 of the sliding assembly 130 in sequence, and when each first protrusion 141 presses the first end 131 of the sliding assembly 130, the sliding assembly 130 can move along the first direction towards the sensing portion 121, so that the second end 132 of the sliding assembly 130 touches the sensing portion 121. The elastic member 150 extends along the first direction, and the elastic member 150 has a first end 151 and a second end 152 along the first direction, and the first end 151 of the elastic member 150 is connected with the sliding assembly 130, and the second end 152 of the elastic member 150 is connected with the fixing assembly 110, and the elastic member 150 can apply a pushing force to the sliding assembly 130, so that the sliding assembly 130 can move along the first direction away from the sensing portion 121 after the first protrusion 141 separates from the first end 131 of the sliding assembly 130. Figure 2 Figure 4

[0028] Exemplarily, the sensor 120 is a micro switch, and the sensing portion 121 is a button of the micro switch.

[0029] Exemplarily, the controller 330 is a programmable logic controller (PLC).

[0030] Exemplarily, the first direction is a vertical direction, and the second direction is a horizontal direction.

[0031] Exemplarily, the distance between the two adjacent first protrusions 141 can be set according to factors such as the distance between the preset deceleration position and the preset grabbing position, the transportation speed, the transportation acceleration, etc.

[0032] Exemplarily, the first protrusion 141 is a protruding block. Figure 4 ​​As shown, the trigger piece 140 includes a horizontal part 142 and a first protruding part 141 connected to each other, the horizontal part 142 extends along the second direction, and the first protruding part 141 is connected to the surface of the horizontal part 142 away from the boat support 200.

[0033] Exemplarily, the elastic piece is a spring.

[0034] In the above embodiment, since the at least two first protruding parts 141 can sequentially press the first end 131 of the sliding assembly 130, the second end 132 of the sliding assembly 130 can touch the sensing part 121 at least twice, and the sensor 120 can send at least two signals to the controller 330 in sequence, therefore, through the detection mechanism 100, only one sensor 120 can be used to detect whether the boat support 200 exists in at least two positions. In actual application, the controller 330 can be set to control the transportation assembly 320 to slow down or stop according to the received signal, if the number of the first protruding parts 141 is two, the controller 330 can be set to control the transportation assembly 320 to reduce the transportation speed when receiving the first signal, and the controller 330 can be set to control the transportation assembly 320 to stop transportation when receiving the second signal, so that only one sensor 120 can be used to control the slowing down and stopping of the boat support 200, thereby reducing the production cost and facilitating maintenance. Moreover, through this structure, the transportation assembly 320 can be precisely controlled to stop transportation, without the need to set a limiting structure, and the boat support 200 will not bounce, so that the boat support 200 can be precisely stopped at the grabbing position, improving the grabbing precision, preventing the collision between the grabbing mechanism and the boat structure 400 from causing the silicon wafer to break, and thereby improving the production efficiency.

[0035] In some embodiments, as shown in Figure 1 and Figure 2 The fixing assembly 110 includes a support seat 111. The support seat 111 has a first through hole 1111 extending along the first direction, and the sliding assembly 130 is arranged in the first through hole 1111 and can slide along the extension direction of the first through hole 1111.

[0036] In the above embodiment, by arranging the support seat 111, the first through hole 1111 for sliding the sliding assembly 130 can be provided, thereby guiding the sliding direction of the sliding assembly 130.

[0037] In some embodiments, as shown in Figure 1 and Figure 2As shown, the sliding assembly 130 has a second protruding part 133 connected with the first end 151 of the elastic member 150. The fixing assembly 110 further includes a limiting member 112. The limiting member 112 is connected with the support base 111 and is located at a side of the second protruding part 133 away from the elastic member 150. The limiting member 112 has a second through hole 1121 extending in the first direction, and the sliding assembly 130 is arranged in the second through hole 1121. The limiting member 112 can abut against the surface of the second protruding part 133 away from the elastic member 150.

[0038] As shown in the examples, Figure 2 The limiting member 112 includes a support part 1122 and a limiting part 1123 connected with each other. The support part 1122 is located at a side of the support base 111 away from the induction part 121 and is in contact with the support base 111. The limiting part 1123 is located in the first through hole 1111.

[0039] In the above embodiment, the limiting member 112 can limit the farthest position of the elastic member 150 in the first direction away from the induction part 121, so as to avoid the elastic member 150 from being pulled out of the first through hole 1111.

[0040] In some embodiments, as shown in the examples, Figure 1 and Figure 2 The sliding assembly 130 includes a spring rod 134 and a rolling member 135. The spring rod 134 extends in the first direction and has a first end 1341 and a second end 1342 oppositely arranged in the first direction. The second end 1342 of the spring rod 134 is close to the induction part 121. The rolling member 135 is located at a side of the first end 1341 of the spring rod 134 away from the second end 1342 of the spring rod 134 and is rotationally connected with the spring rod 134. When the boat support 200 moves in the second direction, the at least two first protruding parts 141 can press the rolling member 135 in sequence. When each first protruding part 141 presses the rolling member 135, the sliding assembly 130 can move in the first direction towards the induction part 121, so that the second end 1342 of the spring rod 134 touches the induction part 121.

[0041] As shown in the examples, the spring rod 134 includes a vertical part 1343 and a second protruding part 133. The vertical part 1343 is a rod-shaped structure extending in the first direction. The second protruding part 133 is connected with a side wall of the vertical part 1343.

[0042] As shown in the examples, the rolling member 135 is a bearing or a roller.

[0043] In the above embodiment, by arranging the rolling member 135, the friction between the first protruding portion 141 and the first end 131 of the sliding assembly 130 can be rolling friction, so that the friction between the first protruding portion 141 and the first end 131 of the sliding assembly 130 is small, and the influence of position detection on the transport speed of the boat 200 is reduced.

[0044] In some embodiments, the first end 1341 of the spring rod 134 has a third through hole 1344. The sliding assembly 130 further includes a first side plate 136, a second side plate 137, a first screw member 138, and a mandrel 139. The first side plate 136 extends in the first direction and has a first threaded portion. The second side plate 137 extends in the first direction and is arranged opposite to the first side plate 136, and has a second threaded portion. The first end of the spring rod 134 is located between the first side plate 136 and the second side plate 137. The first screw member 138 is screwed with the first threaded portion and the second threaded portion and passes through the third through hole 1344. The mandrel 139 is connected with the first side plate 136 and the second side plate 137, and the rolling member 135 is sleeved on the mandrel 139.

[0045] For example, the third through hole 1344 extends in the second direction.

[0046] For example, the first side plate 136 has a first threaded hole extending in the second direction, and the first threaded portion is a thread in the first threaded hole.

[0047] For example, the second side plate 137 has a second threaded hole extending in the second direction, and the second threaded portion is a thread in the second threaded hole.

[0048] For example, the first screw member 138 is a screw or a bolt.

[0049] In the above embodiment, by arranging the first side plate 136, the second side plate 137, the first screw member 138, and the mandrel 139, the rolling member 135 can be rotatably connected with the spring rod 134, and the structure is simple and convenient for production.

[0050] In some embodiments, as shown in Figure 1 , Figure 2 and Figure 4 , the fixing assembly 110 further includes a heat insulation plate 113. The heat insulation plate 113 is connected with the bottom of the support seat 111 and located between the sensor 120 and the furnace tube. The heat insulation plate 113 has a fourth through hole 1131 extending in the first direction, the fourth through hole 1131 is in communication with the first through hole 1111, the sliding assembly 130 passes through the fourth through hole 1131, and the heat insulation plate 113 is configured to block the heat generated by the furnace tube from being transmitted to the sensor 120.

[0051] Exemplarily, the material of the heat insulation plate 113 is stainless steel sheet metal. Stainless steel is not easy to deform, and can improve the service life of the heat insulation plate 113.

[0052] Exemplarily, the first direction is a vertical direction, the base 310 is provided with the conveying assembly 320, the conveying assembly 320 carries the boat support 200, the base 310, the conveying assembly 320 and the boat support 200 are all located below the furnace tube, and the detection structure 100 is located between the boat support 200 and the conveying assembly 320, that is, the heat insulation plate 113 is located between the furnace tube and the sensor 120.

[0053] Exemplarily, as shown in Figure 1 The fixing assembly 110 further includes a fixing plate 114 connected to the bottom of the heat insulation plate 113, and the sensor 120 is connected to the fixing plate 114.

[0054] The conventional detection mechanism 100 is usually installed on the top of the protective plate of the base 310, and no protection is provided above the sensor, so the sensor is easy to be damaged at high temperature emitted by the furnace tube. In the above embodiment, the heat insulation plate 113 is arranged to block the heat generated by the furnace tube from being directly transmitted to the sensor 120, thereby prolonging the service life of the sensor 120.

[0055] In some embodiments, as shown in Figure 1 and Figure 2 The detection mechanism 100 further includes a guide 160. The guide 160 is connected to the heat insulation plate 113, and the guide 160 has a guide portion 161 located between the heat insulation plate 113 and the sensor 120. The guide portion 161 has a fifth through hole 1611 extending in the first direction, the fifth through hole 1611 is in communication with the fourth through hole 1131, the second end 132 of the sliding assembly 130 passes through the fifth through hole 1611, and the guide 160 is configured to guide the sliding assembly 130.

[0056] In the above embodiment, the guide 160 is arranged near the sensor 120 to guide the second end 132 of the sliding assembly 130, so that the second end 132 of the sliding assembly 130 can accurately touch the sensing portion 121, so that the sensor 120 can sense the position of the boat support 200 and send a signal to the controller 330.

[0057] Figure 5 FIG. 1 shows a structural schematic diagram of a conveying device provided by an example embodiment of the present application.

[0058] Based on the same concept, as shown in Figure 5As shown, the embodiment of the present application also provides a transport device 300, which comprises a base 310, the detection mechanism 100 in the above embodiment, and a transport assembly 320. The transport assembly 320 is arranged on the base 310 and is configured to carry and transport the boat support 200. The fixing assembly 110 in the detection mechanism 100 is connected to the base 310, and the trigger 140 in the detection mechanism 100 is connected to the boat support 200.

[0059] Exemplarily, the heat insulation plate 113 is connected to the base 310.

[0060] Exemplarily, the boat support 200 is used to carry the boat structure 400.

[0061] Exemplarily, the transport assembly 320 comprises a synchronous wheel, a conveying belt, and a motor. The motor is used to drive the synchronous wheel to rotate, and the conveying belt is sleeved on the synchronous wheel and moves under the driving of the synchronous wheel.

[0062] Exemplarily, the first direction is a vertical direction, the second direction is a horizontal direction, the base 310 comprises a carrying plate and two protection plates. The carrying plate and the two protection plates respectively extend along the second direction. The two protection plates are oppositely arranged, and the carrying plate is connected between the two protection plates. The transport assembly 320 and the fixing assembly 110 are installed on the carrying plate. When the transport assembly 320 transports the boat support 200, the trigger 140 installed at the bottom of the boat support 200 is located above the first end 131 of the sliding assembly 130.

[0063] Exemplarily, as shown in Figure 4 The trigger 140 has at least one sixth through hole 143 and / or counterbore hole 144, the bottom of the boat support 200 has at least one fourth threaded part (such as a cavity in an aluminum profile is provided with a nut, and the threads of the nut are the fourth threaded part), and the transport device 300 further comprises at least one third screwing piece (such as a screw or a bolt). Each third screwing piece passes through one sixth through hole 143 or counterbore hole 144 and is screwed with one fourth threaded part.

[0064] Exemplarily, as shown in Figure 4 The first protruding part 141 has at least one counterbore hole 144, and the horizontal part 142 has at least one sixth through hole 143.

[0065] In some embodiments, the trigger 140 has two first protrusions 141 capable of sequentially pressing the first end of the sliding assembly 130, and each time the first protrusion 141 presses the first end of the sliding assembly 130, the sliding assembly 130 is capable of moving in the first direction towards the induction portion 121 so that the second end of the sliding assembly 130 touches the induction portion 121. The transport device 300 further comprises a controller 330. The controller 330 is in communication connection with the transport assembly 320 and the sensor 120 of the detection mechanism 100. The sensor 120 of the detection mechanism 100 is configured to generate a detection signal after the induction portion 121 is touched and send the detection signal to the controller 330. The controller 330 is configured to control the transport assembly 320 to reduce the transport speed after receiving the first detection signal sent by the sensor 120, and control the transport assembly 320 to stop the transport after receiving the second detection signal sent by the sensor 120.

[0066] In the above embodiments, by setting the controller 330, the transport assembly can be controlled to slow down and stop according to the first and second signals sent by the sensor 120, so as to accurately control the movement speed and the stopping position of the boat support 200.

[0067] In some embodiments, as shown in Figure 1 The base 310 has at least one third threaded portion, and the heat insulation plate 113 of the fixing assembly 110 has at least one waist-shaped hole 1132 extending in the first direction. The transport device 300 further comprises at least one second screwing piece. Each second screwing piece is screwed with one third threaded portion through one waist-shaped hole 1132.

[0068] Exemplarily, the base 310 has at least one third threaded hole, and the third threaded portion is a thread in the third threaded hole.

[0069] Exemplarily, the second screwing piece is a screw or a bolt.

[0070] In the above embodiments, by setting the waist-shaped hole 1132 and the second screwing piece, the position of the sliding assembly 130 in the first direction can be flexibly adjusted, so that when the boat support 200 passes through the sliding assembly 130, the trigger 140 can press the first end 131 of the sliding assembly 130, so that the boat support 200 can be detected by the sensor 120.

[0071] The basic principles of the present application are described above in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present application are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present application. In addition, the above specific details are only for the purpose of example and understanding, and are not limited to the above specific details.

[0072] The block diagrams of the devices, apparatuses, equipment, systems referred to in this application are only illustrative examples and are not intended to require or imply that the connections, arrangements, configurations must be as shown in the block diagrams. These devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner as will be appreciated by those skilled in the art. Words such as "including," "containing," "comprising," and the like are to be construed in an inclusive fashion, indicating open-ended groups and that "consisting of will be perceived as specifying the noted components or steps and further alternative embodiments are useful while yet being encompassed by such definitions. The words "or" and "and" as used herein are to be interpreted as the word "and / or" unless context indicates otherwise. The word "comprising" as used herein is to be construed as "including but not limited to."

[0073] It is also important to note that the devices, apparatuses, and methods of the present application can be embodied in a variety of forms without departing from the spirit or essential characteristics thereof. These devices, apparatuses, and methods can be implemented in software, hardware, or a combination thereof. Furthermore, wherever possible, any aspects or embodiments of the present application can be implemented by using any of the following technologies: software, hardware, firmware, or fixed logic circuitry; or any combination thereof. For example, a general purpose processor, a controller, or other component can be programmed to perform one or more of the methods disclosed herein. Likewise, a purpose-built processor, controller, or other component can be programmed to perform one or more of the methods disclosed herein. It will be appreciated that the scope of the present application includes:

[0074] The above description of disclosed aspects is given for illustrative purposes only and is not intended to limit the scope of the application. Although various embodiments and examples have been discussed above, those skilled in the art will appreciate that modifications, additions, substitutions, deletions, and other changes can be made to those aspects without departing from the scope of the present application. Therefore, the scope of the present application should be determined by the following claims.

[0075] The above description has been given for illustrative purposes only and is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. A detection mechanism, characterized by, The utility model relates to a sensor device, which comprises: a fixed component; a sensor connected with the fixed component, the sensor having a sensing part, the sensor being capable of generating a detection signal after the sensing part is contacted; a sliding component movably connected with the fixed component, the sliding component being capable of sliding relative to the fixed component along a first direction, the sliding component having oppositely arranged first and second ends, the second end of the sliding component being close to the sensing part; a trigger connected with a boat support, the trigger having at least two first protrusions arranged along a second direction, the second direction intersecting the first direction, wherein, when the boat support moves along the second direction, the at least two first protrusions can press the first end of the sliding component in turn, and each time the first protrusion presses the first end of the sliding component, the sliding component can move along the first direction towards the sensing part so that the second end of the sliding component touches the sensing part; a resilient member extending along the first direction, the resilient member having first and second ends along the first direction, the first end of the resilient member being connected with the sliding component, the second end of the resilient member being connected with the fixed component, the resilient member being capable of applying a pushing force to the sliding component so that the sliding component can move along the first direction away from the sensing part after the first protrusion is separated from the first end of the sliding component.

2. The detection mechanism of claim 1, wherein, The fixed component comprises: a support base having a first through hole extending along the first direction, the sliding component being arranged in the first through hole, the sliding component being capable of sliding along the extension direction of the first through hole.

3. The detection mechanism of claim 2, wherein, The sliding component has a second protrusion connected with the first end of the resilient member. The fixed component further comprises: a limiting member connected with the support base, the limiting member being located on the side of the second protrusion away from the resilient member, the limiting member having a second through hole extending along the first direction, the sliding component being arranged in the second through hole, the limiting member being capable of abutting against the surface of the second protrusion away from the resilient member.

4. The detection mechanism according to any one of claims 1 to 3, characterized in that, The sliding component comprises: a spring rod extending along the first direction, the spring rod having oppositely arranged first and second ends along the first direction, the second end of the spring rod being close to the sensing part; a rolling member located on the side of the first end of the spring rod away from the second end of the spring rod, the rolling member being rotatably connected with the spring rod. When the boat support moves along the second direction, the at least two first protrusions can press the rolling member in turn, and each time the first protrusion presses the rolling member, the sliding component can move along the first direction towards the sensing part so that the second end of the spring rod touches the sensing part.

5. The detection mechanism of claim 4, wherein, The first end of the spring rod has a third through hole. The sliding component further comprises: a first side plate extending along the first direction, the first side plate having a first threaded part. A second side plate extends along the first direction and is arranged opposite to the first side plate. The second side plate has a second threaded portion. The first end of the spring rod is located between the first side plate and the second side plate. A first screwing member is screwed with the first threaded portion and the second threaded portion and passes through the third through hole. A mandrel is connected with the first side plate and the second side plate. The rolling member is sleeved on the mandrel.

6. The detection mechanism of claim 2 or 3, wherein, The fixing assembly comprises: A heat insulation plate is connected with the bottom of the support seat and is located between the sensor and the furnace tube. The heat insulation plate has a fourth through hole extending along the first direction. The fourth through hole is in communication with the first through hole. The sliding assembly passes through the fourth through hole. The heat insulation plate is configured to block the heat generated by the furnace tube from being transmitted to the sensor.

7. The detection mechanism of claim 6, wherein, Further comprising: A guide member is connected with the heat insulation plate. The guide member has a guide portion located between the heat insulation plate and the sensor. The guide portion has a fifth through hole extending along the first direction. The fifth through hole is in communication with the fourth through hole. The second end of the sliding assembly passes through the fifth through hole. The guide member is configured to guide the sliding assembly.

8. A transport device, characterized in that Comprise: A base station; A transportation assembly is arranged on the base station and is configured to carry and transport a boat support; The detection mechanism of any one of claims 1-7, wherein the fixing assembly of the detection mechanism is connected with the base station, and the trigger member of the detection mechanism is connected with the boat support.

9. The transport apparatus of claim 8, wherein, The trigger member has two first protruding portions. The two first protruding portions can sequentially press the first end of the sliding assembly. When each first protruding portion presses the first end of the sliding assembly, the sliding assembly can move along the first direction towards the inductive portion, so that the second end of the sliding assembly touches the inductive portion. The transportation device further comprises: A controller is communicatively connected with the transportation assembly and the sensor of the detection mechanism. The sensor of the detection mechanism is configured to generate a detection signal after the inductive portion is touched and send the detection signal to the controller. The controller is configured to control the transportation assembly to reduce the transportation speed after receiving the first detection signal sent by the sensor, and control the transportation assembly to stop transportation after receiving the second detection signal sent by the sensor.

10. Transport device according to claim 8 or 9, characterized in that The base station has at least one third threaded portion. The heat insulation plate of the fixing assembly has at least one waist-shaped hole extending along the first direction. The transportation device further comprises: At least one second screwing member. Each second screwing member is screwed with one third threaded portion through one waist-shaped hole.

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