Auxiliary device for disassembling and assembling base

Abstract

The utility model discloses an auxiliary device for disassembling and assembling a base, the base comprises a bearing body and a supporting shaft, the bearing body is provided with a bearing surface for bearing a wafer, the top end of the supporting shaft is connected with the back surface, deviating from the bearing surface, of the bearing body, and the auxiliary device comprises a mounting seat, a lifting mechanism, a first supporting piece and a second supporting piece; the mounting base is used for being detachably fixed to the cavity side wall of the process cavity, the lifting mechanism is arranged on the mounting base, and the first supporting piece and the second supporting piece are both connected with the lifting mechanism and are used for being in supporting fit with areas, located on the two sides of the supporting shaft, on the back face; the lifting mechanism is used for driving the first supporting piece and the second supporting piece to ascend and descend, the first supporting piece and the second supporting piece are arranged in a spaced mode, and an avoiding space is formed between the first supporting piece and the second supporting piece and used for allowing the supporting shaft to penetrate through. According to the scheme, the problem that in semiconductor process equipment related to the related technology, the difficulty is large when the base is manually moved to replace the base can be solved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of auxiliary tool design of semiconductor process equipment, and particularly relates to an auxiliary device for dismounting and mounting a pedestal. BACKGROUND

[0002] A pedestal for providing a placement position for a wafer during a process is installed in a process chamber of a semiconductor process equipment. In actual production, a pedestal with an abnormality needs to be replaced to ensure that the process can proceed normally. However, the pedestal needs to be manually moved by a worker during replacement, and the weight of the pedestal is heavy, which makes the dismounting and mounting of the pedestal more laborious, and thus replacement of the pedestal is difficult. CONTENT OF THE UTILITY MODEL

[0003] The utility model discloses an auxiliary device for dismounting and mounting a pedestal to solve the problem of difficulty in replacing the pedestal manually by a worker in the related art.

[0004] To solve the above technical problem, the utility model provides the following technical scheme:

[0005] The utility model discloses an auxiliary device for dismounting and mounting a pedestal, the pedestal includes a bearing body and a support shaft, the bearing body has a bearing surface for bearing a wafer, the top of the support shaft is connected with the back surface of the bearing body away from the bearing surface, the auxiliary device includes a mounting seat, a lifting mechanism, a first support piece and a second support piece.

[0006] The mounting seat is used for being detachably fixed on the chamber side wall of the process chamber, the lifting mechanism is arranged on the mounting seat, the first support piece and the second support piece are connected with the lifting mechanism and are used for supporting and cooperating with the regions on the back surface on both sides of the support shaft respectively.

[0007] The lifting mechanism is used for driving the first support piece and the second support piece to lift, the first support piece and the second support piece are arranged at intervals, and an avoiding space is formed between the first support piece and the second support piece, and the support shaft passes through the avoiding space.

[0008] The technical scheme adopted by the utility model can achieve the following technical effects:

[0009] The auxiliary device disclosed by the embodiment of the application is detachably fixed on the chamber side wall of the process chamber of the semiconductor process equipment through the mounting seat, the first support and the second support connected with the lifting mechanism are lifted through the lifting mechanism of the auxiliary device, and the base is lifted through the support cooperation between the first support and the second support and the bearing body, so that the engineering and technical personnel do not need to carry the base for a long time when disassembling the base, the working intensity of the engineering and technical personnel when disassembling the base is reduced, the disassembly of the base is more convenient, and the difficulty of replacing the base is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a structure schematic view of the auxiliary device disclosed by the embodiment of the application;

[0011] Figure 2 is a sectional view of the auxiliary device disclosed by the embodiment of the application;

[0012] Figure 3 is a partial assembly view of the base and the process chamber disclosed by the embodiment of the application;

[0013] Figure 4 is a structure schematic view of the base disclosed by the embodiment of the application;

[0014] Figure 5 is a structure schematic view of the second support disclosed by the embodiment of the application.

[0015] BRIEF DESCRIPTION OF DRAWINGS:

[0016] 100-base, 110-bearing body, 111-bearing surface, 112-back surface, 120-support shaft, 130-bellow,

[0017] 200-mounting seat, 210-clamping groove, 220-fastening screw,

[0018] 300-lifting mechanism, 310-worm and gear mechanism, 320-screw rod, 330-threaded sleeve, 340-rotary operating handle, 341-second protruding part,

[0019] 410-first support, 420-second support, 430-avoidance space,

[0020] 500-process chamber, 510-through hole,

[0021] 610-rail, 620-sliding block,

[0022] 710-first adjusting screw rod, 720-second adjusting screw rod,

[0023] 800-connecting rod,

[0024] 900 - first connecting member,

[0025] 1000 - second connecting member. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the present application clearer, the technical scheme of the present application will be described clearly and completely below in combination with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0027] The terms "first", "second" in the specification and claims of the present application can explicitly or implicitly include one or more features.

[0028] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] Please refer to Figures 1 to 5 The disclosed auxiliary device for disassembling and assembling the base includes a mounting seat 200, a lifting mechanism 300, a first supporting member 410 and a second supporting member 420.

[0030] The auxiliary device is used for assisting in disassembling and assembling the base 100 of the semiconductor process equipment, so that the replacement of the base 100 is more easy, thereby facilitating the maintenance of the semiconductor process equipment. The base 100 includes a bearing body 110 and a supporting shaft 120, the bearing body 110 has a bearing surface 111 for bearing a wafer, and the top end of the supporting shaft 120 is connected with the back surface 112 of the bearing body 110 away from the bearing surface 111, so as to support the bearing body 110 and facilitate the movement of the bearing body 110, thereby facilitating the movement of the base 100.

[0031] Mounting base 200 is the basic component of the auxiliary device. Mounting base 200 provides a mounting foundation for other components of the auxiliary device and can also form functional spaces or structures, namely the slot 210 described later. In this embodiment, mounting base 200 provides a mounting foundation for the lifting mechanism 300 and is detachably fixed to the side wall of the process chamber 500 to achieve fixed installation of the auxiliary device and facilitate disassembly of the auxiliary device after the base 100 has been assembled and disassembled.

[0032] The lifting mechanism 300 is the core component in the auxiliary device for achieving lifting. The lifting mechanism 300 is mounted on the mounting base 200 and is indirectly mounted on the side wall of the process chamber 500 through the mounting base 200, thereby lifting relative to the process chamber 500.

[0033] The first support member 410 and the second support member 420 are the core components of the auxiliary device that enable the transport of the base 100 by supporting the carrier body 110. Both the first support member 410 and the second support member 420 are connected to the lifting mechanism 300 and are respectively used to support and cooperate with the areas on both sides of the support shaft 120 on the back side 112. During the disassembly and assembly of the base 100, the carrier body 110 is supported on the first support member 410 and the second support member 420, and the back side 112 of the carrier body 110 is in contact with the first support member 410 and the second support member 420.

[0034] The first support member 410 and the second support member 420 are spaced apart and form a clearance space 430 between them. The clearance space 430 is used for the support shaft 120 to pass through, thereby avoiding interference with the support shaft 120 and enabling the first support member 410 and the second support member 420 to support and cooperate with the areas on both sides of the support shaft 120 on the back surface 112, thereby enabling the first support member 410 and the second support member 420 to stably support and cooperate with the bearing body 110.

[0035] Meanwhile, the lifting mechanism 300 is used to drive the first support member 410 and the second support member 420 to rise and fall, thereby driving the load-bearing body 110 supported on the first support member 410 and the second support member 420 to rise and fall, and then driving the base 100 to rise and fall through the auxiliary device.

[0036] like Figure 5 As shown in the embodiment of this application, both the first support member 410 and the second support member 420 can be arc-shaped support claws with their arc openings facing each other, thereby facilitating the formation of a clearance space 430 and effectively preventing interference between the first support member 410 and the second support member 420 and the support shaft 120. Of course, the first support member 410 and the second support member 420 can also be straight plate-shaped support claws. The specific structure of the first support member 410 and the second support member 420 is not limited in this embodiment of the application.

[0037] The auxiliary device disclosed by the embodiment of the application can be detachably fixed on the chamber sidewall of the process chamber 500 of the semiconductor process equipment through the mounting seat 200, the first support 410 and the second support 420 connected with the lifting mechanism 300 are driven to lift by the lifting mechanism 300, and the base 100 is driven to lift by the support cooperation between the first support 410 and the second support 420 and the bearing body 110, so that the engineering and technical personnel do not need to carry the base 100 for a long time when disassembling and assembling the base 100, the labor cost required for transporting the base 100 can be saved, the work intensity of the engineering and technical personnel when disassembling and assembling the base 100 can be reduced, the disassembly and assembly of the base 100 are more convenient, and the difficulty of replacing the base 100 is reduced, and the efficiency of disassembling and assembling the base 100 is improved.

[0038] Please refer to Figure 2 In a further technical solution, the auxiliary device can further include a guide rail 610 and a sliding block 620, the guide rail 610 can be fixedly connected with the lifting mechanism 300, the guide rail 610 can extend in a direction perpendicular to the lifting direction of the lifting mechanism 300, the sliding block 620 can be in sliding cooperation with the guide rail 610, the first support 410 and the second support 420 can be connected with the sliding block 620, and the sliding block 620 can be used to drive the first support 410 and the second support 420 to move in a direction parallel to the extension direction of the guide rail 610, so that the first support 410 and the second support 420 can drive the base 100 to move in a direction parallel to the extension direction of the guide rail 610.

[0039] As described above, the first support 410 and the second support 420 can drive the base 100 to move in a direction parallel to the lifting direction and a direction perpendicular to the lifting direction, so that the base 100 can be driven to move in more dimensions through the multi-dimensional movement of the first support 410 and the second support 420.

[0040] Specifically, the first support 410 and the second support 420 are indirectly connected with the lifting mechanism 300 through the cooperation of the sliding block 620 and the guide rail 610, so that the first support 410 and the second support 420 can drive the base 100 to move in a direction parallel to the lifting direction, so that the base 100 can move towards the direction of approaching or moving away from the chamber bottom wall of the process chamber 500.

[0041] Meanwhile, the first support 410 and the second support 420 can drive the base 100 to move along a direction parallel to the extending direction of the guide rail 610 through the sliding cooperation of the sliding block 620 and the guide rail 610, so that the support shaft 120 can be opposite to the through hole 510 described later. Such a structure can more conveniently adjust the positions of the first support 410 and the second support 420, and more conveniently adjust the position of the base 100, so that the base 100 is more conveniently disassembled and assembled.

[0042] Of course, the guide rail 610 can be one or multiple. In the case of multiple guide rails 610, the multiple guide rails 610 are arranged in parallel, and the sliding block 620 simultaneously slides with the multiple guide rails 610, thereby facilitating the stability of the sliding cooperation of the sliding block 620 and the guide rail 610, and when the bearing body 110 is supported on the first support 410 and the second support 420, the force applied by the base 100 to the first support 410 and the second support 420 can be dispersed on the multiple guide rails 610 through the sliding block 620, thereby improving the bending resistance of the guide rail 610, and further facilitating the reliability of the auxiliary device.

[0043] In the feasible technical solutions, the process chamber 500 can be a circular chamber, the chamber bottom wall of the process chamber 500 can be provided with a through hole 510, and the through hole 510 can be located at the center of the chamber bottom wall of the process chamber 500, and meanwhile, after the mounting seat 200 is installed in place, the guide rail 610 can extend along the radial direction of the circular chamber. In this case, the sliding block 620 can drive the first support 410 and the second support 420 to move along the radial direction of the circular chamber, thereby achieving the centering of the base 100 and the through hole 510, so as to facilitate the installation of the support shaft 120 into the through hole 510, and further achieve the installation of the base 100. In the process of centering the base 100 and the through hole 510, such a structure does not need to set a sliding cooperation mechanism in the third direction to adjust the position of the base 100 in the third direction, thereby avoiding the structure of the auxiliary device being too complex while ensuring that the auxiliary device has a more perfect function.

[0044] Please refer to Figure 1 and Figure 2In a further technical solution, the auxiliary device can further comprise a second connecting member 1000, the second connecting member 1000 can be fixedly connected with the lifting mechanism 300, and the guide rail 610 can be fixed to the second connecting member 1000. Such a structure can disperse the force applied by the base 100 to the first support member 410 and the second support member 420 on the guide rail 610 and the second connecting member 1000 connected with the guide rail 610 through the sliding block 620 when the bearing body 110 is supported on the first support member 410 and the second support member 420, thereby reducing the risk of bending of the guide rail 610. In addition, to facilitate the fixed connection of the guide rail 610 to the second connecting member 1000 and avoid stress concentration, the second connecting member 1000 can be a plate-shaped member.

[0045] When using the auxiliary device, the auxiliary device needs to be disassembled after the base 100 is installed, so that the semiconductor process equipment can work normally. In order to avoid the auxiliary device from being damaged by colliding with the base 100 during disassembly, the first support member 410 and the second support member 420 can be slidingly connected with the sliding block 620, that is, the first support member 410 and the second support member 420 can move relative to the sliding block 620. The direction in which the first support member 410 and the second support member 420 move relative to the sliding block 620 can be perpendicular to the extension direction of the guide rail 610 and the lifting direction of the lifting mechanism 300, so as to adjust the avoidance space 430 by moving relative to the sliding block 620.

[0046] In a specific working process, as shown in Figure 3 After the base 100 is installed, the support shaft 120 can be arranged in the through hole 510 of the chamber bottom wall of the process chamber 500, and the first support member 410 and the second support member 420 are located below the bearing body 110. In this case, the avoidance space 430 can be increased by moving the first support member 410 and the second support member 420 in a direction away from each other relative to the sliding block 620, so that the bearing body 110 can pass through the avoidance space 430, and then the first support member 410 and the second support member 420 are lifted above the base 100 by the lifting mechanism 300, so that the first support member 410 and the second support member 420 are away from the base 100, and finally facilitate the subsequent disassembly of the auxiliary device. Such a structure can avoid the first support member 410 and the second support member 420 from contacting the base 100 when disassembling the auxiliary device, thereby reducing the risk of damaging the base 100 by the collision between the first support member 410 and the second support member 420 and the base 100.

[0047] Meanwhile, before disassembling the base 100, the auxiliary device needs to be fixed on the chamber sidewall of the process chamber 500 through the mounting seat 200, and then the first support 410 and the second support 420 are moved in the direction away from each other relative to the slider 620 to increase the avoiding space 430, so as to lower the first support 410 and the second support 420 below the bearing body 110 through the lifting mechanism 300, and then the first support 410 and the second support 420 are moved in the direction close to each other relative to the slider 620 to reduce the avoiding space 430, so that the first support 410 and the second support 420 can be supported and cooperated with the bearing body 110, thereby completing the installation of the auxiliary device to facilitate the disassembly of the base 100. This structure facilitates the installation of the auxiliary device when disassembling the base 100, and can reduce the case that the auxiliary device is easily damaged by colliding with the process chamber 500 or the base 100 when installing the auxiliary device.

[0048] In addition, the size of the avoiding space 430 can be adjusted, so that the avoiding space 430 can be adjusted according to the specific size of the bearing body 110, so that the auxiliary device can be applied to bases 100 of different sizes.

[0049] In an alternative embodiment, the auxiliary device can further include a first adjusting screw 710 and a second adjusting screw 720. The first adjusting screw 710 can be rotatably arranged on the slider 620 and can be positioned and cooperated with the slider 620 on the rotation axis of the first adjusting screw 710, so as to constrain the movement of the first adjusting screw 710 along the rotation axis of the first adjusting screw 710.

[0050] The first adjusting screw 710 and the first support 410 can be threadedly cooperated, so as to drive the first support 410 to move relative to the slider 620 in the direction close to or away from the second support 420 by rotating the first adjusting screw 710, thereby reducing or increasing the interval between the first support 410 and the second support 420 to reduce or increase the avoiding space 430.

[0051] This structure drives the first support 410 to move relative to the slider 620 by threadedly cooperating the first adjusting screw 710 and the first support 410, so as to more finely and stably control the movement of the first support 410 relative to the slider 620, thereby reducing the case that the adjustment range of the first support 410 is too large when adjusting the first support 410, which causes the first support 410 to easily collide with the process chamber 500 or the base 100 and damage the process chamber 500 or the base 100.

[0052] Meanwhile, the second adjusting screw 720 is rotatably arranged on the sliding block 620 and is positioned and matched with the sliding block 620 along the rotation axis of the second adjusting screw 720, so as to restrict the movement of the second adjusting screw 720 along the rotation axis of the second adjusting screw 720.

[0053] The second adjusting screw 720 is threadedly matched with the second support 420, so as to drive the second support 420 to move relative to the sliding block 620 in the direction close to or away from the first support 410 by rotating the second adjusting screw 720, thereby reducing or increasing the interval between the first support 410 and the second support 420, so as to reduce or increase the avoiding space 430.

[0054] In this structure, the movement of the second support 420 relative to the sliding block 620 is controlled more finely and stably by threadedly matching the second adjusting screw 720 with the second support 420 to drive the second support 420 to move relative to the sliding block 620, thereby reducing the case that the adjustment range of the second support 420 is too large when the second support 420 is adjusted, which causes the second support 420 to collide with the process chamber 500 or the base 100 and damage the process chamber 500 or the base 100.

[0055] Please refer to Figure 3 and Figure 4 The base 100 further comprises a bellows 130, the bellows 130 is sleeved on the support shaft 120, one end of the bellows 130 is sealingly connected with the back surface 112, and the other end of the bellows 130 is sealingly surrounded on the through hole 510, so that the base 100 can be sealingly installed on the process chamber 500. In this case, the first support 410 and the second support 420 are used for support matching with the areas on the back surface 112 located on both sides of the bellows 130, and the avoiding space 430 is used for the bellows 130 to pass through, so as to avoid the interference between the first support 410 and the second support 420 and the bellows 130.

[0056] Please refer to Figure 1 and Figure 2In order to facilitate the extension of the first support 410 and the second support 420 into the process chamber 500 to facilitate the disassembly and assembly of the susceptor 100, the auxiliary device can further comprise a connecting rod 800, a first end of the connecting rod 800 can be connected with the sliding block 620, a second end of the connecting rod 800 can be connected with the first support 410 and the second support 420, and a central axis of the connecting rod 800 can be parallel to the lifting direction of the lifting mechanism 300, so as to avoid that the part of the auxiliary device extending into the process chamber 500 occupies too much internal space of the process chamber 500, thereby making the first support 410 and the second support 420 have a larger activity space in the process chamber 500, and further facilitating the driving of the first support 410 and the second support 420 to move the susceptor 100 in the process chamber 500. Specifically, the connecting rod 800 can be one or multiple, and the number of the connecting rod 800 is not limited in the embodiments of the present application.

[0057] Of course, the sliding block 620 can be provided with a first protruding portion protruding in a direction away from the guide rail 610, and the first support 410 and the second support 420 can be connected to the first protruding portion, so that the auxiliary device is more easily extended to the inside of the process chamber 500.

[0058] Please continue to refer to Figure 1 and Figure 2 The auxiliary device can further comprise a first connecting piece 900, the first connecting piece 900 can be fixedly connected with the second end of the connecting rod 800, and the first support 410 and the second support 420 can be connected with the first connecting piece 900. Specifically, in order to facilitate the connection of the first support 410 and the second support 420 with the first connecting piece 900, the first connecting piece 900 can be a plate-shaped structure.

[0059] As described above, in this case, the first adjusting screw 710 and the second adjusting screw 720 can be rotatably arranged on the first connecting piece 900, and can be positioned and matched with the first connecting piece 900 on the rotation axis of the first adjusting screw 710 and the rotation axis of the second adjusting screw 720, and the first support 410 and the second support 420 can be slidably matched with the first connecting piece 900 in a direction perpendicular to the lifting direction of the lifting mechanism 300, so that the first support 410 and the second support 420 are driven to move relative to the first connecting piece 900 in the direction of approaching or moving away from each other by rotating the first adjusting screw 710 and the second adjusting screw 720, to adjust the avoiding space 430.

[0060] In the embodiments of the present application, the lifting mechanism 300 can be a hydraulic lifting mechanism, a pneumatic lifting mechanism, etc., and the embodiments of the present application do not limit the specific structure and type of the lifting mechanism 300. In a feasible embodiment, the lifting mechanism 300 can include a worm gear mechanism 310, a lead screw 320, and a threaded sleeve 330. The threaded sleeve 330 can be sleeved outside the lead screw 320 and can be threadedly connected with the lead screw 320. One of the lead screw 320 and the threaded sleeve 330 can be rotatably arranged on the mounting seat 200 and connected with the worm gear mechanism 310, and the other one of the lead screw 320 and the threaded sleeve 330 can be connected with the first support 410 and the second support 420.

[0061] Specifically, the worm gear mechanism 310 can be used to drive one of the lead screw 320 and the threaded sleeve 330 connected with the worm gear mechanism 310 to rotate relative to the other one, so as to drive the first support 410 and the second support 420 to lift. This structure realizes the lifting of the first support 410 and the second support 420 through the cooperation of the lead screw 320 and the threaded sleeve 330. Since the transmission precision between the lead screw 320 and the threaded sleeve 330 is high, the first support 410 and the second support 420 can be lifted more finely, avoiding the situation that the base 100 is easily damaged due to the collision of the process chamber 500 caused by the excessive lifting stroke of the first support 410 and the second support 420.

[0062] Of course, the lead screw 320 can be a ball screw, and the threaded sleeve 330 can be a spline nut. The lead screw 320 or the threaded sleeve 330 can be rotatably arranged on the mounting seat 200 through a rotating bearing.

[0063] In addition, the worm gear mechanism 310 has a self-locking function, so that in the event of an accident, the worm gear mechanism 310 can be self-locked to avoid the first support 410 and the second support 420 from being lowered by the gravity of the base 100, thereby causing the base 100 to fall and collide with the process chamber 500 or hit the engineering and technical personnel, thereby facilitating the improvement of the safety of the auxiliary device.

[0064] In further technical solutions, the lifting mechanism 300 can further include a rotating operation handle 340 connected with the worm gear mechanism 310. Specifically, the engineering and technical personnel can drive the worm gear mechanism 310 by rotating the rotating operation handle 340, so as to drive one of the lead screw 320 and the threaded sleeve 330 connected with the worm gear mechanism 310 to rotate relative to the other one. This structure is relatively simple, thereby being easier to realize, and being conducive to reducing the cost.

[0065] The rotating operation handle 340 can have a second protruding part 341, through which an engineering technician can manipulate the rotating operation handle 340 to avoid the situation that the engineering technician's hands are greasy and slippery, and it is difficult to rotate the rotating operation handle 340.

[0066] Of course, the lifting mechanism 300 can also include a motor, which can be connected with the worm gear mechanism 310, so that the automatic lifting of the lifting mechanism 300 is realized through the motor, thereby facilitating the improvement of the automation degree of the auxiliary device.

[0067] In the embodiment of the present application, the mounting seat 200 can have a clamping groove 210 and a fastening screw 220, the slot of the clamping groove 210 can be used to face the chamber bottom wall of the process chamber 500, and the clamping groove 210 can be used to be clamped to the chamber side wall of the process chamber 500, the first side wall and the second side wall of the clamping groove 210 can be respectively opposite to the outer side and the inner side of the chamber side wall of the process chamber 500, the fastening screw 220 can be threaded through the first side wall of the clamping groove 210, and can be threadedly connected with the first side wall of the clamping groove 210, so as to make the fastening screw 220 abut against the outer side of the chamber side wall of the process chamber 500 by rotating the fastening screw 220, and make the second side wall of the clamping groove 210 abut against the inner side of the chamber side wall of the process chamber 500, so that the mounting seat 200 is in a locked state. In this case, the chamber side wall of the process chamber 500 is clamped between the fastening screw 220 and the second side wall of the clamping groove 210, so as to realize the fixation of the mounting seat 200 on the chamber side wall of the process chamber 500, thereby realizing the fixed installation of the auxiliary device.

[0068] Of course, the fastening screw 220 can also be loosened by rotating the fastening screw 220, so that there is a gap between the fastening screw 220 and the outer side of the chamber side wall of the process chamber 500, and there is a gap between the second side wall of the clamping groove 210 and the inner side of the chamber side wall of the process chamber 500, so as to switch the mounting seat 200 to an unlocked state, so as to detach the mounting seat 200 from the chamber side wall of the process chamber 500, thereby realizing the disassembly of the auxiliary device.

[0069] In addition, in this structure, the interval between the fastening screw 220 and the second side wall of the clamping groove 210 can be adjusted according to the actual thickness of the chamber side wall of the process chamber 500, so that the mounting seat 200 can be installed on the chamber side wall of the process chamber 500 of different specifications, thereby facilitating the expansion of the application range of the auxiliary device.

[0070] In the above embodiment of the present application, the focus is on the differences between various embodiments, and the different optimization features of various embodiments can be combined to form better embodiments without contradiction. Considering the brevity of the writing, it will not be repeated here.

[0071] The embodiments of the present application are described above with reference to the drawings; however, the present application is not limited to the specific embodiments described above, but the specific embodiments described above are merely illustrative rather than restrictive, and a person of ordinary skill in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims, and all of them belong to the protection of the present application.

Claims

1. An auxiliary device for assisting in disassembling a pedestal, the pedestal (100) comprising a carrier body (110) having a carrier surface (111) for carrying a wafer and a support shaft (120) whose top end is connected to a back surface (112) of the carrier body (110) facing away from the carrier surface (111), characterized in that The auxiliary device comprises a mounting base (200), a lifting mechanism (300), a first support (410) and a second support (420); The mounting base (200) is used for detachably fixing on a chamber side wall of a process chamber (500), the lifting mechanism (300) is arranged on the mounting base (200), and the first support (410) and the second support (420) are connected with the lifting mechanism (300) and are used for supporting the regions on the back surface (112) on both sides of the support shaft (120) respectively; The lifting mechanism (300) is used for driving the first support (410) and the second support (420) to lift, the first support (410) and the second support (420) are arranged at intervals, and an avoiding space (430) is formed between the first support (410) and the second support (420), and the avoiding space (430) is used for allowing the support shaft (120) to pass through.

2. The supplementary device of claim 1, wherein, The auxiliary device further comprises a guide rail (610) and a sliding block (620), the guide rail (610) is fixedly connected with the lifting mechanism (300), the guide rail (610) extends in a direction perpendicular to the lifting direction of the lifting mechanism (300), and the sliding block (620) is in sliding cooperation with the guide rail (610), The first support (410) and the second support (420) are connected with the sliding block (620), and the sliding block (620) is used for driving the first support (410) and the second support (420) to move in a direction parallel to the extension direction of the guide rail (610).

3. The supplementary device of claim 2, wherein, The first support (410) and the second support (420) are in sliding cooperation with the sliding block (620), The moving direction of the first support (410) and the second support (420) relative to the sliding block (620) is perpendicular to the extension direction of the guide rail (610) and the lifting direction of the lifting mechanism (300), so as to adjust the avoiding space (430) by moving relative to the sliding block (620).

4. The supplemental device of claim 3, wherein, The auxiliary device further comprises a first adjusting screw (710) and a second adjusting screw (720); The first adjusting screw (710) is rotatably arranged on the sliding block (620), and is positioned and cooperated with the sliding block (620) on the rotation axis of the first adjusting screw (710); The first adjusting screw (710) is in threaded cooperation with the first support (410), so as to drive the first support (410) to move relative to the sliding block (620) in the direction close to or away from the second support (420) by rotating the first adjusting screw (710); The second adjusting screw (720) is rotationally arranged on the sliding block (620) and is positioned and matched with the sliding block (620) on the rotation axis of the second adjusting screw (720), and the second adjusting screw (720) is threadedly matched with the second support (420) to drive the second support (420) to move relative to the sliding block (620) in the direction of approaching or moving away from the first support (410) by rotating the second adjusting screw (720).

5. The supplemental device of claim 2, wherein, The auxiliary device further comprises a connecting rod (800), a first end of the connecting rod (800) is connected with the sliding block (620), a second end of the connecting rod (800) is connected with the first support (410) and the second support (420), and a central axis of the connecting rod (800) is parallel to the lifting direction of the lifting mechanism (300).

6. The supplemental device of claim 5, wherein, The auxiliary device further comprises a first connecting piece (900), the first connecting piece (900) is fixedly connected with the second end of the connecting rod (800), and the first support (410) and the second support (420) are connected with the first connecting piece (900).

7. The supplemental device of claim 2, wherein, The auxiliary device further comprises a second connecting piece (1000), the second connecting piece (1000) is fixedly connected with the lifting mechanism (300), and the guide rail (610) is fixed to the second connecting piece (1000).

8. The supplemental device of claim 1, wherein, The lifting mechanism (300) comprises a worm gear mechanism (310), a lead screw (320) and a threaded sleeve (330), the threaded sleeve (330) is sleeved outside the lead screw (320) and is threadedly matched with the lead screw (320), one of the lead screw (320) and the threaded sleeve (330) is rotationally arranged on the mounting base (200) and is connected with the worm gear mechanism (310), and the other of the lead screw (320) and the threaded sleeve (330) is connected with the first support (410) and the second support (420); The worm gear mechanism (310) is used for driving one of the lead screw (320) and the threaded sleeve (330) connected with the worm gear mechanism (310) to rotate relative to the other, so as to drive the first support (410) and the second support (420) to lift.

9. The supplemental device of claim 8, wherein, The lifting mechanism (300) further comprises a rotating operation handle (340), the rotating operation handle (340) is connected with the worm gear mechanism (310).

10. The supplemental device of claim 1, wherein, The mounting base (200) has a clamping groove (210) and a fastening screw (220), an opening of the clamping groove (210) is used for facing the chamber bottom wall of the process chamber (500), the clamping groove (210) is used for being clamped on the chamber side wall of the process chamber (500), and first and second side walls of the clamping groove (210) are respectively opposite to the outer side and the inner side of the chamber side wall of the process chamber (500); The fastening screw (220) is arranged in the first side wall of the clamping groove (210) and is screwed with the first side wall of the clamping groove (210) to make the fastening screw (220) abut against the outer side of the chamber side wall of the process chamber (500) by rotating the fastening screw (220), and make the second side wall of the clamping groove (210) abut against the inner side of the chamber side wall of the process chamber (500).

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