Pedestal device and process chamber
By designing the adjustment components and elastic elements of the base device, the base was quickly and accurately leveled, solving the problem of low leveling efficiency in the existing technology and ensuring the levelness of the base in the chemical vapor deposition process.
Patent Information
- Application Number
- CN202422976314.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2034-12-03
AI Technical Summary
Existing base devices are difficult to meet the high-precision axial and radial runout requirements in chemical vapor deposition processes, resulting in low leveling efficiency and affecting production efficiency.
Design a base device including a base body, a connecting shaft, an adjusting seat, a mounting seat, an adjusting assembly, and an elastic element. The adjusting assembly contacts the inner wall of the positioning cylinder through its adjusting structure and thrust element, and the elastic force of the elastic element maintains the stability of the adjusting seat, reducing the number of parts when adjusting in one direction and achieving fast and accurate axial and radial adjustment.
This improves the efficiency and stability of the base leveling operation, ensures the base levelness in the chemical vapor deposition process, and meets the high-precision runout requirements.
Smart Images
Figure CN223660206U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of process chambers, specifically to a base device and a process chamber. Background Technology
[0002] In the chemical vapor deposition (CVD) process, in order to ensure normal wafer transfer and film thickness uniformity, the substrate on which the wafer is placed needs to meet high axial and radial runout requirements when rotating. Due to space constraints, a dedicated adjustment mechanism needs to be designed to meet this requirement. Utility Model Content
[0003] The present invention aims to provide a base device and a process chamber, wherein the base device can ensure the stability of the base position.
[0004] To achieve the above objectives, as one aspect of this utility model, a base device is provided, comprising a base body, a connecting shaft, an adjusting seat, a mounting seat, multiple adjusting components, and multiple elastic elements;
[0005] The mounting base has a positioning cylinder, and the adjusting base is disposed in the positioning cylinder. The adjusting base has a plurality of first adjusting holes and a plurality of second adjusting holes. The plurality of first adjusting holes extend along the axial direction of the adjusting base, and the plurality of second adjusting holes extend along the radial direction of the adjusting base. The first ends of the plurality of second adjusting holes are connected to the plurality of first adjusting holes one by one, and the second ends of the plurality of second adjusting holes extend to the surface of the adjusting base.
[0006] The adjustment assembly includes an adjustment structure and a thrust member. The thrust member is disposed in the second adjustment hole and abuts against the inner wall of the positioning cylinder. The adjustment structure can move along the first adjustment hole and push the thrust member so that the thrust member and the adjustment seat move relative to each other.
[0007] Multiple elastic elements are arranged one-to-one on the other side of the multiple adjustment components relative to the axis of the adjustment seat, and the two ends of the elastic elements respectively abut against the inner wall of the adjustment seat and the positioning cylinder;
[0008] The top end of the connecting shaft is fixedly connected to the base body, and the adjusting seat is detachably fixedly connected to the bottom end of the connecting shaft and fixes the connecting shaft on the mounting base.
[0009] In one optional embodiment of this utility model, the base device includes two adjustment components, and the two adjustment components are at a 90° angle along the circumference of the adjustment base.
[0010] As an optional embodiment of this utility model, the inner wall of the positioning cylinder has multiple positioning planes, and the second end of the thrust member has a mating plane, which is parallel to and in contact with the positioning plane.
[0011] As an optional embodiment of this utility model, the base body is made of graphite.
[0012] As an optional embodiment of this utility model, the plurality of positioning planes are connected by a cylindrical surface coaxial with the mounting base.
[0013] As an optional embodiment of this utility model, the outer wall shape of the adjusting seat corresponds to the inner wall shape of the positioning cylinder, and there is an adjusting gap between the outer wall shape of the adjusting seat and the inner wall of the positioning cylinder.
[0014] As an optional embodiment of this utility model, the width of the adjustment gap is 1.25mm.
[0015] As an optional embodiment of this utility model, the diameter of the first end of the thrust member gradually increases in the direction toward the second end. The first adjustment hole includes a guide hole and a threaded hole that are interconnected. The adjustment structure includes an adjustment screw and an adjustment ball. The adjustment ball is disposed in the guide hole, and the adjustment screw is disposed in the threaded hole. The end of the adjustment screw can drive the adjustment ball to push the first end of the thrust member, so that the thrust member moves toward the outside of the adjustment seat.
[0016] As an optional embodiment of this utility model, the adjusting seat also forms a plurality of receiving blind holes on the other side of each adjusting component relative to the axis of the adjusting seat, one end of the elastic member abuts against the blind end of the receiving blind hole, and the other end of the elastic member abuts against the inner wall of the positioning cylinder.
[0017] As an optional embodiment of this utility model, the elastic element is a spring, which can be a helical compression spring or a nitrogen spring.
[0018] As an optional embodiment of this utility model, the first end of the thrust member is tapered.
[0019] In one optional embodiment of this utility model, the adjusting ball is made of steel.
[0020] As an optional embodiment of this utility model, the mounting base further includes a positioning ring and a receiving cylinder, wherein the positioning ring is connected between the receiving cylinder and the positioning cylinder and the three are formed as one unit;
[0021] The connecting shaft is partially housed in the receiving cylinder, the positioning ring is located between the connecting shaft and the adjusting seat, and a sealing ring is provided at the top of the receiving cylinder, which fixes the relative position between the corresponding part of the connecting shaft and the top of the receiving cylinder.
[0022] As an optional embodiment of this utility model, an annular receiving groove extending around the axis of the receiving cylinder is formed on the inner wall of the top end of the receiving cylinder, and the sealing ring is disposed in the annular receiving groove and seals the gap between the outer wall of the connecting shaft and the annular receiving groove.
[0023] As an optional embodiment of this utility model, the base device further includes a fastening fastener, the connecting shaft includes an insulating cylinder and a connector, the connector is fixedly connected to the bottom end of the insulating cylinder, the top of the adjusting seat has a positioning boss, and a first fastening hole is formed in the adjusting seat along the axis of the adjusting seat, a positioning groove is formed in the connector, and a second fastening hole is formed at the bottom of the positioning groove, the fastening fastener passes through the first fastening hole and the second fastening hole in sequence to detachably fix the adjusting seat and the connector.
[0024] In one optional embodiment of this utility model, the fastening fastener is a screw.
[0025] As an optional embodiment of this utility model, the insulating cylinder is made of quartz.
[0026] As a second aspect of this utility model, a process chamber is provided, including a cavity, a rotary drive mechanism, and a base device provided by this utility model. The base device is located in the cavity, and the rotary drive mechanism is connected to the mounting seat of the base device for driving the mounting seat to rotate the base body.
[0027] In the base device and process chamber provided by this utility model, the adjustment structure of the adjustment component can drive the thrust member to move relative to the adjustment seat and press the inner wall of the positioning cylinder. Each adjustment component is provided with an elastic member on its opposite side. The two ends of the elastic member abut against the inner wall of the adjustment seat and the positioning cylinder, respectively. Thus, the elastic force can drive the adjustment seat away from the inner wall of the positioning cylinder on the side where the elastic member is located. This allows each adjustment component to form a two-force balance with the elastic member on its opposite side. While using the elastic force of the elastic member to maintain the position stability of the adjustment seat, the number of components required to be operated when adjusting the position of the adjustment seat in a single direction is reduced. This allows the axial and radial runout of the base body to be adjusted to the optimal value quickly and accurately, ensuring the operational efficiency and stability of base leveling, and thus ensuring the levelness of the base in the chemical vapor deposition process. Attached Figure Description
[0028] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the following detailed description to explain the present invention, but do not constitute a limitation thereof. In the drawings:
[0029] Figure 1 This is a schematic diagram of the base device provided in an embodiment of the present invention;
[0030] Figure 2 This is a partially enlarged schematic diagram of the base device provided in this embodiment of the present invention in region A;
[0031] Figure 3 This is a bottom view of the base device provided in this embodiment of the utility model;
[0032] Figure 4 This is a cross-sectional view of the base device provided in an embodiment of the present utility model.
[0033] Explanation of reference numerals in the attached figures:
[0034] Base body 100
[0035] Connecting shaft 200
[0036] Insulating cylinder 210
[0037] Connector 220
[0038] Adjustable seat 300
[0039] First adjustment hole 310
[0040] Guide hole 311
[0041] Threaded hole 312
[0042] Accommodation of blind hole 320
[0043] Positioning boss 330
[0044] Mounting base 400
[0045] Positioning cylinder 410
[0046] Positioning plane 411
[0047] Positioning ring 420
[0048] Container 430
[0049] Annular receiving groove 431
[0050] Adjustment component 500
[0051] Adjustment structure 510
[0052] Adjusting screw 511
[0053] 512 Adjustment Ball
[0054] Thrust component 520
[0055] Elastic component 600
[0056] Sealing ring 710
[0057] Set fastener 720 Detailed Implementation
[0058] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.
[0059] Existing base leveling structures typically have multiple independent adjustment components (such as screws) at the bottom of the base. When leveling the base, multiple adjustment components need to be adjusted sequentially, resulting in poor base leveling accuracy. This makes it difficult to meet the base leveling requirements of chemical vapor deposition processes, and the adjustment is time-consuming, affecting production efficiency.
[0060] To address the aforementioned technical problems, as one aspect of this utility model, a base device is provided, such as... Figures 1 to 4 As shown, the base device includes a base body 100, a connecting shaft 200, an adjusting seat 300, a mounting seat 400, multiple adjusting components 500, and multiple elastic elements 600;
[0061] Mounting base 400 has positioning cylinder 410, and adjusting base 300 is disposed in positioning cylinder 410. Adjusting base 300 has a plurality of first adjusting holes 310 and a plurality of second adjusting holes. The plurality of first adjusting holes 310 extend along the axial direction of adjusting base 300, and the plurality of second adjusting holes extend along the radial direction of adjusting base 300. The first ends of the plurality of second adjusting holes are connected to the plurality of first adjusting holes 310 in a corresponding manner, and the second ends of the plurality of second adjusting holes penetrate to the surface of adjusting base 300.
[0062] The adjustment assembly 500 includes an adjustment structure 510 and a thrust member 520. The thrust member 520 is disposed in the second adjustment hole and abuts against the inner wall of the positioning cylinder 410. The adjustment structure 510 can move along the first adjustment hole 310 and push the thrust member 520 so that the thrust member 520 and the adjustment seat 300 move relative to each other.
[0063] Multiple elastic elements 600 are arranged one-to-one on the other side of the multiple adjusting components 500 relative to the axis of the adjusting seat 300, and the two ends of the elastic elements 600 respectively abut against the inner wall of the adjusting seat 300 and the positioning cylinder 410.
[0064] The top end of the connecting shaft 200 is fixedly connected to the base body 100, and the adjusting seat 300 is detachably fixedly connected to the bottom end of the connecting shaft 200 and fixes the connecting shaft 200 on the mounting seat 400.
[0065] In the base device provided by this utility model, the adjustment structure 510 of the adjustment component 500 can drive the thrust component 520 to move relative to the adjustment seat 300 and press the inner wall of the positioning cylinder 410. Each adjustment component 500 is provided with an elastic component 600 on its opposite side. The two ends of the elastic component 600 abut against the inner walls of the adjustment seat 300 and the positioning cylinder 410, respectively. Thus, the elastic force can drive the adjustment seat 300 away from the inner wall of the positioning cylinder 410 on the side where the elastic component 600 is located. This makes each adjustment component 500 and its opposite elastic component 600 form a two-force balance. While using the elastic force of the elastic component 600 to maintain the positional stability of the adjustment seat 300, the number of components required to be operated when adjusting the position of the adjustment seat 300 in a single direction is reduced. This allows the axial and radial runout of the base body 100 to be adjusted to the optimal value quickly and accurately, ensuring the operational efficiency and stability of base leveling, and thus ensuring the levelness of the base in the chemical vapor deposition process.
[0066] As a preferred embodiment of this utility model, such as Figure 3 , Figure 4 As shown, the base device includes two adjustment components 500, and the two adjustment components 500 are angled together by 90° along the circumference of the adjustment base 300.
[0067] In this embodiment of the utility model, the two adjustment components 500 are orthogonally arranged, so that when the two adjustment components 500 adjust the position of the adjustment seat 300 along their respective corresponding radial directions, they can avoid affecting the adjustment amount of the other adjustment component 500, thereby further ensuring the adjustment efficiency of the base.
[0068] As one embodiment of this utility model, such as Figure 3 , Figure 4 As shown, the inner wall of the positioning cylinder 410 has multiple positioning planes 411, and the second end of the thrust member 520 has a mating plane, which is parallel to and in contact with the positioning planes 411.
[0069] In this embodiment of the utility model, the second end of the thrust member 520 has a mating plane. The thrust member 520 forms a surface contact with the positioning plane 411 on the inner wall of the positioning cylinder 410 through the mating plane, which ensures the stability of the contact between the thrust member 520 and the inner wall of the positioning cylinder 410, thereby ensuring the stability of the position of the base body 100. At the same time, it can also prevent circumferential shaking between the positioning cylinder 410 and the adjusting seat 300, further ensuring the stability of the position of the base body 100 and the adjustment efficiency.
[0070] As an optional embodiment of this utility model, the base body 100 is made of graphite.
[0071] As an optional embodiment of this utility model, such as Figure 3 , Figure 4 As shown, multiple positioning planes 411 are connected by cylindrical surfaces coaxial with the mounting base 400.
[0072] As an optional embodiment of this utility model, such as Figure 3 , Figure 4 As shown, the outer wall shape of the adjusting seat 300 corresponds to the inner wall shape of the positioning cylinder 410, and there is an adjusting gap between the outer wall shape of the adjusting seat 300 and the inner wall of the positioning cylinder 410.
[0073] As an optional embodiment of this utility model, the width of the adjustment gap is 1.15mm-1.35mm. Optionally, the width of the adjustment gap is 1.25mm.
[0074] As an optional embodiment of this utility model, such as Figure 1 , Figure 2 , Figure 4 As shown, the diameter of the first end of the thrust member 520 gradually increases in the direction toward the second end. The first adjustment hole 310 includes a guide hole 311 and a threaded hole 312 that are interconnected. The adjustment structure 510 includes an adjustment screw 511 and an adjustment ball 512. The adjustment ball 512 is disposed in the guide hole 311, and the adjustment screw 511 is disposed in the threaded hole 312. The end of the adjustment screw 511 can drive the adjustment ball 512 to push the first end of the thrust member 520, so that the thrust member 520 moves toward the outside of the adjustment seat 300.
[0075] As an optional embodiment of this utility model, such as Figure 2 , Figure 4 As shown, the first end of the thrust member 520 is tapered.
[0076] As an optional embodiment of this utility model, such as Figure 2 , Figure 4 As shown, the adjusting seat 300 also forms a plurality of receiving blind holes 320 on the other side of each adjusting component 500 relative to the axis of the adjusting seat 300. One end of the elastic member 600 abuts against the blind end of the receiving blind hole 320, and the other end of the elastic member 600 abuts against the inner wall of the positioning cylinder 410.
[0077] As an optional embodiment of this utility model, such as Figure 2 , Figure 4 As shown, the elastic element 600 is a spring.
[0078] As an optional embodiment of this utility model, the elastic element 600 is a helical compression spring or a nitrogen spring.
[0079] As an optional embodiment of this utility model, the adjusting ball 512 is made of steel.
[0080] As an optional embodiment of this utility model, such as Figure 1 , Figure 2 As shown, the mounting base 400 also includes a positioning ring 420 and a receiving cylinder 430. The positioning ring 420 is connected between the receiving cylinder 430 and the positioning cylinder 410, and the three are integrated into one unit.
[0081] The connecting shaft 200 is partially housed in the receiving cylinder 430. The positioning ring 420 is located between the connecting shaft 200 and the adjusting seat 300. A sealing ring 710 is provided at the top of the receiving cylinder 430. The sealing ring 710 fixes the relative position between the corresponding part of the connecting shaft 200 and the top of the receiving cylinder 430.
[0082] In this embodiment of the utility model, the middle part of the connecting shaft 200 is sealed to the top end of the receiving cylinder 430 by a sealing ring 710, so that the adjusting seat 300 uses the sealing point as a fulcrum to pry the top end of the connecting shaft 200 and the base body 100 connected thereto to move, thereby adjusting the axial and radial runout of the base body 100.
[0083] As an optional embodiment of this utility model, such as Figure 1 , Figure 2 As shown, an annular receiving groove 431 extending around the axis of the receiving cylinder 430 is formed on the inner wall of the top end of the receiving cylinder 430. The sealing ring 710 is disposed in the annular receiving groove 431 and seals the gap between the outer wall of the connecting shaft 200 and the annular receiving groove 431.
[0084] As an optional embodiment of this utility model, such as Figures 1 to 4 As shown, the base device also includes a fastening fastener 720. The connecting shaft 200 includes an insulating cylinder 210 and a connector 220. The connector 220 is fixedly connected to the bottom end of the insulating cylinder 210. The top of the adjusting seat 300 has a positioning boss 330, and a first fastening hole is formed in the adjusting seat 300 along the axis of the adjusting seat 300. A positioning groove is formed in the connector 220, and a second fastening hole is formed at the bottom of the positioning groove. The fastening fastener 720 passes through the first fastening hole and the second fastening hole in sequence to detachably fix the adjusting seat 300 and the connector 220.
[0085] As an optional embodiment of this utility model, such as Figure 1 , Figure 2 As shown, the set fastener 720 is a screw.
[0086] As an optional embodiment of this utility model, the insulating cylinder 210 is made of quartz.
[0087] As a second aspect of this utility model, a process chamber is provided, including a cavity, a rotary drive mechanism, and a base device provided in the embodiments of this utility model. The mounting base 400 of the base device is located in the cavity, and the rotary drive mechanism is connected to the mounting base 400 of the base device and is used to drive the mounting base 400 to rotate the base body.
[0088] In the process chamber provided by this utility model, the adjustment structure 510 of the adjustment component 500 of the base device can drive the thrust component 520 to move relative to the adjustment seat 300 and press the inner wall of the positioning cylinder 410. Each adjustment component 500 is provided with an elastic component 600 on its opposite side. The two ends of the elastic component 600 abut against the inner walls of the adjustment seat 300 and the positioning cylinder 410, respectively. Thus, the elastic force can drive the adjustment seat 300 away from the inner wall of the positioning cylinder 410 on the side where the elastic component 600 is located. This allows each adjustment component 500 to form a two-force balance with the elastic component 600 on its opposite side. While using the elastic force of the elastic component 600 to maintain the positional stability of the adjustment seat 300, the number of components required to be operated when adjusting the position of the adjustment seat 300 in a single direction is reduced. This allows the axial and radial runout of the base body 100 to be adjusted to the optimal value quickly and accurately, ensuring the operational efficiency and stability of base leveling, and thus ensuring the levelness of the base in the chemical vapor deposition process.
[0089] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.
Claims
1. A base device, characterized in that, It includes a base body, a connecting shaft, an adjusting seat, a mounting seat, multiple adjusting components, and multiple elastic elements; The mounting base has a positioning cylinder, and the adjusting base is disposed in the positioning cylinder. The adjusting base has a plurality of first adjusting holes and a plurality of second adjusting holes. The plurality of first adjusting holes extend along the axial direction of the adjusting base, and the plurality of second adjusting holes extend along the radial direction of the adjusting base. The first ends of the plurality of second adjusting holes are connected to the plurality of first adjusting holes one by one, and the second ends of the plurality of second adjusting holes extend to the surface of the adjusting base. The adjustment assembly includes an adjustment structure and a thrust member. The thrust member is disposed in the second adjustment hole and abuts against the inner wall of the positioning cylinder. The adjustment structure can move along the first adjustment hole and push the thrust member so that the thrust member and the adjustment seat move relative to each other. Multiple elastic elements are arranged one-to-one on the other side of the multiple adjustment components relative to the axis of the adjustment seat, and the two ends of the elastic elements respectively abut against the inner wall of the adjustment seat and the positioning cylinder; The top end of the connecting shaft is fixedly connected to the base body, and the adjusting seat is detachably fixedly connected to the bottom end of the connecting shaft and fixes the connecting shaft on the mounting base.
2. The base device according to claim 1, characterized in that, The base device includes two adjustment components, and the two adjustment components are 90° apart along the circumferential direction of the adjustment base.
3. The base device according to claim 2, characterized in that, The inner wall of the positioning cylinder has multiple positioning planes, and the second end of the thrust member has a mating plane, which is parallel to and in contact with the positioning planes.
4. The base device according to claim 3, characterized in that, The shape of the outer wall of the adjusting seat corresponds to the shape of the inner wall of the positioning cylinder, and there is an adjusting gap between the outer wall of the adjusting seat and the inner wall of the positioning cylinder.
5. The base device according to claim 2, characterized in that, In the direction from the first end of the thrust member toward the second end of the thrust member, the diameter of the first end of the thrust member gradually increases. The first adjustment hole includes a guide hole and a threaded hole that are interconnected. The adjustment structure includes an adjustment screw and an adjustment ball. The adjustment ball is disposed in the guide hole, and the adjustment screw is disposed in the threaded hole. The end of the adjustment screw can drive the adjustment ball to push the first end of the thrust member, so that the thrust member moves outward from the adjustment seat.
6. The base device according to claim 1, characterized in that, The adjusting seat also has a plurality of receiving blind holes formed on the other side of each adjusting component relative to the axis of the adjusting seat. One end of the elastic member abuts against the blind end of the receiving blind hole, and the other end of the elastic member abuts against the inner wall of the positioning cylinder.
7. The base device according to claim 6, characterized in that, The elastic element is a helical compression spring or a nitrogen spring.
8. The base device according to any one of claims 1 to 7, characterized in that, The mounting base also includes a positioning ring and a receiving cylinder, wherein the positioning ring is connected between the receiving cylinder and the positioning cylinder and the three are formed as one unit; The connecting shaft is partially housed in the receiving cylinder, the positioning ring is located between the connecting shaft and the adjusting seat, and a sealing ring is provided at the top of the receiving cylinder, which fixes the relative position between the corresponding part of the connecting shaft and the top of the receiving cylinder.
9. The base device according to claim 8, characterized in that, The base device further includes a fastening fastener. The connecting shaft includes an insulating cylinder and a connector. The connector is fixedly connected to the bottom end of the insulating cylinder. The top of the adjusting seat has a positioning boss, and a first fastening hole is formed in the adjusting seat along the axis of the adjusting seat. A positioning groove is formed in the connector, and a second fastening hole is formed at the bottom of the positioning groove. The fastening fastener passes through the first fastening hole and the second fastening hole in sequence to detachably and fixedly connect the adjusting seat and the connector.
10. A process chamber, characterized in that, The device includes a cavity, a rotary drive mechanism, and a base device as described in any one of claims 1 to 9, wherein the base device is located in the cavity, and the rotary drive mechanism is connected to a mounting base of the base device for driving the mounting base to rotate the base body.