Argon flow guide device for single crystal furnace
By introducing an argon gas guiding device with an isolation cylinder and a secondary flow guiding component into the single crystal furnace, the problem of turbulent argon gas flow introducing impurities was solved, and uniform gas flow distribution was achieved during the single crystal growth process, thereby improving the growth rate and quality of the single crystal.
Patent Information
- Application Number
- CN202423227076.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2034-12-26
AI Technical Summary
In a single crystal furnace, the argon gas flow splits when it passes through the furnace opening and reaches the blank area at the location of the guide tube and water-cooled screen, causing gas flow turbulence, introducing impurities, and affecting the single crystal growth quality and the overall yield.
An argon gas guiding device including an isolation cylinder and a secondary flow guiding component was designed. The isolation cylinder guides the argon gas to the crucible, and the flow guide plate and rotation mechanism are used to achieve uniform gas flow distribution, preventing gas flow vortices and impurities from entering the crucible.
It increases the thermal gradient for single crystal growth, increases the growth rate of single crystals, reduces growth defects, and improves the overall yield of single crystals.
Smart Images
Figure CN223660291U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to single crystal furnace technical field especially relates to a single crystal furnace argon flow guide device. BACKGROUND
[0002] With the continuous development of world economy, the demand for efficient and clean energy is growing in modernization construction. As a kind of green energy and the main energy of human sustainable development, photovoltaic power generation is increasingly valued by countries around the world and is vigorously developed. As a kind of basic material for photovoltaic power generation, single crystal silicon has wide market demand. At present, the Czochralski method is often used in single crystal furnace to grow single crystal, and the single crystal furnace is a kind of device for melting polycrystalline materials such as polycrystalline silicon in inert gas environment and growing dislocation-free single crystal by the Czochralski method.
[0003] However, the current furnace mouth to the flow guide cylinder and water cooling screen position is a blank area, no shelter, argon flow will be shunted to the remaining position, the airflow cannot be concentrated, so that the single crystal furnace is easy to introduce impurities during crystal growth due to the airflow in the single crystal furnace, resulting in growth defects in single crystal growth, so that the whole rod rate of the prepared single crystal is low.
[0004] Therefore, it is necessary to provide a single crystal furnace argon flow guide device to solve the above problems. UTILITY MODEL CONTENT
[0005] The main purpose of the utility model is to provide a single crystal furnace argon flow guide device, which can effectively solve the problems in the background art.
[0006] To achieve the above purpose, the technical scheme adopted by the utility model is:
[0007] A single crystal furnace argon flow guide device, comprising a furnace body, a furnace mouth arranged at the top end of the furnace body, a crucible arranged on the inner side of the furnace body, and a flow guide cylinder arranged on the upper end of the crucible, an isolation cylinder is arranged between the furnace mouth and the flow guide cylinder;
[0008] The secondary flow guide assembly comprises a flow guide plate uniformly arranged on the inner wall of the isolation cylinder, and the upper end of the flow guide plate is movably connected with the inner wall of the isolation cylinder; the side wall of the lower end of the isolation cylinder is movably connected with a driving arm extending to the inner side of the isolation cylinder, and the end of the driving arm extending to the inner side of the isolation cylinder is movably connected with the lower end side of the flow guide plate; a spring is arranged on the end of the driving arm outside the isolation cylinder, and the spring is compressed when the driving arm moves towards the flow guide plate; a driving ring corresponding to the driving arm is arranged on the outer side of the lower end of the isolation cylinder, and the inner side of the driving ring is uniformly provided with recesses, and a protrusion is arranged between adjacent recesses; when the outer end of the driving arm corresponds to the recess, the spring resets, and when the outer end of the driving arm corresponds to the protrusion, the spring contracts; the isolation cylinder is rotatably connected to the inner side of the upper end of the furnace body, and the upper end of the furnace body is provided with a driving source for driving the rotation of the isolation cylinder.
[0009] Preferably, the isolation cylinder is inverted conical, the upper end of the isolation cylinder corresponds to the bottom port of the furnace mouth, and the lower end corresponds to the upper port of the flow guide cylinder; and the isolation cylinder is made of carbon-carbon composite material.
[0010] Preferably, the driving source comprises a gear ring arranged on the outer wall of the upper end of the isolation cylinder; one end of the inner side of the upper end of the furnace body is rotatably connected with a rotating shaft; the lower end of the rotating shaft is provided with a driving wheel engaged with the gear ring; and one side of the top end of the furnace body is provided with a motor for driving the rotation of the rotating shaft.
[0011] Preferably, the upper end of the flow guide plate is provided with a first pin shaft, the first pin shaft is arranged on the inner wall of the upper end of the isolation cylinder, and the flow guide plate is rotatably connected with the first pin shaft.
[0012] The lower end side wall of the isolation cylinder is provided with a guide hole corresponding to the driving arm, and the driving arm is movably connected with the guide hole.
[0013] Preferably, the lower end of the flow guide plate is provided with a sliding groove on the side close to the driving arm; the sliding groove is fixedly provided with a sliding rod; a sliding block is slidably connected in the sliding groove, and the sliding block and the sliding rod are movably sleeved; one end of the sliding block is provided with a second pin shaft; and the end of the driving arm extending to the inner side of the isolation cylinder is movably connected with the second pin shaft.
[0014] Preferably, a flange is arranged on the end of the driving arm outside the isolation cylinder, and the spring is located between the flange and the outer wall of the isolation cylinder.
[0015] Preferably, the end of the driving arm away from the flow guide plate is provided with a third pin shaft, a roller is rotatably connected on the third pin shaft, and the roller is used for rolling cooperation with the inner wall of the driving ring.
[0016] Preferably, the inner wall of the recess is arc-shaped, the protrusion is arc-shaped, and the recess and the protrusion are smoothly transitioned, and the roller is rolling matched with the recess and the protrusion.
[0017] Compared with the prior art, the argon flow guide device for the single crystal furnace has the following beneficial effects:
[0018] 1、The argon flow guide device for the single crystal furnace, by setting the isolation cylinder between the furnace mouth and the flow guide cylinder, when the argon is filled into the single crystal furnace, the argon will directly move to the crucible from the auxiliary chamber, avoiding the turbulence of the argon flow, and preventing the formation of vortex near the lower end of the furnace mouth, so as to bring the single crystal powder or other impurity powder on the furnace mouth into the crucible, so that the growth defects in the single crystal growth process cause the broken line condition, at the same time, the argon directly moves to the crucible from the furnace mouth, the argon flow can quickly take away the heat on the surface of the crystal rod, so as to increase the heat difference of the crystal growth, increase the growth power of the single crystal, thereby the growth speed of the single crystal can be improved.
[0019] 2、The argon flow guide device for the single crystal furnace, by setting the secondary flow guide assembly, the rotation of the isolation cylinder can be realized, and the angle of the inner wall guide plate can be changed during rotation, so as to realize the secondary flow guide of the gas flow or material entering the isolation cylinder, so that the gas flow or material can be uniformly distributed in the crucible, avoiding local concentration or accumulation. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 is a structural schematic view of the utility model;
[0021] Figure 2 is a structural schematic view of the utility model Figure 1 A place amplification diagram in the utility model;
[0022] Figure 3 is a structural schematic view of the driving ring of the utility model.
[0023] In the drawing: 1, furnace body; 2, furnace mouth; 3, motor; 4, rotating shaft; 5, driving wheel; 6, isolation cylinder; 7, flow guide cylinder; 8, crucible; 9, driving ring; 10, gear ring; 11, guide plate; 12, first pin shaft; 13, guide hole; 14, sliding block; 15, sliding slot; 16, sliding rod; 17, second pin shaft; 18, driving arm; 19, flange; 20, spring; 21, third pin shaft; 22, roller; 23, recess; 24, protrusion. DETAILED DESCRIPTION
[0024] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific embodiments.
[0025] For example, Figures 1-3As shown, an argon flow guide device for a single crystal furnace includes a furnace body 1, a furnace mouth 2 arranged at the top end of the furnace body 1, a crucible 8 arranged inside the furnace body 1, and a flow guide cylinder 7 arranged at the upper end of the crucible 8. An isolation cylinder 6 is arranged between the furnace mouth 2 and the flow guide cylinder 7. The isolation cylinder 6 is inverted conical. The upper end of the isolation cylinder 6 corresponds to the bottom port of the furnace mouth 2, and the lower end corresponds to the upper port of the flow guide cylinder 7. The isolation cylinder 6 is made of carbon-carbon composite material.
[0026] The secondary flow guide assembly includes a flow guide plate 11 uniformly arranged on the inner wall of the isolation cylinder 6. The upper end of the flow guide plate 11 is movably connected to the inner wall of the isolation cylinder 6. Specifically, a first pin shaft 12 is arranged on the upper end of the flow guide plate 11 and is arranged on the inner wall of the upper end of the isolation cylinder 6. The flow guide plate 11 is rotatably connected to the first pin shaft 12. A driving arm 18 extending to the inside of the isolation cylinder 6 is movably connected to the side wall of the lower end of the isolation cylinder 6. Specifically, a guide hole 13 corresponding to the driving arm 18 is arranged on the side wall of the lower end of the isolation cylinder 6. The driving arm 18 is movably connected to the guide hole 13. One end of the driving arm 18 extending to the inside of the isolation cylinder 6 is movably connected to the lower end of the flow guide plate 11. Specifically, a sliding groove 15 is arranged on the side of the lower end of the flow guide plate 11 close to the driving arm 18. A sliding rod 16 is fixedly arranged in the sliding groove 15. A sliding block 14 is slidably connected to the inside of the sliding groove 15. The sliding block 14 is movably sleeved with the sliding rod 16. A second pin shaft 17 is arranged on one end of the sliding block 14. The second pin shaft 17 is movably connected to the end of the driving arm 18 extending to the inside of the isolation cylinder 6. A spring 20 is arranged on the end of the driving arm 18 outside the isolation cylinder 6. Specifically, a flange 19 is arranged on the side wall of the end of the driving arm 18 outside the isolation cylinder 6. The spring 20 is arranged between the flange 19 and the outer wall of the isolation cylinder 6. When the driving arm 18 moves towards the flow guide plate 11, the spring 20 is compressed. A driving ring 9 corresponding to the driving arm 18 is arranged on the outside of the lower end of the isolation cylinder 6. The inside of the driving ring 9 is uniformly provided with recesses 23. Adjacent recesses 23 are provided with protrusions 24. When the outer end of the driving arm 18 corresponds to the recess 23, the spring 20 is reset. When the outer end of the driving arm 18 corresponds to the protrusion 24, the spring 20 is contracted. Specifically, a third pin shaft 21 is arranged on the end of the driving arm 18 away from the flow guide plate 11. A roller 22 is rotatably connected to the third pin shaft 21. The inner wall of the recess 23 is arc-shaped. The protrusion 24 is arc-shaped. The recess 23 and the protrusion 24 are smoothly transitioned. The roller 22 is rollingly connected to the recess 23 and the protrusion 24. The isolation cylinder 6 is rotatably connected to the inside of the upper end of the furnace body 1. A driving source for driving the rotation of the isolation cylinder 6 is arranged on the upper end of the furnace body 1. The driving source includes a gear ring 10 arranged on the outer wall of the upper end of the isolation cylinder 6. A rotating shaft 4 is rotatably connected to one end of the inside of the upper end of the furnace body 1. A driving wheel 5 engaged with the gear ring 10 is arranged on the lower end of the rotating shaft 4. An electric motor 3 for driving the rotation of the rotating shaft 4 is arranged on one side of the top end of the furnace body 1.
[0027] It should be noted that the utility model is a kind of argon flow guiding device for single crystal furnace, and when using, material or airflow enters after passing through furnace mouth 2 and directly enters guiding cylinder 7 under the action of isolation cylinder 6, then enters into crucible 8, and during the period, motor 3 drives driving wheel 5 to rotate by rotating shaft 4, driving wheel 5 drives isolation cylinder 6 to rotate by gear ring 10, isolation cylinder 6 rotates and will drive flow guide plate 11 to rotate, spring 20 resets when roller 22 enters recess 23, flow guide plate 11 is attached to the inner wall of isolation cylinder 6, driving arm 18 will push flow guide plate 11 to displace to the axis direction of isolation cylinder 6 when roller 22 is located in protrusion 24, spring 20 is compressed, spring 20 resets when roller 22 enters recess 23 again, and so on, multiple flow guide plates 11 continuously adjust angle, and passing material or airflow can be guided by flow guide plate 11, so as to be evenly distributed in crucible 8.
[0028] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above-described embodiments, and the above-described embodiments and the description in the specification are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.
Claims
1. An argon flow guide device for a single crystal furnace, comprising a furnace body (1), a furnace mouth (2) arranged at the top end of the furnace body (1), a crucible (8) arranged at the inner side of the furnace body (1), and a flow guide cylinder (7) arranged at the upper end of the crucible (8), characterized in that: The furnace mouth (2) and the draft tube (7) are provided with an isolation cylinder (6); Further comprising a secondary flow guide assembly, the secondary flow guide assembly comprises a flow guide plate (11) uniformly arranged on the inner wall of the isolation cylinder (6), and the upper end of the flow guide plate (11) is movably connected with the inner wall of the isolation cylinder (6); the side wall of the lower end of the isolation cylinder (6) movably connects a driving arm (18) extending to the inner side of the isolation cylinder (6), and one end of the driving arm (18) extending to the inner side of the isolation cylinder (6) is movably connected with the lower end of the flow guide plate (11); a spring (20) is arranged on one end of the driving arm (18) outside the isolation cylinder (6), and is configured to be compressed when the driving arm (18) moves towards the flow guide plate (11); the lower end of the isolation cylinder (6) is provided with a driving ring (9) corresponding to the driving arm (18); the inner side of the driving ring (9) is uniformly provided with recesses (23), and adjacent recesses (23) are provided with protrusions (24); when the outer end of the driving arm (18) corresponds to the recess (23), the spring (20) resets; when the outer end of the driving arm (18) corresponds to the protrusion (24), the spring (20) contracts; the isolation cylinder (6) is rotatably connected to the inner side of the upper end of the furnace body (1); the upper end of the furnace body (1) is provided with a driving source for driving the rotation of the isolation cylinder (6).
2. The argon flow guiding device for a single crystal furnace according to claim 1, characterized in that: The isolation cylinder (6) is inverted conical, the upper end of the isolation cylinder (6) corresponds to the bottom port of the furnace mouth (2), and the lower end corresponds to the upper port of the draft tube (7); the isolation cylinder (6) is made of carbon-carbon composite material.
3. The argon flow guiding device for a single crystal furnace according to claim 1, characterized in that: The driving source comprises a gear ring (10) arranged on the outer wall of the upper end of the isolation cylinder (6); one end of the inner side of the upper end of the furnace body (1) is rotatably connected with a rotating shaft (4); the lower end of the rotating shaft (4) is provided with a driving wheel (5) engaged with the gear ring (10); one side of the top end of the furnace body (1) is provided with a motor (3) for driving the rotation of the rotating shaft (4).
4. The argon flow guide device for a single crystal furnace according to claim 1, characterized in that: The upper end of the flow guide plate (11) is provided with a first pin shaft (12), which is arranged on the inner wall of the upper end of the isolation cylinder (6); the flow guide plate (11) is rotatably connected with the first pin shaft (12); The side wall of the lower end of the isolation cylinder (6) is provided with a guide hole (13) corresponding to the driving arm (18); the driving arm (18) is movably connected with the guide hole (13).
5. The argon flow guiding device for a single crystal furnace according to claim 1, characterized in that: The side of the lower end of the flow guide plate (11) close to the driving arm (18) is provided with a sliding groove (15); the sliding groove (15) is fixedly provided with a sliding rod (16); the inner side of the sliding groove (15) is slidably connected with a sliding block (14); the sliding block (14) and the sliding rod (16) are movably sleeved; one end of the sliding block (14) is provided with a second pin shaft (17); one end of the driving arm (18) extending to the inner side of the isolation cylinder (6) is movably connected with the second pin shaft (17).
6. The argon flow guiding device for a single crystal furnace according to claim 1, characterized in that: The side wall of one end of the driving arm (18) outside the isolation cylinder (6) is provided with a flange (19); the spring (20) is located between the flange (19) and the outer wall of the isolation cylinder (6).
7. The argon flow guide device for a single crystal furnace according to claim 1, characterized in that: The driving arm (18) is provided with a third pin shaft (21) at one end away from the guide plate (11), the third pin shaft (21) is rotatably connected with a roller (22), and the roller (22) is used for rolling cooperation with the inner wall of the driving ring (9).
8. The argon flow guide device for a single crystal furnace according to claim 7, characterized in that: The inner wall of the recess (23) is arc-shaped, the protrusion (24) is arc-shaped, and the recess (23) and the protrusion (24) are smoothly transitioned, and the roller (22) is in rolling cooperation with the recess (23) and the protrusion (24).