Lens inspection device based on transmission-type collimation imaging measurement method

Abstract

The utility model provides a lens inspection device based on a transmission-type collimation imaging measurement method, which relates to the technical field of optical machine assembly, is matched with a collimator, a lens, an electron microscope and an industrial personal computer for use, and comprises a rotary table, a lifting table, a translation table, an angular table, a quick mounting plate and a lens clamp, the lens inspection device comprises a rotary table, a lifting table is fixedly connected above the rotary table, a translation table is fixedly connected above the lifting table, an angular table is fixedly mounted above the translation table, a lens clamp is fixedly mounted above the angular table, and the lens inspection device accurately detects aberration and definition of a lens by adjusting positions and angles of the rotary table, the lifting table, the translation table and the angular table. The problem that the detected lens cannot be accurately coaxial with the collimator and the electron microscope is solved, and high dynamic and wide range of lens detection is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of optical machine assembly, concretely to lens inspection device based on transmission type collimation imaging measurement method. BACKGROUND

[0002] In transmission type collimation imaging measurement method, the traditional observation equipment is optical microscope, with the rapid development of electron microscope, optical microscope is gradually replaced by electron microscope as observation equipment, compared with observation by traditional optical microscope, the use of electron microscope greatly improves the accuracy and range of inspection, supplemented by computer software, the data of observation results can be realized, and recording and analysis can be realized.

[0003] In view of the need of observation, electron microscope needs to be transversely arranged, so lens inspection device is installed and fixed between collimator and electron microscope, so as to realize qualitative and quantitative detection of different aperture lenses, but the existing lens inspection device cannot be accurately coaxial with collimator and electron microscope, resulting in inaccurate measurement accuracy, or the relative fixation of the detected lens leads to low utilization rate of the detection device and small range of lens inspection.

[0004] In order to solve the above problems, it is urgent to develop lens inspection device based on transmission type collimation imaging measurement method to solve the above problems. CONTENT OF THE UTILITY MODEL

[0005] The utility model discloses lens inspection device based on transmission type collimation imaging measurement method, the problem that the measured lens cannot be accurately coaxial with collimator and electron microscope, the utility model aims at providing lens inspection device based on transmission type collimation imaging measurement method, can realize the rotation and translation of the measured lens in all directions, realize high dynamic and wide range of inspection.

[0006] In order to achieve the above purpose, the utility model is realized by the following technical scheme: lens inspection device based on transmission type collimation imaging measurement method is used in cooperation with collimator, lens, electron microscope and industrial computer, comprising: rotating table, lifting platform, translation table, angle position table, quick mounting plate and lens clamp, the lifting platform is fixedly connected above the rotating table, the translation table is fixedly connected above the lifting platform, the angle position table is fixedly installed above the translation table, the lens clamp is fixedly installed above the angle position table, the lens inspection device detects the aberration and definition of the lens by adjusting the position and / or angle of the rotating table, lifting platform, translation table and angle position table.

[0007] Preferably, the rotating table includes rotating table base, scale table, angle adjusting rod and rotation stop valve, the rotating table is provided with angle adjusting rod in transverse direction, and the rotating table is provided with rotation stop valve in vertical direction of the angle adjusting rod.

[0008] Preferably, the lifting platform comprises a fixed plate, a moving plate and a lifting adjusting valve, the fixed plate is fixedly connected with the scale platform, a sliding channel is arranged between the fixed plate and the moving plate, and the lifting adjusting valve is fixedly connected with the moving plate.

[0009] Preferably, the translation platform comprises a fixed seat, a moving seat, a translation adjusting valve and a fixed valve, the fixed seat is fixedly connected with the shorter side of the moving plate, a sliding rail is arranged between the moving seat and the fixed seat, the translation adjusting valve is clamped and fixed with the fixed seat, the front end of the translation adjusting valve is connected with the moving seat in abutment, and the translation adjusting valve drives the moving seat to move in the horizontal direction along the sliding rail on the fixed seat.

[0010] Preferably, the angle position platform comprises an angle position concave seat, an angle position convex seat, an angle position adjusting valve and a limiting valve, the angle position concave seat is fixedly connected with the moving seat, the angle position convex seat is arranged above the angle position concave seat, an arc-shaped sliding rail is arranged between the angle position convex seat and the angle position concave seat, the angle position adjusting valve is fixedly connected with the angle position concave seat, the front end of the angle position adjusting valve is connected with the angle position convex seat in abutment, and the angle position adjusting valve drives the angle position convex seat to adjust the circumferential angle along the arc-shaped sliding rail between the angle position concave seat.

[0011] Preferably, a quick mounting plate is fixedly connected above the angle position platform, and a lens clamp is fixedly connected above the quick mounting plate.

[0012] Preferably, the adjustment accuracy of the lifting platform and the translation platform is 1mm.

[0013] Preferably, the adjustment accuracy of the rotating platform and the angle position platform is 1 degree.

[0014] Beneficial effects

[0015] Compared with the prior art, the lens inspection device based on the transmission type collimation imaging measurement method has the following beneficial effects:

[0016] The rotating platform, the lifting platform, the translation platform and the angle position platform are arranged, the overall angle of the device is adjusted by the rotating platform, the vertical height of the device is adjusted by the lifting platform, the horizontal transverse position of the device is adjusted by the translation platform, and the pitch angle of the lens clamp is adjusted by the angle position platform, the omnibearing rotation and translation of the device are realized through the cooperation of the rotating platform, the lifting platform, the translation platform and the angle position platform, the problem that the measured lens cannot be accurately coaxial with the collimator tube and the electron microscope is solved, and high dynamic and wide range inspection is realized.

[0017] The lens clamp of the lens inspection device can be used for the installation of lenses of various specifications, so as to adapt to lenses of different diameters, and the efficiency of inspection can be greatly improved by replacing lens clamps of different specifications.

[0018] The rotating table and the lifting table have an adjustment precision of 1mm, the rotating table and the angle position table have an adjustment precision of 1 degree, high-precision adjustment of a lens detection point is realized, and measurement data is more accurate. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical problems, technical solutions and beneficial effects to be solved by the utility model, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced, and obviously, the drawings in the following description are only the embodiment of the utility model, and other drawings can be obtained according to the provided drawings without creative labor for the ordinary skilled in the art.

[0020] Figure 1 It is the main view of the utility model structure;

[0021] Figure 2 It is the side view of the utility model structure;

[0022] Figure 3 It is the structure schematic diagram of the utility model translation table and angle position table;

[0023] Figure 4 It is the use flow schematic diagram of the utility model;

[0024] In the drawing:

[0025] 1, rotating table, 101, rotating table base, 102, scale table, 103, angle adjusting rod, 104, rotation stop valve;

[0026] 2, lifting table, 201, lifting adjusting valve, 202, fixed plate, 203, moving plate;

[0027] 3, translation table, 301, fixed seat, 302, moving seat, 303, translation adjusting valve, 304, fixed valve;

[0028] 4, angle position table, 401, angle position concave seat, 402, angle position convex seat, 403, angle position adjusting valve, 404, limit valve;

[0029] 5, quick mounting plate, 6, lens clamp, 7, collimator, 8, electron microscope, 9, industrial computer. DETAILED DESCRIPTION

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the utility model more clearly, the utility model is further described in detail in combination with the embodiment and the drawings, and it should be understood that the specific embodiment described here is only used to explain the utility model, and is not used to limit the utility model, and the technical solutions of the utility model will be described in detail below in combination with the embodiment and the drawings, but the protection scope is not limited by this.

[0031] Please refer to Figures 1-3 The utility model provides a technical scheme: lens inspection device based on transmission type collimation imaging measurement method, with collimator 7, lens, electron microscope 8 and industrial computer 9 cooperation uses, include: rotating table 1, lifting platform 2, translation table 3, angular position table 4, quick -wearing board 5 and lens clamp 6, rotating table 1 top fixedly connected with lifting platform 2, lifting platform 2 top fixedly connected with translation table 3, translation table 3 top fixed mounting has angular position table 4, angular position table 4 top fixed mounting has lens clamp 6, lens clamp 6 carries out to take lens, the lens clamp 6 in the utility model can adopt multiple styles, can satisfy the replacement different style lens measurement use, and lens inspection device is through the position and / or angle of adjusting rotating table 1, lifting platform 2, translation table 3 and angular position table 4 to the aberration of lens and the definition of clearness carry out accurate detection.

[0032] In some embodiments, the rotating table 1 includes a rotating table base 101, a scale table 102, an angle adjusting rod 103, and a rotation stop valve 104. The rotating table 1 is provided with the angle adjusting rod 103 transversely. The rotating table 1 is provided with the rotation stop valve 104 perpendicularly to the angle adjusting rod 103. The adjusting precision of the rotating table 1 is 1 degree. The rotating table 1 drives the whole device to rotate left and right along the optical axis direction in a circular motion.

[0033] In some embodiments, the lifting platform 2 includes a lifting adjusting valve 201, a fixed plate 202, and a moving plate 203. The fixed plate 202 is fixedly connected to the scale table 102. A slide is provided between the fixed plate 202 and the moving plate 203. The lifting adjusting valve 201 is fixedly connected to the moving plate 203. The lifting adjusting valve 201 drives the moving plate 203 to move vertically along the slide. The lifting platform 2 drives the device to move vertically up and down along the optical axis direction.

[0034] In some embodiments, the translation table 3 includes a fixed seat 301, a moving seat 302, a translation adjusting valve 303, and a fixed valve 304. The fixed seat 301 is fixedly connected to the shorter side of the moving plate 203. A slide rail is provided between the fixed seat 301 and the moving seat 302. The translation adjusting valve 303 is fixedly connected to the fixed seat 301. The front end of the translation adjusting valve 303 is connected to the moving seat 302. The translation adjusting valve 303 drives the moving seat 302 to move horizontally along the slide rail on the fixed seat 301. The translation table 3 drives the device to move horizontally left and right along the optical axis direction.

[0035] In some embodiments, the angular position table 4 comprises an angular position concave seat 401, an angular position convex seat 402, an angular position adjusting valve 403 and a limit valve 404, the angular position concave seat 401 is fixedly connected with the moving seat 302, the angular position convex seat 402 is arranged above the angular position concave seat 401, an arc-shaped sliding rail is arranged between the angular position convex seat 402 and the angular position concave seat 401, the angular position adjusting valve 403 is fixedly connected with the angular position concave seat 401, the front end of the angular position adjusting valve 403 is connected with the angular position convex seat 402 in abutment, the angular position adjusting valve 403 drives the angular position convex seat 402 to adjust the angle along the arc-shaped sliding rail between the angular position convex seat 402 and the angular position concave seat 401, and the angular position table 4 drives the lens to move up and down along the optical axis direction.

[0036] In some embodiments, the parallel light tube 7 is arranged at the front end of the device, the parallel light tube 7 is internally provided with a discrimination rate plate with stripes, parallel light is irradiated to the lens inspection device after passing through the discrimination rate plate, the lens fixed on the clamp is driven to rotate left and right along the optical axis direction and to move up and down by the position change of the rotating table 1 and the angular position table 4, the parallel light is irradiated to the electron microscope 8 after passing through the lens clamped by the lens inspection device, the electron microscope 8 is electrically connected with the industrial computer 9, the industrial computer 9 reads the parameters of the electron microscope 8, the corresponding imaging change of the electron microscope 8 is displayed on the industrial computer 9 by adjusting the position of the lens in the lens inspection device, the accurate detection of the field angle and the chromatic aberration of the lens by the detection device is realized, and the accurate detection of the aberration and the definition of the lens by the detection device is realized.

[0037] In some embodiments, the parallel light tube 7 is internally provided with a discrimination rate plate with stripes, parallel light is irradiated to the lens inspection device after passing through the discrimination rate plate, the lens fixed on the clamp is driven to move left and right along the optical axis direction and to move up and down by the position change of the lifting table 2 and the displacement table, the parameters of the electron microscope 8 are read by using the industrial computer 9, and the imaging range of the electron microscope 8 is observed, so that the accurate detection of the aberration and the definition of the lens by the detection device is realized.

[0038] The above is a further detailed description of the utility model in combination with specific preferred embodiments, and for ordinary skilled persons in the technical field to which the utility model belongs, without departing from the utility model, a number of simple deductions or substitutions can be made, which should be regarded as belonging to the utility model, and the scope of patent protection is determined by the submitted claims.

Claims

1. A lens inspection device based on the transmission collimation imaging measurement method, used in conjunction with a collimator, lens, electron microscope, and industrial control computer, characterized in that: include: The lens inspection device comprises a rotating platform, a lifting platform, a translation platform, an angled platform, a quick-release plate, and a lens clamp. The lifting platform is fixedly connected above the rotating platform, the translation platform is fixedly connected above the lifting platform, the angled platform is fixedly installed above the translation platform, and the lens clamp is fixedly installed above the angled platform. The lens inspection device detects the aberrations and sharpness of the lens by adjusting the position and / or angle of the rotating platform, the lifting platform, the translation platform, and the angled platform.

2. The lens inspection device based on the transmission collimation imaging measurement method according to claim 1, characterized in that, The rotary table includes a rotary table base, a scale table, an angle adjustment rod, and an anti-rotation valve. The rotary table is provided with the angle adjustment rod in the horizontal direction, and the rotary table is provided with the anti-rotation valve in the direction perpendicular to the angle adjustment rod.

3. The lens inspection device based on the transmission collimation imaging measurement method according to claim 2, characterized in that, The lifting platform includes a fixed plate, a movable plate, and a lifting regulating valve. The fixed plate is bolted to the scale table, and a slide is provided between the fixed plate and the movable plate. The lifting regulating valve is snapped to the movable plate, and the lifting regulating valve drives the movable plate to move vertically along the slide.

4. The lens inspection device based on the transmission collimation imaging measurement method according to claim 3, characterized in that, The translation stage includes a fixed base, a movable base, a translation adjustment valve, and a fixed valve. The fixed base is bolted to the shorter side of the movable plate. A slide rail is provided between the movable base and the fixed base. The translation adjustment valve is clamped and fixed to the fixed base. The front end of the translation adjustment valve is abutted and connected to the movable base. The movement of the translation adjustment valve drives the movable base to move horizontally along the slide rail on the fixed base.

5. The lens inspection device based on the transmission collimation imaging measurement method according to claim 4, characterized in that, The corner positioning platform includes a concave corner seat, a convex corner seat, a corner adjusting valve, and a limiting valve. The concave corner seat is bolted to a movable seat. The convex corner seat is positioned above the concave corner seat. An arc-shaped slide rail is provided between the convex corner seat and the concave corner seat. The corner adjusting valve is fixedly connected to the concave corner seat. The front end of the corner adjusting valve abuts against the convex corner seat. The corner adjusting valve drives the convex corner seat to perform circumferential angle adjustment along the arc-shaped slide rail between the concave corner seats.

6. The lens inspection device based on the transmission collimation imaging measurement method according to claim 5, characterized in that, A quick-release plate is bolted to the top of the corner platform, and a lens clamp is bolted to the top of the quick-release plate.

7. The lens inspection device based on the transmission collimation imaging measurement method according to claim 6, characterized in that, The adjustment accuracy of the lifting platform and the translation platform is 1 mm.

8. The lens inspection device based on the transmission collimation imaging measurement method according to claim 7, characterized in that, The adjustment accuracy of the rotary table and the angular positioning table is 1 degree.

Images