Graphite bottom support resistivity detection device

Abstract

According to the graphite bottom support resistivity detection device provided by the utility model, the structure of the graphite bottom support resistivity detection device is improved, so that resistivity test errors are reduced or avoided, and the quality of subsequent crystal growth products is improved. The graphite bottom support resistivity detection device comprises a detection base, the detection base is provided with a limiting structure, a to-be-detected piece containing cavity used for containing a to-be-detected graphite bottom support is defined by the limiting structure, and the to-be-detected piece containing cavity and the detection base are concentrically arranged; the device further comprises two joint fixing structures, the joint fixing structures are used for fixing electrode joints, and the two joint fixing structures are oppositely arranged in the radial direction of the to-be-tested piece containing cavity.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite bottom support detection technical field, specifically, relate to a kind of graphite bottom support resistivity detection device. BACKGROUND

[0002] In the production and quality control process of semiconductor graphite piece, the resistivity of graphite bottom support is a crucial parameter, which directly affects the crystal growth effect and the performance of final product. Currently, the detection method of graphite bottom support resistivity mainly relies on manual holding of resistance tester.

[0003] In the traditional detection process, the operator needs to hold the two test electrodes of resistance tester, and then the operator needs to observe and confirm the two test points symmetrically distributed on the graphite bottom support by eyes, and then the test electrodes are respectively contacted with the two points to read the stable resistivity test value. However, since the test points determined by manual cannot be guaranteed to be consistent, the different test points in each test will lead to low test accuracy and there is a slight deviation and fluctuation in each test. Such deviation will cause the measured resistance value to have large fluctuation and error. Such error not only affects the accuracy of resistivity detection, but also may adversely affect the crystal growth effect, thereby reducing the quality of product. SUMMARY

[0004] The utility model aims at providing a kind of graphite bottom support resistivity detection device, by improving the structure of graphite bottom support resistivity detection device, thereby reducing or avoiding resistivity test error, improve the quality and quality of subsequent crystal growth product.

[0005] To achieve the above object, the utility model provides a kind of graphite bottom support resistivity detection device, graphite bottom support resistivity detection device includes detection base, the detection base is provided with limiting structure, the limiting structure is enclosed to accommodate the test piece accommodating cavity of the graphite bottom support to be detected, the test piece accommodating cavity is concentrically arranged with the detection base;It also includes two joint fixing structures, the joint fixing structure is used to fix electrode joint, two the joint fixing structure is arranged in the radial direction opposite of the test piece accommodating cavity.

[0006] In the technical solution of the present application, the two electrode connectors of the resistance tester are fixed by adopting the connector fixing structure, replacing the traditional manual holding of the electrode connector; the relative positional relationship between the electrode connector and the detection base during each test is increased; and the two connector fixing structures are arranged in a radial opposite manner relative to the workpiece accommodating cavity to realize the relative positional relationship between the two connector fixing structures and the workpiece accommodating cavity. Thus, the consistency of the test point position during each test can be ensured, the resistivity test error is reduced or avoided, the accuracy of the resistance value is ensured, and the yield of the subsequent crystal growth product is improved.

[0007] Optionally, the detection base and the connector fixing structure are both made of insulating material. The adoption of the insulating material is beneficial to ensuring the stability of the test and avoiding current interference during the test.

[0008] Optionally, the detection base has an upper surface, the upper surface is configured with a flange, the flange extends upward from the upper surface in the axial direction, and the flange serves as the limiting structure. The flange is arranged as the limiting structure, which can form better limiting for the workpiece to be tested, and ensure the coaxiality of the graphite base and the detection base.

[0009] Optionally, the flange is continuously arranged around the circumference of the workpiece accommodating cavity to form a closed annular shape, or a plurality of flanges are arranged around the workpiece accommodating cavity in a spaced manner. The two types of flanges are arranged to limit the workpiece to be tested.

[0010] Optionally, the detection base is provided with a groove, the groove is formed by recessing downward from the upper surface of the detection base in the axial direction, and the groove serves as the limiting structure. Another limiting structure is provided in addition to the flange.

[0011] Optionally, the workpiece accommodating cavity has a support cavity wall, the support cavity wall is directly or indirectly abutted against the surface of the graphite base to be tested, and the support cavity wall is coated with an electrostatic protection layer, the electrostatic protection layer is directly contacted with the graphite base. The electrostatic protection layer can release the static electricity of the graphite base to further ensure the accuracy of the test.

[0012] Optionally, the detection base is provided with an equalizing channel, the equalizing channel penetrates through the support wall to form an equalizing hole. By arranging the equalizing channel, the graphite base is prevented from being incompletely contacted with the support cavity wall during feeding, and the graphite base is prevented from being incompletely discharged due to pressure difference during discharging.

[0013] Optionally, the detection base further has an axially extending seat sidewall, and the joint fixing structure is arranged on the seat sidewall; the joint fixing structure has a fixing cavity, at least part of the cavity wall of the fixing cavity is used to abut against the electrode joint, and the fixing cavity can be axially beyond the upper surface of the detection base. The fixing cavity is beyond the upper surface, so that the test electrode can avoid interference with the detection base and ensure good contact between the test electrode and the graphite base to be detected.

[0014] Optionally, the joint fixing structure is rotatably connected to the seat sidewall to switch to a loading position and a detection position; in the detection position, part of the joint fixing structure is axially beyond the upper surface of the detection base, and the part of the joint fixing structure beyond the upper surface of the detection base serves as the fixing cavity; in the loading position, the joint fixing structure is axially below the upper surface of the detection base. By arranging the loading position, the joint fixing structure can avoid the loading channel during loading, and the detection base is conveniently loaded.

[0015] Optionally, the joint fixing structure comprises two elastically connected clamping arms, and the fixing cavity is surrounded between the two clamping arms. By arranging the clamping arms to clamp the test electrode, the operation is facilitated.

[0016] Optionally, the joint fixing structure comprises a body and a magnetic suction head; the outer wall of the electrode joint has a magnetic suction matching part, and the magnetic suction head is connected with the magnetic suction matching part. Another structure is provided to clamp the test electrode.

[0017] Other features of the present specification and its advantages will become apparent from the following detailed description of exemplary embodiments thereof, which description should be taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] The accompanying drawings incorporated in and forming a part of the specification, illustrate embodiments of the present specification and, together with the description, serve to explain the principles of the present specification.

[0019] Figure 1 is a structural schematic view of a graphite base resistivity detection device in an embodiment of the present utility model, and shows a working condition of supporting an electrode joint;

[0020] Figure 2 is a structural schematic view of a graphite base resistivity detection device in an embodiment of the present utility model, and shows a working condition of not supporting an electrode joint.

[0021] Reference signs:

[0022] 100, detection base; 101, seat sidewall; 102, upper surface; 200, workpiece containing cavity; 300, electrode joint; 400, joint fixing structure. DETAILED DESCRIPTION

[0023] The utility model provides a kind of graphite bottom support resistivity detection device, by improving the structure of graphite bottom support resistivity detection device, to reduce or avoid resistivity test error, improve the quality and quality of subsequent long crystal product.

[0024] In order to make the personnel in the technical field better understand the utility model scheme, the utility model is further explained in detail below in conjunction with drawings and specific embodiments.

[0025] The relational terms such as "first" and "second" are only used to distinguish one from another of identical name, and do not necessarily require or imply any such actual relationship or order between the parts.

[0026] As a semiconductor material, the resistivity of graphite reflects the degree of hindering current. During the test, by applying a certain voltage to the graphite bottom support and measuring the current flowing through, the resistance value of the graphite bottom support can be calculated, and then its resistivity can be evaluated. The main purpose of the graphite bottom support resistivity test is to ensure that the resistance characteristics of the graphite bottom support meet the production and quality control requirements. As part of the semiconductor graphite piece, the resistivity of the graphite bottom support directly affects the heat conduction, current distribution and other factors during the long crystal process, and then affects the performance of the final product. By testing the resistivity of the graphite bottom support, problems in materials or processes can be found in time to ensure the quality of the product. The test process of the resistivity of the graphite bottom support usually includes the following steps: preparing a resistance tester, the resistance tester has two test electrodes for energizing the graphite bottom support to be tested; applying voltage to the set position of the graphite bottom support through the test electrode, and measuring the current of the graphite bottom support. This process needs to be repeated several times to ensure the accuracy of the test results.

[0027] But in the process of handheld test electrode, the test point cannot always remain unchanged, resulting in fluctuation of measured resistance value.

[0028] Please refer to Figure 1 and Figure 2 , Figure 1 is the structure diagram of graphite bottom support resistivity detection device in the utility model embodiment, shows the working condition of supporting electrode connector; Figure 2 is the structure diagram of graphite bottom support resistivity detection device in the utility model embodiment, shows the working condition of not supporting electrode connector.

[0029] The graphite base resistivity detection device as shown in the figure comprises a detection base 100. The detection base 100 is in a cylindrical structure, comprising an upper surface 102 for supporting the graphite base in the axial direction, and a seat sidewall 101 connected with the upper surface 102, which is arranged around the upper surface 102 and extends in the axial direction. The detection base 100 is provided with a limiting structure, which surrounds a detection piece accommodating cavity 200 for accommodating the graphite base to be detected.

[0030] As an optional limiting structure, the upper surface 102 of the detection base 100 is configured with a flange extending upward in the axial direction from the upper surface 102, which serves as a limiting structure, and the inner side of the flange constitutes an accommodating cavity, and the sidewall of the inner side can be gap-fitted with the sidewall of the graphite base to be detected.

[0031] By providing the flange as a limiting structure, the graphite base to be detected can be better limited, and the coaxiality of the graphite base and the detection base 100 can be ensured.

[0032] Specifically, the flange is continuously arranged around the periphery of the detection piece accommodating cavity 200 to form a closed annular shape. Alternatively, a plurality of flanges can also be included, which are distributed around the detection piece accommodating cavity 200, i.e. a plurality of flanges are distributed at intervals along the axial direction of the accommodating cavity. The flanges can be three or four, and the inner sidewall of the flange can be arc-shaped to conform to the graphite base to be detected; or it can be a straight wall, which can be tangent to the outer peripheral wall of the graphite base to be detected. By providing the two types of flanges, the graphite base to be detected is limited.

[0033] As another optional limiting structure, the detection base 100 is provided with a groove, which is formed by the upper surface 102 of the detection base 100 being recessed downward in the axial direction, and the groove serves as a limiting structure. Another structure form of the limiting structure is provided in addition to the flange.

[0034] The detection base 100 is made of an insulating material, for example, high-strength plastic, inorganic insulating material, organic insulating material, etc.; the test base can also be formed by injection molding, cutting, etc. to form the aforementioned limiting structure.

[0035] In the above embodiment, the test piece accommodating cavity 200 has a supporting cavity wall. The supporting cavity wall can be a part of the upper surface 102 of the detection base 100 on the inner side of the flange, or a groove bottom wall of the groove. The supporting cavity wall is used to directly or indirectly abut the surface of the graphite susceptor to be tested. The supporting cavity wall is coated with an electrostatic protection layer, which is used to directly contact the graphite susceptor. By setting the electrostatic protection layer, the static electricity of the graphite susceptor can be released to further ensure the accuracy of the test. The electrostatic protection layer is made of non-conductive material; for example, silicone, anti-static plastic, and thermoplastic polymer such as polypropylene plate, etc. These materials have good anti-static performance and can effectively prevent the anti-static performance of the graphite susceptor to be tested.

[0036] The test piece accommodating cavity 200 is concentrically arranged with the detection base 100, so as to ensure that the position of the test piece accommodating cavity 200 relative to the detection base 100 is unchanged.

[0037] In the above embodiment, two joint fixing structures 400 are further included, which are used to fix the electrode joints 300. The two joint fixing structures 400 are arranged in a diametrically opposite manner in the test piece accommodating cavity 200.

[0038] In the technical solution of the present application, the two electrode joints 300 of the resistance tester are fixed by using the joint fixing structure 400, which replaces the traditional manual holding mode of the electrode joint 300. The relative positional relationship between the electrode joint 300 and the detection base 100 during each test process is increased. At the same time, the two joint fixing structures 400 are arranged in a diametrically opposite manner relative to the test piece accommodating cavity 200, which realizes the relative positional relationship between the two joint fixing structures 400 and the test piece accommodating cavity 200. Therefore, the consistency of the test point position during each test process can be ensured, the resistivity test error can be reduced or avoided, the accuracy of the resistance value can be ensured, and the yield of the subsequent crystal growth product can be improved.

[0039] Specifically, the joint fixing structure 400 is made of insulating material. By using insulating material, the stability of the test can be ensured, and the current interference during the test process can be avoided. The joint fixing structure 400 is arranged on the seat side wall 101. The joint fixing structure 400 has a fixing cavity, and at least part of the cavity wall of the fixing cavity is used to abut the electrode joint 300.

[0040] As a form of the joint fixing structure 400, the joint fixing structure 400 comprises two elastically connected clamping arms. The clamping arms have clamping ends and elastic connection ends, and in the example shown in the figure, the elastic connection ends are located on the lower side of the clamping ends, one end of a spring is connected to the elastic connection end of one clamping arm, the other end of the spring abuts against the elastic connection end of the other clamping arm, and the middle portions of the two clamping arms are hingedly connected; in this way, when the elastic connection ends are driven to move close to each other to compress the elastic member, the clamping ends of the two clamping arms move away from each other to put in the electrode joint 300. After the electrode joint 300 is in place, the elastic connection ends are released, and under the elastic force of the spring, the two elastic connection ends move reversely and drive the two clamping ends to move towards each other to clamp the electrode joint 300. That is, a fixing cavity is formed between the clamping ends of the two clamping arms. The test electrode is clamped by the clamping arms, which is convenient for operation.

[0041] As another form of the joint fixing structure 400, the joint fixing structure 400 comprises a member body and a magnetic suction head; the outer wall of the electrode joint 300 has a magnetic suction matching part, and the magnetic suction head is connected with the magnetic suction matching part. Another structure is provided to clamp the test electrode. The joint fixing structure 400 is connected to the detection base 100 through a rotating shaft; the detection base 100 is also provided with a bearing matched with the rotating shaft, which can be a ball bearing or a roller bearing. Of course, a locking mechanism is also included, which locks the joint fixing structure 400 after it is rotated into place. For example, it can be a bolt, a latch or a buckle, etc., to prevent it from rotating out of position or accidentally rotating. Those skilled in the art can choose as needed.

[0042] In the above embodiment, the joint fixing structure 400 is rotatably connected to the side wall 101 of the seat to switch to the loading position and the detection position. In the detection position, part of the joint fixing structure 400 axially protrudes above the upper surface 102 of the detection base 100, and the part of the joint fixing structure 400 protruding above the upper surface 102 of the detection base 100 serves as the fixing cavity; in the loading position, the joint fixing structure 400 is lower than the upper surface 102 of the detection base 100 in the axial direction. By providing the loading position, the joint fixing structure 400 is avoided in the loading channel during loading, which is convenient for loading the detection base 100.

[0043] That is, the fixing cavity can protrude above the upper surface 102 of the detection base 100 in the axial direction. The fixing cavity protrudes above the upper surface 102, which can avoid interference between the test electrode and the detection base 100, and ensure good contact between the test electrode and the graphite bottom support to be tested.

[0044] In any of the above embodiments, the detection base 100 is provided with an equalizing channel which can extend through the detection base 100 in an axial direction or extend partially in an axial direction and partially in a radial direction to form an L-shaped air passage to extend through the seat sidewall 101; the above two extending directions and equivalent extending manners all belong to the protection scope of the present application, so as to realize equalizing pressure on both sides of the graphite base in the axial direction when the equalizing channel is placed in the accommodating cavity.

[0045] Specifically, the other end of the equalizing channel extends through the support wall to form an equalizing hole. By arranging the equalizing channel, the graphite base can avoid incomplete contact with the support cavity wall during feeding; and the equalizing channel can also avoid the situation that the graphite base is not smoothly discharged due to pressure difference during discharging. The number of equalizing holes can be one or multiple, and when the number of equalizing holes is multiple, the equalizing holes are uniformly distributed around the circumference of the accommodating cavity 200 for the measured member.

[0046] Compared with the prior art, the present application has the following advantages:

[0047] Firstly, the present application can ensure the accuracy of the test point of the measured graphite base and reduce the risk of instability of manually holding a resistance tester to find a point;

[0048] Secondly, the present application improves the efficiency of detecting the resistivity of the graphite base and improves the yield of the subsequent crystal growth product;

[0049] Thirdly, the present application ensures the antistatic efficiency of the measured graphite base;

[0050] Fourthly, the present application ensures the smooth feeding and discharging of the detection base 100.

[0051] In the present application, specific examples are applied to describe the principles and implementation modes of the present application, and the above description of the embodiments is only used to help understand the core idea of the present application. It should be pointed out that for ordinary skilled persons in the technical field, some improvements and modifications can be made to the present application without departing from the principles of the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

Claims

1. A graphite susceptor resistivity detection apparatus, characterized by, The graphite electrode detection device comprises a detection base (100), which is provided with a limiting structure, and a to-be-detected member accommodating cavity (200) is formed by the limiting structure to accommodate a graphite base support to be detected, and the to-be-detected member accommodating cavity (200) is concentrically arranged on the detection base (100). The graphite electrode detection device further comprises two joint fixing structures (400) for fixing an electrode joint (300), and the two joint fixing structures (400) are arranged in a diametrically opposite manner in the to-be-detected member accommodating cavity (200).

2. The graphite susceptor resistivity detection apparatus of claim 1, wherein The detection base (100) and the joint fixing structure (400) are both made of insulating material.

3. The graphite susceptor resistivity sensing apparatus of claim 2, wherein, The detection base (100) has an upper surface (102), and a flange is arranged on the upper surface (102) and extends upward in the axial direction, and the flange serves as the limiting structure.

4. The graphite susceptor resistivity sensing apparatus of claim 3, wherein, The flange is continuously arranged around the periphery of the to-be-detected member accommodating cavity (200) to form a closed annular shape, or a plurality of flanges are arranged around the to-be-detected member accommodating cavity (200) in a spaced manner.

5. The graphite susceptor resistivity sensing apparatus of claim 2, wherein, The detection base (100) is provided with a groove, which is formed by recessing the upper surface (102) of the detection base (100) in the axial direction, and the groove serves as the limiting structure.

6. The graphite susceptor resistivity sensing apparatus of claim 1, wherein, The to-be-detected member accommodating cavity (200) has a supporting cavity wall, which directly or indirectly abuts against the surface of the graphite base support to be detected, and the supporting cavity wall is coated with an electrostatic protection layer, which directly contacts the graphite base support.

7. The graphite susceptor resistivity sensing apparatus of claim 6, wherein, The detection base (100) is provided with an equalizing channel, which penetrates the supporting cavity wall to form an equalizing hole.

8. The graphite susceptor resistivity sensing apparatus of any of claims 1-7, wherein, The detection base (100) further has an axially extending seat side wall (101), and the joint fixing structure (400) is arranged on the seat side wall (101); the joint fixing structure (400) has a fixing cavity, at least part of the cavity wall of the fixing cavity abuts against the electrode joint (300), and the fixing cavity can protrude above the upper surface (102) of the detection base (100) in the axial direction.

9. The graphite susceptor resistivity sensing apparatus of claim 8, wherein, The joint fixing structure (400) is rotatably connected to the seat side wall (101) to switch between a loading position and a detection position. In the detection position, part of the joint fixing structure (400) protrudes above the upper surface (102) of the detection base (100) in the axial direction, and the part of the joint fixing structure (400) protruding above the upper surface (102) of the detection base (100) is provided with the fixing cavity. In the loading position, the joint fixing structure (400) is lower than the upper surface (102) of the detection base (100) in the axial direction.

10. The graphite susceptor resistivity sensing apparatus of claim 8, wherein, The joint fixing structure (400) comprises two elastically connected clamping arms, and the fixing cavity is formed between the two clamping arms; or The joint fixing structure (400) comprises a member body and a magnetic suction head, the member body is connected to the detection base (100), the outer wall of the electrode joint (300) has a magnetic suction matching part, and the magnetic suction head is connected to the magnetic suction matching part.

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